Method and system for spatial filtering of an extended radiation source
with chromatic aberration of imaging optics in single-element detector
measurement for monitoring of the extended radiation source
    141.
    发明授权
    Method and system for spatial filtering of an extended radiation source with chromatic aberration of imaging optics in single-element detector measurement for monitoring of the extended radiation source 失效
    用于监测扩展辐射源的单元件检测器测量中的成像光学器件的色差的扩展辐射源的空间滤波方法和系统

    公开(公告)号:US5875026A

    公开(公告)日:1999-02-23

    申请号:US763752

    申请日:1996-12-11

    CPC classification number: G01J1/42 G01J1/06

    Abstract: A method and system is disclosed in which the local variation of an extended radiation source is monitored with single-element detector. The chromatic aberration of the imaging optics induces the different transmittance curves for different wavelengths, and the different shape in the transmittance curve is used as a spatial filter which is multiplied to the chromatic intensity profile of the extended radiation source to detect the local variation in the intensity profile of the extended radiation source. The signal processing of the chromatic signals is implemented to detect the size variation and the environmental effects on the extended radiation source. A fiber is also used for remote operation.

    Abstract translation: 公开了一种方法和系统,其中利用单元件检测器监测扩展辐射源的局部变化。 成像光学器件的色差引起不同波长的不同透射率曲线,并且将透射率曲线中的不同形状用作空间滤波器,该空间滤波器与扩展辐射源的色度分布相乘以检测扩展辐射源中的局部变化 扩展辐射源的强度分布。 实施彩色信号的信号处理以检测尺寸变化和对扩展辐射源的环境影响。 光纤也用于远程操作。

    Semiconductor device manufacturing apparatus
    142.
    发明授权
    Semiconductor device manufacturing apparatus 失效
    半导体装置制造装置

    公开(公告)号:US5275629A

    公开(公告)日:1994-01-04

    申请号:US762355

    申请日:1991-09-19

    CPC classification number: H01L21/67115 C23C16/481 Y10T29/41

    Abstract: A semiconductor device manufacturing apparatus has a first space and a second space in a process chamber in which a semiconductor wafer is accommodated, the first and second spaces being separated by the semiconductor wafer. A process gas port opens into the first space adjacent to the obverse surface of the semiconductor wafer, and an infrared light transmission window is formed in a wall of the chamber at the second space facing the reverse surface of the semiconductor wafer. No layers are deposited on the reverse surface of the semiconductor wafer and the infrared light transmission window so that the emissivity at the reverse surface of the semiconductor wafer is not changed during layer deposition. The temperature during processing can therefore be monitored accurately with a pyrometer, and a reduction in the transmissivity of the window is prevented.

    Abstract translation: 半导体器件制造装置在其中容纳有半导体晶片的处理室中具有第一空间和第二空间,第一和第二空间被半导体晶片隔开。 处理气体通道向与半导体晶片的正面相邻的第一空间开口,并且在面向半导体晶片的背面的第二空间处,在室的壁上形成红外光透射窗。 在半导体晶片和红外光透射窗的反面上没有层沉积,使得在层沉积期间半导体晶片的反面的发射率不变。 因此,可以用高温计精确地监测加工过程中的温度,并且防止窗口的透射率的降低。

    Thermal energy proximity detector
    143.
    发明授权
    Thermal energy proximity detector 失效
    热能接近检测器

    公开(公告)号:US4691105A

    公开(公告)日:1987-09-01

    申请号:US740798

    申请日:1985-06-03

    CPC classification number: F42C13/02 Y10S250/01

    Abstract: A proximity sensor comprising a thermal detector responding to the rate of change of a thermal input and connected to circuitry for performing a control function when the detector output becomes zero, which occurs when a target being approached by the detector fills the field of view of the detector.

    Abstract translation: 一种接近传感器,其包括响应于热输入的变化率并且连接到电路的热检测器,所述热检测器在检测器输出变为零时执行控制功能,当检测器接近目标时,该检测器填充了视场 探测器。

    SAFE VISUAL RECOGNITION-BASED METHOD FOR STANDARD MEASUREMENT/CALCULATION OF DAYTIME TUNNEL ENTRANCE SECTION ILLUMINATION, AND SYSTEM THEREOF
    147.
    发明公开
    SAFE VISUAL RECOGNITION-BASED METHOD FOR STANDARD MEASUREMENT/CALCULATION OF DAYTIME TUNNEL ENTRANCE SECTION ILLUMINATION, AND SYSTEM THEREOF 审中-公开
    SICHERES AUF VISUELLER ERKENNUNG BASIERTES VERFAHRENFÜRSTANDARDMESSUNG / -BERECHNUNG VON TAGESZEITTUNNELEINGANGSBELEUCHUNG UND SYSTEMDAFÜR

    公开(公告)号:EP3187850A4

    公开(公告)日:2017-09-20

    申请号:EP15853969

    申请日:2015-10-15

    CPC classification number: H05B37/0218 Y02B20/46

    Abstract: The invention relates to an illumination standard calculation method for a tunnel entrance section in daytime based on safe visual recognition. The method includes: (a) setting light environment parameters of the tunnel entrance section; (b) determining a feature position in the tunnel, and measuring the average road surface brightness L of the feature position; (c) placing a target object in the feature position and then making a driver drive at different speeds from outside the tunnel towards the target object to measure visual recognition distances D required by the driver to visually discover the target object under different driving speeds, and measuring the road surface brightness L 20 at the position where the driver visually discovers the target object and calculating the brightness reduction factor K to be the ratio between L and L 20 ; (d) resetting the average road surface brightness L of the tunnel entrance section and repeating steps (b) and (c) to obtain a plurality of different sets of visual recognition distances D and corresponding brightness reduction factors K; (e) using Sigmoid function model to calculate and fit the data of the plurality of sets of D and K to obtain a relational model formula of D and K: D = 215 1 + e ˆ’ 70 K + 96 + 27.6 ; (f) substituting a safe stopping sight distance D 0 corresponding to a maximum speed limit of the tunnel into the formula to obtain the minimum brightness reduction factor K 0 of the tunnel entrance section in daytime. The invention also relates to a system for implementing the illumination standard calculation method for a tunnel entrance section in daytime based on safe visual recognition.

    Abstract translation: 本发明涉及一种基于安全视觉识别的白天隧道入口段照明标准计算方法。 该方法包括:(a)设定隧道入口部分的光环境参数; (b)确定隧道中的特征位置,并测量特征位置的平均路面亮度L; (c)将目标物体放置在特征位置,然后以不同的速度从隧道外朝向目标物体驱动,以测量驾驶员在不同的驾驶速度下视觉发现目标物体所需的视觉识别距离D,以及 测量驾驶员目视发现目标物体的位置处的路面亮度L 20,并计算亮度降低因子K为L与L 20之间的比率; (d)重置隧道入口部分的平均路面亮度L,并重复步骤(b)和(c)以获得多组不同的视觉识别距离D和相应的亮度降低因子K; (e)用Sigmoid函数模型计算并拟合多组D和K的数据,得到D和K的关系模型公式:D = 215 1 + e'70 K + 96 + 27.6; (f)将对应于隧道最大速度限制的安全停止视距D 0代入公式中以获得白天隧道入口部分的最小亮度减小因子K 0。 本发明还涉及一种基于安全视觉识别实现白天隧道入口段照度标准计算方法的系统。

    Apparatus and method for equalizing illumination of light sources for digital image test member, and apparatus and method for testing color of digital image
    148.
    发明公开
    Apparatus and method for equalizing illumination of light sources for digital image test member, and apparatus and method for testing color of digital image 有权
    装置和方法,用于均衡的用于数字图像的测试对象以及装置和方法的光源的照明用于测试数字图像的颜色

    公开(公告)号:EP1933083A1

    公开(公告)日:2008-06-18

    申请号:EP07010329.6

    申请日:2007-05-24

    CPC classification number: G01J1/28 F21K9/00 F21S8/00 G03B15/07

    Abstract: An illumination equalizing device includes a polygonal rotary column (200) disposed in a sealed space, equipped with light sources, and rotatable at specific angular intervals, light sources (210) radiating light onto an image test member (220) attached to a wall of the sealed space for testing a digital image, the light sources (210) mounted on side surfaces of the polygonal rotary column (200), illuminometers (222, 224, 225, 227, 229) measuring illumination values of light radiated onto the image test member (220), and a rotary column control unit (260) rotating the polygonal rotary column (200) at set angular intervals so that the illumination values measured by the illuminometers (222, 224, 225, 227, 229) are equalized. A method for equalizing the illumination of light sources (210) for a digital image test member (220), and an apparatus and method for testing the color of a digital image uses the illumination equalizing device.

    Abstract translation: 照明均匀化装置包括:在一个密封的空间设置在多边形旋转柱(200),配备有光源,并且在特定的角度间隔可转动的基础上,光源(210)照射光连接到的壁的图像的测试构件(220) 用于测试的数字图像的密封空间中,光源安装在所述多边形旋转柱的侧表面(210)(200)照度计(222,224,225,227,229)测量光的照度值照射到图像测试 构件(220),和旋转在设定的角度间隔多边形旋转柱(200),使得管芯DASS通过照度计测量到的照明值的旋转柱控制单元(260)(222,224,225,227,229)相等。 一种用于均衡的光源(210),用于数字图像的测试构件(220)的照明,以及装置和方法用于测试数字图像的颜色的方法使用的照明均衡装置。

    SAFE VISIBILITY-BASED METHOD AND SYSTEM FOR MEASURING AND ESTIMATING LIGHTING STANDARDS IN TUNNEL MIDSECTIONS
    150.
    发明公开
    SAFE VISIBILITY-BASED METHOD AND SYSTEM FOR MEASURING AND ESTIMATING LIGHTING STANDARDS IN TUNNEL MIDSECTIONS 审中-公开
    用于测量和照明标准的计算在隧道中部地区SAFEVISIBILITÄTSBASIERTES的方法和系统

    公开(公告)号:EP3182077A1

    公开(公告)日:2017-06-21

    申请号:EP15853741.5

    申请日:2015-10-15

    Abstract: This invention relates to an illumination standard calculation method for a tunnel middle section based on safe visual recognition: (a) Setting the light environment of the tunnel middle section; (b) Placing a target object in the tunnel middle section; (c) Making a driver drive a motor vehicle at different speeds toward the target object, and measuring the visual recognition distances D required by the driver to visually discover the target object at different speeds; (d) Resetting the average brightness L of the tunnel middle section and repeating the steps (b) and (c) to obtain a plurality of different sets of visual recognition distances D and corresponding brightness values L; (e) Using the S model to fit the data of the plurality of sets of visual recognition distances D and brightness values L to obtain the formula of the relational model of D and L to be L=0.683/(5.575-In(D)); (f) Substituting a safe stopping sight distance D 0 corresponding to a maximum speed limit of the tunnel into the model formula to obtain the dynamic minimum brightness value L 0 required for the tunnel middle section under this tunnel light environment. The method improves the accuracy of safety evaluation of the tunnel middle section brightness, and the method is simple and convenient, and provides a reference basis for the road traffic safety research. The invention also provides a system for implementing this method.

    Abstract translation: 本发明涉及在基于安全视觉识别的隧道中间部分照明标准计算方法,包括:(a)设置在隧道中间部分的光环境; (B)放置在隧道中间段的目标对象; (C)使驱动器在朝向目标对象不同的速度驱动的机动车辆,并测量视觉识别距离所要求的驾驶员D在视觉上发现以不同的速度在目标对象; (D)复位隧道中间部分的平均亮度L和重复所述步骤(b)和(c),以获得不同组的视觉识别的多个距离D和对应的亮度值L, (E)使用S模型以适合的套视觉识别的所述多个数据的距离D和亮度值L,以获得D和L的关系模型的公式为L = 0.683 /(5.575-在(D) ); (F)代安全停止视线距离D 0对应于最大速度极限隧道到模型公式来获得动态最小brightnessvalue L0此隧道光环境下的隧道中间部分必需的。 该方法提高了隧道中间段亮度的安全性评价的准确性,且方法简单方便,并提供道路交通安全研究提供参考基础。 因此本发明提供用于实施该方法的系统。

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