公开(公告)号：DK73582A

公开(公告)日：1982-02-19

申请号：DK73582

申请日：1982-02-19

Applicant: HANLET J M

Inventor： HANLET J M

IPC: H01J61/00 ,  H01J20060101 ,  H01J17/49 ,  H01J61/02 ,  H01J61/067 ,  H01J61/09 ,  H01J61/16 ,  H01J61/38 ,  H01J61/42 ,  H01J61/54 ,  H01J61/70 ,  H01J61/76 ,  H01J61/78 ,  H01J63/08

Abstract: In a preferred embodiment a lighting system contains a cathode 12 with an external surface 34 coated with an external cathode film 40 for the emission of electrons. A first anode 14 runs inside the cathode 12 to heat up the cathode in order to emit electrons from the external surface 34. A second anode 16 is arranged outside the cathode 12 to accelerate the electrons which are emitted from the external surface 34 of the cathode. A bulb body 18 surrounds the cathode 12, the first anode 14 and the second anode 16 in a hermetic seal. The bulb body contains a predetermined gas composition, the atoms of which are ionized by the electrons emitted by the cathode. The ionized atoms in the gas composition emit rays in the ultraviolet bandwidth of the electromagnetic spectrum. The bulb body 18 is coated with a fluorescing material 20 to trap the ultraviolet energy originating from the ionization of the atoms in the gas composition. The fluorescing material 20 emits rays in the visible bandwidth in the electromagnetic spectrum and emits a visible light.

公开(公告)号：IL62756D0

公开(公告)日：1981-06-29

申请号：IL6275681

申请日：1981-04-30

Applicant: HANLET J

IPC: H01J61/00 ,  H01J20060101 ,  H01J17/49 ,  H01J61/02 ,  H01J61/067 ,  H01J61/09 ,  H01J61/16 ,  H01J61/38 ,  H01J61/42 ,  H01J61/54 ,  H01J61/70 ,  H01J61/76 ,  H01J61/78 ,  H01J63/08 ,  F21V

Abstract: An improved lighting system (10) which in the preferred embodiment includes a cathode (12) having an external surface (34) being coated with a cathode outside film (40) for emitting electrons therefrom. A first anode (14) extends internal to the cathode (12) for heating the cathode (12) to thereby emit electrons from the external surface (34). A second anode (16) is positionally located external to the enclosed cathode (12) for accelerating the electrons emitted from the cathode external surface (34). A bulb member (18) encompasses the cathode (12), the first anode (14), and the second anode (16) in a hermetic type seal. The bulb member (18) has a predetermined gas composition contained therein with the gas composition atoms being ionized by the cathode emitted electrons. The gas composition ionized atoms radiate in the ultraviolet bandwidth of the electromagnetic spectrum. The bulb member (18) is coated with a fluorescent material (20) for intercepting the ultraviolet energy responsive to the ionization of the gas composition atoms. The fluorescent material (20) radiates in the visible bandwidth of the electromagnetic spectrum to give a visible light output.

公开(公告)号：EP2754213A1

公开(公告)日：2014-07-16

申请号：EP12830191.8

申请日：2012-09-06

Applicant: Kla-Tencor Corporation

Inventor： DELGADO, Gildardo ,  WACK, Daniel

IPC: H01S3/0977 ,  H01J63/08

CPC classification number: G03F7/70033 ,  H05G2/005 ,  H05G2/008

Abstract: A method and apparatus for generating extreme ultraviolet (EUV) light is disclosed. The method may comprise non-thermally ablating a target material utilizing a first laser beam. The first laser beam may be configured for ejecting a portion of the target material in a non-thermal manner to create a plume. The method may further comprise irradiating the plume utilizing a second laser beam to produce a high-temperature plasma for EUV radiation.

公开(公告)号：EP2487706A4

公开(公告)日：2014-01-08

申请号：EP10821761

申请日：2010-02-23

Applicant: HITACHI LTD

Inventor： SAGAWA MASAKAZU ,  IMAMURA SHIN ,  KUSUNOKI TOSHIAKI

IPC: H01J63/08 ,  H01J11/22 ,  H01J11/34 ,  H01J11/50 ,  H01J17/04 ,  H01J17/06 ,  H01J17/20 ,  H01J17/49 ,  H01J61/16 ,  H01J61/30 ,  H01J65/04

CPC classification number: H01J17/00 ,  H01J11/22 ,  H01J11/34 ,  H01J11/50 ,  H01J17/04 ,  H01J17/066 ,  H01J17/20 ,  H01J17/49 ,  H01J61/16 ,  H01J65/04

公开(公告)号：EP1955362A2

公开(公告)日：2008-08-13

申请号：EP06851596.4

申请日：2006-10-17

Applicant: University of Washington

Inventor： SHUMLAK, Uri ,  GOLINGO, Raymond ,  NELSON, Brian A.

IPC: H01J63/08

CPC classification number: H05G2/003

Abstract: Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.

公开(公告)号：EP1936661A1

公开(公告)日：2008-06-25

申请号：EP07254891.0

申请日：2007-12-17

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Li, Jung-Yu ,  Chen, Shih-Pu ,  Lin, Yi-Ping ,  Lin, Wei-Chih ,  Cho, Lian-Yi

IPC: H01J61/62 ,  H01J63/08

CPC classification number: H01J61/62 ,  H01J63/06 ,  H01J63/08

Abstract: An electron emission light-emitting device includes a cathode structure, an anode structure, a fluorescent layer, and a low-pressure gas layer. The fluorescent layer is located between the cathode structure and the anode structure. The low-pressure gas layer is filled between the cathode structure and the anode structure, having a function of inducing the cathode to emit electron uniformly. The low-pressure gas layer has an electron mean free path, allowing at least sufficient amount of electrons to directly impinge the fluorescent layer under an operation voltage.

Abstract translation: 电子发射发光器件包括阴极结构，阳极结构，荧光层和低压气体层。 荧光层位于阴极结构和阳极结构之间。 低压气体层被填充在阴极结构和阳极结构之间，具有使阴极均匀地发射电子的功能。 低压气体层具有电子平均自由程，允许至少足够量的电子在操作电压下直接照射荧光层。

公开(公告)号：EP1049136A4

公开(公告)日：2002-04-17

申请号：EP98961489

申请日：1998-12-22

Applicant: HAMAMATSU PHOTONICS KK

Inventor： IKEDO TOMOYUKI ,  ADACHI KOUZOU ,  ITO YOSHINOBU ,  MATUI RYOTARO

IPC: H01J61/10 ,  H01J61/30 ,  H01J61/35 ,  H01J61/68 ,  H01J63/02 ,  H01J63/08 ,  H01J5/20 ,  H01J61/36

CPC classification number: H01J61/302 ,  H01J61/10 ,  H01J61/30 ,  H01J61/35 ,  H01J61/68 ,  H01J63/02 ,  H01J63/08

Abstract: A gas discharge tube (1), wherein a side tube member (14) is formed of glass with a metal employed for joint portions of a stem (4) and side tube member (14), so as to prolong the lifetime of the discharge tube while lowering a discharge tube assembling temperature, a first metal circumferential portion (15) provided on the stem (4) and a second metal circumferential portion (16) provided on the side tube member (14) being utilized as the joint portions, this enabling the discharge tube (1) to be miniaturized.

公开(公告)号：EP1043755A4

公开(公告)日：2002-04-17

申请号：EP98961487

申请日：1998-12-22

Applicant: HAMAMATSU PHOTONICS KK

Inventor： IKEDO TOMOYUKI ,  ADACHI KOUZOU ,  ITO YOSHINOBU ,  MATUI RYOTARO

IPC: H01J61/10 ,  H01J61/30 ,  H01J61/35 ,  H01J61/68 ,  H01J63/02 ,  H01J63/08 ,  H01J5/08

CPC classification number: H01J61/302 ,  H01J61/10 ,  H01J61/30 ,  H01J61/35 ,  H01J61/68 ,  H01J63/02 ,  H01J63/08

Abstract: A gas discharge tube (1) having a layer of coating (21) comprising a glass material or a ceramic material on either or both of an inner surface (22A) and an outer surface (22B) of a side tube body (22), so that the side tube body (22) can be formed of various materials irrespective of the nature of a gas sealed in the interior of the gas discharge tube, this enabling the diversification of the worked shape of the gas discharge tube and the miniaturization of the same tube to be compatible with each other, and the mass production thereof to be carried out freely.

公开(公告)号：EP1113483A4

公开(公告)日：2002-04-10

申请号：EP98961484

申请日：1998-12-22

Applicant: HAMAMATSU PHOTONICS KK

Inventor： IKEDO TOMOYUKI ,  ADACHI KOUZOU ,  ITO YOSHINOBU ,  MATUI RYOTARO

IPC: H01J61/10 ,  H01J61/68 ,  H01J63/02 ,  H01J63/08 ,  G01J3/10

CPC classification number: H01J63/02 ,  H01J61/10 ,  H01J61/68 ,  H01J63/08

Abstract: A gas discharge tube, wherein a stem (4) forming a sealed case for the gas discharge tube is provided with a flange portion (4A) integral therewith, this enabling a lamp assembling operation to be simplified without requiring an operation for combining and fixing the flange portion (4A) with and to the gas discharge tube, the gas discharge tube to be easily mass-produced, and, moreover, a positioning hole (22) provided in advance in the flange (4A) to be utilized to fix the gas discharge tube (1) to an external stem setting portion (17), whereby a more accurate lamp setting operation can be carried out.

公开(公告)号：EP1043756A4

公开(公告)日：2002-04-10

申请号：EP98961488

申请日：1998-12-22

Applicant: HAMAMATSU PHOTONICS KK

Inventor： IKEDO TOMOYUKI ,  ADACHI KOUZOU ,  ITO YOSHINOBU ,  MATUI RYOTARO

IPC: H01J61/10 ,  H01J61/30 ,  H01J61/35 ,  H01J61/68 ,  H01J63/02 ,  H01J63/08

CPC classification number: H01J61/10 ,  H01J61/30 ,  H01J61/302 ,  H01J61/35 ,  H01J61/68 ,  H01J63/02 ,  H01J63/08

Abstract: A gas discharge tube (1), wherein a side tube member (22) is formed of a metal, a metal joint portion (15b) being provided on an outer circumferential portion of a stem (4) and combined with a joint portion (16) of the side tube member (22), which comprises a metal, by welding, whereby it becomes possible to attain the facilitation of an assembling operation owing to the welding method, as well as the miniaturization of the gas discharge tube (1) itself, the handling efficiency of the gas discharge tube being also improved greatly since the side tube member (22) is formed to small dimensions and made of a metal, the side tube member (22) made of a metal promoting the diversification of the shape of the gas discharge tube (1) and promising mass-production thereof.

Abstract translation: 一种气体放电管（1），其中侧管件（22）由金属形成，金属接头部分（15b）设置在管座（4）的外圆周部分上并与接头部分（16） ）通过焊接而构成侧管构件（22），由此，能够实现基于焊接方法的组装作业的容易化和气体放电管（1）本身的小型化 由于侧管构件22形成为小尺寸并且由金属制成，所以气体放电管的处理效率也大大提高，侧管构件22由金属制成，促进了形状的多样化 气体放电管（1）以及有希望的大规模生产。