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    FABRICATION OF ULTRA-SHALLOW CHANNELS FOR MICROFLUIDIC DEVICES AND SYSTEMS
    114.
    发明申请
    FABRICATION OF ULTRA-SHALLOW CHANNELS FOR MICROFLUIDIC DEVICES AND SYSTEMS 审中-公开

    公开(公告)号：WO2003068672A3

    公开(公告)日：2003-08-21

    申请号：PCT/US2003/004228

    申请日：2003-02-12

    Applicant: KIONIX, INC.

    Inventor： MOON, James, E. ,  YOUNG, Lincoln, C.

    IPC: B81C1/00

    Abstract: A method for etching an ultra-shallow channel includes using an etch process that is selective for one material with minimum etching of a different material in order to achieve a very precise channel depth in the different material. Channels as shallow as 10nm can be fabricated in silicon with precisions of 5nm or better using the method. Stepped channels can be fabricated where each segment is a different depth, with the segments being between 10nm and 1000nm in depth. The method is applied to creat a fluidic channel which includes a channel substrate to which is bonded a lid substrate to confine fluids to the fluidic channels so fabricated.

    ACCELEROMETER APPARATUSES AND SYSTEMS
    115.
    发明申请
    ACCELEROMETER APPARATUSES AND SYSTEMS 审中-公开

    公开(公告)号：WO2022169964A1

    公开(公告)日：2022-08-11

    申请号：PCT/US2022/015100

    申请日：2022-02-03

    Applicant: KIONIX, INC.

    Inventor： GU, Wenting ,  HOCKING, Andrew ,  KERNESS, Nicole

    IPC: G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  G01C19/5712 ,  G01C19/5747 ,  G01C19/5719

    Abstract: A sensor having a proximal end and a distal end includes an anchor, a proof mass, a fixed finger, and a movable finger. The anchor is disposed at the proximal end. The proof mass is coupled to the anchor and disposed at a first distance from the anchor. The fixed finger and the movable finger are coupled to the anchor and disposed at a second distance from the anchor at the distal end. The fixed and movable fingers are configured to measure a first capacitance area. A ratio of the first distance over the second distance is between about 0.2 to about 0.6. The ratio is configured to deflect the movable finger at least about 1 m relative to the fixed finger.

    MECHANICALLY-SENSITIVE SEMICONDUCTING TRIODE CAPACITOR
    116.
    发明申请
    MECHANICALLY-SENSITIVE SEMICONDUCTING TRIODE CAPACITOR 审中-公开

    公开(公告)号：WO2022169952A1

    公开(公告)日：2022-08-11

    申请号：PCT/US2022/015083

    申请日：2022-02-03

    Applicant: KIONIX, INC.

    Inventor： DEWALL, Jonah

    IPC: G01P15/02 ,  G01P15/08 ,  G01P15/10 ,  G01P15/125

    Abstract: A sensor apparatus includes a base, a tap, a channel, and a gate. The tap is adjacent the base and electrically coupled to the base. The channel is between the tap and the base. The gate is adjacent the channel and electrically coupled to the channel. The gate is separated from the channel by a gap. At least a portion of a charge flow in the channel is substantially parallel or antiparallel to an electric field between the gate and the channel. A triode capacitor system includes a channel region, a gate region, and a processor. The gate region is separated from the channel region by a gap. The processor is coupled to a base contact, a tap contact, and a gate contact and configured to measure a distance of the gap based on a potential difference between the base contact and the tap contact.

    STRENGTHENED MICRO-ELECTROMECHANICAL SYSTEM DEVICES AND METHODS OF MAKING THEREOF
    118.
    发明申请
    STRENGTHENED MICRO-ELECTROMECHANICAL SYSTEM DEVICES AND METHODS OF MAKING THEREOF 审中-公开
    加强型微机电系统装置及其制造方法

    公开(公告)号：WO2012112452A2

    公开(公告)日：2012-08-23

    申请号：PCT/US2012024886

    申请日：2012-02-13

    Applicant: KIONIX INC ,  BLACKMER CHARLES W ,  ADAMS SCOTT G ,  HOCKING ANDREW S ,  LYNCH KRISTIN J ,  SHAH ASHISH A

    Inventor： BLACKMER CHARLES W ,  ADAMS SCOTT G ,  HOCKING ANDREW S ,  LYNCH KRISTIN J ,  SHAH ASHISH A

    IPC: B81B3/00

    CPC classification number: B81C1/00698 ,  B81B2203/0118 ,  B81B2203/033 ,  H01L21/76232

    Abstract: In an embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam, and can have a non-linear shape. In another embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam. The isolation joint can have a first portion, a second portion, and a bridge portion between the first portion and the second portion. The first and second portions of the isolation joint can each have a seam and a void, while the bridge portion can be solid.

    Abstract translation: 在一个实施例中，微机电装置可以包括衬底，梁和隔离接头。 梁可以相对于衬底的表面悬挂。 隔离接头可以在梁的第一部分和第二部分之间，并且可以具有非线性形状。 在另一个实施例中，微机电装置可以包括衬底，梁和隔离接头。 梁可以相对于衬底的表面悬挂。 隔离接头可以位于梁的第一部分和第二部分之间。 隔离接头可以具有第一部分，第二部分以及第一部分和第二部分之间的桥接部分。 隔离接头的第一和第二部分可以各自具有接缝和空隙，而桥接部分可以是实心的。

    SYSTEM AND METHOD FOR DETECTION OF FREEFALL WITH SPIN USING TWO TRI-AXIS ACCELEROMETERS
    120.
    发明申请
    SYSTEM AND METHOD FOR DETECTION OF FREEFALL WITH SPIN USING TWO TRI-AXIS ACCELEROMETERS 审中-公开
    使用两个三轴加速度计检测旋转的系统和方法

    公开(公告)号：WO2008121739A1

    公开(公告)日：2008-10-09

    申请号：PCT/US2008/058522

    申请日：2008-03-27

    Applicant: KIONIX, INC. ,  KIM, Dong Yoon ,  MILLER, Scott, A.

    Inventor： KIM, Dong Yoon ,  MILLER, Scott, A.

    IPC: G01P15/18

    CPC classification number: G01P15/0891 ,  G11B19/043

    Abstract: A system (10) and method detect freefall associated with an object that is spinning or tumbling as it falls. Two tri-axis accelerometers (14, 16) provide inputs to an algorithm (28) that detects the freefall of a spinning object that would not otherwise be detected by a conventional freefall detection system, due to the centrifugal and centripetal forces being placed on the falling object as it spins. The system can be used to detect the freefall of portable devices with onboard memory or hard disk drives, allowing the devices to have time to park the read/write head and reduce the potential of losing data that can be damaged by impact. This freefall detection system may be applied to such portable devices as notebook computers, PDAs, MP3 players, digital cameras, mobile phones and even automobiles.

    Abstract translation: 一种系统（10）和方法，用于检测与下降时正在旋转或翻滚的对象相关联的自由落体。 两个三轴加速度计（14,16）为算法（28）提供输入，该算法（28）检测纺丝物体的自由落体，由于离心力和向心力被放置在 坠落的物体，因为它旋转。 该系统可用于检测具有板载内存或硬盘驱动器的便携式设备的自由落体，从而允许设备有时间停放读/写头，并减少丢失可能受到影响而损坏的数据的可能性。 这种自由落体检测系统可以应用于诸如笔记本电脑，PDA，MP3播放器，数码相机，移动电话甚至汽车的便携式设备。

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