Method and apparatus for gas analysis
    112.
    发明公开
    Method and apparatus for gas analysis 失效
    气体分析方法与装置

    公开(公告)号:EP0405841A3

    公开(公告)日:1991-11-06

    申请号:EP90306799.9

    申请日:1990-06-21

    CPC classification number: G01N21/3504 G01N2201/128

    Abstract: There is provided a gas analyzer, including a radiation source (2), an analytical space (6) through which passes the gas to be analyzed, at least one detector (14) for detecting the intensity of radiation passing through the space, means (18,20,22,24) facilitating the alternating introduction, into the space (6), of the gas to be analyzed and a reference gas (RG) having a concentration located at least in the upper half of the range of concentrations to be measured by the gas analyzer. The analyzer further includes processing means (32), having memory means, to process signals originating in the detector (14), the memory means adapted to store in a first mode of operation signals representing instantaneous intensity values of the detected source and, in a second mode of operation, to store signals representing intensity values obtained when the analytical space (6) is filled with the reference gas, circuit means for comparing the instantaeous values with the reference value, and indicator means (38) for indicating concentration. A method for analyzing gases to establish their concentration is also provided.

    Abstract translation: 提供了一种气体分析器,包括辐射源(2),通过待分析气体的分析空间(6),用于检测通过该空间的辐射强度的至少一个检测器(14) 18,20,22,24)有助于将待分析气体交替引入空间(6),以及浓度至少在浓度范围的上半部分内的参考气体(RG)为 由气体分析仪测量。 分析器还包括具有存储装置的处理装置(32),用于处理源自检测器(14)的信号,该存储装置适于以表示所检测的源的瞬时强度值的第一操作模式存储信号,并且在 第二操作模式,用于存储表示当分析空间(6)填充有参考气体时获得的强度值的信号,用于将即时值与参考值进行比较的电路装置和用于指示浓度的指示装置(38)。 还提供了分析气体以确定其浓度的方法。

    Apparatus and method for measuring dark and bright reflectances of sheet material
    113.
    发明公开
    Apparatus and method for measuring dark and bright reflectances of sheet material 失效
    用于测量材料的暗和亮度反射的装置和方法

    公开(公告)号:EP0340437A3

    公开(公告)日:1991-03-20

    申请号:EP89105033.8

    申请日:1989-03-21

    Inventor: Burk, Gary Neil

    Abstract: Apparatus (10) and methods for measuring dark and bright reflectances of translucent sheet material (2) are disclosed. The apparatus (10) comprises first optical means for illuminating one side of the sheet material (2) with a source of electromagnetic radiation. A portion of the radiation is transmitted through the sheet material (2) and another portion of the radiation is reflected by the sheet material. The apparatus (10) also comprises optical gating means (30) that is positioned adjacent the other side of the sheet material (2) in a fixed position relative to the first optical means. The optical gating means (30) absorbs substantially all of the transmitted portion of the radiation when switched to a dark state and reflects substantially all of the transmitted portion of the radiation back through the sheet material (2) when switched to a bright state. The apparatus (10) further comprises second optical means for collecting the reflected portion of the radiation and the portion of the trasmitted portion of the radiation reflected by the optical gating means (30) and retransmitted through the sheet material (2) to provide a total reflectance. The total reflectance has a dark reflectance intensity when the optical gating means (30) is in the dark state and a bright reflectance intensity when the optical gating means is in the bright state. The apparatus also comprises sensing means (60), responsive to radiation collected by the second optical means, for providing a dark signal having a magnitude corresponding to the dark reflectance intensity and a bright signal having a magnitude corresponding the the bright reflectance intensity. The dark and bright signals can be incorporated in known formulae to compute values for quality attributes of the sheet material (2) including opacity and color.

    Verfahren und Vorrichtung zur Messung der optischen Eigenschaften von dünnen Schichten
    115.
    发明公开
    Verfahren und Vorrichtung zur Messung der optischen Eigenschaften von dünnen Schichten 失效
    用于测量薄层的光学性能的方法和装置。

    公开(公告)号:EP0290657A1

    公开(公告)日:1988-11-17

    申请号:EP87107037.1

    申请日:1987-05-15

    CPC classification number: G01N21/59 C23C14/54 G01N21/8422 G01N2201/128

    Abstract: Verfahren zur Messung der optischen Eigenschaften von dünnen Schichten während ihres Aufbaus in Vakuum-Beschichtungsanlagen (1). Dabei wird mindestens ein Meßobjekt (6) durch einen stationären Meßlicht­strahl (14) geführt und das Transmissionsverhalten des Meßobjekts (6) meßtechnisch ausgewertet. Durch Referenz­messungen in zeitlichen Abständen wird jeweils ein Bezugspunkt für die Messungen festgelegt. In der Bewegungsbahn des Meßobjekts (6) sind außerdem mindestens eine lichtundurchlässige Meßzone (7) und mindestens eine den Meßlichtstrahl nicht ab­schwächende Meßzone (8) angeordnet und in einer Rechen­einheit (21) wird der Quotient aus dem Meßwert des Meß­objekts (6), vermindert um den Meßwert der undurchlässigen Meßzone (7), und aus dem Meßwert der nicht abschwächenden Meßzone (8), vermindert um den Meßwert der undurchlässigen Meßzone (7), gebildet.

    Abstract translation: 用于测量薄层的光学性质,因为它们是在真空镀膜装置(1)建立的方法。 的至少一个的TestObject(6)通过一个固定的测量光束(14)和(6)是利用测量技术评估测试对象的传输响应引导。 用于测量的基准点被建立在从在时间上隔开的参考测量每一种情况下。 更完了,至少一个测量区(7)不透光的和至少一个测量区(8)做不会衰减测量光束在所述测试对象(6)的行进轨道布置,和的商 测试对象(6)的测量值,由所述不透明测量区(7)的测定值减小,并且非衰减测量区(8)的测量值,由所述不透明测量区的测量值减少的 (7)在一个计算单元(21)形成。

    光學自動測定方法
    116.
    发明专利
    光學自動測定方法 有权
    光学自动测定方法

    公开(公告)号:TW575728B

    公开(公告)日:2004-02-11

    申请号:TW090118418

    申请日:2001-07-27

    IPC: G01N

    Abstract: 在依據本發明之一種光學自動測定方法中,將可移動反射板6移動至置於光軸下,光接收部位3b可接收自光投射部位3a所投射之經由可移動反射板6、固定反射板11、及可移動反射板6反射之光線,而將可移動反射板6自光軸移開且設定一基準件8在樣本級台10上,光接收部位3b可接收自光投射部位3a所投射之經由基準件8反射的光線,從而判定在所接收光線之強度間的比率。於樣本測定期間,將可移動反射板6移動至置於光軸下,光接收部位3b可接收來自光投射部位3a所投射之經由可移動反射板6、固定反射板11、及可移動反射板6反射之光線,因此,前述比率與因而接收之光線強度被使用以估計將以基準件測定之光線強度,所估計之光線強度被使用以校正經由一樣本所接收之光線強度。

    Abstract in simplified Chinese: 在依据本发明之一种光学自动测定方法中,将可移动反射板6移动至置于光轴下,光接收部位3b可接收自光投射部位3a所投射之经由可移动反射板6、固定反射板11、及可移动反射板6反射之光线,而将可移动反射板6自光轴移开且设置一基准件8在样本级台10上,光接收部位3b可接收自光投射部位3a所投射之经由基准件8反射的光线,从而判定在所接收光线之强度间的比率。于样本测定期间,将可移动反射板6移动至置于光轴下,光接收部位3b可接收来自光投射部位3a所投射之经由可移动反射板6、固定反射板11、及可移动反射板6反射之光线,因此,前述比率与因而接收之光线强度被使用以估计将以基准件测定之光线强度,所估计之光线强度被使用以校正经由一样本所接收之光线强度。

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