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    Method and apparatus for forming thin organic film
    111.
    发明公开
    Method and apparatus for forming thin organic film 失效
    用于形成有机薄膜的方法和装置。

    公开(公告)号：EP0366647A2

    公开(公告)日：1990-05-02

    申请号：EP90100016.6

    申请日：1987-12-01

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Wakayama, Shigeru ,  Miura, Akira

    IPC: B05D1/20 ,  B05C3/10

    CPC classification number: B82Y30/00 ,  B05C3/10 ,  B05C3/109 ,  B05C11/11 ,  B05D1/206 ,  B82Y40/00

    Abstract: An apparatus for forming thin organic films includes a plurality of water tanks (11, 12, 13) each containing water. Monomolecular films of different amphiphatic organic molecules are developed on the surfaces of the liquid in water tanks respectively. A work (48) is dipped into and raised out of a desired water tank, by a driving device (50), in a direction substantially perpendicular to the liquid surface. It is arranged that the monomolecular film is adhered to the surface of the work in only one of the steps of dipping and drawing up the work. It is also arranged that the work is dipped into and raised out of the developing region in a predetermined direction with respect to the monomolecular film.

    Method and apparatus for forming organic thin film
    113.
    发明公开
    Method and apparatus for forming organic thin film 失效
    Verfahren und Vorrichtung zur Herstellung einesdünnenorganischen Filmes。

    公开(公告)号：EP0327193A1

    公开(公告)日：1989-08-09

    申请号：EP89300066.1

    申请日：1989-01-05

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Yasuda, Satoshi c/o Patent Division ,  Wakayama, Shigeru c/o Patent Division ,  Tsukumo, Yoshiaki c/o Patent Division ,  Haraguchi, Takashi c/o Patent Division ,  Egusa, Syun c/o Patent Division

    IPC: B05D1/20

    CPC classification number: B82Y30/00 ,  B05D1/206 ,  B82Y40/00

    Abstract: An organic film forming apparatus includes a trough (11) storing water therein and a work drive device (50) for moving a work (48) with respect to the trough. The surface of the water is partitioned by a rod (25) into a first developing region (11a) on which a monomolecular film (21) is developed and a second developing region (11b) on which no monomolecular film is developed. The work is moved by the device through the developed mono­molecular film so as to adhere the film on the surface of the work. The device has a holding mechanism (54) which has a holding portion (70, 72) engaged with the work, and which holds the work so that when the work passes through the developed monomolecular film, the holding portion is away from the film or passes through the film after almost the entire work passes through the film.

    Abstract translation: 一种有机膜形成装置包括在其中储存水的槽（11）和用于使工件（48）相对于槽移动的工件驱动装置（50）。 水的表面被一个棒（25）分隔成单分子膜（21）显影的第一显影区域（11a）和不形成单分子膜的第二显影区域（11b）。 工件由设备通过开发的单分子膜移动，以将膜粘附在工件的表面上。 该装置具有保持机构（54），该保持机构具有与工件接合的保持部（70,72），并且保持工件，使得当工件通过显影单分子膜时，保持部分远离膜或 几乎整个作品都通过电影，通过电影。

    Method and apparatus for forming thin organic film
    115.
    发明公开
    Method and apparatus for forming thin organic film 失效
    Verfahren und Vorrichtung zur Erzeugung einesdünnenorganischen Films。

    公开(公告)号：EP0270348A1

    公开(公告)日：1988-06-08

    申请号：EP87310589.4

    申请日：1987-12-01

    Applicant: KABUSHIKI KAISHA TOSHIBA

    Inventor： Wakayama, Shigeru c/o Patent Division ,  Miura, Akira c/o Patent Division

    IPC: B05D1/20 ,  B05C3/10 ,  B05C11/11

    CPC classification number: B82Y30/00 ,  B05C3/10 ,  B05C3/109 ,  B05C11/11 ,  B05D1/206 ,  B82Y40/00

    Abstract: An apparatus for forming thin organic films in­cludes a plurality of water tanks (11, 12, 13) each containing water. Monomolecular films of different amphiphatic organic molecules are developed on the sur­faces of the liquid in water tanks, respectively. A work (48) is dipped into and raised out of a desired water tank, by a driving device (50), in a direction substantially perpendicular to the liquid surface, so that the monomolecular film in the water tank is adhered on a work surface. The work is transported by a transporting device (52) to a position above another water tank, through an area lying above the water tanks. Then, the work is dipped into and raised out of the other water tank, by the driving device, in a direction substantially perpendicular to the monomolecular film, so that another monomolecular film is adhered on the monomolecular film already formed on the work surface.

    Abstract translation: 用于形成薄有机膜的装置包括多个含有水的水箱（11,12,13）。 不同亲水性有机分子的单分子膜分别在水箱中的液体表面上形成。 通过驱动装置（50）将工件（48）从基本上垂直于液面的方向浸入并升出所需的水箱，使得水箱中的单分子膜粘附在工作表面上 。 工作由运送装置（52）运送到位于另一水箱上方的位置，通过位于水箱上方的区域。 然后，通过驱动装置将工件从大致垂直于单分子膜的方向浸入并升出另一个水箱，使得另一个单分子膜粘附在已经形成在工作表面上的单分子膜上。

    Forming method of monomolecular laminated film
    120.
    发明专利
    Forming method of monomolecular laminated film 失效
    单分层膜的形成方法

    公开(公告)号：JPS60194517A

    公开(公告)日：1985-10-03

    申请号：JP4933784

    申请日：1984-03-16

    Applicant: Canon Inc

    Inventor： MIZOTA ETSUKO ,  MATSUDA HIROSHI ,  TOMITA YOSHINORI

    IPC: H01L51/05 ,  B01J19/00 ,  B05D1/20 ,  H01L21/312 ,  H01L21/368 ,  H01L49/02 ,  H01L51/40

    CPC classification number: B82Y30/00 ,  B05D1/206 ,  B82Y40/00

    Abstract: PURPOSE:To prevent the mixing of an impurity while improving and equalizing molecular-axis orientation by forming a monomolecular film on the interface between a water layer and an organic solvent layer of two phase systems, an upper layer thereof consists of water and a lower layer thereof an organic solvent, which is heavier than water and does not mix with water. CONSTITUTION:An organic solvent 12, which is heavier than water and does not mix with water, is introduced up to the center of a frame 15 fitted in approximately half height of a water tank 11 in the lower section of the water tank. The frame 15 functions as the change of an area 16 surrounded by the frame. When pure water 13 is added slowly onto the organic solvent 12, the interface 14 between the organic solvent and water is formed. When a material for a monomolecular film is dropped to the interface 16 surrounded by the frame 15, molecules form in lines while hydrophilic groups are directed toward the water layer on the interface 14 between the organic solvent and water. When the area surrounded by the frame 15 is reduced gradually, intermolecular interaction is intensified, and a two-element solid film, which has high molecular orientation and into which impurities do not mix, is formed. A monomolecular laminated film is obtained by transferring the monomolecular film 17 to the surface of a clean substrate as the state of the solid film is kept as it is.

    Abstract translation: 目的：为了通过在水相和两相体系的有机溶剂层之间的界面上形成单分子膜来改善和均匀分子轴取向，防止杂质的混合，其上层由水和下层组成 其为有机溶剂，其比水重，并且不与水混合。 构成：将比水重并且不与水混合的有机溶剂12引入装配在水箱下部的水箱11的大约一半高度的框架15的中心。 框架15用作由框架包围的区域16的改变。 当纯水13缓慢加入到有机溶剂12上时，形成有机溶剂和水之间的界面14。 当单分子膜的材料落到由框架15包围的界面16上时，分子形成一行，而亲水基团指向有机溶剂和水之间的界面14上的水层。 当由框架15包围的区域逐渐减小时，分子间相互作用增强，并且形成具有高分子取向且杂质不混合的双元素固体膜。 通过将固体膜的状态保持原样，将单分子膜17转印到清洁基板的表面，得到单分子层叠膜。

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