公开(公告)号：US20240280506A1

公开(公告)日：2024-08-22

申请号：US18409698

申请日：2024-01-10

Applicant: Applied Materials Israel Ltd.

Inventor： Elad EIZNER ,  Haim FELDMAN ,  Boris GOLBERG ,  Ron NAFTALI ,  Keith WELLS

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/06113 ,  G01N2201/103

Abstract: Implementations disclosed describe, among other things, a sample inspection system that includes an illumination subsystem to illuminate a sample with a plurality of time-spaced light pulses generated, using a pulse multiplexing system, from a source light pulse. The pulse multiplexing system includes a plurality of optical loops, each deploying an optical coupler that outputs a first portion of incident light to a sample and provides a second portion of incident light as an input into the next optical loop. The sample inspection system further includes a collection subsystem to collect a portion of light generated upon interaction of the plurality of time-spaced light pulses with the sample, and a light detection subsystem to detect the collected portion of light.