Salt vapor atmosphere treatment of quartz crystal granules
    122.
    发明授权
    Salt vapor atmosphere treatment of quartz crystal granules 失效
    石墨晶体颗粒的盐水蒸气处理

    公开(公告)号:US3850602A

    公开(公告)日:1974-11-26

    申请号:US31631272

    申请日:1972-12-18

    Inventor: BRUNING R

    Abstract: Bubble-free and OH-free quartz glass is made from granular quartz crystal by doping quartz crystal granules with a salt whose cation is selected from the group of lithium, sodium, potassium, magnesium, calcium, strontium and silver, and having, at temperatures ranging from 800* to 1,700*C., a vapor pressure of at least 5 mm Hg, preferably of more than 100 mm Hg, or with a mixture of such salts, in a quantity corresponding at least to the OH content of the quartz crystal granules, stirring and doped quartz crystal granules for a period of at least 30 seconds in a reaction chamber heated to a temperature ranging from 800* to 1,700*C. and having an atmosphere enriched with a salt vapor, flooding the stirred quartz crystal granules with a water vaporfree gas at a temperature ranging from 800* to 1,700*C., and melting the gas-flooded quartz crystal granules in a water-vaporfree atmosphere in a known melting furnace.

    Abstract translation: 通过掺杂具有阳离子选自锂,钠,钾,镁,钙,锶和银的盐的盐的石英晶体颗粒,由颗粒状石英晶体制成无气泡和无OH的石英玻璃,并且在温度 800至1700℃,蒸汽压至少为5mmHg,优选大于100mm Hg,或与这些盐的混合物,其量至少对应于石英晶体的OH含量 颗粒,搅拌和掺杂的石英晶体颗粒在加热至800至1700℃的反应室中至少30秒的时间,并且具有富含盐蒸气的气氛,将搅拌的石英晶体颗粒浸入 在800〜1700℃的温度范围内的无水蒸汽气体,并在已知的熔融炉中在无水蒸汽气氛中熔化气体淹没的石英晶体颗粒。

    Method for reproducing quartz glass jig

    公开(公告)号:JP5001524B2

    公开(公告)日:2012-08-15

    申请号:JP2005132925

    申请日:2005-04-28

    Abstract: To provide a technique with which a quartz glass jig and a doped quartz glass jig are regenerated by completely removing the impurities which are attached to the surface and the impurities which have diffused into the interior from quartz glass jigs which have been used in semiconductor production processes and then carrying out working repair and removing the contamination from the working processes as well. After use, the impurities are removed from the aforementioned quartz glass jigs in the said purification treatment process which includes a purification treatment process in which the quartz glass jigs are subjected to a purification treatment in a gaseous atmosphere which includes a halogen element at a temperature within the region above a prescribed temperature.

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