公开(公告)号：US07004016B1

公开(公告)日：2006-02-28

申请号：US09370302

申请日：1999-08-09

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: G01N29/00 ,  B08B3/00

CPC classification number: G01N27/06 ,  B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002 ,  G01N29/032 ,  G01N29/222 ,  G01N29/348 ,  G01N2291/02818 ,  G01N2291/02863 ,  G10K11/004 ,  Y10S134/902

Abstract: The invention provides systems, methods and apparatus for processing delicate parts within a process tank such as an ultrasonic tank. Typically, one or more transducers connect to the tank and respond to drive signals from a generator to produce ultrasound within process liquid within the tank. Specific features of the invention include: (1) a power up-sweep ultrasonic system for moving contaminants upwards within the tank by sweeping transducer drive signals from an upper frequency to a lower frequency without sweeping from the lower frequency to the upper frequency; (2) a multi-generator system for producing ultrasound at selected different frequencies within the tank by switching a common transducer bank to one of the generators in response to remote relays initiated by the user; (3) a probe sensing system for sensing process conditions within the tank including an enclosure for housing a sample liquid and one or more sensing transducers within the sample liquid, the transducers generating signals indicative of characteristics of the sample liquid, a subsystem analyzing the signals in feedback with the generator to modify process conditions; (4) variable voltage ultrasonic generator systems to accommodate varying world-wide voltage supplies; (5) a laminar process tank for efficiently pushing contaminants upwards in a tank; (6) a quick dump rinse tank including a pressure cavity to accelerate dumping processes; (7) an ultrasonic generating unit formed of a printed circuit board (PCB) and multiple transducers within the PCB; (8) an AC power system to produce an AC voltage at frequency f that is impressed across a capacitive element; and (9) various configurations of transducers, including acid-safe transducers, double-compression transducers, and transducers with increased reliability.

Abstract translation: 本发明提供了用于处理诸如超声波罐的处理罐内的精密部件的系统，方法和装置。 通常，一个或多个换能器连接到油箱并响应来自发电机的驱动信号，以在罐内的处理液体内产生超声波。 本发明的具体特征包括：（1）上行扫描超声波系统，用于通过从较高频率向较低频率扫描换能器驱动信号而不用从较低频率扫频到上频频段来将污染物向上移动; （2）多发生器系统，用于响应由用户发起的远程继电器，通过将公共换能器组切换到发电机中的一个，在罐内以选定的不同频率产生超声波; （3）用于感测罐内的工艺条件的探针感测系统，包括用于容纳样品液体和样品液体内的一个或多个传感传感器的外壳，换能器产生指示样品液体特性的信号，分析信号的子系统 用发电机反馈修改工艺条件; （4）可变电压超声波发生器系统，以适应不同的世界范围的电压源; （5）用于在罐中有效地将污染物向上推动的层流工艺罐; （6）快速倾倒冲洗槽，包括压力腔，以加速倾倒过程; （7）由印刷电路板（PCB）和PCB内的多个换能器构成的超声波发生单元; （8）交流电力系统，以产生跨过电容元件施加的频率f的交流电压; 和（9）各种配置的传感器，包括耐酸性传感器，双压缩传感器和具有更高可靠性的传感器。

公开(公告)号：US06946773B2

公开(公告)日：2005-09-20

申请号：US10814672

申请日：2004-03-30

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: B01J19/10 ,  B06B1/02 ,  B06B1/06 ,  G10K11/00 ,  H01L41/08

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  G10K11/004 ,  G10K11/006

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., “microsonic” frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation.

Abstract translation: 本发明利用某些夹紧的超声换能器的谐波在超声波罐的液体内产生超声波，并且在约100khz至350khz（即“微音”）频率的频率范围内。 将微声频率应用于液体优选地与换能器的谐波带宽内的微声频率的扫描同时发生，以减少或消除（a）液体内的驻波，（b）其他共振，（c）高能空化爆发，以及 （d）不均匀的声场，每个声场对于半导体晶片和其它微细零件的清洁和/或处理是不期望的。 本发明还可以驱动超声波换能器，使得施加的能量的频率在换能器的超声波带内具有扫描速率; 并且扫描速率也变化，使得扫描速率在操作期间基本上不恒定。

公开(公告)号：US20050109368A1

公开(公告)日：2005-05-26

申请号：US10936104

申请日：2004-09-08

Applicant: J. Goodson

Inventor： J. Goodson

IPC: B06B1/02 ,  B06B1/06 ,  B08B3/10

CPC classification number: B06B1/0611 ,  B06B2201/71

Abstract: A ultrasonic cleaning system includes a tank composed of quartz or silicon carbide and one or more sleeved ultrasonic transducers mounted to the tank. The sleeved ultrasonic transducer has a two-part head mass, including a threaded sleeve and an outer housing that are composed of different materials. The threaded sleeve is preferably a metal that provides superior thread strength for mating with a compression bolt, while the outer housing is preferably silicon carbide or other ceramic material that provides a good thermal expansion match to the tank to facilitate adhesive bonding of the transducer to the tank.

Abstract translation: 超声波清洗系统包括由石英或碳化硅组成的罐和安装在罐上的一个或多个套筒式超声换能器。 袖子超声波换能器具有两部分头部质量，包括由不同材料组成的螺纹套筒和外壳体。 螺纹套管优选地是提供用于与压缩螺栓配合的优异的螺纹强度的金属，而外壳体优选地是碳化硅或其它陶瓷材料，其提供与罐的良好的热膨胀匹配，以便于换能器粘合到 坦克。

公开(公告)号：US06538360B2

公开(公告)日：2003-03-25

申请号：US10029751

申请日：2001-10-29

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B06B1/0269 ,  B06B2201/71 ,  B08B3/12

Abstract: The invention utilizes multiple frequency sound in liquids to improve the cleaning or processing effect. The sound frequencies are produced in two or more non-overlapping continuous frequency ranges. The sound frequencies are controlled to change frequency within the frequency ranges and the sound frequencies are programmed by a digital code to jump amongst the frequency ranges. The sound frequencies may change continuously within the frequency ranges, and the sound frequencies may jump discontinuously from one frequency range to another. The frequency ranges may also be within different, non-contiguous and non-overlapping frequency bands.

公开(公告)号：US20030015039A1

公开(公告)日：2003-01-23

申请号：US10230285

申请日：2002-08-29

Applicant: LG Electronics Inc.

Inventor： Seung Taek Baek

IPC: G01N009/18

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

公开(公告)号：US06433460B1

公开(公告)日：2002-08-13

申请号：US09678576

申请日：2000-10-03

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  G10K11/004 ,  G10K11/006

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., “microsonic” frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. This reduces or eliminates resonances which are created by transducers operating with a single sweep rate. An ultrasound generator of the invention sometimes utilizes amplitude modulation (AM), and the AM frequency is swept over time so as to reduce resonances. AM control is preferably provided by selecting a portion of the rectified power line frequency. In applications which utilize multiple generators, multiple transducers, and one or more tanks, simultaneously, the invention synchronizes the operation of the generators to a common FM signal to reduce beat frequencies between generators. Each such generator can also be adjusted, through AM, to control the process characteristics within the associated tank. Two or more transducers are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducers are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth. In a single chamber ultrasound system, two or more generators, each operating or optimized to generate a different range of frequencies, are connected to a multiplexer; and the desired frequency range is selected, and hence the right generator, according to the cavitation implosion energy that is desired within the tank chemistry.

公开(公告)号：US20020100329A1

公开(公告)日：2002-08-01

申请号：US10105289

申请日：2002-03-26

Applicant: LG Electronics Inc.

Inventor： Seung Taek Baek

IPC: G01N029/00

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

Abstract translation: 振动检测装置包括在筒管的内周具有所需长度的移动路径的线轴， 可以通过外部施加的振动或施加到筒管的振动沿着线轴的内周沿着移动路径移动的芯体; 卷绕在筒管的外周的线圈，其电感根据芯的移动而变化。

公开(公告)号：US06288476B1

公开(公告)日：2001-09-11

申请号：US09370324

申请日：1999-08-09

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002 ,  G01N27/06 ,  G01N29/032 ,  G01N29/222 ,  G01N29/348 ,  G01N2291/02818 ,  G01N2291/02863 ,  G10K11/004 ,  G10K11/006

Abstract: The invention provides systems, methods and apparatus for processing delicate parts within a process tank such as an ultrasonic tank. Typically, one or more transducers connect to the tank and respond to drive signals from a generator to produce ultrasound within process liquid within the tank. Specific features of the invention include: (1) a power up-sweep ultrasonic system for moving contaminants upwards within the tank by sweeping transducer drive signals from an upper frequency to a lower frequency without sweeping from the lower frequency to the upper frequency; (2) a multi-generator system for producing ultrasound at selected different frequencies within the tank by switching a common transducer bank to one of the generators in response to remote relays initiated by the user; (3) a probe sensing system for sensing process conditions within the tank including an enclosure for housing a sample liquid and one or more sensing transducers within the sample liquid, the transducers generating signals indicative of characteristics of the sample liquid, a subsystem analyzing the signals in feedback with the generator to modify process conditions; (4) variable voltage ultrasonic generator systems to accommodate varying world-wide voltage supplies; (5) a laminar process tank for efficiently pushing contaminants upwards in a tank; (6) a quick dump rinse tank including a pressure cavity to accelerate dumping processes; (7) an ultrasonic generating unit formed of a printed circuit board (PCB) and multiple transducers within the PCB; (8) an AC power system to produce an AC voltage at frequency f that is impressed across a capacitive element; and (9) various configurations of transducers, including acid-safe transducers, double-compression transducers, and transducers with increased reliability.

Abstract translation: 本发明提供了用于处理诸如超声波罐的处理罐内的精密部件的系统，方法和装置。 通常，一个或多个换能器连接到油箱并响应来自发电机的驱动信号，以在罐内的处理液体内产生超声波。 本发明的具体特征包括：（1）上行扫描超声波系统，用于通过从较高频率向较低频率扫描换能器驱动信号而不用从较低频率扫频到上频频段来将污染物向上移动; （2）多发生器系统，用于响应由用户发起的远程继电器，通过将公共换能器组切换到发电机中的一个，在罐内以选定的不同频率产生超声波; （3）用于感测罐内的工艺条件的探针感测系统，包括用于容纳样品液体和样品液体内的一个或多个感测传感器的外壳，换能器产生指示样品液体特性的信号，分析信号的子系统 用发电机反馈修改工艺条件; （4）可变电压超声波发生器系统，以适应不同的世界范围的电压源; （5）用于在罐中有效地将污染物向上推动的层流工艺罐; （6）快速倾倒冲洗槽，包括压力腔，以加速倾倒过程; （7）由印刷电路板（PCB）和PCB内的多个换能器构成的超声波发生单元; （8）交流电力系统，以产生跨过电容元件施加的频率f的交流电压; 和（9）各种配置的传感器，包括耐酸性传感器，双压缩传感器和具有更高可靠性的传感器。

公开(公告)号：US06196059B1

公开(公告)日：2001-03-06

申请号：US09132617

申请日：1998-08-11

Applicant: Conrad Kösslinger ,  Erich Uttenthaler ,  Andreas Nitsch ,  Thomas Härle

Inventor： Conrad Kösslinger ,  Erich Uttenthaler ,  Andreas Nitsch ,  Thomas Härle

IPC: G01N2700

CPC classification number: H03H9/19 ,  B06B1/0692 ,  B06B2201/71 ,  G01H13/00 ,  G01N29/022 ,  G01N29/036 ,  G01N29/222 ,  G01N2291/015 ,  G01N2291/0222 ,  G01N2291/0256 ,  G01N2291/02809 ,  G01N2291/0426 ,  H03H3/02

Abstract: Disclosed is a piezoelectric resonator, a process for the fabrication thereof and its use as a sensor element, which implemented in a through-flow cell, is integratable in a measurement system for the determination of the concentration of a substance contained in a liquid and/or for the determination of the physical properties of the liquid. The piezoelectric resonator is designed plane and is provided on its surface with electric contact areas for an electrode and a counter electrode, which is connectable to a signal source as well as to a measurement device. For measuring, the piezoelectric resonator is brought into contact with the to-be-examined liquid on one side, with the resonator responding to the accumulation of the mass of the to-be-detected substance or to a change in the physical properties of the liquid by changing its resonance frequency and/or oscillation amplitude. The present invention is distinguished by the fact that the piezoelectric resonator is provided with contact electrode areas which is contactable from one single side of the resonator. The resonator is the heart piece of a sensor element, which is integrated in a through-flow cell. The through-flow cell us insertable module-like in a measurement arrangement for determining the concentration of a substance contained in a liquid and/or determining the physical properties of the liquid.

Abstract translation: 公开了一种压电谐振器，其制造方法及其作为传感器元件的用途，其在通流池中实现，可在测量系统中积分，用于确定液体中所含物质的浓度和/ 或用于确定液体的物理性质。 压电谐振器是设计平面的，并且在其表面上设置有用于电极和对电极的电接触区域，其可连接到信号源以及测量装置。 为了测量，压电谐振器在一侧与待检查液体接触，谐振器响应待检测物质的质量的积累或对物质的变化 通过改变其共振频率和/或振荡幅度来限制液体。本发明的特征在于压电谐振器设置有可从谐振器的一个单侧接触的接触电极区域。 谐振器是传感器元件的心脏片，其集成在通流池中。 在用于确定液体中所含物质的浓度和/或确定液体的物理性质的测量装置中，可插入模块状的通流池。

公开(公告)号：US5276376A

公开(公告)日：1994-01-04

申请号：US895624

申请日：1992-06-09

Applicant: Peter J. Puskas

Inventor： Peter J. Puskas

IPC: B06B1/02 ,  H03L5/02 ,  H01L41/08

CPC classification number: B06B1/0246 ,  H03L5/02 ,  B06B2201/71

Abstract: A generator for driving an ultrasonic transducer for use in ultrasonic cleaning. The generator is based on a voltage controlled oscillator which drives an output circuit which includes the ultrasonic transducer. The output circuit has a resonant frequency, and a resonance follower produces a control voltage which tunes the voltage controlled oscillator to the resonant frequency. Operating in conjunction with the automatic tuning elements is a constant power control which allows the user to set a desired power level, and monitors the actual output power by means of an output wattmeter circuit, to cause the actual output power to match the level selected by the user. The constant output power circuit is effective even during resonance tracking of the system, or during frequency modulation of the ultrasonic output energy.

Abstract translation: 一种用于驱动用于超声波清洗的超声换能器的发生器。 发电机基于压控振荡器，其驱动包括超声换能器的输出电路。 输出电路具有谐振频率，并且谐振跟随器产生将压控振荡器调谐到谐振频率的控制电压。 与自动调谐元件一起操作是恒定的功率控制，其允许用户设置期望的功率水平，并且通过输出功率计电路监视实际输出功率，以使实际的输出功率与由 用户。 恒定输出功率电路即使在系统的谐振跟踪期间或在超声波输出能量的频率调制期间也是有效的。