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    광전자 분광 장치 및 그 사용 방법
    121.
    发明公开
    광전자 분광 장치 및 그 사용 방법 有权
    一种光电子能谱仪及其使用方法

    公开(公告)号：KR1020080064844A

    公开(公告)日：2008-07-09

    申请号：KR1020087010109

    申请日：2006-09-08

    Applicant: 리베라 인코퍼레이티드

    Inventor： 쉴러브루노더블유 ,  리드데이비드에이

    IPC: G01J3/42 ,  H01L21/66

    CPC classification number: G01N23/2273 ,  G01N2223/085 ,  G01N2223/6116 ,  H01J2235/08

    Abstract: According to one aspect of the present invention, a substrate processing system is provided. The system may include a chamber wall enclosing a chamber, a substrate support positioned within the chamber to support a substrate, an electromagnetic radiation source to emit electromagnetic radiation onto the substrate on the substrate support, the electromagnetic radiation causing photoelectrons to be emitted from a material on the substrate, an analyzer to capture the photoelectrons emitted from the substrate, and a magnetic field generator to generate a magnetic field within the chamber and guide the photoelectrons from the substrate to the analyzer.

    Abstract translation: 根据本发明的一个方面，提供了一种基板处理系统。 该系统可以包括封闭室的室壁，位于腔室内以支撑衬底的衬底支撑件，用于向衬底支撑件上的衬底上发射电磁辐射的电磁辐射源，引起光电子从材料发射的电磁辐射 在基板上，分析器捕获从基板发射的光电子，以及磁场发生器，以在室内产生磁场，并将光电子从基板引导到分析器。

    연Ｘ선을 이용한 정전기 제거장치
    122.
    发明公开
    연Ｘ선을 이용한 정전기 제거장치 失效
    使用软X射线去除静电的装置

    公开(公告)号：KR1020010009566A

    公开(公告)日：2001-02-05

    申请号：KR1019990027985

    申请日：1999-07-12

    Applicant: 한국산업안전보건공단

    Inventor： 이형수 ,  이동훈

    IPC: H05G1/08

    CPC classification number: H05F3/06 ,  H01J35/025 ,  H01J2235/08 ,  H05G1/02

    Abstract: PURPOSE: A static electricity removing apparatus is provided to prevent a fracture of semiconductors, a fire or an explosion caused by static electricity or electrification of static electricity by removing static electricity from electrified powder. CONSTITUTION: A static electricity removing apparatus comprises a head unit(100) for generating a soft X ray, a soft X ray protecting unit(200) for wrapping the head unit(100) to prevent the X ray from leaking from the head unit(100), and a power control unit(300). The power control unit(300) is electrically connected to the head unit(100) and the soft X ray protecting unit(200) to suitably control the generation of the soft X ray from the head unit(100). The X ray protecting unit(200) is made of a steel plate with a thickness of 1mm. An interlock switch(220) controls the power control unit(200), and a door(210) controls the interlock switch(220) on/off. If the door(200) is open, the head unit(100) does not generate the X ray.

    Abstract translation: 目的：提供静电除去装置，通过从带电粉末中除去静电，防止半导体的断裂，火灾或静电引起的静电或静电带电。 构成：静电除去装置包括用于产生软X射线的头单元（100），用于包封头单元（100）以防止X射线从头单元泄漏的软X射线保护单元（200） 100）和功率控制单元（300）。 电源控制单元（300）电连接到头单元（100）和软X射线保护单元（200），以适当地控制来自头单元（100）的软X射线的产生。 X射线保护单元（200）由厚度为1mm的钢板制成。 互锁开关（220）控制动力控制单元（200），门（210）控制互锁开关（220）的开/关。 如果门（200）打开，则头单元（100）不产生X射线。

    Electromagnetic wave generator
    125.
    发明专利
    Electromagnetic wave generator 有权
    电磁波发生器

    公开(公告)号：JP2006309968A

    公开(公告)日：2006-11-09

    申请号：JP2005128120

    申请日：2005-04-26

    Applicant: Mitsubishi Electric Corp ,  三菱電機株式会社

    Inventor： TANAKA HIROBUMI

    IPC: H05H11/00 ,  G21K5/08 ,  H05G2/00 ,  H05H7/04

    CPC classification number: H05H11/00 ,  H01J2235/08 ,  H05G2/00 ,  H05H6/00

    Abstract: PROBLEM TO BE SOLVED: To provide a compact and inexpensive electromagnetic wave generator capable of generating X rays of great intensity and switching energy of the generated X rays at a high speed.
    SOLUTION: The electromagnetic wave generator comprises a circular accelerator. Because a deflection electromagnet for structuring the circular accelerator has a converging function to an incident or accelerated electron by its shape, the accelerator has a stable electron orbit in a predetermined range of a diameter direction in entire processes of incidence and acceleration of an electron, and a target is arranged on the stable electron orbit. Corresponding to an arrangement position of the target, a region where a orbiting electron beam collides with the target and a region where the electron beam does not collide with the target are set, and the electron orbits and moves between these regions and collides with the target by control of time change patterns of both deflection magnetic field of the deflection electromagnet and acceleration of the electron beam, and the X rays are generated.
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种能够以高速度产生高强度的X射线和产生的X射线的能量的紧凑而廉价的电磁波发生器。 解决方案：电磁波发生器包括圆形加速器。 由于用于构造圆形加速器的偏转电磁体通过其形状具有对入射或加速电子的会聚功能，所以在电子的入射和加速的整个过程中，加速器在直径方向的预定范围内具有稳定的电子轨道，并且 目标被安排在稳定的电子轨道上。 对应于目标的布置位置，设置轨道电子束与目标物碰撞的区域和电子束不与目标物碰撞的区域，电子在这些区域之间运动并与目标物碰撞 通过控制偏转电磁铁的偏转磁场和电子束的加速度的时间变化模式，并且产生X射线。 版权所有（C）2007，JPO＆INPIT

    Polychromatic x-ray generating device
    130.
    发明专利
    Polychromatic x-ray generating device 有权
    多色X射线发生装置

    公开(公告)号：JP2006318746A

    公开(公告)日：2006-11-24

    申请号：JP2005139726

    申请日：2005-05-12

    Applicant: Ishikawajima Harima Heavy Ind Co Ltd ,  Natl Inst Of Radiological Sciences ,  Univ Of Tokyo ,  国立大学法人 東京大学 ,  独立行政法人放射線医学総合研究所 ,  石川島播磨重工業株式会社

    Inventor： NOSE HIROYUKI ,  ISHIDA ONORI ,  KANEKO NAMIO ,  SAKAE HISAHARU ,  KAMISAKA MITSURU ,  DOBASHI KATSUHIRO

    IPC: H05G2/00 ,  G21K1/00 ,  G21K5/02 ,  H01S3/00

    CPC classification number: H05G2/00 ,  G21K5/00 ,  H01J35/14 ,  H01J35/28 ,  H01J2235/08

    Abstract: PROBLEM TO BE SOLVED: To provide a polychromatic X-ray generating device capable of generating a plurality (two, three or more kinds) of single-color hard X rays by switching in turn at as short a time interval as a blood vessel is deemed to be at a standstill, and generating strong X rays applicable to angiogram or the like.
    SOLUTION: The device includes an electron beam generating device 10 for accelerating electron beams to generate pulsed electron beams 1 to pass a given linear track 2, a compound laser generating device 20 for generating in turn a plurality of pulsed laser lights 3a 3b of different wavelengths, and a laser light guiding device 30 for guiding in the plurality of pulsed laser lights on the linear track 2 in opposition to the pulsed electron beams 1. The plurality of pulse laser lights 3a, 3b are made collided head-on with the pulsed electron beams 1 on the linear track 2, to generate two or more kinds of single-color hard X rays 4 (4a, 4b).
    COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种多色X射线产生装置，其能够以与血液相同的时间间隔依次进行切换，从而能够生成多种（两种，三种以上）单色硬X射线 血管被认为处于停滞状态，并产生适用于血管造影等的强X射线。 解决方案：该装置包括用于加速电子束以产生脉冲电子束1以通过给定的线性轨道2的电子束产生装置10，用于依次产生多个脉冲激光3a 3b的复合激光产生装置20 不同波长的激光导向装置30，用于与线性轨道2上的脉冲电子束1相对地引导多个脉冲激光的激光导向装置30.多个脉冲激光3a，3b被正面与 线性轨道2上的脉冲电子束1，以产生两种或更多种单色硬X射线4（4a，4b）。 版权所有（C）2007，JPO＆INPIT

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