Abstract:
La présente invention se rapporte à un appareil générateur d'ozone pour la stérilisation ou la désinfection dans lequel l'ozone est généré sous forme gazeuse par décharge corona dans un générateur haute tension à partir d'air, caractérisé en ce qu'il comprend des moyens pour réchauffer et propulser un gaz inerte initialement sous forme liquide et le mélanger à l'ozone produit, de sorte que le gaz inerte constitue un gaz porteur de l'ozone sortant de l'appareil sous forme d'un mélange à une pression totale comprise entre 2 et 10 bar et à une température inférieure d'au moins 10°C à la température ambiante.
Abstract:
There are obtained an ozone generator system and an ozone generating method of high concentration and high efficiency in which a raw material gas added with no nitrogen and mainly containing an oxygen gas is used and the amount of generation of NO x by-product is null. A raw material gas 25 not containing nitrogen and mainly containing an oxygen gas is supplied into an ozone generator 300, an AC voltage is applied to produce discharge light having at least a light wavelength of 428 nm to 620 nm, a photocatalytic material containing a photocatalytic material 303 with a band gap of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, a gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.
Abstract:
An ozone generating apparatus is provided, which comprises an ozone generating unit including tow electrodes (2, 31) mutually opposed to generate discharge in response to high voltage applied therebetween, a dielectric (4) interposed between the electrodes and a gas supply mechanism to supply an oxygen-rich gas between the electrodes (2, 31) so as to generate ozone by the discharge. The discharge space (5) has a gas pressure of 101325 Pa (1 atm) or more and a discharge gap length of 0,6 mm or less. Further the product of the gas pressure and the discharge gap length is about 10 4 Pa·cm (75 Torr·cm) or less.
Abstract:
An ozone generating apparatus comprises at least one ozone generating unit which includes:
two electrode (2, 31) mutually opposed to generate a discharge in response to high voltage applied therebetween; at least one dielectric (4) interposed between the electrodes to provide
Abstract:
An ozone generating apparatus comprises at least one ozone generating unit which includes:
two electrodes mutually (2, 31) which are opposed to generate a discharge in response to high voltage applied therebetween; at least one dielectric (4) interposed between the electrodes to provide insulation between the electrodes; and a gas supply mechanism to supply an oxygen-containing gas between the electrodes so as to generate ozone by the discharge. In this unit a spacer (61) is inserted into a discharge space (5) causing the discharge to ensure a predetermined distance or more between the electrodes of the ozone generating unit, and the spacer forms a non-discharge portion where no discharge occurs.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a frst process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
A silent discharge plasma apparatus includes a dielectric member, paired electrodes opposed against each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing discharge. A gas is supplied to a discharge space, where discharge should occur, and plasma is accordingly created. At least one of the electrodes is formed by a conductive power feeding thin film which is formed on the dielectric member, and when the dielectric member is destroyed and arc discharge develops between the electrodes, the power feeding thin film on which the arc discharge develops is eliminated or oxidized, and creation of the arc discharge is stopped.
Abstract:
An ozone generating apparatus is provided, which comprises an ozone generating unit including tow electrodes (2, 31) mutually opposed to generate discharge in response to high voltage applied therebetween, a dielectric (4) interposed between the electrodes and a gas supply mechanism to supply an oxygen-rich gas between the electrodes (2, 31) so as to generate ozone by the discharge. The discharge space (5) has a gas pressure of 101325 Pa (1 atm) or more and a discharge gap length of 0,4 mm or less. Further the product of the gas pressure and the discharge gap length is about 4000 Pa · cm (30 Torr · cm) or less.