公开(公告)号：EP1588120A4

公开(公告)日：2006-12-20

申请号：EP04705643

申请日：2004-01-27

Applicant: ZETETIC INST

Inventor： HILL HENRY ALLEN

IPC: G01B9/04 ,  A45D8/00 ,  G01B9/02 ,  G02B17/08 ,  G02B21/00 ,  G02B21/14 ,  G02B27/01 ,  G02B27/10

CPC classification number: G01B9/02007 ,  A45D2008/006 ,  G01B9/02002 ,  G01B9/0201 ,  G01B9/02014 ,  G01B9/02022 ,  G01B9/02042 ,  G01B9/02079 ,  G01B9/04 ,  G01B2290/70 ,  G02B21/0056 ,  G02B21/14 ,  G02B27/017 ,  G02B27/108 ,  G02B27/126 ,  G02B27/143 ,  G02B27/144 ,  G02B27/145

Abstract: A confocal interferometry system (110) for making measurements of an object (60), the system including an array of pinholes (12) to receive a source beam (24) and act as an array of beamsplitters to separate the source beam into a reference beam and measurement beam.

公开(公告)号：EP1717546A1

公开(公告)日：2006-11-02

申请号：EP06113217.1

申请日：2006-04-27

Applicant: MITUTOYO CORPORATION

Inventor： Kawasaki, Kazuhiko ,  Suzuki, Yoshimasa ,  Sesko, David W

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02004 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometer comprises a wavelength-variable light source. A reference light and a measurement light are synthesized, and the synthesized light is split into a plurality of split lights. A certain phase difference is provided between the split lights through phase shifting optical members. A plurality of interference fringe images formed by the phase-shifted split lights are captured at an imaging unit. Biases, amplitudes and the amounts of phase shift of the interference fringes formed by the plurality of split lights are calculated, based on interference fringe intensities of the imaged interference fringes, which are obtained by disposing a calibrating substrate instead of the measuring object, varying the wavelength of the emitted light to plural values, and operating the imaging unit to capture a plurality of images of interference fringes obtained by the split lights.

Abstract translation: 干涉仪包括波长可变光源。 合成参考光和测量光，并将合成光分成多个分光。 通过相移光学部件在分光灯之间提供一定的相位差。 在成像单元处捕获由相移分裂光形成的多个干涉条纹图像。 基于成像干涉条纹的干涉条纹强度，计算由多个分光灯形成的干涉条纹的偏移量，振幅和相移量，其通过设置校准基板而不是测量对象而获得， 发射光的波长为多个值，并且操作成像单元以捕获通过分光获得的干涉条纹的多个图像。

公开(公告)号：EP1362252A4

公开(公告)日：2006-02-01

申请号：EP02708993

申请日：2002-01-11

Applicant: UNIV TEXAS

Inventor： DAVE DIGANT P ,  MILNER THOMAS E ,  TELENKOV SERGEY

IPC: A61B5/026 ,  G01B9/02 ,  G01N21/47 ,  G01P5/00 ,  G01P5/26 ,  G02B6/34 ,  G02B6/26 ,  A61B5/00 ,  G02B6/27

CPC classification number: G01P5/26 ,  A61B5/0066 ,  A61B5/0261 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02028 ,  G01B9/02045 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/4795 ,  G01P5/001

Abstract: One form of the present invention is a dual channel optical reflectometer composed of four separate paths (100, 102, 104 and 106), interconnected through a path coupler (108). The source path (100), optically connected to the path coupler (108), is comprised of a light source (110) that is optically coupled to a birefringent optical fiber (112). A depolarizer (114) is placed in-line in the optical fiber (112) and is of sufficient length (116) to insure complete decorrelation with independent phase components that are separated by virtue of the birefringent nature of the optical fiber (112). The reference path (102) is comprised of another birefringent optical fiber (118) that is optically connected to the path coupler (108) on one end, and has the other end optically aligned with a collimating lens (120) that collimates the light emitted from the second end of optical fiber (118) into a scanning delay line (122).

公开(公告)号：EP1604168A2

公开(公告)日：2005-12-14

申请号：EP04718544.2

申请日：2004-03-08

Applicant: ZYGO CORPORATION

Inventor： DE GROOT, Peter, J. ,  STONER, Robert ,  DE LEGA, Xavier, Colonna

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2290/70

Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

公开(公告)号：EP1590696A2

公开(公告)日：2005-11-02

申请号：EP04706072.8

申请日：2004-01-28

Applicant: Oraxion

Inventor： ROSAKIS, Ares, J. ,  OWEN, David ,  GLEDDEN, Stephen ,  OLSON, Sean

IPC: G02B9/02

CPC classification number: G01B9/02098 ,  G01B9/0201 ,  G01B11/2441 ,  G01B2290/35 ,  G01J9/0215

Abstract: Techniques and systems for using optical interferometers to obtain full-field optical measurements of surfaces, such as surfaces of flat panels, patterned surfaces of wafers and substrates. Applications of various shearing interferometers for measuring surfaces are described.

公开(公告)号：EP1588120A2

公开(公告)日：2005-10-26

申请号：EP04705643.7

申请日：2004-01-27

Applicant: Zetetic Institute

Inventor： HILL, Henry Allen

IPC: G01B9/02

CPC classification number: G01B9/02007 ,  A45D2008/006 ,  G01B9/02002 ,  G01B9/0201 ,  G01B9/02014 ,  G01B9/02022 ,  G01B9/02042 ,  G01B9/02079 ,  G01B9/04 ,  G01B2290/70 ,  G02B21/0056 ,  G02B21/14 ,  G02B27/017 ,  G02B27/108 ,  G02B27/126 ,  G02B27/143 ,  G02B27/144 ,  G02B27/145

Abstract: A confocal interferometry system (110) for making measurements of an object (60), the system including an array of pinholes (12) to receive a source beam (24) and act as an array of beamsplitters to separate the source beam into a reference beam and measurement beam.

公开(公告)号：EP1064517B1

公开(公告)日：2004-09-29

申请号：EP99911805.2

申请日：1999-03-19

Applicant: LITEF GmbH

Inventor： HANDRICH, Eberhard

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02007 ,  G01B2290/45

公开(公告)号：EP1451524A2

公开(公告)日：2004-09-01

申请号：EP02790004.2

申请日：2002-12-04

Applicant: Zygo Corporation

Inventor： DECK, Leslie, L.

IPC: G01B9/02

CPC classification number: G01B11/06 ,  G01B9/02004 ,  G01B9/0201 ,  G01B9/02021 ,  G01B9/02028 ,  G01B9/02057 ,  G01B9/02081 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometry method including: i) forming an optical interference image by combining different portions of an optical wave front (140) reflected from multiple surfaces (109); ii) recording (170) an interference signal at different locations of the optical interference image in response to varying a property of the optical wave front that causes pairs of the multiple surfaces that have different optical path separations to contribute differently to the interference signal; iii) transforming (180) the interference signal for at least one of the locations to produce a spectrum having a peak at a spectral coordinate corresponding to each pair of the multiple surfaces; and iv) identifying (190) the spectral coordinate of the peak corresponding to a selected pair of the multiple surfaces.

公开(公告)号：EP0971626A1

公开(公告)日：2000-01-19

申请号：EP98915128.7

申请日：1998-03-06

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY

Inventor： BOPPART, Stephen, A. ,  TEARNEY, Gary, J. ,  BOUMA, Brett, E. ,  BREZINSKI, Mark, E. ,  FUJIMOTO, James, G. ,  SWANSON, Eric, A.

IPC: A61B5/00

CPC classification number: A61B1/00188 ,  A61B1/00096 ,  A61B1/00172 ,  A61B1/00183 ,  A61B1/002 ,  A61B1/043 ,  A61B1/07 ,  A61B5/0066 ,  A61B5/0071 ,  A61B5/0075 ,  A61B5/0084 ,  A61B5/415 ,  A61B5/417 ,  A61B5/418 ,  A61B5/6852 ,  G01B9/0201 ,  G01B9/02022 ,  G01B9/0205 ,  G01B9/02063 ,  G01B9/02091 ,  G01B2290/65 ,  G11B2007/0013

Abstract: An imaging system includes forward directed optical coherence tomography (OCT), and non-retroreflected forward scanning OCT, and also interferometric imaging and ranging techniques and fluorescent, Raman, two-photon, and diffuse wave imaging can be used. The forward scanning mechanisms include a cam (70) attached to a motor (61), pneumatic devices (96), a pivoting device (90, 94), piezoelectric transducers (74), electrostatic driven slides (108) for substantially transverse scanning; counter-rotating prisms (144), and offset lenses (62) are used for arbitrary scanning. The imaging system of the invention is applied to hand held probes including probes integrated with surgical probes, scalpels, scissors, forceps and biopsy instruments. Hand held probes include forward scanning lasers. The imaging system is also applicable to laparoscopes and endoscopes for diagnostic and therapeutic intervention in body orifices, canals, tubes, ducts, vessels and cavities of the body.

公开(公告)号：EP0843152A2

公开(公告)日：1998-05-20

申请号：EP97110052.4

申请日：1997-06-19

Applicant: Hewlett-Packard Company

Inventor： Zorabedian, Paul

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02007 ,  G01B2290/60 ,  G01B2290/70

Abstract: The signal-to-noise ratio of the correction signal used for second harmonic interferometry is improved in two ways. First, an optical amplifier, tuned to the second harmonic frequency, is positioned in the optical path. Second, a doubling stage is positioned internal to the correction laser.

Abstract translation: 用于二次谐波干涉测量的校正信号的信噪比有两种改进。 首先，调整到二次谐波频率的光放大器位于光路中。 第二，加倍阶段位于校正激光器的内部。