公开(公告)号：US07429863B2

公开(公告)日：2008-09-30

申请号：US11488457

申请日：2006-07-18

Applicant: Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

Inventor： Larry K. Carmichael ,  Michael D. Borenstein ,  Paul C. Arnold ,  Stephen C. Blouch ,  Richard A. Knott

IPC: G01N27/62 ,  G01L21/30

CPC classification number: H01J41/04

Abstract: A method and apparatus for operating a multi-hot-cathode ionization gauge is provided to increase the operational lifetime of the ionization gauge in gaseous process environments. In example embodiments, the life of a spare cathode is extended by heating the spare cathode to a temperature that is insufficient to emit electrons but that is sufficient to decrease the amount of material that deposits on its surface or is optimized to decrease the chemical interaction between a process gas and a material of the at least one spare cathode. The spare cathode may be constantly or periodically heated. In other embodiments, after a process pressure passes a given pressure threshold, plural cathodes may be heated to a non-emitting temperature, plural cathodes may be heated to a lower emitting temperature, or an emitting cathode may be heated to a temperature that decreases the electron emission current.

Abstract translation: 提供了用于操作多热阴极电离计的方法和装置，以增加气态过程环境中电离计的使用寿命。 在示例实施例中，通过将备用阴极加热到不足以发射电子的温度来延长备用阴极的寿命，但足以减少沉积在其表面上的材料的量或被优化以降低其间的化学相互作用 处理气体和所述至少一个备用阴极的材料。 备用阴极可以不断地或周期性地加热。 在其他实施例中，在工艺压力通过给定压力阈值之后，可以将多个阴极加热到非发光温度，多个阴极可以被加热到较低的发光温度，或者可以将发射阴极加热到降低 电子发射电流。

公开(公告)号：US07030619B2

公开(公告)日：2006-04-18

申请号：US10799446

申请日：2004-03-12

Applicant: Paul C. Arnold ,  Paul M. Rutt

Inventor： Paul C. Arnold ,  Paul M. Rutt

IPC: G01L21/30 ,  G01N27/62

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) can be located within the anode volume or outside the anode volume. The ionization gauge can have a mass filter for separating the ions based on mass-to-charge ratio. The ionization gauge can be a Bayard-Alpert type that measures pressure or a residual gas analyzer that determines a gas type.

Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积并将电子保持在阳极区域中的阳极。 电离计可以具有多个电子源和/或集电极。 集电极可以位于阳极体积内或阳极体积外。 电离计可以具有用于基于质荷比分离离子的质量过滤器。 电离计可以是衡量压力的Bayard-Alpert型，也可以是确定气体类型的残留气体分析仪。

公开(公告)号：US06476612B1

公开(公告)日：2002-11-05

申请号：US09838402

申请日：2001-04-19

Applicant: Robert E. Ellefson ,  Louis C. Frees

Inventor： Robert E. Ellefson ,  Louis C. Frees

IPC: G01L2130

CPC classification number: H01J41/04 ,  G01L21/30

Abstract: In an ionization gauge, the effect of X-rays emitted when a collimated electron beam strikes grid surfaces in the gauge structure is reduced by a louvered beam stop. The louvered beam stop creates shadow regions having no X-rays, thus minimizing the amount of X-rays striking the collector plate and reducing the X-ray effect portion of the residual current.

Abstract translation: 在电离计中，当准直电子束撞击仪表结构中的栅格表面时发射的X射线的效果由百叶窗光束挡块减小。 百叶窗光束停止产生没有X射线的阴影区域，从而最小化撞击集电板的X射线的量并减少残余电流的X射线效应部分。

公开(公告)号：US6025723A

公开(公告)日：2000-02-15

申请号：US917932

申请日：1997-08-27

Applicant: Daniel Granville Bills

Inventor： Daniel Granville Bills

IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04 ,  G01L21/32 ,  H05B31/26 ,  H05H15/00

CPC classification number: H01J41/04

Abstract: An ionization gauge including a source of electrons; an open anode defining an anode volume, where the source of electrons is disposed outside the anode volume; a plurality of ion collector electrodes disposed within the anode volume; a plurality of axially extending anode support posts for supporting the open anode, the anode support posts being electrically connected to the open anode; and the plurality of ion collector electrodes being respectively located sufficiently close to the plurality of axially extending anode support posts so as to substantially repel the electrons from the anode support posts.

Abstract translation: 包括电子源的电离计; 限定阳极体积的开放阳极，其中电子源设置在阳极体积的外部; 设置在阳极容积内的多个离子收集电极; 多个轴向延伸的阳极支撑柱，用于支撑开放的阳极，阳极支撑柱电连接到开放的阳极; 并且所述多个离子集电极分别位于与所述多个轴向延伸的阳极支撑柱足够接近的位置，以便基本上排斥所述阳极支撑柱的电子。

公开(公告)号：US5644220A

公开(公告)日：1997-07-01

申请号：US388232

申请日：1995-02-13

Applicant: Waelchli Urs ,  Stoeckli Armin Leo ,  Boesch Martin

Inventor： Waelchli Urs ,  Stoeckli Armin Leo ,  Boesch Martin

IPC: G01R19/00 ,  G01R29/24 ,  G01T1/29 ,  H01J37/244 ,  H01J41/04 ,  H01J49/02 ,  G01R27/26

CPC classification number: G01R29/24 ,  G01R19/0061 ,  H01J37/244 ,  H01J41/04 ,  H01J49/025

Abstract: For measuring the charge transported in an ion or electron beam, collecting grids are provided in a cascaded manner and the galvanic currents occurring there are measured. The same surface range is measured on the collecting cascade with respect to the particle current in the vacuum. The process and apparatus have particular applicability in partial-pressure and total-pressure measuring apparatuses, e.g. mass spectrometers and Bayard-d'Alpert tubes.

Abstract translation: 为了测量以离子或电子束传输的电荷，以级联的方式提供收集栅格，并测量在那里发生的电流。 在真空中相对于颗粒电流在集电级联上测量相同的表面范围。 该方法和装置在分压和全压测量装置中具有特别的适用性。 质谱仪和Bayard-d'Alpert管。

公开(公告)号：US5422573A

公开(公告)日：1995-06-06

申请号：US164953

申请日：1993-12-10

Applicant: Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

Inventor： Daniel G. Bills ,  Michael D. Borenstein ,  Paul C. Arnold

IPC: G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: Ionization gauge and method of operating same where the gauge may be of the Bayard-Alpert type and include a shield which completely encloses the electron source, the anode, and the collector electrode so that potentials external to the shield do not disturb the electric charge distribution within the shielded volume to thus stabilize the sensitivity of the gauge. The ionization gauge is further characterized by the following features which may be present either alone or in combination including: (a) the anode is provided with end caps which extend radially inward at least 25% of the radius of the anode but not more than 75% of the radius; (b) the ion collector has a diameter of not less than 0.015 in. and not more than 0.080 in.; (c) the ion collector extends at its free end at least through one of the partial end caps of the anode; (d) the electron source is not substantially longer axially than the region within the anode volume in which the electric field is predominantly directed radially inward and where the electron source is located substantially only adjacent to the foregoing region; (e) the anode is provided with a substantially uniformly transparent grid structure in the regions where the electrons enter the anode volume and where they exit from the anode volume. Moreover, the above features may be utilized in other hot cathode ionization gauges where, for example, the above features (a) and (d) may be utilized in triode gauges.

Abstract translation: 电离计及其操作方法，其中量规可以是Bayard-Alpert型，并且包括完全包围电子源，阳极和集电极的屏蔽，使得屏蔽外部的电位不会扰乱电荷分布 在屏蔽体积内，从而稳定仪表的灵敏度。 电离计进一步的特征在于以下特征，其可以单独存在或组合存在，包括：（a）阳极设置有端盖，其径向向内延伸至阳极半径的至少25％但不大于75 半径的百分比; （b）离子收集器的直径不小于0.015英寸，不大于0.080英寸。 （c）离子收集器至少通过阳极的部分端盖之一在其自由端处延伸; （d）电子源基本上不比阳极体积内的区域基本上更长，其中电场主要指向径向向内并且电子源基本上仅与前述区域相邻; （e）阳极在其中电子进入阳极体积并且它们从阳极体积排出的区域中具有基本均匀的透明网格结构。 此外，上述特征可以用于其他热阴极电离计，其中例如上述特征（a）和（d）可用于三极管计。

公开(公告)号：US5300890A

公开(公告)日：1994-04-05

申请号：US866869

申请日：1992-04-10

Applicant: Guenter Haas

Inventor： Guenter Haas

IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:(a) a thermionic cathode filament which has a central active part and lateral support parts;(b) an essentially flat, diaphragm-like control electrode,(c) an essentially flat apertured acceleration electrode and(d) an essentially flat ion collector electrode,(e) a base plate on which the filament, the control electrode, the acceleration electrode and ion collector electrode are mounted,wherein the base plate consists of a ceramic material and has a plurality of through holes, and each of said control, acceleration and ion collector electrodes comprises a support member having essentially a shape of an inverted "U" with first and second legs, one of said legs of each electrode support member extending through a corresponding hole of said base plate and being fixed therein.

Abstract translation: 一种具有以下电极的热阴极电离压力计，其沿着轴以规定的顺序彼此间隔一定距离：（a）具有中心活性部分和侧向支撑部分的热离子阴极细丝; （b）基本平坦的隔膜状控制电极，（c）基本平坦的有孔加速电极和（d）基本平坦的离子收集电极，（e）基板，其上的灯丝，控制电极，加速度 安装电极和离子收集电极，其中基板由陶瓷材料组成并具有多个通孔，并且所述控制加速度和离子收集电极中的每一个包括基本上具有反向“U”形状的支撑构件， 具有第一和第二腿部，每个电极支撑构件的所述腿中的一个延伸穿过所述基板的对应的孔并固定在其中。

公开(公告)号：US5191211A

公开(公告)日：1993-03-02

申请号：US856263

申请日：1992-03-23

Applicant: William B. Gorman, Jr.

Inventor： William B. Gorman, Jr.

IPC: G01N1/00 ,  G01N1/22 ,  G01N30/06 ,  G01N33/44 ,  H01J41/04

CPC classification number: H01J41/04 ,  G01N30/06 ,  G01N33/445 ,  G01N2001/2229

Abstract: Volatile additives for vulcanized or unvulcanized rubber can be accurately identified by controlled heating of a test sample in a sealed vial equipped with an overhead collecting headspace, transferring the heated volatiles to a chromatograph column, and analyzing the separated volatile components emerging from the chromatograph column by various selective analytical detectors.

Abstract translation: 用于硫化或未硫化橡胶的挥发性添加剂可以通过在装有塔顶收集顶部空间的密封小瓶中受控加热测试样品，将加热的挥发物转移到色谱柱上，并通过分析从色谱柱出来的分离的挥发性组分 各种选择性分析检测器。

公开(公告)号：US5128617A

公开(公告)日：1992-07-07

申请号：US507579

申请日：1990-04-11

Applicant: Daniel G. Bills

Inventor： Daniel G. Bills

IPC: G01L21/30 ,  H01J41/04

CPC classification number: H01J41/04

Abstract: An ionization gauge and controller therefor where the gauge has a sensitivity which is reproducible gauge to gauge and stable over time in the same gauge. An ionization gauge with a very much lower and a somewhat higher pressure limit than prior art gauges is also disclosed. Elements are also described for launching all electrons in a tight beam in Bayard-Alpert type geometry, so that all the conditions for reproducible and stable sensitivity are satisfied. Elements are also described for collecting all electrons at low energy so that soft X-ray production is negligible.

Abstract translation: 一种电离计及其控制器，其中量规具有可重复的测量灵敏度，可在同一规格下测量和稳定。 还公开了一种具有比现有技术的量规非常低和稍高压力极限的电离计。 还描述了用于以Bayard-Alpert型几何形式在紧束中发射所有电子的元件，使得满足可再现和稳定灵敏度的所有条件。 还描述了用于以低能量收集所有电子的元件，使得软X射线产生可忽略。

公开(公告)号：US3839655A

公开(公告)日：1974-10-01

申请号：US39139273

申请日：1973-08-24

Applicant: VARIAN ASSOCIATES

Inventor： HELGELAND W ,  SHELDON D

IPC: G01L21/32 ,  H01J41/04 ,  H01J41/14

CPC classification number: H01J41/04

Abstract: An improved Bayard-Alpert type vacuum ionization tube includes an electron collecting grid surrounding and coaxial with a centrally located positive ion collector. The grid has an inner diameter of approximately 0.5 inches and an electron emitting filament is positioned outside of the grid and spaced from the grid by approximately 0.2 inches. A grounded shield screen surrounds the grid outside of the filament and is coaxial with the collector. The tube has constant vacuum gauging sensitivity over the range from 10 1 to 5 X 10 10 torr.

Abstract translation: 改进的Bayard-Alpert型真空电离管包括围绕并与中心定位的正离子收集器同轴的电子收集栅。 栅格具有大约0.5英寸的内径，并且电子发射丝位于栅格的外部并与网格间隔约0.2英寸。 接地屏蔽屏幕围绕灯丝外部的栅格并与收集器同轴。 该管在10 -1至5×10 -10托的范围内具有恒定的真空计量灵敏度。