公开(公告)号：WO2010080439A1

公开(公告)日：2010-07-15

申请号：PCT/US2009/068249

申请日：2009-12-16

Applicant: ANALOG DEVICES, INC. ,  ELLIS, Denis ,  FITZGERALD, Padraig ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  ECKL, Richard, Tarik

Inventor： ELLIS, Denis ,  FITZGERALD, Padraig ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  ECKL, Richard, Tarik

IPC: H01H57/00

CPC classification number: H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

Abstract translation: 公开了一种微电子机械开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚和铰链。 所述梁构件具有足以突出所述栅极连接和所述排出连接的长度。 所述锚将所述开关结构耦合到所述基底，所述锚具有宽度。 铰链将梁构件沿着锚固件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电荷差异而弯曲。 开关结构在靠近铰链的区域中在基板和锚之间具有间隙。

公开(公告)号：WO2011127120A1

公开(公告)日：2011-10-13

申请号：PCT/US2011/031341

申请日：2011-04-06

Applicant: ANALOG DEVICES, INC. ,  GOGGIN, Raymond ,  FITZGERALD, Padraig

Inventor： GOGGIN, Raymond ,  FITZGERALD, Padraig

IPC: B81B7/04

CPC classification number: H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

Abstract translation: 公开了一种微机电开关，其包括耦合到衬底的具有栅极连接的衬底，源极连接，漏极连接和开关结构。 开关结构包括梁构件，锚固件，锚梁接口和铰链。 所述梁构件具有足以突出所述栅极连接和所述排水连接两端的长度。 将开关结构连接到基板上。 将锚杆与铰链连接的锚梁接口。 铰链将梁构件沿着锚定件的长度在相应位置处联接到锚固件，铰链响应于门和梁构件之间建立的电压差而弯曲。 开关结构在接近铰链的区域中在基板和锚固件之间具有间隙。

公开(公告)号：WO2011022203A1

公开(公告)日：2011-02-24

申请号：PCT/US2010/044254

申请日：2010-08-03

Applicant: ANALOG DEVICES, INC. ,  ROHAN, David ,  DIXON, John ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  SCHIRMER, Mark ,  FITZGERALD, Padraig

Inventor： ROHAN, David ,  DIXON, John ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  SCHIRMER, Mark ,  FITZGERALD, Padraig

IPC: H01H1/00

CPC classification number: H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

Abstract: A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.

Abstract translation: 具有铂系触点的MEMS开关通过一个过程进行封盖，该工艺也通过随时间控制环境中的氧气量，压力和温度来钝化触点。 一些实施例在第一温度和压力下，在氧化气氛中钝化接触，然后在更高的温度和压力下密封盖子。 一些实施方案在低于该温度的情况下气密地密封盖子，从而将氧气吸留在由盖子限定的体积内，然后在较高温度下钝化与被捕获的氧气的接触。

公开(公告)号：EP2377138A1

公开(公告)日：2011-10-19

申请号：EP09837894.6

申请日：2009-12-16

Applicant: Analog Devices, Inc.

Inventor： ELLIS, Denis ,  FITZGERALD, Padraig ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  ECKL, Richard, Tarik

IPC: H01H57/00

CPC classification number: H01H11/00 ,  B81B3/0081 ,  B81B2201/014 ,  H01H1/0036 ,  H01H59/0009 ,  Y10T29/49002 ,  Y10T29/49105

Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate, the anchor having a width. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a charge differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

公开(公告)号：EP2377138B1

公开(公告)日：2019-04-03

申请号：EP09837894.6

申请日：2009-12-16

Applicant: Analog Devices, Inc.

Inventor： ELLIS, Denis ,  FITZGERALD, Padraig ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  ECKL, Richard, Tarik

IPC: H01H59/00 ,  B81B7/04

公开(公告)号：EP2556014B1

公开(公告)日：2016-08-03

申请号：EP11766622.2

申请日：2011-04-06

Applicant: Analog Devices, Inc.

Inventor： GOGGIN, Raymond ,  FITZGERALD, Padraig

IPC: B81B7/04 ,  H01H59/00 ,  H01H1/00 ,  B81B7/00 ,  H01H57/00

CPC classification number: H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

公开(公告)号：EP2467861B1

公开(公告)日：2014-06-18

申请号：EP10740115.0

申请日：2010-08-03

Applicant: Analog Devices, Inc.

Inventor： ROHAN, David ,  DIXON, John ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  SCHIRMER, Mark ,  FITZGERALD, Padraig

IPC: H01H1/00

CPC classification number: H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

公开(公告)号：EP2556014A1

公开(公告)日：2013-02-13

申请号：EP11766622.2

申请日：2011-04-06

Applicant: Analog Devices, Inc.

Inventor： GOGGIN, Raymond ,  FITZGERALD, Padraig

IPC: B81B7/04

CPC classification number: H01H57/00 ,  B81B7/0012 ,  B81B2201/014 ,  H01H59/0009

Abstract: Disclosed is a micro-electro-mechanical switch, including a substrate having a gate connection, a source connection, a drain connection and a switch structure, coupled to the substrate. The switch structure includes a beam member, an anchor, an anchor beam interface and a hinge. The beam member having a length sufficient to overhang both the gate connection and the drain connection. The anchor coupling the switch structure to the substrate. The anchor beam interface coupling the anchor to the hinge. The hinge coupling the beam member to the anchor at a respective position along the anchor's length, the hinge to flex in response to a voltage differential established between the gate and the beam member. The switch structure having gaps between the substrate and the anchor in regions proximate to the hinges.

公开(公告)号：EP2467861A1

公开(公告)日：2012-06-27

申请号：EP10740115.0

申请日：2010-08-03

Applicant: Analog Devices, Inc.

Inventor： ROHAN, David ,  DIXON, John ,  WONG, Jo-ey ,  GOGGIN, Raymond ,  SCHIRMER, Mark ,  FITZGERALD, Padraig

IPC: H01H1/00

CPC classification number: H01H1/0036 ,  H01H1/023 ,  H01H1/0237 ,  H01H59/0009 ,  H01H2001/0052

Abstract: A MEMS switch with a platinum-series contact is capped through a process that also passivates the contact by controlling, over time, the amount of oxygen in the environment, pressures and temperatures. Some embodiments passivate a contact in an oxygenated atmosphere at a first temperature and pressure, before hermetically sealing the cap at a higher temperature and pressure. Some embodiments hermetically seal the cap at a temperature below which passivating dioxides will form, thus trapping oxygen within the volume defined by the cap, and later passivate the contact with the trapped oxygen at a higher temperature.