Manufacturing method of micro machine

    公开(公告)号:JP2004314289A

    公开(公告)日:2004-11-11

    申请号:JP2004068325

    申请日:2004-03-11

    CPC classification number: H03H3/0072 B81B7/0012

    Abstract: PROBLEM TO BE SOLVED: To seal a part of an oscillator of a micro machine by carrying out sacrifice layer etching, and to remove and seal a sacrifice layer without requiring a special packaging technology even in that case.
    SOLUTION: In the manufacturing method of the micro machine 1 equipped with the oscillator 4 comprises steps of: forming the sacrifice layer around a moving portion of the oscillator 4; covering the sacrifice layer with an over coat film 8 and forming a penetrating port 10 leading to the sacrifice layer on the over coat film 8; carrying out the sacrifice layer etching for removing the sacrifice layer by using the penetrating port 10 so as to form a space around the moving portion; and sealing the penetrating port 1 by conducting deposition processing under a reduced pressure after sacrifice layer etching.
    COPYRIGHT: (C)2005,JPO&NCIPI

    Microelectromechanical system (mems) element
    122.
    发明专利

    公开(公告)号:JP2004243462A

    公开(公告)日:2004-09-02

    申请号:JP2003035471

    申请日:2003-02-13

    Abstract: PROBLEM TO BE SOLVED: To adjust the natural frequency (resonance frequency) of the vibrator in a MEMS element having a beam type vibrator.
    SOLUTION: The MEMS element is provided with the beam type vibrator 15 having integrated rising portions or falling portions 15a, 15b so as to be opposed to a fixed side electrode 13. The natural frequency of the beam 15 is adjusted by controlling the vibration of the rising portions or falling portions 15a, 15b of the beam 15 by electrostatic force (electrostatic force caused by control electrodes 17A, 17B) or mechanical fixing force.
    COPYRIGHT: (C)2004,JPO&NCIPI

    Micromachine and its manufacturing method

    公开(公告)号:JP2004181567A

    公开(公告)日:2004-07-02

    申请号:JP2002350639

    申请日:2002-12-03

    CPC classification number: H03H3/0072 H03H9/2405 H03H2009/02511

    Abstract: PROBLEM TO BE SOLVED: To provide a micromachine for a high frequency filter having a high Q value, and a higher frequency band.
    SOLUTION: This micromachine 1 has an output electrode 7 arranged on a base board 5, an interlayer insulating film 9 arranged in a state of covering the base board 5 and having a hole pattern 9a with the output electrode 7 as a bottom part and a belt-like vibrator electrode 11 arranged on the interlayer insulating film 9 so as to cross an upper part with the inside of the hole pattern 9a as a space part A. The vibrator electrode 11 is characterized by being arranged in a recessed shape on the hole pattern 9a side along a side wall of the hole pattern 9a.
    COPYRIGHT: (C)2004,JPO&NCIPI

    Micromachine and its manufacturing method

    公开(公告)号:JP2004058228A

    公开(公告)日:2004-02-26

    申请号:JP2002221433

    申请日:2002-07-30

    CPC classification number: H03H9/2463 H03H3/0072

    Abstract: PROBLEM TO BE SOLVED: To provide a micromachine for a high frequency filter having a high Q value and a higher frequency band.
    SOLUTION: This micromachine 20 is provided with an input electrode 7b, an output electrode 7a and a support electrode 7c mounted on a substrate 4, and a belt-shaped vibrator electrode 15 formed by laying a beam (vibration part) 15a whose both side ends are supported on the input electrode 7b and the substrate 4 via the support electrode 7c with a space part A formed in the upper part of the output electrode 7a. Both side end parts of the vibrator electrode 15 are completely fixed to the input electrode 7b and the support electrode 7c in the whole surface from the tip to the beam 15a.
    COPYRIGHT: (C)2004,JPO

    ROTATIONAL SPEED INCREASING APPARATUS

    公开(公告)号:JPH10331928A

    公开(公告)日:1998-12-15

    申请号:JP13969197

    申请日:1997-05-29

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To secure operation for transmitting rotation of a driving shaft to a rotary shaft in a rotational operating unit with simple arrangement without requiring provision of another driven shaft or the like by increasing a speed of the rotation of the driving shaft and transmitting the rotation, and increasing a speed of rotation of a driven shaft over at least two stages. SOLUTION: A rotational speed increasing apparatus comprises: a driving shaft 41; a driven shaft 42; a large-diameter pulley 45 fixed to the driving shaft 41 and rotated together with the driving shaft 41 by outside rotational drive force; a small-diameter pulley 48 fixed to the driven shaft 42, to which rotation of the large-diameter pulley 45 is transmitted, and rotated together with the driven shaft 42; another large-diameter pulley 46 fixed to the driven shaft 42 and rotated together with the driven shaft 42; a further large-diameter pulley 47 rotatable with respect to the driving shaft 41 in engagement with the driving shaft 41 and rotated to rotationally increase a speed of a rotary shaft 34 of AC generators 32A, 32B; and a small-diameter pulley 49 rotatable with respect to the driving shaft 41 in engagement with the driving shaft 41 and connected to the large-diameter pulley 47, to which rotation of the large-diameter pulley 46 is transmitted for rotation, for rotating the large-diameter pulley 47.

    POWER SUPPLY CONTROL DEVICE AND ELECTRONIC EQUIPMENT

    公开(公告)号:JPH09245592A

    公开(公告)日:1997-09-19

    申请号:JP5433696

    申请日:1996-03-12

    Applicant: SONY CORP

    Abstract: PROBLEM TO BE SOLVED: To find and repair failures, and to control the power supply to an electronic equipment without troublesome works such as replacement of a battery. SOLUTION: When the vibration over the prescribed magnitude is generated, a steel ball 100 set on a steel ball receiving saucer is dropped, and collided with a hook lever 40 through a steel ball guide tube 12. By the collision, the hook lever 40 is turned in the direction of the arrow R2, and a rod fixing claw is detached from a notch 32 in a contact plate rod 30. The contact plate rod 30 is pushed in the direction of the arrow X2 by a rod push-out spring 33, and a contact plate 31 is detached from an electricity conductive plate 25.

    TELEVISION SIGNAL TRANSMITTER
    128.
    发明专利

    公开(公告)号:JPH0332291A

    公开(公告)日:1991-02-12

    申请号:JP16728189

    申请日:1989-06-29

    Applicant: SONY CORP

    Abstract: PURPOSE:To transmit a television signal with wide band width from a satellite to a CATV system by simple configuration without being degraded by converting the frequency of a sound signal to a frequency band different from that of a video signal and sending the signal. CONSTITUTION:The television signals of plural channels to be sent from the satellite are received and FM modulation is executed to the video signals in the respective received television signals by channel units 31, 32.... Afterwards, AM modulation to the frequency band at prescribed intervals is executed to the video signals and the signals are sent. Simultaneously, the frequencies of the sound signals in the respective received television signals are converted to the frequency band different from the frequency band, in which the video signals are sent, by the channel units 31, 32... and the sound signals are sent. Thus, the configuration of the CATV system can be simplified to transmit the sound signals to be transmitted from a satellite 1 to each terminal equipment 50 side without degradating the sound signals.

    DATA TRANSMISSION EQUIPMENT
    129.
    发明专利

    公开(公告)号:JPH02274035A

    公开(公告)日:1990-11-08

    申请号:JP9618489

    申请日:1989-04-15

    Applicant: SONY CORP

    Abstract: PURPOSE:To easily transmit scramble information even when a voice mode is different by superposing the scramble information of digital data on the common free area of plural transmission formats corresponding to plural voice modes. CONSTITUTION:Scramble information SDA, SIF of digital data DADO is superposed to the common free area DTUSE of plural transmission formats FMTA, FMTB corresponding to plural voice modes. Accordingly, in a transmission side 2, the scramble information SDA, SIF can be superposed by a common processing means, and also, in a reception side 4, as well, the scramble information SDA, SIF can be obtained by a common processing produce. In such a manner, even when the voice mode is different, the scramble information SDA, SIF can be easily transmitted.

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