公开(公告)号：WO2005035090A3

公开(公告)日：2005-04-21

申请号：PCT/US2004/027573

申请日：2004-08-25

Applicant: REFLECTIVITY, INC. ,  SCHAADT, Gregory, P. ,  HONGQIN, Shi

Inventor： SCHAADT, Gregory, P. ,  HONGQIN, Shi

IPC: C23F1/00

Abstract: The present invention teaches a method and apparatus for removing sacrificial materials in fabrications of microstructures using one or more selected spontaneous vapor phase etchants. The selected etchant is fed into an etch chamber containing the microstructure during each feeding cycle of a sequence of feeding cycles until the sacrificial material of the microstructure is exhausted through the chemical reaction between the etchant and the sacrificial material, Specifically, during a first feeding cycle, a first amount of selected spontaneous vapor phase etchant is fed into the etch chamber. At a second feeding cycle, a second amount of the etchant is fed into the etch chamber. The first amount and the second amount of the selected etchant may or may not be the same, The time duration of the feeding cycles are individually adjustable.

公开(公告)号：WO2005022886A2

公开(公告)日：2005-03-10

申请号：PCT/US2004/027095

申请日：2004-08-19

Applicant: REFLECTIVITY, INC. ,  RICHARDS, Peter

Inventor： RICHARDS, Peter

IPC: H04N

CPC classification number: G09G3/346 ,  G09G3/2014 ,  G09G3/2022 ,  G09G2300/08 ,  G09G2310/0235

Abstract: The present invention provides a method and apparatus of converting a stream of pixel data in space and time into a stream of bitplane data. In particular, the present invention converts the pixel data stream according to a predetermined output format. The apparatus of the present invention receives the pixel data in a “real-time” fashion, and dynamically performs predefined permutations so as to accomplish the predetermined transpose operation. Alternatively, the pixel data are stored in a storage medium, and the apparatus of the present invention retrieves the pixel DAT and perform the predetermined permutation to accomplish the predefined operation. The methods and apparatus disclosed herein are especially useful for processing a high-speed stream of digital data in a flow-through manner and suitable for implementation in a hardware video pipeline. The control signal fanout and gate count of this invention are reduced compared to currently available similar techniques for converting pixel data into bitplane data.

Abstract translation: 本发明提供一种将空间和时间中的像素数据流转换成位平面数据流的方法和装置。 特别地，本发明根据预定的输出格式转换像素数据流。 本发明的装置以“实时”的方式接收像素数据，并动态地执行预定义的排列，以便完成预定的转置操作。 或者，将像素数据存储在存储介质中，并且本发明的装置检索像素DAT并执行预定的排列以完成预定义的操作。 本文公开的方法和装置特别适用于以流通方式处理高速数字数据流并且适合于在硬件视频流水线中实现。 与用于将像素数据转换为位平面数据的当前可用的类似技术相比，本发明的控制信号扇出和门数减少。

公开(公告)号：WO2005010933A3

公开(公告)日：2005-02-03

申请号：PCT/US2004/018818

申请日：2004-06-10

Applicant: REFLECTIVITY, INC. ,  PATEL, Satyadev, R. ,  HUIBERS, Andrew, G.

Inventor： PATEL, Satyadev, R. ,  HUIBERS, Andrew, G.

IPC: G02B26/00

Abstract: A micromirror device (122) is disclosed, along with a method of making such a micromirror device (122) that comprises a mirror plate (230), a hinge (214) and an extension plate (212). The extension plate (212) is formed on the mirror plate (230) and between the mirror plate (230) and the electrode (126) associated with the mirror plate (230) for rotating the mirror plate. The.extension plate (212) can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate (212) is formed after the formation of the mirror plate (230). Moreover, also disclosed is a projection system (102) that comprises a spatial light modulator (110) having an array of such micromirrors, as well as a light source (102), condensing optics, wherein light from the light source (102) is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors (110) onto a target, and a controller for selectively actuating the micromirrors (122) in the array (110).

公开(公告)号：WO2005010571A2

公开(公告)日：2005-02-03

申请号：PCT/US2004/024039

申请日：2004-07-26

Applicant: REFLECTIVITY, INC. ,  PATEL, Satyadev, R. ,  HUIBERS, Andrew, G.

Inventor： PATEL, Satyadev, R. ,  HUIBERS, Andrew, G.

IPC: G02B

CPC classification number: B82Y30/00 ,  G02B26/0841 ,  H04N5/7458

Abstract: A spatial light modulator is disclosed, along with a method for making such a modulator that comprises an array of micromirror devices. The center-to-center distance and the gap between adjacent micromirror devices are determined corresponding to the light source being used so as to optimize optical efficiency and performance quality. The micromirror device comprises a hinge support formed on a substrate and a hinge that is held by the hinge support. A mirror plate is connected to the hinge via a contact, and the distance between the mirror plate and the hinge is determined according to desired maximum rotation angle of the mirror plate, the optimum gap and pitch between the adjacent micromirrors. In a method of fabricating such spatial light modulator, one sacrificial layer is deposited on a substrate followed by forming the mirror plates, and another sacrificial layer is deposited on the mirror plates followed by forming the hinge supports. The two sacrificial layers are removed via the small gap between adjacent mirror devices with spontaneous vapor phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

Abstract translation: 公开了一种空间光调制器，以及用于制造这样的调制器的方法，该调制器包括微镜器件阵列。 根据所使用的光源确定中心到中心的距离和相邻的微反射镜装置之间的间隙，以优化光学效率和性能质量。 微反射镜装置包括形成在基底上的铰链支撑件和由铰链支撑件保持的铰链。 镜板通过触点连接到铰链，并且根据镜板的期望的最大旋转角度，相邻微镜之间的最佳间隙和间距来确定镜板和铰链之间的距离。 在制造这种空间光调制器的方法中，将一个牺牲层沉积在衬底上，随后形成镜板，并且另一牺牲层沉积在镜板上，随后形成铰链支架。 通过具有自发气相化学蚀刻剂的相邻反射镜装置之间的小间隙去除两个牺牲层。 还公开了一种投影系统，其包括这样的空间光调制器以及光源，聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射从微镜阵列反射的光的投影光学器件 以及用于选择性地致动阵列中的微镜的控制器。

公开(公告)号：WO2004106221A2

公开(公告)日：2004-12-09

申请号：PCT/US2004014895

申请日：2004-05-12

Applicant: REFLECTIVITY INC ,  TARN TERRY

Inventor： TARN TERRY

IPC: B81B7/00 ,  G02B26/08 ,  H01L23/10 ,  B81B

CPC classification number: B81C1/00269 ,  B81C2203/0181 ,  G02B26/0841 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/01079 ,  H01L2924/09701 ,  H01L2924/12044 ,  H01L2924/16195 ,  Y10T156/10 ,  H01L2924/00

Abstract: A microelectromechanical device package with integral a heater and a method for packaging the micro-electromechanical device are disclosed in this invention. The microelectromechanical device package comprises a first package substrate and second substrate, between which a microelectromechanical device, such as a micromirror array device is located. In order to bonding the first and second package substrates so as to package the microelectromechanical device inside, a sealing medium layer is deposited, and heated by the heater so as to bond the first and second package substrates together.

Abstract translation: 具有集成加热器的微机电装置封装和用于封装微机电装置的方法在本发明中公开。 微机电器件封装包括第一封装衬底和第二衬底，微机电器件如微镜阵列器件之间位于该第一衬底和第二衬底之间。 为了将第一和第二封装基板接合以将微机电装置封装在内部，密封介质层被沉积并被加热器加热，以将第一和第二封装基板接合在一起。

公开(公告)号：WO2004102229A3

公开(公告)日：2004-11-25

申请号：PCT/US2004/015008

申请日：2004-05-13

Applicant: REFLECTIVITY, INC. ,  PATEL, Satyadev, R. ,  HUIBERS, Andrew, G. ,  SPINDT, Christopher ,  HEUREUX, Peter

Inventor： PATEL, Satyadev, R. ,  HUIBERS, Andrew, G. ,  SPINDT, Christopher ,  HEUREUX, Peter

IPC: G02B26/00

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a preferably at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops. The stops may be formed on substrate(s), hinge structures holding the mirror plates of the micromirror device and/or a desired location within the micromirror device. Alternatively, the electrodes for the ON state and the OFF state can be used as stops, either individually or in combination, or in combination with other component(s), such as substrate(s) of the micromirror device. The OFF state angle and the ON state angle are preferably different.

公开(公告)号：WO2004102229A2

公开(公告)日：2004-11-25

申请号：PCT/US2004015008

申请日：2004-05-13

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV R ,  HUIBERS ANDREW G ,  SPINDT CHRISTOPHER ,  HEUREUX PETER

Inventor： PATEL SATYADEV R ,  HUIBERS ANDREW G ,  SPINDT CHRISTOPHER ,  HEUREUX PETER

IPC: B81B3/00 ,  C10L1/02 ,  G02B20060101 ,  G02B26/00 ,  G02B26/08 ,  G02B

CPC classification number: B81B3/0051 ,  B81B2201/042 ,  B81B2203/058 ,  C10L1/026 ,  G02B26/0841

Abstract: A spatial light modulator is disclosed, along with methods for making such a modulator that comprises an array of mirror devices each having at least a preferably at least a first electrode and a second electrode. The first electrode is designated for driving the mirror plate of the micromirror device to an ON state, and the second electrode is designated for driving the mirror plate to an OFF state. The two electrodes can be disposed on the same side of the mirror plate but on opposite sides of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. Alternatively, the two electrodes can be disposed on the opposite sides of the mirror plate, but on the same side of the rotation axis of the mirror plate for driving the mirror plate to rotate in opposite directions. The ON state and OFF state of the mirror plate can be defined by stops. The stops may be formed on substrate(s), hinge structures holding the mirror plates of the micromirror device and/or a desired location within the micromirror device. Alternatively, the electrodes for the ON state and the OFF state can be used as stops, either individually or in combination, or in combination with other component(s), such as substrate(s) of the micromirror device. The OFF state angle and the ON state angle are preferably different.

Abstract translation: 公开了一种空间光调制器，以及用于制造这种调制器的方法，该调制器包括每个具有至少优选至少第一电极和第二电极的反射镜装置的阵列。 第一电极被指定用于将微镜器件的镜板驱动到ON状态，并且第二电极被指定用于将镜板驱动到OFF状态。 两个电极可以设置在镜板的相同侧上，但是可以设置在镜板的旋转轴的相对侧上，用于驱动镜板沿相反方向旋转。 或者，两个电极可以设置在镜板的相对侧上，但是设置在用于驱动镜板的相反方向旋转的镜板的旋转轴的同一侧。 镜片的ON状态和OFF状态可以通过停止来定义。 止动件可以形成在基底上，保持微镜装置的镜板的铰链结构和/或微镜装置内的期望位置。 或者，用于ON状态和OFF状态的电极可以单独地或组合地用作停止，或者与诸如微镜装置的基板的其它部件组合使用。 OFF状态角度和ON状态角度优选地不同。

公开(公告)号：WO0219391A3

公开(公告)日：2002-06-13

申请号：PCT/US0141913

申请日：2001-08-28

Applicant: REFLECTIVITY INC ,  PATEL SATYADEV ,  SCHAADT GREGORY P ,  MACDONALD DOUGLAS B ,  MACDONALD NILES K

Inventor： PATEL SATYADEV ,  SCHAADT GREGORY P ,  MACDONALD DOUGLAS B ,  MACDONALD NILES K

IPC: H01L21/302 ,  C03C15/00 ,  C25F3/12 ,  H01L20060101 ,  H01L21/00

CPC classification number: H01L21/67063 ,  C03C15/00 ,  C03C2218/33 ,  H01L21/67017

Abstract: Processes for the addition or removal of a layer or region from a workpiece (14) material by contact with a process gas, in the manufacture of a microstructure, are enhanced by the use of a recirculation of the process gas. Recirculation is effected by a pump (18) that has no sliding or abrading parts that contact the process gas nor any wet (such as oil) seals or purge gas in the pump (18). Improved processing can be achieved by a process chamber (15) that contains a baffle (16), a perforated plate (17), or both, appropriately situated in the chamber (15) to deflect the incoming process gas and distribute it over the workpiece (14) surface. In certain embodiments, a diluent gas is added to the recirculation loop (36) and continuously recirculated therein, followed by the bleeding of the process gas (such as an etchant gas) into the recirculation loop (36). Also, cooling of the process gas, etching chamber (15) and/or sample platen can aid the etching process. The method is particularly useful for adding to or removing material from a sample (14) of microscopic dimensions.

Abstract translation: 通过使用工艺气体的再循环来增强在制造微结构时通过与工艺气体接触从工件（14）材料添加或去除层或区域的工艺。 再循环通过泵（18）实现，泵（18）没有与工艺气体接触的滑动或研磨部件以及泵（18）中的任何湿的（例如油）密封件或吹扫气体。 改进的处理可以通过包含挡板（16），多孔板（17）或两者的处理室（15）来实现，该处理室适当地位于室（15）中，以偏转进入的处理气体并将其分布在工件 （14）表面。 在某些实施方案中，稀释气体被添加到再循环回路（36）中并在其中连续再循环，随后将工艺气体（例如蚀刻剂气体）渗出到再循环回路（36）中。 此外，工艺气体，蚀刻室（15）和/或样品台的冷却可以帮助蚀刻工艺。 该方法对于从微观尺寸的样品（14）添加或除去材料特别有用。

公开(公告)号：EP1116063B1

公开(公告)日：2006-06-07

申请号：EP98949533.8

申请日：1998-09-24

Applicant: Reflectivity Inc.

Inventor： HUIBER, Andrew, Gerrit

IPC: G02B26/00 ,  G02B26/08

CPC classification number: G02B26/0841

Abstract: A spatial light modulator (12) includes an upper optically transmissive substrate (20) held above a lower substrate (34) containing addressing circuitry (36). One or more electrostatically deflectable elements (48) are suspended by hinges (50) from the upper substrate (20). In operation, individual mirrors (48) are selectively deflected and serve to spatially modulate light (56) that is incident to, and then reflected back through, the upper substrate (20). Motion stops (49) may be attached to the reflective deflectable elements so that the mirror (48) does not snap to the bottom substrate (34). Instead, the motion stop (49) rests against the upper substrate (20) thus limiting the deflection angle of the reflective deflectable elements (48).

公开(公告)号：EP1611581A2

公开(公告)日：2006-01-04

申请号：EP04758968.4

申请日：2004-03-24

Applicant: Reflectivity Inc.

Inventor： RICHARDS, Peter

IPC: G11C5/00 ,  G09G3/36 ,  G02B26/08

CPC classification number: G09G3/34 ,  G02B26/0841 ,  G03B21/28 ,  G09G3/2022 ,  G09G3/346 ,  G09G2300/08 ,  G09G2310/02 ,  G09G2320/0261 ,  G09G2320/0266 ,  G11C11/408 ,  Y10S359/904

Abstract: Methods and apparatus for selectively updating memory cells of a memory cell array are provided. The memory cells of each row of the memory cell array are provided with a plurality of wordlines. Memory cells of the row are activated and updated by separated wordlines. In an application of display systems using memory cell arrays for controlling the pixels of the display system and pulse-width-modulation (PWM) technique for displaying grayscales, the pixels can be modulated by different PWM waveforms. The perceived dynamic-false-contouring artifacts are reduced thereby. In another application, the provision of multiple wordlines enables precise measurements of voltages maintained by memory cells of the memory cell array.