公开(公告)号：US5426506A

公开(公告)日：1995-06-20

申请号：US36320

申请日：1993-03-22

Applicant: William A. Ellingson ,  Mark P. Brada

Inventor： William A. Ellingson ,  Mark P. Brada

IPC: G01N21/88 ,  G01N21/01

CPC classification number: G01N21/88 ,  G01N2021/178 ,  G01N2021/1782 ,  G01N2021/4792 ,  G01N2021/8887 ,  G01N2201/103

Abstract: A laser is used in a non-destructive manner to detect surface and near-subsurface defects in dense ceramics and particularly in ceramic bodies with complex shapes such as ceramic bearings, turbine blades, races, and the like. The laser's wavelength is selected based upon the composition of the ceramic sample and the laser can be directed on the sample while the sample is static or in dynamic rotate or translate motion. Light is scattered off surface and subsurface defects using a preselected polarization. The change in polarization angle is used to select the depth and characteristics of surface/subsurface defects. The scattered light is detected by an optical train consisting of a charge coupled device (CCD), or vidicon, television camera which, in turn, is coupled to a video monitor and a computer for digitizing the image. An analyzing polarizer in the optical train allows scattered light at a given polarization angle to be observed for enhancing sensitivity to either surface or near-subsurface defects. Application of digital image processing allows subtraction of digitized images in near real-time providing enhanced sensitivity to subsurface defects. Storing known "feature masks" of identified defects in the computer and comparing the detected scatter pattern (Fourier images) with the stored feature masks allows for automatic classification of detected defects.

Abstract translation: 以非破坏性的方式使用激光来检测致密陶瓷中的表面和近地下缺陷，特别是陶瓷轴承，涡轮叶片，种类等复杂形状的陶瓷体。 基于陶瓷样品的组成选择激光器的波长，并且可以在样品静态或动态旋转或平移运动时将激光器定向在样品上。 光被预选的极化散射在表面和地下缺陷之外。 偏振角的变化用于选择表面/地下缺陷的深度和特征。 散射光通过由电荷耦合器件（CCD）或视频摄像机组成的光学系统来检测，电视摄像机又连接到视频监视器和用于数字化图像的计算机。 光学列车中的分析偏振器允许观察到给定偏振角的散射光，以增强对表面或近地下缺陷的敏感性。 数字图像处理的应用允许近实时地减少数字化图像，提供对地下缺陷的增强的灵敏度。 在计算机中存储已识别缺陷的已知“特征掩模”，并将检测到的散射图（傅立叶图像）与存储的特征掩模进行比较，可以自动分类检测到的缺陷。

公开(公告)号：US5171963A

公开(公告)日：1992-12-15

申请号：US700819

申请日：1991-05-16

Applicant: Masahiro Saruta ,  Tetsuji Sagisaka ,  Kazunari Maeda ,  Takumi Yashiki

Inventor： Masahiro Saruta ,  Tetsuji Sagisaka ,  Kazunari Maeda ,  Takumi Yashiki

IPC: B23K26/08 ,  G01N21/88 ,  G01N21/95 ,  G02F1/13 ,  G05B19/401

CPC classification number: G05B19/401 ,  B23K26/0853 ,  G01N21/88 ,  G02F1/1309 ,  G01N2021/9513 ,  G01N2201/103 ,  G05B2219/45165 ,  G05B2219/50064

Abstract: A laser processing device includes a Z stage movable in the up and down directions with respect to a XY stage movable in the X, Y directions on which an object to be processed is provided. The surface of the object to be processed is image-sensed by a CCD camera through a lens of an electrically-driven revolver attached to the Z stage, which is projected in a monitor. When a defect of the object is displayed in the monitor, a laser beam is radiated to a defective portion of the object from a laser head provided in the Z stage and the defective portion is removed.

公开(公告)号：US5086232A

公开(公告)日：1992-02-04

申请号：US547467

申请日：1990-06-29

Applicant: Sean P. J. Maguire ,  Kandiah Sivayoganathan ,  Velupillai Balendran

Inventor： Sean P. J. Maguire ,  Kandiah Sivayoganathan ,  Velupillai Balendran

IPC: G01B11/30 ,  G01N21/55 ,  G01N21/57 ,  G01N21/84 ,  G01N21/88 ,  G01N21/89 ,  G01N21/892 ,  G01N21/95 ,  G06T1/00

CPC classification number: G01N21/8806 ,  G01N2021/4726 ,  G01N2021/556 ,  G01N21/9515 ,  G01N2201/103

Abstract: A method of inspecting a surface of a member such as a motor vehicle body panel includes the steps of setting up the member at an inspection site, directing light on to the surface at a high angle of incidence so as to form a transverse trace across the surface and to reflect light from the surface with a low angle of deflection to form an image of the trace on a detection screen. A record of the image is produced. The trace is also viewed and recorded directly from a position substantially perpendicular to the surface. The records of the image and of the trace are analysed together to give an indication of the nature of the surface at the trace. The light is scanned in relation to the member to form further transverse traces across the member and the new traces and images are also analysed.

公开(公告)号：US4943732A

公开(公告)日：1990-07-24

申请号：US394674

申请日：1989-08-16

Applicant: Nicholas P. Economou

Inventor： Nicholas P. Economou

IPC: G01N21/88 ,  G01N21/95 ,  G02F1/13

CPC classification number: G02F1/1309 ,  G01N21/88 ,  G01N2021/8893 ,  G01N2021/9513 ,  G01N2201/103

Abstract: Methods and apparatus for locating defects in liquid crystal display (LCD) panels include scanning the panel with a laser, detecting reflected, refracted, scattered or transmitted light, and processing signals representative of the detected light utilizing a digital processor, to detect discontinuities in the arrays of LCD elements on the panel.

Abstract translation: 用于定位液晶显示器（LCD）面板中的缺陷的方法和设备包括用激光扫描面板，检测反射，折射，散射或透射的光，以及利用数字处理器处理表示检测到的光的信号，以检测在 面板上的LCD元件阵列。

公开(公告)号：US4845552A

公开(公告)日：1989-07-04

申请号：US087387

申请日：1987-08-20

Applicant: Bruno Jaggi ,  Mohammed J. Deen ,  Branko Palcic

Inventor： Bruno Jaggi ,  Mohammed J. Deen ,  Branko Palcic

IPC: G01N21/59 ,  G02B21/00

CPC classification number: G02B21/002 ,  G01N21/5911 ,  G01N2021/5938 ,  G01N2021/5957 ,  G01N2201/103

Abstract: A solid state microscope for viewing and scanning microscopic objects. The solid state microscope has a light source with a condensor and diffusion filter. A moveable stage is provided to allow X, Y, Z plane displacements in order to scan objects under the microscope. There is an objective to magnify the image of the object and project this image onto a two dimensional solid state image sensor. The solid state image sensor sends signals to an analog-to-digital converter where the signals are digitized and sent to a frame memory. A monitor is used to display the image of the object as stored in frame memory. The present invention can be interfaced with a computer to allow for automatic focusing and scanning of an image. The computer also houses storage means to store images. Methods of scanning an object are also described. A prism element can be used to obtain spectral scans of an object. In another scanning method, a first edge row of pixels is used to detect an object of interest in the scanned image. This first detection row activates an area of the sensor array at a later time to capture the entire image. In this way, only relevant information is collected and processed.

Abstract translation: 用于观察和扫描微观物体的固态显微镜。 固态显微镜具有带有聚光器和扩散滤光片的光源。 提供可移动台以允许X，Y，Z平面位移，以便在显微镜下扫描物体。 目的是放大对象的图像并将该图像投影到二维固态图像传感器上。 固态图像传感器将信号发送到模数转换器，其中信号被数字化并发送到帧存储器。 显示器用于显示存储在帧存储器中的对象的图像。 本发明可以与计算机接口以允许图像的自动聚焦和扫描。 计算机还容纳存储图像的存储装置。 还描述了扫描对象的方法。 可以使用棱镜元件来获得物体的光谱扫描。 在另一种扫描方法中，第一边缘像素行用于检测扫描图像中的感兴趣对象。 该第一检测行在稍后时间激活传感器阵列的区域以捕获整个图像。 这样，只收集和处理相关信息。

公开(公告)号：US4689491A

公开(公告)日：1987-08-25

申请号：US725082

申请日：1985-04-19

Applicant: James T. Lindow ,  Simon D. Bennett ,  Ian R. Smith ,  Gary A. Melmon

Inventor： James T. Lindow ,  Simon D. Bennett ,  Ian R. Smith ,  Gary A. Melmon

IPC: H01L21/66 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G02B21/00 ,  H01L21/027 ,  H01L21/30

CPC classification number: G02B21/006 ,  G01N21/956 ,  G02B21/0052 ,  G01N21/9501 ,  G01N2201/103

Abstract: A semiconductor wafer scanning system includes a confocal optical imaging system with a laser beam being focused on a small spot on the wafer surface to be scanned. The optics include an objective lens located closest to the wafer with means being provided to vary the spacing of the lens from the wafer over small distances to thus change the focal plane of the system. The wafer may be independently driven in two orthogonal directions in a plane generally perpendicular to the imaging system to bring selected portions thereof into view of the optics. During scanning, the wafer is rapidly vibrated in one of the directions while it is slowly moved in the other direction with a series of digital output signals being provided by the light reflected back from the laser spot on the moving wafer to provide precise information for constructing a three dimensional representation of the surface pattern of the wafer.

Abstract translation: 半导体晶片扫描系统包括共聚焦光学成像系统，其中激光束聚焦在要扫描的晶片表面上的小点上。 光学器件包括位于最靠近晶片的物镜，其具有用于在较小距离上改变透镜与晶片的间隔，从而改变系统的焦平面。 晶片可以在大致垂直于成像系统的平面中在两个正交方向独立地驱动，以将其选定的部分带入光学器件的视野。 在扫描期间，晶片在其中一个方向上快速振动，同时沿着另一个方向缓慢移动，一系列数字输出信号由从移动晶片上的激光点反射回来的光提供，以提供用于构造的精确信息 晶片的表面图案的三维表示。

公开(公告)号：US20240280506A1

公开(公告)日：2024-08-22

申请号：US18409698

申请日：2024-01-10

Applicant: Applied Materials Israel Ltd.

Inventor： Elad EIZNER ,  Haim FELDMAN ,  Boris GOLBERG ,  Ron NAFTALI ,  Keith WELLS

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/06113 ,  G01N2201/103

Abstract: Implementations disclosed describe, among other things, a sample inspection system that includes an illumination subsystem to illuminate a sample with a plurality of time-spaced light pulses generated, using a pulse multiplexing system, from a source light pulse. The pulse multiplexing system includes a plurality of optical loops, each deploying an optical coupler that outputs a first portion of incident light to a sample and provides a second portion of incident light as an input into the next optical loop. The sample inspection system further includes a collection subsystem to collect a portion of light generated upon interaction of the plurality of time-spaced light pulses with the sample, and a light detection subsystem to detect the collected portion of light.

公开(公告)号：US20230316842A1

公开(公告)日：2023-10-05

申请号：US18017312

申请日：2021-07-08

Applicant: GIESECKE+DEVRIENT CURRENCY TECHNOLOGY GMBH

Inventor： Wolfgang RAUSCHER

IPC: G07D7/1205 ,  G01N21/64 ,  G07D7/121

CPC classification number: G07D7/1205 ,  G01N21/6408 ,  G01N21/643 ,  G07D7/121 ,  G01N2201/103 ,  G07D2207/00

Abstract: AMENDMENT TO THE ABSTRACT Please replace the Abstract in the application with the following Abstract, insert the following after the claims:
ABSTRACT A method for checking value documents, in particular with regard to their authenticity and/or with regard to their value-document type, involves the following steps: detecting a first plurality of intensity courses on a value document, combining the first plurality of intensity courses or a second plurality of intensity courses selected from the first plurality into a combined intensity course, determining a time constant τ of the combined intensity course, checking the value document based on the time constant τ of the combined intensity course. A corresponding sensor is provided for checking value documents, and an apparatus enables value-document processing with the aforementioned sensor.

公开(公告)号：US20230258577A1

公开(公告)日：2023-08-17

申请号：US18153036

申请日：2023-01-11

Applicant: SHIN-ETSU HANDOTAI CO., LTD.

Inventor： Shigeru Oba

IPC: G01N21/95 ,  G01N21/47 ,  H01L21/66

CPC classification number: G01N21/9503 ,  G01N21/4738 ,  H01L22/12 ,  G01N2021/4783 ,  G01N2201/101 ,  G01N2201/103

Abstract: An edge portion measuring apparatus for measuring shape of an edge portion of a wafer, including, a holding portion that holds the wafer, a rotating means for rotating the wafer, a sensor including a light projecting portion for projecting a laser light from a light source onto the edge portion of the wafer held by the holding portion, and a light receiving detection unit receiving diffuse reflected light that the laser light projected is reflected at the edge portion of the wafer, wherein, rotating the wafer while holding the wafer, at least in a range from normal direction of a held surface of the wafer to normal direction of a surface opposite to the held surface, projecting the laser light and detecting the diffuse reflected light by the sensor, being able to measure the shape of an entire area of the edge portion of the wafer by a triangulation method.

公开(公告)号：US20180180404A1

公开(公告)日：2018-06-28

申请号：US15388743

申请日：2016-12-22

Applicant: The Boeing Company ,  FemtoMetrix, Inc.

Inventor： Jeffrey H. Hunt ,  Jianing Shi ,  John Paul Changala

IPC: G01B11/24

CPC classification number: G01B11/24 ,  G01J3/10 ,  G01J3/108 ,  G01J3/44 ,  G01J2003/102 ,  G01N21/636 ,  G01N21/65 ,  G01N2021/638 ,  G01N2021/655 ,  G01N2201/103 ,  G01N2201/105

Abstract: Surface sensing systems and methods for imaging a scanned surface of a sample via sum-frequency vibrational spectroscopy are disclosed herein. The systems include a sample holder, a visible light source configured to direct a visible light beam incident upon a sampled location of the scanned surface and a tunable IR source configured to direct a tunable IR beam coincident with the visible light beam upon the sampled location. The systems also include a scanning structure configured to scan the visible light beam and the tunable IR beam across the scanned surface, and a light filter configured to receive an emitted beam from the scanned surface and to filter the emitted beam to generate a filtered light beam. The systems further include a light detection system configured to receive the filtered light beam, and an alignment structure. The methods include methods of operating the systems.