公开(公告)号：US09546090B1

公开(公告)日：2017-01-17

申请号：US14826449

申请日：2015-08-14

Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.

Inventor： Jia Jie Xia ,  Nagarajan Ranganathan ,  Rakesh Kumar ,  Aveek Nath Chatterjee

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/007 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C1/00253 ,  B81C2201/013 ,  B81C2201/019 ,  B81C2201/053 ,  B81C2203/0735 ,  B81C2203/0771 ,  B81C2203/0792

Abstract: Integrated MEMS-CMOS devices and methods for fabricating MEMS devices and CMOS devices are provided. An exemplary method for fabricating a MEMS device and a CMOS device includes forming the CMOS device in and/or over a first side of a semiconductor substrate. Further, the method includes forming the MEMS device in and/or under a second side of the semiconductor substrate. The second side of the semiconductor substrate is opposite the first side of the semiconductor substrate.

Abstract translation: 提供了用于制造MEMS器件和CMOS器件的集成MEMS-CMOS器件和方法。 用于制造MEMS器件和CMOS器件的示例性方法包括在半导体衬底的第一侧中和/或之上形成CMOS器件。 此外，该方法包括在半导体衬底的第二面内和/或下方形成MEMS器件。 半导体衬底的第二面与半导体衬底的第一侧相对。

公开(公告)号：US09343242B2

公开(公告)日：2016-05-17

申请号：US11767413

申请日：2007-06-22

Applicant: Lianjun Liu

Inventor： Lianjun Liu

IPC: H01H1/00 ,  B81C1/00 ,  H01H1/06 ,  H01H1/20 ,  H01H11/04

CPC classification number: H01H1/0036 ,  B81B2201/016 ,  B81C1/00103 ,  H01H1/06 ,  H01H1/20 ,  H01H11/04 ,  Y10T29/49105 ,  Y10T29/49174

Abstract: A device 20 includes a substrate 22 coupled with a substrate 24 such that a volume 32 is formed between the substrates 22, 24. Contact posts 48, 50 on the substrate 22 and a cantilever beam structure 36 on the substrate 24 are located within the volume 32. The cantilever beam structure has a conductive trace 38 that is selectively contactable with the contact posts 48, 50 to yield a microelectromechanical (MEMS) switch within the volume 32. Fabrication methodology for making the contact posts 48, 50 entails forming post protrusions 68, 70 on the substrate 22 and shaping post protrusions 68, 70 so that they acquire a rounded shape. Input and output signal lines 42, 44 are constructed such that respective portions of input and output signal lines 42, 44 overly corresponding post protrusions 68, 70 and take on the shape of post protrusions 68, 70.

Abstract translation: 器件20包括与衬底24耦合的衬底22，使得在衬底22,24之间形成体积32.衬底22上的接触柱48,50和衬底24上的悬臂梁结构36位于体积 悬臂梁结构具有能够与接触柱48,50选择性地接触的导电迹线38，以在体积32内产生微机电（MEMS）开关。用于制造接触柱48,50的制造方法需要形成后突起68 ，70在基板22上，并且成形柱突起68,70，使得它们获得圆形。 输入和输出信号线42,44被构造成使得输入和输出信号线42,44的相应部分过度对应的柱形突起68,70并且呈立柱形突起68,70的形状。

公开(公告)号：US09187311B2

公开(公告)日：2015-11-17

申请号：US13966175

申请日：2013-08-13

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hiroaki Yamazaki ,  Haruka Kubo

IPC: H01H57/00 ,  B81B3/00 ,  H01G5/18 ,  H01H59/00

CPC classification number: B81B3/0086 ,  B81B2201/016 ,  H01G5/18 ,  H01H59/0009

Abstract: According to one embodiment, a MEMS device comprises a first electrode provided on a support substrate, a second electrode opposed to the first electrode and movable in the direction it is opposed to the first electrode, and beam parts, each connected to those sides of the second electrode, which oppose to each other, and each supporting the second electrode. The second electrode has a slit extending parallel to the sides to which the beam parts are connected and opening at both the front and the back. Further, the second electrode has at least one bridge part extending over the slit, crossing the slit and made of a material different from that of the second electrode.

Abstract translation: 根据一个实施例，MEMS器件包括设置在支撑衬底上的第一电极，与第一电极相对并且可在第一电极与第一电极相对的方向上移动的第二电极，以及每个连接到第一电极的那些侧的光束部分 第二电极彼此相对，并且每个支撑第二电极。 第二电极具有平行于侧面延伸的狭缝，梁部分连接到侧面并且在前后两者都开口。 此外，第二电极具有至少一个在狭缝上延伸的桥接部分，该桥部分与狭缝交叉并且由不同于第二电极的材料制成。

公开(公告)号：US08866363B2

公开(公告)日：2014-10-21

申请号：US13421142

申请日：2012-03-15

Applicant: Takayuki Masunaga ,  Hiroaki Yamazaki

Inventor： Takayuki Masunaga ,  Hiroaki Yamazaki

IPC: H02N1/00 ,  B81B3/00

CPC classification number: B81B3/0072 ,  B81B2201/016 ,  B81B2203/0163 ,  H01H59/0009

Abstract: According to one embodiment, an electrostatic actuator includes a substrate, an electrode unit, a film body unit, and an urging unit. The electrode unit is provided on the substrate. The film body unit is provided to oppose the electrode unit and is conductive. The urging unit is configured to support the film body unit and includes a connection unit connected to the substrate and an elastic unit provided between the connection unit and the film body unit. A contacting state and a separated state are possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit. The elastic unit has a branch portion between one end of the elastic unit connected to the connection unit and multiple one other ends of the elastic unit connected to the film body unit.

Abstract translation: 根据一个实施例，静电致动器包括基板，电极单元，膜体单元和推压单元。 电极单元设置在基板上。 膜体单元设置成与电极单元相对并且是导电的。 推压单元被配置为支撑胶片主体单元，并且包括连接到基板的连接单元和设置在连接单元和胶片主体单元之间的弹性单元。 根据施加到电极单元的电压，电极单元和膜体单元的接触状态和分离状态是可能的。 弹性单元在连接到连接单元的弹性单元的一端和连接到胶片主体单元的弹性单元的多个另一端之间具有分支部分。

公开(公告)号：US20140191616A1

公开(公告)日：2014-07-10

申请号：US14208012

申请日：2014-03-13

Applicant: FUJITSU LIMITED

Inventor： OSAMU TOYODA ,  Takeaki Shimanouchi

IPC: H01L41/09

CPC classification number: H01L41/094 ,  B81B2201/016 ,  B81C1/00976 ,  H01H57/00 ,  H01H2057/006

Abstract: A MEMS switch has fixed support, a plate-shaped flexible beam having at least one end immovably supported by the fixed support and having an extending movable surface, a movable electric contact disposed on the movable surface of the flexible beam, a fixed electric contact facing the movable electric contact and disposed at a fixed position relative to the fixed support, first piezoelectric driver disposed above the movable surface of the flexible beam, extending from a portion above the fixed support towards the movable electric contact, and capable of displacing the movable electric contact towards the fixed electric contact by voltage driving, and second piezoelectric driver disposed at least on the movable surface of the flexible beam and capable of so driving a movable part of the flexible beam by voltage driving that the movable electric contact is separated from the fixed electric contact.

Abstract translation: MEMS开关具有固定支撑件，板状柔性梁，其至少一端由固定支撑件不可移动地支撑并具有延伸的可移动表面，设置在柔性梁的可移动表面上的可移动电触点，面向 所述可移动电触头相对于所述固定支撑件设置在固定位置，所述第一压电驱动器设置在所述柔性梁的可移动表面上方，从所述固定支撑件上方的部分朝向所述可移动电触点延伸，并且能够移动所述可移动电 通过电压驱动与固定电触点接触;以及第二压电驱动器，其至少设置在柔性梁的可移动表面上，并且能够通过电压驱动来驱动柔性梁的可移动部分，使得可移动电触点与固定电触头分离 电接触。

公开(公告)号：US08686816B2

公开(公告)日：2014-04-01

申请号：US12704836

申请日：2010-02-12

Applicant: Tomohiro Saito

Inventor： Tomohiro Saito

IPC: H01H51/22

CPC classification number: B81B3/007 ,  B81B2201/016 ,  B81B2203/0109 ,  H01H59/0009 ,  H01H2001/0084 ,  H01H2059/0036

Abstract: A MEMS element of an aspect of the present invention including a first electrode provided on a substrate, a second electrode which is provided above the first electrode and which is driven toward the first electrode, an anchor provided on the substrate, a beam which supports the second electrode in midair, one end of the beam being connected to the anchor and the beam including a sidewall part provided at its end in the width direction, the sidewall part having a downward-facing protrusion.

Abstract translation: 本发明的一个方面的MEMS元件包括设置在基板上的第一电极，设置在第一电极上方并被朝向第一电极驱动的第二电极，设置在基板上的锚杆，支撑 第二电极在空中，梁的一端连接到锚杆，并且梁包括设置在其宽度方向上的端部的侧壁部分，侧壁部分具有向下的突起。

公开(公告)号：US20130140155A1

公开(公告)日：2013-06-06

申请号：US13396525

申请日：2012-02-14

Applicant: Ilkka Urvas ,  Andrei Pavlov ,  Yelena Pavlova

Inventor： Ilkka Urvas ,  Andrei Pavlov ,  Yelena Pavlova

IPC: H01H57/00

CPC classification number: B81B3/0086 ,  B81B2201/016 ,  B81C1/00246 ,  B81C2203/0714 ,  H01G5/18 ,  H01H57/00 ,  H01H59/0009

Abstract: A MEMS switch comprises a top cantilevered conductor that moves downwardly. At least one first insulator layer is positioned below the top cantilevered conductor. At least one second insulator layer is positioned below the at least one first insulator layer such that at least one gap is formed between the top cantilevered conductor and the at least one second insulator layer. The gap has a thickness in the range 0.5 Å to 100 Å when the top cantilevered conductor is at rest. The thickness of the at least one gap decreases when the top cantilevered conductor is moved downwardly. At least one contact conductor is positioned below the top cantilevered conductor. The second insulator layer has at least one opening that exposes a conducting area of the at least one contact conductor within the second insulator layer. At least one actuation conductor is electrically insulated from the at least one contact conductor such that application of at least one actuation voltage to the at least one actuation conductor moves the top cantilevered conductor downwardly towards the at least one contact conductor for making an electrical connection between the top cantilevered conductor and the at least one contact conductor.

Abstract translation: MEMS开关包括向下移动的顶部悬臂导体。 至少一个第一绝缘体层位于顶部悬臂导体的下方。 至少一个第二绝缘体层位于至少一个第一绝缘体层的下方，使得在顶部悬臂导体和至少一个第二绝缘体层之间形成至少一个间隙。 当顶部悬臂导体静止时，间隙的厚度范围为0.5Å至100Å。 当顶部悬臂导体向下移动时，至少一个间隙的厚度减小。 至少一个接触导体位于顶部悬臂导体的下方。 第二绝缘体层具有暴露第二绝缘体层内的至少一个接触导体的导电区域的至少一个开口。 至少一个致动导体与至少一个接触导体电绝缘，使得至少一个致动导体施加至少一个致动电压使顶部悬臂导体向下朝向至少一个接触导体移动，以便在 顶部悬臂导体和至少一个接触导体。

公开(公告)号：US20120235537A1

公开(公告)日：2012-09-20

申请号：US13421142

申请日：2012-03-15

Applicant: Takayuki MASUNAGA ,  Hiroaki Yamazaki

Inventor： Takayuki MASUNAGA ,  Hiroaki Yamazaki

IPC: H02N1/00

CPC classification number: B81B3/0072 ,  B81B2201/016 ,  B81B2203/0163 ,  H01H59/0009

Abstract: According to one embodiment, an electrostatic actuator includes a substrate, an electrode unit, a film body unit, and an urging unit. The electrode unit is provided on the substrate. The film body unit is provided to oppose the electrode unit and is conductive. The urging unit is configured to support the film body unit and includes a connection unit connected to the substrate and an elastic unit provided between the connection unit and the film body unit. A contacting state and a separated state are possible for the electrode unit and the film body unit according to a voltage applied to the electrode unit. The elastic unit has a branch portion between one end of the elastic unit connected to the connection unit and multiple one other ends of the elastic unit connected to the film body unit.

Abstract translation: 根据一个实施例，静电致动器包括基板，电极单元，膜体单元和推压单元。 电极单元设置在基板上。 膜体单元设置成与电极单元相对并且是导电的。 推压单元被配置为支撑胶片主体单元，并且包括连接到基板的连接单元和设置在连接单元和胶片主体单元之间的弹性单元。 根据施加到电极单元的电压，电极单元和膜体单元的接触状态和分离状态是可能的。 弹性单元在连接到连接单元的弹性单元的一端和连接到胶片主体单元的弹性单元的多个另一端之间具有分支部分。

公开(公告)号：US08149076B2

公开(公告)日：2012-04-03

申请号：US12518690

申请日：2007-12-10

Applicant: Peter G. Steeneken

Inventor： Peter G. Steeneken

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  B81B3/0056 ,  B81B2201/016 ,  B81C2201/017 ,  Y10T29/49105

Abstract: The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one deformation electrode. The second electrode or the suspension structure or both are plastically deformable upon application of an electrostatic deformation force via the deformation electrode. This way, variations in the off-state position of the second electrode that occur during fabrication of different devices or during operation of a single device can be eliminated.

Abstract translation: 本发明涉及一种MEMS器件，其包括第一电极和借助于悬挂结构悬挂至第一电极一定距离的第二电极。 MEMS器件还包括至少一个变形电极。 当通过变形电极施加静电变形力时，第二电极或悬架结构或两者均可塑性变形。 这样，可以消除在制造不同装置期间或在单个装置的操作期间发生的第二电极的截止状态位置的变化。

公开(公告)号：US20110051312A1

公开(公告)日：2011-03-03

申请号：US12990158

申请日：2009-05-07

Applicant: Peter G. Steeneken ,  Hilco Suy ,  Martijn Goossens

Inventor： Peter G. Steeneken ,  Hilco Suy ,  Martijn Goossens

IPC: H01G7/00 ,  H01H57/00

CPC classification number: H01H1/0036 ,  B81B3/0078 ,  B81B2201/016 ,  B81B2203/0109 ,  H01H59/0009 ,  H01H2057/006

Abstract: A MEMS device comprises first and second opposing electrodes (42,46), wherein the second electrode (46) is electrically movable to vary the electrode spacing between facing first sides of the first and second electrodes. A first gas chamber (50) is provided between the electrodes, at a first pressure, and a second gas chamber (52) is provided on the second, opposite, side of the second electrode at a second pressure which is higher than the first pressure. This arrangement provides rapid switching and with damping of oscillations so that settling times are reduced.

Abstract translation: MEMS器件包括第一和第二相对电极（42,46），其中第二电极（46）可电可移动以改变第一和第二电极的相对的第一侧之间的电极间隔。 第一气室（50）在第一压力下设置在电极之间，第二气室（52）以比第一压力高的第二压力设置在第二电极的第二相对侧上 。 这种布置提供了快速切换和振荡的阻尼，从而降低了沉降时间。