SILICA VESSEL FOR DRAWING UP MONOCRYSTALLINE SILICON AND METHOD FOR PRODUCING SAME
    128.
    发明公开
    SILICA VESSEL FOR DRAWING UP MONOCRYSTALLINE SILICON AND METHOD FOR PRODUCING SAME 审中-公开
    石英玻璃坩埚进行繁殖单晶硅及其制造方法

    公开(公告)号:EP2712946A1

    公开(公告)日:2014-04-02

    申请号:EP13791676.3

    申请日:2013-02-19

    Abstract: The present invention provides a single-crystal silicon pulling silica container comprising: a transparent layer made of transparent silica glass in the inner side of the silica container; and an opaque layer made of opaque silica glass containing gaseous bubbles in the outer side of the silica container, wherein the transparent layer is constituted of a high-OH group layer that is placed on an inner surface side of the silica container and contains the OH group at a concentration of 200 to 2000 ppm by mass and a low-OH group layer that has the OH group concentration lower than that of the high-OH group layer, and the high-OH group layer contains Ba at a concentration of 50 to 2000 ppm by mass. As a result, in a case where the silica container is used for pulling single-crystal silicon, there can be provided the silica container that can greatly improve etching resistance (corrosion resistance) of the container inner surface to silicon melt when the entire inner surface made of transparent silica glass of the container is finely crystallized (turned to glass ceramics) in a short time after start of using the container and also provided a method for producing such a silica container.

    Abstract translation: 本发明提供一种单晶硅提拉用二氧化硅容器,其包括:在二氧化硅容器的内侧由透明的石英玻璃构成的透明层; 并制成不透明的石英玻璃中含有二氧化硅容器,worin透明层构成的高OH基层的外侧气泡的不透明层并在二氧化硅容器的内表面侧上放置并包含OH 在200〜2000质量ppm以下,低OH基团层的浓度组确实具有OH基团浓度比该高-OH基层低,和高OH层含有Ba中的50至浓度 2000质量ppm。 其结果是,在将二氧化硅容器用于提拉单晶硅的情况下,可以提供的二氧化硅容器确实可以大大改善蚀刻到硅熔体中的容器内表面的电阻(耐腐蚀性)当整个内表面 使用容器的开始之后进行,在短时间内将容器微细结晶的透明石英玻璃(转向玻璃陶瓷)的并由此的制造寻求的二氧化硅容器提供了一种方法。

    QUARZGLASKÖRPER SOWIE VERFAHREN UND GELKÖRPER ZUR HERSTELLUNG EINES QUARZGLASKÖRPERS
    129.
    发明公开
    QUARZGLASKÖRPER SOWIE VERFAHREN UND GELKÖRPER ZUR HERSTELLUNG EINES QUARZGLASKÖRPERS 审中-公开
    石英玻璃体及其制造方法和凝胶体QUARZGLAS BODY

    公开(公告)号:EP2598449A1

    公开(公告)日:2013-06-05

    申请号:EP11723354.4

    申请日:2011-05-13

    Abstract: The invention relates to a method for producing a quartz glass body (Q) from a gel body, wherein the gel body generated from a colloidal suspension (S) is at least formed and compressed into the quartz glass body (Q). According to the invention, displacement bodies (V) are added to the colloidal suspension (S) prior to gelating into the gel body, and are completely removed from the gel body after gelating, wherein hollow spaces (H) are generated at the positions of the removed displacement bodies (V), so that a translucent or opaque quartz glass body (Q) is generated. The invention further relates to a gel body for producing a quartz glass body (Q), wherein displacement bodies (V) are introduced into the gel body that can be completely removed from the gel body, so that hollow spaces (H) arise at the positions of the displacement bodies (V). The invention further relates to a quartz glass body comprising vacuoles or hollow spaces (H) filled with gas.

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