公开(公告)号：EP1724550B1

公开(公告)日：2009-01-07

申请号：EP06114142.0

申请日：2006-05-18

Applicant: Mitutoyo Corporation

Inventor： Kawasaki, Kazuhiko ,  Suzuki, Yoshimasa ,  Sesko, David W

IPC: G01B11/24

CPC classification number: G01B9/02048 ,  G01B9/02004 ,  G01B9/02081 ,  G01B2290/45 ,  G01B2290/70

公开(公告)号：EP1717546A1

公开(公告)日：2006-11-02

申请号：EP06113217.1

申请日：2006-04-27

Applicant: MITUTOYO CORPORATION

Inventor： Kawasaki, Kazuhiko ,  Suzuki, Yoshimasa ,  Sesko, David W

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02004 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometer comprises a wavelength-variable light source. A reference light and a measurement light are synthesized, and the synthesized light is split into a plurality of split lights. A certain phase difference is provided between the split lights through phase shifting optical members. A plurality of interference fringe images formed by the phase-shifted split lights are captured at an imaging unit. Biases, amplitudes and the amounts of phase shift of the interference fringes formed by the plurality of split lights are calculated, based on interference fringe intensities of the imaged interference fringes, which are obtained by disposing a calibrating substrate instead of the measuring object, varying the wavelength of the emitted light to plural values, and operating the imaging unit to capture a plurality of images of interference fringes obtained by the split lights.

Abstract translation: 干涉仪包括波长可变光源。 合成参考光和测量光，并将合成光分成多个分光。 通过相移光学部件在分光灯之间提供一定的相位差。 在成像单元处捕获由相移分裂光形成的多个干涉条纹图像。 基于成像干涉条纹的干涉条纹强度，计算由多个分光灯形成的干涉条纹的偏移量，振幅和相移量，其通过设置校准基板而不是测量对象而获得， 发射光的波长为多个值，并且操作成像单元以捕获通过分光获得的干涉条纹的多个图像。

公开(公告)号：EP1717546B1

公开(公告)日：2008-10-01

申请号：EP06113217.1

申请日：2006-04-27

Applicant: Mitutoyo Corporation

Inventor： Kawasaki, Kazuhiko ,  Suzuki, Yoshimasa ,  Sesko, David W

IPC: G01B9/02

CPC classification number: G01B9/0201 ,  G01B9/02004 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70

公开(公告)号：EP1724550A1

公开(公告)日：2006-11-22

申请号：EP06114142.0

申请日：2006-05-18

Applicant: MITUTOYO CORPORATION

Inventor： Kawasaki, Kazuhiko ,  Suzuki, Yoshimasa ,  Sesko, David W

IPC: G01B11/24

CPC classification number: G01B9/02048 ,  G01B9/02004 ,  G01B9/02081 ,  G01B2290/45 ,  G01B2290/70

Abstract: A wavelength-variable light source is configured to emit a light with a wavelength (X), which is variable within a scan width (Δλ). An interferometer has a coherent length (ΔL), which is determinable from (Δλ) and (λ). A controller determines an appropriate magnitude of the scan width (Δλ) while a CCD camera captures a fringe image in an exposure time (Te), which is set longer than a time for wavelength scanning.

Abstract translation: 波长可变光源被配置为发射波长（X）的光，其在扫描宽度（“»）内是可变的。 干涉仪具有相干长度（“L”），可从（“»）和（”）确定。 当CCD照相机以比波长扫描时间长的曝光时间（Te）拍摄条纹图像时，控制器确定扫描宽度（“»”的适当大小）。