Abstract:
In the present invention, particularly, means for removing moisture contained in a raw material gas is provided in a raw material gas supply part so that the amount of moisture contained in the raw material gas that is supplied to an ozone gas supply system is reduced, and additionally an ozone gas output flow rate management unit is provided that is configured to receive a plurality of ozone gas outputs from a plurality of nitrogen-free ozone generation units and capable of performing an ozone gas output flow rate control for selectively outputting one or a combination of two or more of the plurality of ozone gas outputs to any of a plurality of ozone treatment apparatuses by performing an opening/closing operation on a plurality of ozone gas control valves provided in the ozone gas output flow rate management unit.
Abstract:
An ozone generating apparatus for making a temperature distribution in a dielectric tube more uniform including a sealed vessel, two tube sheets made of a conductive metal plate having a hole formed therein which are provided at a predetermined interval to divide the inside of the sealed vessel into three spaces; a metal tube formed so as to connect holes of the tow tube sheets, a dielectric tube which is inserted into the inner part of a dielectric tube so as to have a predetermined gap between an outer wall an inner wall of a metal tube and a metal electrode formed inside the dielectric tube. An alternating current voltage is applied between the tube and electrode, a gas including oxygen flowing in a gap is discharged to generate ozone, and a discharge suppressing member is provided at a part of the gap facing a tube sheet.
Abstract:
An improved system and method for controlling ozone concentration in connection with a multi-chamber tool. The system and method involve a first and a second concentration controller in combination with an ozone generator. The first concentration controller detects an EVENT (i.e., one of the chambers in the multi-chamber tool coming on-line or off-line) and in response provides a power instruction to the ozone generator in accordance with a predictive control algorithm. The first concentration controller has a fast (i.e, about 1 second) response time. The second concentration controller is masked from the ozone generator during the EVENT, but otherwise controls the generator after an interval of time has lapsed after the EVENT. The second concentration controller has a slower response time than the first concentration controller, however the second concentration controller provides the system with long-term stability and can be used to provide updated data to the predictive control algorithm.
Abstract:
The invention provides a power supply apparatus for supplying electric power to a capacitive load. The apparatus has a transformer, a positive half-period driver and a negative half-period driver supplying positive and negative half-periods of voltage to the first coil. The second coil forms an electric resonance circuit and supplies electric voltage to the load. Zero crossings of the voltage supplied to the first coil are determined from a third coil on the transformer, and alternation between positive and negative half-periods of voltage supplied to the first coil is done at the zero crossings of the voltage supplied to the first coil.
Abstract:
An ozone generating apparatus is provided which includes a pair of electrodes for producing a discharge by the application of an ac voltage therebetween, and at least one dielectric provided between the pair of electrodes. A source gas containing oxygen is provided into a discharge space in which the discharge is produced to generate ozone by the action of the discharge. A surface lying between at least one of the pair of electrodes and the discharge space and in contact with the discharge has a surface resistivity of 104Ω to 1011Ω. The source gas provided into the discharge space includes ultrapure oxygen having a purity of not less than 99.9%.
Abstract:
Ozone generator cells that include two thermally conductive plates that maintain contact between various layers of the cells in the absence of a bonding agent. The cells lack aluminum-containing materials in the discharge region of the cell.
Abstract:
An ozone generator cartridge 60 suitable for a sterilisation, decontamination and/or sanitation device. The cartridge comprises a sealable housing 60 for providing a corona discharge, the housing containing at least one power supply unit 64 and at least one inlet 65 for connection to an oxygen or air supply, the cartridge including at least part of at least one ozone conversion cell 63 attached to and extending from an external surface of a wall of the sealed housing, the conversion cell extending into a delivery conduit 52 of a decontamination device that leads to at least one discharge outlet 16.
Abstract:
An object of the present invention is to provide a downsized ozone generation unit including control means having plurality of means for outputting an ozone gas, and the ozone generation unit. In the present invention, a gas pipe integrated block (30) has a plurality of internal pipe paths (R30a to R30f). The plurality of internal pipe paths are connected to an ozone generator (1), control means (an MFC (3), a gas filter (51), and an APC (4)), a raw gas supply port (14), an ozone gas output port (15), and cooling water inlet/outlet ports (13A, 13B), to thereby form a unit in which a raw gas input pipe path and an ozone gas output pipe path are integrated. The raw gas input pipe path extends from the raw gas supply port through the APC to the ozone gas generator. The ozone gas output pipe path extends from the ozone generator through the gas filter, the ozone concentration meter 5, and the MFC 3, to the ozone gas output port.
Abstract:
Apparatus, method and system for delivering sterile unit dose of ozone. System includes sterile vial containing oxygen and corona discharge assembly. Sterile vial is engaged to ozone conversion unit having high voltage transformer, ozone measurement mechanism, data input mechanism, and displayed read-out. When power is supplied to sterile vial containing corona discharge assembly, oxygen is converted to specified concentration of ozone. Sterile vial is disengaged from ozone conversion unit, drawing port is attached, and needle or similar extraction tool is used to withdrawal ozone for treatment.
Abstract:
Apparatus for the production of a product gas (eg hydrogen and ozone) comprises: a supply of reactant gas (eg oxygen and steam) (14); a pair of electrodes (24) with a space between them of less than 1 mm (28); a conduit to lead the reactant gas from the source through the space between the electrodes; a power source (26) to apply a voltage across the electrodes to dis sociate the reactant gas and ultimately permit formation of product gas; and a conduit (40) to supply the product gas to an outlet. sterilisation unit for water treatment employs such apparatus and includes a fluidic oscillator to oscillate the flow of oxygen and/or ozone, and wherein said outlet comprises a plurality of orifices (42) to be submerged in said water and for the purpose of forming micro bubbles of ozone. An analyser for detecting large organic molecules in eg air can employ the ozone generator to breakdown the large molecule into simpler and easier-to-detect-and-identify molecules.