公开(公告)号：JPH1039122A

公开(公告)日：1998-02-13

申请号：JP18975396

申请日：1996-07-18

Applicant: SHARP KK

Inventor： ABE SHINGO ,  INUI TETSUYA ,  MATOBA KOJI ,  HIRATA SUSUMU ,  ISHII YORISHIGE

IPC: G02B5/08 ,  G02B7/182 ,  G11B7/09 ,  G11B7/135

Abstract: PROBLEM TO BE SOLVED: To provide a mirror capable of remarkably changing the curvature by a small deformation amount, and to provide an optical pickup device capable of miniaturizing the device constitution, reducing the driving power, and reducing the running cost. SOLUTION: This mirror is a curvature variable mirror 10 provided with a mirror main body 1 having a curved surface part 1a and a flange part 1b, a deformation member 2 consisting of dielectric material, forming electrodes 3, 3' on its upper/lower both side surfaces and connected to the flange part 1b of the mirror main body 1 and a power source circuit provided with a DC power source 4 and a switch 5 and connected to the electrodes 3, 3', and when the switch 5 is turned ON, electric charges are loaded on the electrode 3, and an electric field occurs in the deformation member 2. Then, the deformation member 2 is deformed in the radial direction by a piezoelectric effect, and compression force is imparted from the deformation member 2 to the curved surface part 1a. Thus, since the curved surface part 1a is shrunk in the radial direction, and is expanded in the curved surface direction, the curvature of the curved surface part 1a is reduced.

公开(公告)号：JPH10802A

公开(公告)日：1998-01-06

申请号：JP15676996

申请日：1996-06-18

Applicant: SHARP KK

Inventor： HIRATA SUSUMU ,  MATOBA KOJI ,  ISHII YORISHIGE ,  ABE SHINGO ,  INUI TETSUYA

IPC: B41J2/335

Abstract: PROBLEM TO BE SOLVED: To provide a thermal head reducing consumed power, size and weight and cost and accelerating an operation by decreasing thermal mutual interference of adjacent heating resistors and performing a recording operation of a high quality level and provide also a method for manufacturing it. SOLUTION: A unimorph 9 obtained by laminating a piezoelectric member 7 and an elastic member 4 is fixed at its end to a board 2. A heating resistor 12 is formed at a free end of the unimorph 9. At the time of recording, the member 7 is energized by a piezoelectric member drive power source 13. Thus, the unimorph 9 is deformed to a heat sensitive sheet 15 side. And, the resistor 12 is energized by a heater drive power source 14. Thus, the sheet is heated to record an image.

公开(公告)号：JPH09193385A

公开(公告)日：1997-07-29

申请号：JP913296

申请日：1996-01-23

Applicant: SHARP KK

Inventor： ISHII YORISHIGE ,  MATOBA KOJI ,  HIRATA SUSUMU ,  ONDA YUTAKA ,  ABE SHINGO ,  INUI TETSUYA

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To provide a high reliable ink jet recording head capable of achieving extreme miniaturization and integration, moreover, a gradation expression and high speed and high quality printing. SOLUTION: The recording head is constituted such that a piezoelectric element 10 is electrified to expand itself and compress the ink chamber 7 to produce discharge pressure, and in the producing period of this discharge pressure, electrification is carried out to a buckling structure as a valve comprising an electroplate layer, thereby allowing the buckling structure 4 to be buckled upward and a nozzle 8 to be closed off to stop a discharge of ink, or by no electrification to the buckling structure 4, ink is permitted to discharge from the nozzle 8.

公开(公告)号：JPH09152615A

公开(公告)日：1997-06-10

申请号：JP31291695

申请日：1995-11-30

Applicant: SHARP KK

Inventor： MATOBA KOJI ,  HIRATA SUSUMU ,  ISHII YORISHIGE ,  ABE SHINGO ,  ONDA YUTAKA ,  INUI TETSUYA

IPC: G02F1/1339

Abstract: PROBLEM TO BE SOLVED: To eliminate an appearance defect and to prevent the degradation in yield by once arranging spacer particles on the prescribed part of a jig plate for spraying, then transferring the spacer particles in this arrangement to a liquid crystal display substrate. SOLUTION: The spacer particles 3 are sprayed atop the jig plate 1 for spraying from a spraying nozzle 4. Next, the jig plate 1 for spraying is inclined to apply vibration on the particles. At this time, the spacer particles 3 entering recessed parts 2 stay as they are in the recessed parts 2 and the spacer particles 3 are arranged in the recessed parts 2 in correspondence respectively thereto. Next, the liquid crystal display element substrate 7 provided with an oriented film 5 subjected to an orientation treatment is driven to align this liquid crystal display element substrate 7 and the jig plate 1 for spraying opposite to each other and, thereafter, the oriented film 5 is brought into contact with the spacer particles 3 on the jig plate 1 for spraying. Next, the liquid crystal display element substrate 7 is disposed on the lower side of the jig plate 1 for spraying. Finally, the jig plate 1 for spraying is parted from the liquid crystal display element substrate 7 to transfer the spacer particles 3 to the liquid crystal display element substrate 7 side.

公开(公告)号：JPH09152505A

公开(公告)日：1997-06-10

申请号：JP31291795

申请日：1995-11-30

Applicant: SHARP KK

Inventor： MATOBA KOJI ,  HIRATA SUSUMU ,  ISHII YORISHIGE ,  ABE SHINGO ,  ONDA YUTAKA ,  INUI TETSUYA

IPC: G02B5/10 ,  G02B7/198 ,  G02B17/00 ,  G02B26/06 ,  G02B26/08 ,  G11B7/00 ,  G11B7/09 ,  G11B7/135 ,  G11B7/1362

Abstract: PROBLEM TO BE SOLVED: To reduce the influence of variation in ambient temperature and variation of an electric circuit, deform and hold a mirror surface with high precision, and obtain small-sized and simple structure and reduce the manufacture cost. SOLUTION: A flexible member 2 is a member which can elastically deform and has the mirror surface 2a reflecting incident light on its surface. A substrate 6 is installed below the flexible member 2 and has a reference surface at the part facing the reverse surface of the flexible member 2. An upper electrode 8 formed on the flexible member 2 is attracted to the substrate 6 with an electrostatic force when applied with a potential difference from a lower electrode 12 formed on the substrate 6. Consequently, the flexible member 2 attracts the substrate 6 to deform the mirror surface 2a.

公开(公告)号：JPH0994955A

公开(公告)日：1997-04-08

申请号：JP25292695

申请日：1995-09-29

Applicant: SHARP KK

Inventor： ISHII YORISHIGE ,  MATOBA KOJI ,  HIRATA SUSUMU ,  ONDA YUTAKA ,  ABE SHINGO ,  INUI TETSUYA

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00

Abstract: PROBLEM TO BE SOLVED: To reduce the irregularity of a printing grade by a simple structure to enable integration by arranging a plurality of a piezoelectric elements having a common electrode on the contact surface with a silicon substrate thereof and having a signal electrode on the other surface thereof on the silicon diaphragm on the surface of a silicon substrate. SOLUTION: A single crystal silicon substance of a surface azimuth (100) is thermally oxidized to form thermally oxidized films 8, 9 on the upper and rear surfaces of the substrate. Next a mask opening for silicon anisotropic etching is formed to the thermally oxidized film 9 on the rear surface of the substrate and the thermally oxidized film patterns are used as a mask to form a rear silicon side groove 5 and a silicon diaphragm 4. Next, a common electrode 6 is formed from a metal hardly reacting with a Pt iso-piezoelectric material. Subsequently, a piezoelectric material represented by PZT is epitaxially grown on the common electrode 6 to form a membrane. An electrode material 7' becoming a signal electrode 7 is formed into a membrane by using a metal hardly reacting with a piezoelectric material such as Pt and the signal electrode 7 is formed by photolithography or and an ion milling method.

公开(公告)号：JPH0985946A

公开(公告)日：1997-03-31

申请号：JP24596695

申请日：1995-09-25

Applicant: SHARP KK

Inventor： ABE SHINGO ,  INUI TETSUYA ,  MATOBA KOJI ,  HIRATA SUSUMU ,  KIMURA MASAHARU ,  ISHII YORISHIGE ,  HORINAKA MASARU ,  ONDA YUTAKA

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To provide a long-lived ink jet head, with which the discharging force and discharging speed of ink can be enlarged and in which the discharging efficiency of ink is favorable under the condition that its dimensions are kept small. SOLUTION: In an ink jet head equipped with a container having an ink discharging port 7a on its wall part, a structure 1, at least both end portions on one direction of the peripheral edges of which is arranged so as to be fixed to the wall surface in the container and which can light-tightly partition the interior of the container and can be deformed, and a voltage applying means for deforming the structure, the structure 1 is made of piezoelectric material and is bucklingly deformed through the application of voltage.

公开(公告)号：JPH0911339A

公开(公告)日：1997-01-14

申请号：JP16267495

申请日：1995-06-28

Applicant: SHARP KK

Inventor： ISHII YORISHIGE ,  INUI TETSUYA ,  MATOBA KOJI ,  HIRATA SUSUMU ,  KIMURA MASAHARU ,  HORINAKA MASARU ,  ABE SHINGO ,  ONDA YUTAKA

IPC: B29C67/00 ,  B29D99/00 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00 ,  H01L21/302 ,  H01L21/306 ,  H01L21/3065 ,  B29D31/00

Abstract: PURPOSE: To form a fine structure using a sacrifice layer which can obtain a complex three dimensional structure, has high selectivity about its constitutional materials, and can be made a thick film. CONSTITUTION: In (a), while a sacrifice layer 21 of a film of an amphoteric metal such as Al, a sacrifice layer 22 of a thick positive photoresist film, a sacrifice layer 23 of Al being formed, a heater 20, a buckling structure 2, a diaphragm 5, etc., are laminated in sequence on a silicon substrate 7. In (b), a strong alkali aqueous solution 27 is introduced from a side groove 15 on the back side of the silicon substrate 7 to form a space 28 by removing a part of the sacrifice layer 21. As shown in (c), the space 28 expands, and as shown in (d), a movable space 29 is formed between the movable groove 3 of the buckling structure 2 and the buckling structure 2 and the diaphragm 5.

公开(公告)号：JPH091795A

公开(公告)日：1997-01-07

申请号：JP14893395

申请日：1995-06-15

Applicant: SHARP KK

Inventor： INUI TETSUYA ,  MATOBA KOJI ,  HIRATA SUSUMU ,  ISHII YORISHIGE ,  ABE SHINGO ,  KIMURA MASAHARU ,  HORINAKA MASARU ,  ONDA YUTAKA

IPC: B41J2/045 ,  B41J2/16

Abstract: PURPOSE: To achieve an effective heat radiation and a satisfactory response speed by forming a pressure generating means of a driving body having a central part narrower than both the ends in width, and generating buckling deformation by thermal expansion, a heater layer at the lower part of the driving body, and a diaphragm layer on the upper part thereof. CONSTITUTION: On a silicon single substrate 1, there is provided successively a diaphragm 2, a first insulating layer 3, a heater layer 4, a second insulating layer 5, and a buckling body 6 as a driving body generating buckling deformation from thermal expansion, and further a nozzle plate 7 having a nozzle 12 formed thereon. The buckling body 6 is joined with the diaphragm 2 at the central connection part 10, and secured to the substrate 1 at the securing part 6a, and its root part 6b and central part 6c arc spaced apart from the substrate 1 through the gap 9, and the central part 6c is formed narrower than the securing part 6a and root part 6b in width W. Thus, when the diaphragm 2 or the like is deformed, since the distance between the heater layer 4 and the substrate 1 scarcely vary, the distance is made shorter, the element can be formed with a fast heat-radiation and good response speed.

公开(公告)号：JPH08309980A

公开(公告)日：1996-11-26

申请号：JP11852995

申请日：1995-05-17

Applicant: SHARP KK

Inventor： HIRATA SUSUMU ,  MATOBA KOJI ,  INUI TETSUYA ,  ISHII YORISHIGE ,  ABE SHINGO ,  KIMURA MASAHARU ,  HORINAKA MASARU ,  ONDA YUTAKA

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/16

Abstract: PURPOSE: To enhance response characteristics by heating/cooling to enable high speed printing by forming a plurality of fins alternately combined on the side of the substrate of a buckling structure and on the side of the buckling structure of the substrate and always opposing the fins each other at a narrow interval at least on the single side of them. CONSTITUTION: When voltage is applied to an electrode 14a, a buckling structure 1 is heated by the resistance heating of a heater 3 to extend in its longitudinal direction. However, since the end part in the longitudinal direction of the structure 1 is fixed to a substrate 7 and the structure 1 can not extend, compression force Po being reaction force is generated and accumulated in the structure 1 and, when the compression force Po exceeds buckling load, the structure 1 generates buckling deformation. When the structure 1 is deformed toward a nozzle plate 10 at its central part, the diaphragm 5 connected to the structure 1 is deformed toward the plate 10. Therefore, ink 17 is pushed out of a nozzle 11 and an ink droplet is formed to the outside of an ink jet head and injected to apply printing to a printing surface. Next, a current is cut off and the structure 1 is cooled to return a standby state.