Abstract:
The invention relates to a method of fabricating a single-piece micromechanical component including at least two distinct functional levels. According to the invention, the method includes a LIGA process on a single level combined with the machining of the LIGA deposition directly on the substrate.
Abstract:
The invention relates to a method of fabricating a single-piece micromechanical component including at least two distinct functional levels. According to the invention, the method includes a LIGA process on a single level combined with the machining of the LIGA deposition directly on the substrate.
Abstract:
The invention relates to a micromechanical part (11, 21, 31, 41, 51, 61) made of a single-piece material. According to the invention, the part has an elementary section formed of at least two secant and non-aligned segments so that one of the at least two segments forms the height (e3) of the micromechanical part (11, 21, 31, 41, 51, 61), the height being greater than the thickness (e1) of each segment.The invention also concerns the method of fabricating the part.
Abstract:
A method of manufacturing a mechanical part includes providing a substrate of micro-machinable material; etching, using photolithography, a pattern that includes said part through said entire substrate; assembling a clip on said part so that said part is ready to be mounted without the portion made of micro-machinable material having to be touched by a tool other than the clip; releasing the part from the substrate so as to mount said part in a device such as a timepiece movement.
Abstract:
A device for converting a first movement into a second movement responsive to the first movement under a demagnification scale includes: a) an input portion being drivable in a rectilinear translation in a first direction by an actuator causing the first movement; b) an output portion being movable by a converting blade causing the second movement responsive to the first movement in a second direction substantially perpendicular to the first direction; and c) a converting section connecting the input portion to the output portion. The converting section includes an intermediate spring portion and the converting blade. The intermediate spring portion has at least two parallel flexure blades; and the converting blade is substantially identical in shape to the a least two parallel flexure blades and is offset from its neutral position by a predetermined amount in the first direction as compared to the neutral position of the at least two parallel flexure blades. The device has a flexure-based structure that allows combining the advantages of classical actuators with accuracies in the micrometer range and the advantages of flexures to achieve nanometer accuracy.
Abstract:
The invention relates to a method (1) of fabricating a composite micromechanical component (41, 41′) including the following steps: a) providing (10) a substrate (9, 9′) that includes a horizontal top layer (21) and a horizontal bottom layer (23) made of electrically conductive, micromachinable material, and secured to each other by an electrically insulating, horizontal, intermediate layer (22); b) etching at least one pattern (26) in the top layer (21) through to the intermediate layer (22), so as to form at least one cavity (25) in the substrate (9, 9′); c) coating (16) the top part of said substrate with an electrically insulating coating (30); d) directionally etching (18) said coating and said intermediate layer so as to limit the presence thereof exclusively at each vertical wall (51, 52) formed in said top layer; e) performing (5) an electrodeposition by connecting the electrode to the conductive bottom layer (23) of the substrate (9, 9′) to form at least one metal part (33, 43, 43′) of said component; f) releasing the composite component (41, 41′) from the substrate (9, 9′). The invention concerns the field of micromechanical components, particularly for timepiece movements.
Abstract:
The process comprises the following steps:a) a first element (3) or a plurality of said first elements (3) is/are machined in a first silicon wafer (1) keeping said elements (3) joined together via material bridges (5); b) step a) is repeated with a second silicon wafer (2) in order to machine a second element (4), differing in shape from that of the first element (3), or a plurality of said second elements (4); c) the first and second elements (3, 4) or the first and second wafers (1, 2) are applied, face to face, with the aid of positioning means (6, 7); d) the assembly formed in step c) undergoes oxidation; and e) the parts (10) are separated form the wafers (1, 2). Micromechanical timepiece parts obtained according to the process.
Abstract:
The invention relates to a method of manufacturing (1) a mechanical part (51) including the following steps:a) providing (3) a substrate (53) made of micro-machinable material;b) etching (5), with help of photolithography, a pattern (50) that includes said part through said entire substrate;According to the invention, the method further includes the following steps:c) mounting (7) said etched substrate on a support (55′) so as to leave the top and bottom surfaces of said substrate accessible;d) depositing (9, C′) a coating of better tribological quality than said micro-machinable material on the outer surface of said part e) releasing (11) the part from the substrate. The invention concerns the field of timepiece manufacture.
Abstract:
Disclosed herein is a method of fabricating nano-components using nanoplates, including the steps of: printing a grid on a substrate using photolithography and Electron Beam Lithography; spraying an aqueous solution dispersed with nanoplates onto the grid portion to position the nanoplates on the substrate; depositing a protective film of a predetermined thickness on the substrate and the nanoplates positioned on the substrate; ion-etching the nanoplates deposited with the protective film by using a Focused Ion Beam (FIB) or Electron Beam Lithography; and eliminating the protective film remaining on the substrate using a protective film remover after the ion-etching of the nanoplates, and a method of manufacturing nanomachines or nanostructures by transporting such nano-components using a nano probe and assembling with other nano-components. The present invention makes it possible to fabricate the high-quality nano-components in a more simple and easier manner at a lower cost, as compared to other conventional methods. Further, the present invention provides a method of implementing nanomachines through combination of such nano-components and biomolecules, etc.
Abstract:
The present invention is focused on a revolutionary, low-cost (highly-scaleable) approach for the mass production of three-dimensional microcomponents: the biological reproduction of naturally-derived, biocatalytically-derived, and/or genetically-tailored three-dimensional microtemplates (e.g., frustules of diatoms, microskeletons of radiolarians, shells of mollusks) with desired dimensional features, followed by reactive conversion of such microtemplates into microcomponents with desired compositions that differ from the starting microtemplate and with dimensional features that are similar to those of the starting microtemplate. Because the shapes of such microcomponents may be tailored through genetic engineering of the shapes of the microtemplates, such microcomposites are considered to be Genetically-Engineered Materials (GEMs).