Abstract:
The present disclosure generally relates to gas inject apparatus for a process chamber for processing of semiconductor substrates. The gas inject apparatus include one or more gas injectors which are configured to be coupled to the process chamber. Each of the gas injectors are configured to receive a process gas and distribute the process gas across one or more gas outlets. The gas injectors include a plurality of pathways, a fin array, and a baffle array. The gas injectors are individually heated. A gas mixture assembly is also utilized to control the concentration of process gases flown into a process volume from each of the gas injectors. The gas mixture assembly enables the concentration as well as the flow rate of the process gases to be controlled.
Abstract:
The present invention relates to an initiator injection nozzle (1) for mixing an initiator with a process fluid. The initiator injection nozzle 1 comprises a body (10) comprising (i) a process fluid inlet port (11) to receive the process fluid and an outlet port (17), (ii) a process fluid flow passage (13) through which the process fluid traverses along a process fluid central flow axis (15) between the process fluid inlet port (11) and the outlet port (17), wherein the process fluid flow passage (13) is at least partially defined by a constricting portion (12), a throat (14), and an expanding portion (16), (iii) an initiator inlet (30) to receive the initiator and an initiator outlet (32), and (iv) an initiator fluid flow passage (34) through which the initiator traverses along an initiator central flow axis (35) between the initiator inlet (30) and the initiator outlet (32). The initiator injection nozzle (1) is characterised by a plurality of elongated vanes (20) provided within the constricting portion (12) and extending along the process fluid central flow axis (15), and in that each of the vanes (20) has a leading end (22), a trailing end (26) and a curved vane surface (21). The plurality of vanes (20) are configured such that an unobstructed process fluid flow cross-section A perpendicular to and including the process fluid central flow axis (15) is located within the constricting portion (12), and that an area of the unobstructed process fluid flow cross-section A becomes larger with increasing distance from the process fluid inlet port (11).
Abstract:
A reactor and method for the conversion of hydrocarbon gases utilizes a reactor (12, 312, 412, 512, 612, 712) having a unique feed assembly with an original vortex combustion chamber (40, 340, 436, 536, 636, 736), a diverging conduit (48, 348, 448, 548, 648, 748), and a cylindrical reactor chamber (40, 340, 436, 536, 636, 736). This design creates a compact combustion zone and an inwardly swirling fluid flow pattern of the feed gases to form a swirling gas mixture that passes through a diverging conduit (48, 348, 448, 548, 648, 748). The feed streams can be introduced into the reactor at any angle (perpendicular, axial, or something between, or a combination of the above forms) with swirling flow components. This provides conditions suitable for efficient cracking of hydrocarbons, such as ethane, to form olefins.
Abstract:
An apparatus for producing pulverulent poly(meth)acrylate in a reactor for droplet polymerization having an apparatus for dropletization of a monomer solution for the production of the poly(meth)acrylate having holes through which the monomer solution is introduced, an addition point for a gas above the apparatus for dropletization, at least one gas withdrawal point on the circumference of the reactor and a fluidized bed, and above the gas withdrawal point the reactor has a region having a constant hydraulic internal diameter and below the gas withdrawal point the reactor has a hydraulic internal diameter that steadily decreases. The reactor has a heating means in the region having a steadily decreasing hydraulic internal diameter.
Abstract:
A catalytic reactor comprises a particle separator the reactor internals by means which makes the fluid flow stream perform a radial outwards and upwards S-curve flow path, which enables the particles to be extracted and settle in a collection section with low flow activity and turbulence.
Abstract:
The invention relates to distributing reactants more evenly across the interior space of a reactor vessel utilizing a distributor at the inlet end that initially directs the flow of reactants through a series of circumferential nozzles. The nozzles are physical spaced such that the first nozzle provides the reactants into the vessel to spread radially and broadly outwardly into the vessel and each successive circumferential nozzle to deliver reactants in a less broadly distribution or dispersion where the interior space is filled with reactants without broadly diverse velocities that may create hot spots within the catalyst bed.
Abstract:
A gaseous fuel catalytic partial oxidation (CPOX) reformer can include a plurality or an array of spaced-apart CPOX reactor units, each reactor unit including an elongate tube having a wall with internal and external surfaces, the wall enclosing an open gaseous flow passageway with at least a portion of the wall having CPOX catalyst disposed therein and/or comprising its structure. The catalyst-containing wall structure and open gaseous flow passageway enclosed thereby define a gaseous phase CPOX reaction zone, the catalyst-containing wall section being gas-permeable to allow gaseous CPOX reaction mixture to diffuse therein and hydrogen-rich product reformate to diffuse therefrom. At least the exterior surface of a CPOX reaction zone of a CPOX reactor unit can include a hydrogen barrier. The gaseous fuel CPOX reformer also can include one or more igniters, and a source of gaseous reformable fuel.
Abstract:
Integrated liquid fuel catalytic partial oxidation (CPOX) reformer and fuel cell systems can include a plurality or an array of spaced-apart CPOX reactor units, each reactor unit including an elongate tube having a gas-permeable wall with internal and external surfaces, the wall enclosing an open gaseous flow passageway with at least a portion of the wall having CPOX catalyst disposed therein and/or comprising its structure. The catalyst-containing wall structure and open gaseous flow passageway enclosed thereby define a gaseous phase CPOX reaction zone, the catalyst-containing wall section being gas-permeable to allow gaseous CPOX reaction mixture to diffuse therein and hydrogen rich product reformate to diffuse therefrom. The liquid fuel CPOX reformer also can include a vaporizer, one or more igniters, and a source of liquid reformable fuel. The hydrogen-rich reformate can be converted to electricity within a fuel cell unit integrated with the liquid fuel CPOX reactor unit.
Abstract:
Disclosed is a process for continuously reacting liquid alkylene oxide with a liquid substance including an organic compound with active hydrogen atoms and a catalyst in a reactor.
Abstract:
A mixing device for a fuel reformer for mixing at least two fluids is provided. The mixing device includes at least a first plurality of holes which is arranged along a first row, and a second plurality of holes which is arranged along a second row. The mixing device can be used in a fuel reformer for converting hydrocarbon fuel into hydrogen rich gas by auto-thermal reaction process having a, preferably cylindrically shaped and double walled, housing with two side walls forming a reaction chamber of the fuel reformer, wherein hydrocarbon fuel and an oxidizing agent are mixed by the mixing device.