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    SWIRL FLOW OZONE GENERATION
    123.
    发明公开
    SWIRL FLOW OZONE GENERATION 失效
    生产电涡流臭氧的

    公开(公告)号：EP0717719A1

    公开(公告)日：1996-06-26

    申请号：EP94923961.0

    申请日：1994-07-19

    Applicant: Kamyr, Inc.

    Inventor： KARLSON, Eskil, L. ,  CHAMBLEE, J., Wayne

    IPC: C01B13

    CPC classification number: C01B13/11 ,  C01B2201/14 ,  C01B2201/60 ,  C01B2201/70 ,  Y10S422/907

    Abstract: Ozone is generated from an oxygen-containing gas utilizing a tube-type ozone generator at significantly greater power efficiency. The oxygen is introduced into the annular passageway between the electrodes of the tube-type ozone generator at an angle (e.g. about 45-90 DEG ) so that it swirls in a cyclonic flow path as it travels from one end of the annular passageway to the other. The amount of power consumed to produce a gas having about 8 % ozone is roughly half of the power needed if the same conditions are applied but the oxygen gas is introduced conventionally (without swirling action, so that it travels along the dimension of elongation of the passageway). The swirling action also allows a higher concentration of ozone (e.g. 10 % or more) to be achieved in the product gas compared to the same conditions when no swirling is employed. Cooling fluid, such as nitrogen gas, may be passed through an interior passageway and outside the outer electrode either co-current or countercurrent to the general direction of oxygen gas flow.

    Method and apparatus for generating ozone and methods of its use
    124.
    发明公开
    Method and apparatus for generating ozone and methods of its use 失效
    对于臭氧的生成和使用该装置的方法的方法和装置

    公开(公告)号：EP0703187A2

    公开(公告)日：1996-03-27

    申请号：EP95113254.7

    申请日：1995-08-23

    Applicant: EBARA CORPORATION ,  KABUSHIKI KAISHA TOSHIBA

    Inventor： Harada, Minoru ,  Shinjo, Ryoichi ,  Tsujimura, Manabu ,  Nakata, Rempei ,  Miyazaki, Kunihiro ,  Kaji, Naruhiko ,  Nakano, Yutaka

    IPC: C01B13/11 ,  C01B13/10

    CPC classification number: C23C16/448 ,  C01B13/10 ,  C01B13/11 ,  C01B2201/60 ,  C23C8/12 ,  C23C16/402 ,  C23C16/4402

    Abstract: Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices.
    Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10 - 20 vol% of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.

    低温プラズマオゾン発生器
    126.
    发明专利
    低温プラズマオゾン発生器 审中-公开

    公开(公告)号：JP2018531211A

    公开(公告)日：2018-10-25

    申请号：JP2018537737

    申请日：2016-10-06

    Applicant: アクアレンス リミティド イスラエル

    Inventor： ユバール ロダン ,  メイア バダロブ ,  モティー ビゼル

    IPC: H01T19/00 ,  A20 ,  C07C275 ,  C01B13/11

    CPC classification number: C01B13/115 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/32 ,  C01B2201/60 ,  C01B2201/62 ,  C01B2201/64 ,  C01B2201/66 ,  H05H1/2406 ,  H05H1/46 ,  H05H2001/466 ,  H05H2240/20 ,  H05H2245/121

    Abstract: 本発明は、低温プラズマオゾン発生器であって、流入ガスポートと、少なくとも1つの入側電極であって、当該入側電極が、当該入側電極の実質的に周辺部に複数の孔を有しており、前記複数の周辺部の孔が前記流入ガスポートと流体連通しており、前記複数の周辺部の孔が、前記乾燥ガスが前記周辺部の孔を通過するのを可能にするように形成されている、少なくとも1つの入側電極と、少なくとも1つの出側電極であって、当該出側電極が、当該出側電極の中心部に少なくとも1つの孔を有しており、前記少なくとも1つの孔が、ガスが前記孔を通過するのを可能にするように形成されており、前記入側電極と前記出側電極とが、前記入側電極と前記出側電極との間に前記高電圧交流電流を維持するように形成されている、少なくとも1つの出側電極と、前記入側電極と前記出側電極との間の少なくとも1つのスペーサであって、当該スペーサが、前記入側電極と前記出側電極との間に一定幅のギャップを維持するように形成されている、少なくとも1つのスペーサと、流出ポートとを含む、低温プラズマオゾン発生器を提供する。

    Nitrogen suppression ozone generator and nitrogen suppression ozone generation method
    129.
    发明专利
    Nitrogen suppression ozone generator and nitrogen suppression ozone generation method 有权
    氮气抑制臭氧发生器和氮气抑制臭氧发生方法

    公开(公告)号：JP2011063512A

    公开(公告)日：2011-03-31

    申请号：JP2011001201

    申请日：2011-01-06

    Applicant: Toshiba Mitsubishi-Electric Industrial System Corp ,  東芝三菱電機産業システム株式会社

    Inventor： TABATA YOICHIRO ,  OKIHARA YUJIRO ,  ISHIKAWA MASAYUKI ,  NISHITSU TETSUYA ,  YOTSUMOTO HATSUO

    IPC: C01B13/11 ,  B01J35/00 ,  B01J35/02 ,  H01T19/00 ,  H01T23/00

    CPC classification number: C01B13/11 ,  B01J35/004 ,  C01B2201/12 ,  C01B2201/32 ,  C01B2201/34 ,  C01B2201/60 ,  C01B2201/64 ,  C01B2201/70 ,  C01B2201/80 ,  C01B2201/82 ,  C01B2201/90

    Abstract: PROBLEM TO BE SOLVED: To obtain a nitrogen suppression ozone generator which promotes an ozone production reaction by adding a micro amount of nitrogen gas.
    SOLUTION: A photocatalytic substance having a band gap of 2.0-3.6 eV is prepared in a dielectric or an electrode of a discharge region, and ozone gas is generated by applying an AC voltage from a power source and injecting discharge electric power to the discharge region, supplying oxygen gas to the discharge region together with nitrogen gas which is supplied to the oxygen gas for promoting an ozone production reaction in the range of 10-500 ppm, dissociating the oxygen gas which passes through the discharge region into oxygen atoms by the interaction between discharge light having a light wavelength of at least 344-620 nm which is emitted by an electric discharge and the photocatalytic substance, and bonding the oxygen gas with the dissociated oxygen atoms.
    COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 解决的问题：为了获得通过添加微量的氮气来促进臭氧产生反应的氮气抑制臭氧发生器。 解决方案：在放电区域的电介质或电极中制备带隙为2.0-3.6eV的光催化物质，并且通过从电源施加交流电压并将放电电力注入到臭氧气体中来产生臭氧气体 放电区域，与供给到氧气的氮气一起向排出区域供给氧气，以促进10-500ppm的臭氧产生反应，将通过排放区域的氧气解离成氧原子 通过由放电发出的具有至少344-620nm的光波长的放电光与光催化物质之间的相互作用，以及将氧气与解离的氧原子结合。 版权所有（C）2011，JPO＆INPIT

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