公开(公告)号：WO2022169964A1

公开(公告)日：2022-08-11

申请号：PCT/US2022/015100

申请日：2022-02-03

Applicant: KIONIX, INC.

Inventor： GU, Wenting ,  HOCKING, Andrew ,  KERNESS, Nicole

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  G01C19/5712 ,  G01C19/5747 ,  G01C19/5719

Abstract: A sensor having a proximal end and a distal end includes an anchor, a proof mass, a fixed finger, and a movable finger. The anchor is disposed at the proximal end. The proof mass is coupled to the anchor and disposed at a first distance from the anchor. The fixed finger and the movable finger are coupled to the anchor and disposed at a second distance from the anchor at the distal end. The fixed and movable fingers are configured to measure a first capacitance area. A ratio of the first distance over the second distance is between about 0.2 to about 0.6. The ratio is configured to deflect the movable finger at least about 1 m relative to the fixed finger.

公开(公告)号：WO2022169964A8

公开(公告)日：2022-08-11

申请号：PCT/US2022/015100

申请日：2022-02-03

Applicant: KIONIX, INC.

Inventor： GU, Wenting ,  HOCKING, Andrew ,  KERNESS, Nicole

IPC: G01P15/08 ,  G01P15/125 ,  G01P15/18 ,  G01C19/5712 ,  G01C19/5747 ,  G01C19/5719 ,  G01P15/0802

Abstract: A sensor having a proximal end and a distal end includes an anchor, a proof mass, a fixed finger, and a movable finger. The anchor is disposed at the proximal end. The proof mass is coupled to the anchor and disposed at a first distance from the anchor. The fixed finger and the movable finger are coupled to the anchor and disposed at a second distance from the anchor at the distal end. The fixed and movable fingers are configured to measure a first capacitance area. A ratio of the first distance over the second distance is between about 0.2 to about 0.6. The ratio is configured to deflect the movable finger at least about 1 μm relative to the fixed finger.