Abstract:
PROBLEM TO BE SOLVED: To provide a stamper, a method of manufacturing it, and a method of transferring patterns, by which a specially fine pattern can be transferred at a low cost. SOLUTION: The stamper has a substrate and a plurality of projecting sections formed on one surface of the substrate with different heights. Among the projecting sections, a high one is constituted by laminating at least two or more kinds of materials in at least two or more layers. COPYRIGHT: (C)2004,JPO
Abstract:
The present invention provides, in certain embodiments, improved microfluidic systems and methods for fabricating improved microfluidic systems, which contain one or more levels of microfluidic channels. The inventive methods can provide a convenient route to topologically complex and improved microfluidic systems. The microfluidic systems provided according to the invention can include three-dimensionally arrayed networks of fluid flow paths therein including channels that cross over or under other channels of the network without physical intersection at the points of cross over. The microfluidic networks of the invention can be fabricated via replica molding processes, also provided by the invention, utilizing mold masters including surfaces having topological features formed by photolithography. The microfluidic networks of the invention are, in some cases, comprised of a single replica molded layer, and, in other cases, are comprised of two, three, or more replica molded layers that have been assembled to form the overall microfluidic network structure. The present invention also describes various novel applications for using the microfluidic network structures provided by the invention.
Abstract:
Die Erfindung betrifft ein Verfahren, mit dem die Oberflächen von Körpern mit unterständigen Mikro- oder Nanostrukturen versehen sowie mikro- und/oder nanogroß durchbrochene Folien hergestellt werden können. Hierzu wird die aus Diamant, Hartmetall, Glas oder Keramik bestehende Spitze (2) zumindest eines nadelförmigen Prägewerkzeugs (1) unter Verwendung einer Positioniereinrichtung sehr oft auf verschiedene Stellen der Oberfläche des Körpers (3) gepresst, wodurch an allen Aufpressstellen Vertiefungen (4) eingeprägt und/oder Durchbrüche (5) erzeugt werden. Das Verfahren ist für die kostengünstige Herstellung von Urformen für den Polymer-Spritzguss von Mikro- oder Nanolinsenarrays, von Mikro- oder Nano-Prägewerkzeugen, von Mikroreaktoren ("lab on a chip"), von strukturierten Elektroden- sowie Wärmetauscherflächen, von lithografischen Masken und für die fälschungssichere Kennzeichnung von Gegendständen geeignet. Spezifische Signaturen können auch als Nachweis für nachträglich erfolgte Veränderungen oder Belastungen (Schrumpfung, plastische Verformung, Reibung, Verschleiß, Korrosion, Beschichtung) an Körpern dienen. - Fig. 1 -
Abstract:
A method is provided for fabricating a fluidic module (80) comprising fluidic channels (60) defined within a glass or glass-ceramic structure. According to the method, a heterogeneous channel-forming laminate (10) is provided comprising a mold-engaging layer (20) and a laminate backbone (30). The laminate backbone (30) comprises a vitreous body defining a supportive viscosity µ B . A channel-forming mold (50) is pressed into engagement with the mold-engaging layer (20) of the channel forming laminate (10) at a molding temperature T M to form fluidic channel components (40) in the channel-forming laminate (10). The molding viscosity µ M of the mold-engaging layer (20) is less than the supportive viscosity µ B of the laminate backbone (30) at the molding temperature T M . The pressed channel-forming laminate (10') is stacked with a plurality of complementary pressed channel forming laminates (10') to define a plurality of fluidic channels (60) in a stacked laminate structure (70). The plurality of fluidic channels (60) in the stacked laminate structure (70) is sealed at a sealing temperature T s that is less than the molding temperature T M and above a softening point temperature of the mold-engaging layer (20). Fluidic modules (80) comprising a stacked laminate structure (70) are also provided.
Abstract:
The invention provides a system and process of patterning structures on a carbon based surface comprising exposing part of the surface to an ion flux, such that material properties of the exposed surface are modified to provide a hard mask effect on the surface. A further step of etching unexposed parts of the surface forms the structures on the surface. The inventors have discovered that by controlling the ion exposure, alteration of the surface structure at the top surface provides a mask pattern, without substantially removing any material from the exposed surface. The mask allows for subsequent ion etching of unexposed areas of the surface leaving the exposed areas raised relative to the unexposed areas thus manufacturing patterns onto the surface. For example, a Ga+ focussed ion beam exposes a pattern onto a diamond surface which produces such a pattern after its exposure to a plasma etch. The invention is particularly suitable for patterning of clear well-defined structures down to nano-scale dimensions.