公开(公告)号：US20240170560A1

公开(公告)日：2024-05-23

申请号：US17990898

申请日：2022-11-21

Applicant: GlobalFoundries U.S. Inc.

Inventor： Alexander Derrickson ,  Venkatesh Gopinath ,  John J. Pekarik ,  Hong Yu ,  Vibhor Jain ,  David Pritchard

IPC: H01L29/735 ,  H01L27/06 ,  H01L29/66 ,  H01L29/732

CPC classification number: H01L29/735 ,  H01L27/0623 ,  H01L29/66871 ,  H01L29/732

Abstract: Structures that include bipolar junction transistors and methods of forming such structures. The structure comprises a semiconductor layer, a substrate, and a dielectric layer disposed between the semiconductor layer and the substrate. The structure further comprises a first bipolar junction transistor including a first collector in the substrate, a first emitter, and a first base layer. The first base layer extends through the dielectric layer from the first emitter to the first collector. The structure further comprises a second bipolar junction transistor including a second collector in the substrate, a second emitter, and a second base layer. The second base layer extends through the dielectric layer from the second emitter to the second collector. The second base layer is connected to the first base layer by a section of the semiconductor layer to define a base line.

公开(公告)号：US11942534B2

公开(公告)日：2024-03-26

申请号：US17745178

申请日：2022-05-16

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Hong Yu ,  Judson R. Holt ,  Vibhor Jain

IPC: H01L29/737 ,  H01L23/373 ,  H01L29/66

CPC classification number: H01L29/737 ,  H01L23/3738 ,  H01L29/66242

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with thermal conductor and methods of manufacture. The structure includes: a base formed within a semiconductor substrate; a thermal conductive material under the base and extending to an underlying semiconductor material; an emitter on a first side of the base; and a collector on a second side of the base.

公开(公告)号：US11881523B2

公开(公告)日：2024-01-23

申请号：US17740725

申请日：2022-05-10

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Shesh Mani Pandey ,  Vibhor Jain ,  Judson R. Holt

IPC: H01L29/737 ,  H01L29/10 ,  H01L29/66

CPC classification number: H01L29/7371 ,  H01L29/1004 ,  H01L29/66242

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to heterojunction bipolar transistors and methods of manufacture. The structure includes: a subcollector under a buried insulator layer; a collector above the subcollector; a base within the buried insulator layer; an emitter above the base; and contacts to the subcollector, the base and the emitter.

公开(公告)号：US20230290868A1

公开(公告)日：2023-09-14

申请号：US17745178

申请日：2022-05-16

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Hong Yu ,  Judson R. Holt ,  Vibhor Jain

IPC: H01L29/737 ,  H01L29/66 ,  H01L23/373

CPC classification number: H01L29/737 ,  H01L29/66242 ,  H01L23/3738

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with thermal conductor and methods of manufacture. The structure includes: a base formed within a semiconductor substrate; a thermal conductive material under the base and extending to an underlying semiconductor material; an emitter on a first side of the base; and a collector on a second side of the base.

公开(公告)号：US20230231040A1

公开(公告)日：2023-07-20

申请号：US17578011

申请日：2022-01-18

Applicant: GlobalFoundries U.S. Inc.

Inventor： Hong Yu ,  Vibhor Jain

IPC: H01L29/735 ,  H01L29/417 ,  H01L29/66 ,  H01L29/08

CPC classification number: H01L29/735 ,  H01L29/41708 ,  H01L29/6625 ,  H01L29/0808 ,  H01L29/0821

Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with an emitter/collector (E/C) contact to a doped semiconductor well and related methods. A bipolar transistor structure according to the disclosure may include a doped semiconductor well over a semiconductor substrate. An insulative region is on the doped semiconductor well. A base layer is on the insulative region, and an emitter/collector (E/C) layer on the insulative region and adjacent a first sidewall of the base layer. An E/C contact to the doped semiconductor well includes a lower portion adjacent the insulative region and an upper portion adjacent and electrically coupled to the E/C layer.

公开(公告)号：US11695064B2

公开(公告)日：2023-07-04

申请号：US17176251

申请日：2021-02-16

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Judson R. Holt ,  Tayel Nesheiwat ,  John J. Pekarik ,  Christopher Durcan

IPC: H01L29/732 ,  H01L29/66 ,  H01L29/08 ,  H01L29/06

CPC classification number: H01L29/732 ,  H01L29/0649 ,  H01L29/0804 ,  H01L29/66272

Abstract: Device structures and fabrication methods for a bipolar junction transistor. The device structure includes a substrate and a trench isolation region in the substrate. The trench isolation region surrounds an active region of the substrate. The device structure further includes a collector in the active region of the substrate, a base layer having a first section positioned on the active region and a second section oriented at an angle relative to the first section, an emitter positioned on the first section of the base layer, and an extrinsic base layer positioned over the trench isolation region and adjacent to the emitter. The second section of the base layer is laterally positioned between the extrinsic base layer and the emitter.

公开(公告)号：US20230143396A1

公开(公告)日：2023-05-11

申请号：US17684321

申请日：2022-03-01

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Hong Yu ,  Vibhor Jain

IPC: H01L29/417 ,  H01L29/08 ,  H01L29/10 ,  H01L29/66 ,  H01L29/735 ,  H01L29/737

CPC classification number: H01L29/41708 ,  H01L29/0821 ,  H01L29/1008 ,  H01L29/66242 ,  H01L29/735 ,  H01L29/737 ,  H01L29/0808 ,  H01L29/0817

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with a collector contact and methods of manufacture. The structure includes: a lateral bipolar transistor which includes an emitter, a base and a collector; an emitter contact to the emitter; a base contact to the base; and a collector contact to the collector and extending to an underlying substrate underneath the collector.

公开(公告)号：US20230069207A1

公开(公告)日：2023-03-02

申请号：US17524043

申请日：2021-11-11

Applicant: GlobalFoundries U.S. Inc.

Inventor： Alexander Derrickson ,  Judson R. Holt ,  Haiting Wang ,  Jagar Singh ,  Vibhor Jain

IPC: H01L29/10 ,  H01L29/08 ,  H01L29/66 ,  H01L29/735 ,  H01L29/737

Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes an emitter having a raised portion, a collector having a raised portion, and a base having a base layer and an extrinsic base layer stacked with the base layer. The base layer and the extrinsic base layer are positioned in a lateral direction between the raised portion of the emitter and the raised portion of the collector, the base layer has a first width in the lateral direction, the extrinsic base layer has a second width in the lateral direction, and the second width is greater than the first width.

公开(公告)号：US20230067486A1

公开(公告)日：2023-03-02

申请号：US17525256

申请日：2021-11-12

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alexander Derrickson ,  Vibhor Jain ,  Judson R. Holt ,  Jagar Singh ,  Mankyu Yang

IPC: H01L29/08 ,  H01L29/735 ,  H01L29/737 ,  H01L29/06 ,  H01L29/10 ,  H01L29/417

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor with gated collector and methods of manufacture. The structure includes: an extrinsic base region vertically over a semiconductor substrate and comprising asymmetrical sidewall spacers on opposing sidewalls of the extrinsic base region; a collector region on the semiconductor substrate and separated from the extrinsic base region by at least a first spacer of the asymmetrical sidewall spacers; and an emitter region on the semiconductor substrate and separated from the extrinsic base region by a second spacer of the asymmetrical sidewall spacers.

公开(公告)号：US20230057695A1

公开(公告)日：2023-02-23

申请号：US17509327

申请日：2021-10-25

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Vibhor Jain ,  Alvin J. Joseph ,  Alexander Derrickson ,  Judson R. Holt ,  John J. Pekarik

IPC: H01L29/08 ,  H01L29/735 ,  H01L29/417 ,  H01L29/66

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to lateral bipolar transistors and methods of manufacture. The structure includes: an extrinsic base comprising semiconductor material; an intrinsic base comprising semiconductor material which is located below the extrinsic base; a polysilicon emitter on a first side of the extrinsic base; a raised collector on a second side of the extrinsic base; and sidewall spacers on the extrinsic base which separate the extrinsic base from the polysilicon emitter and the raised collector.