MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING
    131.
    发明公开
    MICRO-ELECTRO-MECHANICAL SWITCH BEAM CONSTRUCTION WITH MINIMIZED BEAM DISTORTION AND METHOD FOR CONSTRUCTING 有权
    微机电与梁施工开关,最小梁歪设计和方法

    公开(公告)号:EP2556014A1

    公开(公告)日:2013-02-13

    申请号:EP11766622.2

    申请日:2011-04-06

    CPC classification number: H01H57/00 B81B7/0012 B81B2201/014 H01H59/0009

    Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS
    132.
    发明公开
    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS 审中-公开
    SPRUNG MEMS具有可调TRAGARM及其方法电容器

    公开(公告)号:EP2524383A2

    公开(公告)日:2012-11-21

    申请号:EP11733466.4

    申请日:2011-01-14

    Applicant: Wispry, Inc.

    Inventor: DEREUS, Dana

    CPC classification number: H01G5/18 B81B3/007 B81B2201/014 H02N1/006

    Abstract: The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.

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