Method and apparatus for manufacturing thin film, and method of manufacturing electronic apparatus
    141.
    发明专利
    Method and apparatus for manufacturing thin film, and method of manufacturing electronic apparatus 有权
    制造薄膜的方法和装置以及制造电子装置的方法

    公开(公告)号:JP2010045150A

    公开(公告)日:2010-02-25

    申请号:JP2008207666

    申请日:2008-08-12

    Inventor: SUMINO KOJI

    Abstract: PROBLEM TO BE SOLVED: To further improve orientation property of thin film forming materials, uniformity and controllability in thickness of a thin film, and stability in forming the thin film. SOLUTION: A method of manufacturing a carbon nanotube thin film 18 includes the first step of preparing a carbon nanotube dispersion liquid 8 including the carbon nanotube dispersed by mixing the carbon nanotube and surface active agent, the second step of forming a dispersion liquid film 31 formed of the carbon nanotube dispersion liquid 8 at the internal circumferential side of an annular dispersion liquid film holding ring 35, the third step of moving the carbon nanotube dispersion liquid 8 to the surface of a substrate 37 in the form of a film by relatively sliding the cylindrical substrate 37 arranged along the internal circumference of the dispersion liquid film holding ring 35 between the central part and external circumferential part of internal space of the dispersion liquid film holding ring 35 and the dispersion liquid film 31 under the condition that these are placed in contact, and the fourth step of forming the carbon nanotube thin film 18 by drying up the dispersion liquid film formed on the surface of the substrate 37. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题:为了进一步提高薄膜形成材料的取向性能,薄膜厚度的均匀性和可控性,以及薄膜形成的稳定性。 解决方案:制造碳纳米管薄膜18的方法包括:制备包含通过混合碳纳米管和表面活性剂而分散的碳纳米管的碳纳米管分散液8的第一步骤,形成分散液 在环状分散液膜保持环35的内周侧由碳纳米管分散液8形成的膜31,将碳纳米管分散液8以薄膜形式移动到基板37的表面的第三工序 在分散液膜保持环35和分散液膜31的内部空间的中心部分和外周部分之间沿着分散液膜保持环35的内周布置的圆柱形基板37相对滑动,条件是它们是 并且通过干燥分散体1形成碳纳米管薄膜18的第四步骤 在基板37的表面上形成的鱿鱼膜。版权所有(C)2010,JPO&INPIT

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