公开(公告)号：WO2013112120A1

公开(公告)日：2013-08-01

申请号：PCT/US2012/000321

申请日：2012-07-11

Applicant: OWL BIOMEDICAL, INC. ,  INNOVATIVE MICRO TECHNOLOGY ,  FOSTER, John, S. ,  GRUMMITT, Daryl, W. ,  HARLEY, John, C. ,  LINTON, James, P. ,  SPONG, Jaquelin, K.

Inventor： FOSTER, John, S. ,  GRUMMITT, Daryl, W. ,  HARLEY, John, C. ,  LINTON, James, P. ,  SPONG, Jaquelin, K.

IPC: A61J1/06

CPC classification number: C12M47/04 ,  B01L3/502761 ,  B01L7/52 ,  B01L2200/0652 ,  B01L2300/0816 ,  B01L2400/043 ,  B01L2400/0439 ,  B01L2400/0478 ,  B01L2400/0481 ,  G01N15/1459 ,  G01N2015/149

Abstract: A disposable cartridge is described which is compatible with a MEMS particle sorting device. The disposable cartridge may include passageways which connect fluid reservoirs in the cartridge with corresponding microfluidic passageways on the MEMS chip. A flexible gasket may prevent leakages and allow the fluid to cross the gasket barrier through a plurality of holes in the gasket. Vents and septums may also be included to allow air to escape and fluids to be inserted by hypodermic needle. A MEMS-based particle sorting system using the disposable cartridge is also described.

Abstract translation: 描述了与MEMS颗粒分选装置兼容的一次性盒。 一次性盒可以包括将盒中的流体储存器与MEMS芯片上的相应微流体通道连接的通道。 柔性垫片可以防止泄漏，并允许流体通过垫圈中的多个孔穿过垫圈屏障。 还可以包括通气孔和隔膜，以允许空气逸出，并由皮下注射针插入液体。 还描述了使用一次性盒的基于MEMS的颗粒分选系统。

公开(公告)号：WO2009099669A2

公开(公告)日：2009-08-13

申请号：PCT/US2009000807

申请日：2009-02-09

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  FOSTER JOHN S ,  PARANJPYE ALOK ,  RYBNICEK KIMON ,  MOTTA PAULO SILVEIRA DA

Inventor： FOSTER JOHN S ,  PARANJPYE ALOK ,  RYBNICEK KIMON ,  MOTTA PAULO SILVEIRA DA

IPC: H01H1/10

CPC classification number: H01H59/0009 ,  H01H1/18

Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flexible shunt bar which has one end coupled to the deformable plate, and the other end coupled to a contact on the second substrate. Upon activating the switch, the deformable plate urges the shunt bar against a second contact formed in the second substrate, thereby closing the switch. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.

Abstract translation: 用于形成静电MEMS板开关的系统和方法包括在第一衬底上形成可变形板，在第二衬底上形成电触点，并且使用气密密封来耦合这两个衬底。 可变形板可以具有柔性分流棒，该柔性分流棒的一端联接到可变形板，并且另一端联接到第二基板上的触点。 在激活开关时，可变形板推动分流棒抵靠形成在第二基板中的第二触点，从而闭合开关。 气密密封可以是金/铟合金，通过加热镀金层上的铟层而形成。 对静电MEMS开关的电接入可以通过在第二衬底的厚度上形成通孔来进行。

公开(公告)号：WO2007084341A3

公开(公告)日：2009-05-07

申请号：PCT/US2007000765

申请日：2007-01-12

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  RUBEL PAUL J

Inventor： RUBEL PAUL J

IPC: B81B3/00

CPC classification number: H02N10/00 ,  F03G7/06 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49204

Abstract: A MEMS hysteretic thermal device may have a cantilevered beam which bends about one or more points in at least two substantially different directions. In one exemplary embodiment, the MEMS hysteretic thermal device is made from a first segment coupled to an anchor point, and also coupled to a second segment by a joint. Heating two respective drive beams causes the first segment to bend in a direction substantially about th& anchor point and the second segment to bend in a direction substantially about the joint. By cooling the first drive beam faster than the second drive beam, the motion of the MEMS thermal device may be hysteretic. The MEMS hysteretic thermal device may be used for example, as an electrical switch or as a valve or piston.

Abstract translation: MEMS迟滞热装置可以具有悬臂梁，其在至少两个基本上不同的方向上围绕一个或多个点弯曲。 在一个示例性实施例中，MEMS滞后热装置由耦合到锚定点的第一段制成，并且还通过接头耦合到第二段。 加热两个相应的驱动梁使得第一段在基本上约th和锚点的方向上弯曲，而第二段在基本上围绕接头的方向上弯曲。 通过比第二驱动光束更快地冷却第一驱动光束，MEMS热装置的运动可能是滞后的。 MEMS迟滞热装置可以例如用作电开关或阀或活塞。

公开(公告)号：WO2008045230A2

公开(公告)日：2008-04-17

申请号：PCT/US2007021113

申请日：2007-10-02

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  PARANJPYE ALOK ,  THOMPSON DOUGLAS L

Inventor： PARANJPYE ALOK ,  THOMPSON DOUGLAS L

IPC: H01H1/06

CPC classification number: H01H1/0036 ,  H01H1/06 ,  H01H59/0009 ,  H01H61/02 ,  H01H2001/0052 ,  H01H2061/008

Abstract: A contact electrode for a device is made using an etching process to etch the surface of the contact electrode to form a corrugated contact surface wherein the outer edges of at least one grain is recessed from the outer edges of adjecent grains and is recessed by at least about 0.05 µm from the contact plane. By having such a corrugated surface, the contact electrode is likely to contact another conductor with at least one pure metal grain. This etching treatment reduces contact resistance and contact resistance variability throughout many cycles of use of the contact electrode.

Abstract translation: 使用蚀刻工艺来制造用于器件的接触电极以蚀刻接触电极的表面以形成波纹状接触表面，其中至少一个晶粒的外边缘从凹凸晶粒的外边缘凹陷并且至少凹陷 距接触面约0.05μm。 通过具有这种波纹表面，接触电极很可能与另一导体接触至少一个纯金属颗粒。 该蚀刻处理在接触电极的许多使用周期中减少接触电阻和接触电阻变化性。

公开(公告)号：WO2007111861A3

公开(公告)日：2007-10-04

申请号：PCT/US2007/006751

申请日：2007-03-19

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  CARLSON, Gregory, A. ,  FOSTER, John, S. ,  LIU, Donald, C. ,  THOMPSON, Douglas, L.

Inventor： CARLSON, Gregory, A. ,  FOSTER, John, S. ,  LIU, Donald, C. ,  THOMPSON, Douglas, L.

IPC: H01L29/82

Abstract: A material for forming a conductive structure for a MEMS device is described, which is an alloy containing about 0.01% manganese and the remainder nickel. Data shows that the alloy possesses advantageous mechanical and electrical properties. In particular, the sheet resistance of the alloy is actually lower than the sheet resistance of the pure metal. In addition, the alloy may have superior creep and higher recrystallization temperature than the pure metal. It is hypothesized that these advantageous material properties are a result of the larger grain structure existing in the NiMn alloy film compared to the pure nickel metal film. These properties may make the alloy appropriate for applications such as MEMS thermal electrical switches for telecommunications applications.

公开(公告)号：WO2007109203A2

公开(公告)日：2007-09-27

申请号：PCT/US2007/006752

申请日：2007-03-19

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  PARANJPYE, Alok ,  SUMMERS, Jeffery, F.

Inventor： PARANJPYE, Alok ,  SUMMERS, Jeffery, F.

IPC: H01H1/00 ,  H01H11/00

CPC classification number: B81B3/0024 ,  B81B2201/018 ,  B81B2201/0278 ,  H01H2037/008 ,  H01H2061/008 ,  Y10T29/49105 ,  Y10T29/49147 ,  Y10T29/49204 ,  Y10T29/53248

Abstract: A MEMS thermal switch is disclosed which couples a hot, expanding beam to a cool flexor beam using a slideably engaged tether, and bends the cool, flexor beam by the expansion of the hot beam. A rigidly engaged tether ties the distal ends of the hot, expanding beam and the cool, flexor beam together, whereas the slideably engaged tether allows the hot, expanding beam to elongate with respect to the cool, flexor beam, without loading the slideably engaged tether with a large shear force. As a result, the material of the tether can be made stiffer, and therefore transmit the bending force of the hot, expanding beam more efficiently to the cool, flexor beam.

Abstract translation: 公开了一种MEMS热开关，其使用可滑动接合的系绳将热膨胀梁耦合到冷弯头梁，并且通过热梁的膨胀来弯曲冷弯曲梁。 刚性接合的系绳将热的，扩张的梁和冷的弯曲梁的远端连接在一起，而可滑动地接合的系绳允许热的，膨胀的梁相对于冷的屈肌梁而伸长，而不加载可滑动地接合的系绳 具有很大的剪切力。 结果，系链的材料可以变得更硬，并且因此将热膨胀梁的弯曲力更有效地传递到凉爽的弯曲梁。

公开(公告)号：WO2007055862A3

公开(公告)日：2007-05-18

申请号：PCT/US2006/040016

申请日：2006-10-12

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  FOSTER, John, S. ,  RUBEL, Paul, J.

Inventor： FOSTER, John, S. ,  RUBEL, Paul, J.

IPC: H01H61/00 ,  H02N10/00 ,  F02G1/04 ,  F01B29/10

Abstract: A MEMS thermal device is made in a smaller size by decreasing the distance that the two cantilevered portions, a spring cantilever and a latch cantilever, of the device must travel. The smaller distance is accomplished by positioning the two contact surfaces of the spring cantilever and the latch cantilever adjacent to each other in the quiescent state of the switch. When the switch is closed, the spring cantilever moves laterally to clear the contact surface of the latch cantilever, and then the latch cantilever moves its contact surface into position. To close the switch, the spring cantilever is allowed to relax and return to nearly its original position, except for the presence of the latch contact surface. When the spring cantilever is allowed to relax, it stays in the closed position because of friction or because of an angled shape of the contact surfaces.

公开(公告)号：WO2007055862A2

公开(公告)日：2007-05-18

申请号：PCT/US2006040016

申请日：2006-10-12

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  FOSTER JOHN S ,  RUBEL PAUL J

Inventor： FOSTER JOHN S ,  RUBEL PAUL J

IPC: H01H61/00

CPC classification number: H01H61/04 ,  H01H1/0036 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

Abstract: A MEMS thermal device is made in a smaller size by decreasing the distance that the two cantilevered portions, a spring cantilever and a latch cantilever, of the device must travel. The smaller distance is accomplished by positioning the two contact surfaces of the spring cantilever and the latch cantilever adjacent to each other in the quiescent state of the switch. When the switch is closed, the spring cantilever moves laterally to clear the contact surface of the latch cantilever, and then the latch cantilever moves its contact surface into position. To close the switch, the spring cantilever is allowed to relax and return to nearly its original position, except for the presence of the latch contact surface. When the spring cantilever is allowed to relax, it stays in the closed position because of friction or because of an angled shape of the contact surfaces.

Abstract translation: 通过减小装置的两个悬臂部分（弹簧悬臂和闩锁悬臂）必须行进的距离来制造更小尺寸的MEMS热装置。 通过在开关的静止状态下将弹簧悬臂和闩锁悬臂的两个接触表面彼此相邻地定位，实现较小的距离。 当开关关闭时，弹簧悬臂横向移动以清除闩锁悬臂的接触表面，然后闩锁悬臂将其接触表面移动到位。 为了闭合开关，除了存在闩锁接触面之外，弹簧悬臂可以松弛并返回到其初始位置。 当弹簧悬臂被允许松弛时，由于摩擦或由于接触表面的成角度，它停留在关闭位置。

公开(公告)号：WO2007032948A2

公开(公告)日：2007-03-22

申请号：PCT/US2006/034437

申请日：2006-09-05

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  RUBEL, Paul, J.

Inventor： RUBEL, Paul, J.

IPC: H01P1/10

CPC classification number: H01H59/0009 ,  H01H9/38 ,  H01H9/42

Abstract: A multiple switch MEMS structure has a higher resistance, higher durability switch arranged in parallel with a lower resistance, less durable switch. By closing the higher resistance, high durability switch before the lower resistance, less durable switch, the lower resistance, less durable switch is protected from voltage transients and arcing which may otherwise damage the lower resistance, less durable switch. By appropriate selection of dimensions and materials, the high resistance, high durability switch may be assured to close first, as well as open first, thereby also protecting the lower resistance, less durable switch from voltage transients upon opening as well as upon closing.

Abstract translation: 多开关MEMS结构具有较高的电阻，较高的耐​​久性开关与较低的电阻平行布置，较不耐用的开关。 通过关闭较高的电阻，较高的耐​​久性开关，在较低的电阻，较不耐用的开关，较低的电阻，较不耐用的开关保护免受电压瞬变和电弧，否则可能会损坏较低的电阻，较不耐用的开关。 通过适当选择尺寸和材料，可以确保高电阻，高耐久性开关首先关闭，并首先打开，从而也可以保护较低的电阻，开启时以及关闭时的电压瞬变的耐用切换。

公开(公告)号：WO2015017067A1

公开(公告)日：2015-02-05

申请号：PCT/US2014/044804

申请日：2014-06-30

Applicant: INNOVATIVE MICRO TECHNOLOGY

Inventor： ZEYEN, Benedikt

IPC: C21D1/04 ,  G01R33/06

CPC classification number: G01R33/0052 ,  G01R33/0011 ,  Y10T29/4902

Abstract: A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.

Abstract translation: 微制造的磁场传感器使用与一个或多个可渗透的磁通引导件组合的磁敏结构。 磁通引导件可以将外部施加的磁场的偏轴分量穿过磁敏结构的敏感轴线，或者可以将磁敏结构屏蔽到离轴，杂散场或噪声源。 布置在单个基板上的磁通引导件和磁敏结构的组合可以使单个封装中的集成的3轴磁力计能够大大地提高成本和性能。