公开(公告)号：JP4023713B2

公开(公告)日：2007-12-19

申请号：JP2001333785

申请日：2001-10-31

Applicant: 信越石英株式会社 ,  株式会社山形信越石英

Inventor： 直哉 岡崎 ,  賞治 高橋

IPC: C03B8/04 ,  C03B20/00 ,  C03C3/06

CPC classification number: C03C3/06 ,  C03C2201/40 ,  C03C2201/50 ,  C03C2201/54

公开(公告)号：JP2006306675A

公开(公告)日：2006-11-09

申请号：JP2005132925

申请日：2005-04-28

Applicant: Shinetsu Quartz Prod Co Ltd ,  信越石英株式会社

Inventor： SATO TATSUHIRO ,  FUJINOKI AKIRA ,  ARAKI ITSUO

IPC: C03B32/00 ,  H01L21/3065

CPC classification number: C03B32/00 ,  C03B23/20 ,  C03C3/06 ,  C03C23/007 ,  C03C23/0075 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/54

Abstract: PROBLEM TO BE SOLVED: To provide a technique for regenerating a quartz-glass tool and a doped quartz-glass tool by completely removing the impurities adhered to the surface of the quartz-glass tool after use in a semiconductor process and the impurities diffused in the inside of the tool, then machining and repairing the tool, and further removing contamination in the above machining step. SOLUTION: The technique includes a purifying treatment step, in which the quartz-glass tool after use is subjected to a purifying treatment at a temperature not lower than a prescribed temperature in a gas atmosphere containing a halogen element. In the purifying treatment step, impurities are removed from the quartz-glass tool. COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：为了提供一种用于再生石英玻璃工具和掺杂的石英玻璃工具的技术，通过在半导体工艺中使用后完全除去附着在石英玻璃工具的表面上的杂质，并且杂质 扩散在工具内部，然后加工和修理工具，并进一步消除上述加工步骤中的污染。 解决方案：该技术包括净化处理步骤，其中使用后的石英玻璃工具在含有卤素元素的气体气氛中在不低于规定温度的温度下进行净化处理。 在净化处理步骤中，从石​​英玻璃工具中除去杂质。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JPS5946899B2

公开(公告)日：1984-11-15

申请号：JP332981

申请日：1981-01-14

Applicant: Fuiritsupusu Furuuiranpenfuaburiken Nv

Inventor： HERARUDOSU HENRIKUSU ANTONIUSU MARIA BAN DERU SUTEEN ,  EDEI FURANSOWA KUREMENTO BAN HOOBE

IPC: C03C3/06 ,  C03C4/08 ,  H01J61/30 ,  H01K1/28 ,  H01K1/32

CPC classification number: C03C3/06 ,  C03C2201/34 ,  C03C2201/3429 ,  C03C2201/3447 ,  C03C2201/50 ,  C03C2201/54 ,  C03C2203/10 ,  H01J61/302 ,  H01K1/28

公开(公告)号：EP1874699B1

公开(公告)日：2018-12-05

申请号：EP06754892.5

申请日：2006-04-27

Applicant: Heraeus Quarzglas GmbH & Co. KG ,  SHIN-ETSU QUARTZ PRODUCTS CO., LTD.

Inventor： SATO, Tatsuhiro ,  FUJINOKI, Akira ,  ARAKI, Itsuo

IPC: C03C23/00 ,  C03B23/00 ,  C03B32/00 ,  C03C3/06 ,  C03B23/20

CPC classification number: C03B32/00 ,  C03B23/20 ,  C03C3/06 ,  C03C23/007 ,  C03C23/0075 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/54

Abstract: To provide a technique with which a quartz glass jig and a doped quartz glass jig are regenerated by completely removing the impurities which are attached to the surface and the impurities which have diffused into the interior from quartz glass jigs which have been used in semiconductor production processes and then carrying out working repair and removing the contamination from the working processes as well. After use, the impurities are removed from the aforementioned quartz glass jigs in the said purification treatment process which includes a purification treatment process in which the quartz glass jigs are subjected to a purification treatment in a gaseous atmosphere which includes a halogen element at a temperature within the region above a prescribed temperature.

公开(公告)号：EP2511402A4

公开(公告)日：2017-06-07

申请号：EP10835634

申请日：2010-10-19

Applicant: SHIN-ETSU QUARTZ PRODUCTS CO LTD ,  HERAEUS QUARZGLAS

Inventor： YAMAGATA SHIGERU ,  USUI TOMOMI

IPC: C03B19/09 ,  C03C3/06 ,  C30B15/10 ,  C30B29/06 ,  C30B35/00

CPC classification number: B65D13/02 ,  C03B19/095 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/54 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

Abstract: Disclosed is a process for the production of a silica vessel which comprises both a base body that contains bubbles in the outer peripheral portion and an inner layer that consists of transparent silica glass and that is formed on the inner surface of the base body. The process comprises: preparing a base body-forming raw material powder that has a total concentration of Li, Na and K of 50wt.ppm or less and an inner layer-forming raw material powder that contains Ca, Sr and Ba in a total amount of 50 to 2000wt.ppm; forming a preform for the base body in a mold; forming a preform for the inner layer on the inner surface of the perform for the base body; and heating the thus-obtained composite preform in a gaseous atmosphere that contains hydrogen, helium, or a mixture of both in an amount exceeding 10vol% by an electric discharge heating-melting method from the inside of the composite preform to convert the outer peripheral portion of the preform for the base body into a sintered body and to convert the inner peripheral portion of the preform for the base body and the preform for the inner layer into a molten glass body. Thus, both a process by which a silica vessel with high dimensional accuracy and high heat resistance can be produced at a low cost and such a silica vessel are provide

Abstract translation: 本发明公开了一种制造二氧化硅容器的方法，该容器包括在外周部分包含气泡的基体和由透明二氧化硅玻璃构成并形成在基体内表面上的内层。 该方法包括：准备Li，Na和K的总浓度为50重量ppm以下的基体形成原料粉末和含有总量为Ca，Sr和Ba的内层形成原料粉末 为50〜2000重量ppm; 在模具中形成用于基体的预成型件; 在所述基体的所述表面的内表面上形成用于所述内层的预制件; 以及通过放电加热熔融法，在含有氢气，氦气或二者的混合物的气体气氛中，从复合预制品内部通过放电加热熔化法加热如此获得的复合预制品，以将外周部分 将用于基体的预成型体制成烧结体，并将用于基体的预成型体的内周部分和用于内层的预制体转变成熔融玻璃体。 因此，能够以低成本制造尺寸精度高且耐热性高的二氧化硅容器，并且能够提供这样的二氧化硅容器

公开(公告)号：EP2594537A4

公开(公告)日：2015-10-28

申请号：EP10854572

申请日：2010-07-14

Applicant: OCEANS KING LIGHTING SCIENCE

Inventor： ZHOU MINGJIE ,  QIAO YANBO ,  MA WENBO

IPC: C03C3/06 ,  C03C4/12 ,  C03C23/00

CPC classification number: C03C21/005 ,  C03C3/06 ,  C03C4/12 ,  C03C23/0095 ,  C03C2201/10 ,  C03C2201/3423 ,  C03C2201/3458 ,  C03C2201/36 ,  C03C2201/54 ,  C03C2203/50 ,  C09K11/7774

公开(公告)号：EP2594537A1

公开(公告)日：2013-05-22

申请号：EP10854572.4

申请日：2010-07-14

Applicant: Ocean's King Lighting Science&Technology Co., Ltd.

Inventor： ZHOU, Mingjie ,  QIAO, Yanbo ,  MA, Wenbo

IPC: C03C17/00

CPC classification number: C03C21/005 ,  C03C3/06 ,  C03C4/12 ,  C03C23/0095 ,  C03C2201/10 ,  C03C2201/3423 ,  C03C2201/3458 ,  C03C2201/36 ,  C03C2201/54 ,  C03C2203/50 ,  C09K11/7774

Abstract: A preparation method of rare earth ions doped alkali metal silicate luminescent glass is provided. The steps involves: step 1, mixing the source compounds of cerium, terbium and alkali metals and putting the mixture into solvent to get a mixed solution; step 2, impregnating the nanometer micropores glass with the mixed solution obtained in step 1; step 3: calcining the impregnated nanometer micropores glass obtained in step 2 in a reducing atmosphere, cooling to room temperature, then obtaining the cerium and terbium co-doped alkali metal silicate luminescent glass. Besides, the rare earth ions doped alkali metal silicate luminescent glass prepared with aforesaid method is also provided. In the prepared luminescent glass, cerium ions can transmit absorbed energy to terbium ions under the excitation of UV light due to the co-doping of cerium ions. As a result, the said luminescent glass has higher luminous intensity than the glass only doped with terbium.

Abstract translation: 提供了稀土离子掺杂的碱金属硅酸盐发光玻璃的制备方法。 步骤包括：步骤1，混合铈，铽和碱金属的源化合物，并将混合物放入溶剂中得到混合溶液; 步骤2，用步骤1中获得的混合溶液浸渍纳米微孔玻璃; 步骤3：在还原气氛中煅烧步骤2中获得的浸渍的纳米微孔玻璃，冷却至室温，然后获得共混掺杂的铈和铽的碱金属硅酸盐发光玻璃。 此外，还提供了用上述方法制备的稀土离子掺杂的碱金属硅酸盐发光玻璃。 在制备的发光玻璃中，由于铈离子的共掺杂，铈离子可以在UV光的激发下将吸收的能量传递给铽离子。 结果，所述发光玻璃比仅掺杂铽的玻璃具有更高的发光强度。

公开(公告)号：EP2511402A1

公开(公告)日：2012-10-17

申请号：EP10835634.6

申请日：2010-10-19

Applicant: Shin-Etsu Quartz Products Co.,Ltd. ,  Heraeus Quarzglas GmbH & Co. KG

Inventor： YAMAGATA, Shigeru ,  USUI, Tomomi

IPC: C30B29/06 ,  C03B20/00 ,  C30B15/10

CPC classification number: B65D13/02 ,  C03B19/095 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/54 ,  C30B15/10 ,  C30B29/06 ,  C30B35/002 ,  Y02P40/57

Abstract: Disclosed is a process for the production of a silica vessel which comprises both a base body that contains bubbles in the outer peripheral portion and an inner layer that consists of transparent silica glass and that is formed on the inner surface of the base body. The process comprises: preparing a base body-forming raw material powder that has a total concentration of Li, Na and K of 50wt.ppm or less and an inner layer-forming raw material powder that contains Ca, Sr and Ba in a total amount of 50 to 2000wt.ppm; forming a preform for the base body in a mold; forming a preform for the inner layer on the inner surface of the perform for the base body; and heating the thus-obtained composite preform in a gaseous atmosphere that contains hydrogen, helium, or a mixture of both in an amount exceeding 10vol% by an electric discharge heating-melting method from the inside of the composite preform to convert the outer peripheral portion of the preform for the base body into a sintered body and to convert the inner peripheral portion of the preform for the base body and the preform for the inner layer into a molten glass body. Thus, both a process by which a silica vessel with high dimensional accuracy and high heat resistance can be produced at a low cost and such a silica vessel are provide

Abstract translation: 本发明公开了一种制造二氧化硅容器的方法，该容器包括在外周部分包含气泡的基体和由透明二氧化硅玻璃构成并形成在基体内表面上的内层。 该方法包括：准备Li，Na和K的总浓度为50重量ppm以下的基体形成原料粉末和含有总量为Ca，Sr和Ba的内层形成原料粉末 为50〜2000重量ppm; 在模具中形成用于基体的预成型件; 在所述基体的所述表面的内表面上形成用于所述内层的预制件; 以及通过放电加热熔融法，在含有氢气，氦气或二者的混合物的气体气氛中，从复合预制品内部通过放电加热熔化法加热如此获得的复合预制品，以将外周部分 将用于基体的预成型体制成烧结体，并将用于基体的预成型体的内周部分和用于内层的预制体转变成熔融玻璃体。 因此，能够以低成本制造尺寸精度高且耐热性高的二氧化硅容器，并且能够提供这样的二氧化硅容器

公开(公告)号：EP1914209A1

公开(公告)日：2008-04-23

申请号：EP06122489.5

申请日：2006-10-18

Applicant: Degussa Novara Technology S.p.A.

Inventor： Giardino, Vincenzo ,  Gini, Lucia

IPC: C03C1/00 ,  C03C4/00 ,  C01B33/16

CPC classification number: C03C3/097 ,  C03C1/006 ,  C03C4/0007 ,  C03C2201/06 ,  C03C2201/28 ,  C03C2201/54 ,  C03C2203/22

Abstract: An improved sol-gel process is disclosed for the making of large synthetic silica based bioactive materials objects crack-free. A series of ordered mesoporous SiO 2 -CaO-P 2 O 5 sol-gel glasses which are highly bioactive has been synthesized through a sol-gel process. The mesoporous glasses are highly bioactive compared with conventional ones, due to the increased textural characteristics i.e. surface area. The bioactivity tests point out that the surface area, porosity, and 3D-structure become more important than chemical composition during the apatite crystallization stage in these materials, due to the very high textural parameters obtained. The product is intended to be used for tissue engineering applications.

Abstract translation: 公开了一种改进的溶胶 - 凝胶方法，用于制造大的合成二氧化硅基生物活性材料物体无裂纹。 已经通过溶胶 - 凝胶法合成了一系列有序介孔SiO 2 -CaO-P 2 O 5溶胶凝胶玻璃，其具有高度的生物活性。 由于增加的结构特征，即表面积，介孔玻璃与常规玻璃相比具有高生物活性。 生物活性测试指出，由于获得的非常高的结构参数，表面积，孔隙率和3D结构在这些材料中的磷灰石结晶阶段期间比化学成分更重要。 该产品旨在用于组织工程应用。

公开(公告)号：EP1497484B1

公开(公告)日：2007-01-03

申请号：EP03722390.6

申请日：2003-04-03

Applicant: Siltronic AG ,  Wacker Siltronic AG

Inventor： KORUS, Gabriele ,  ARNDT, Martin ,  LAUDAHN, Hilmar ,  SCHWARZBAUER, Manfred

IPC: C30B15/10 ,  C03B19/09

CPC classification number: C30B15/10 ,  C03B19/095 ,  C03C3/06 ,  C03C10/0009 ,  C03C2201/40 ,  C03C2201/54 ,  Y10T117/10

Abstract: A known quartz glass crucible for crystal pulling consists of a crucible wall, having an outer layer which is provided in an external area thereof with a crystallisation promoter which results in crystallisation of quartz glass, forming cristobalite when the quartz glass crucible is heated according to specified use in crystal pulling. The aim of the invention is to provide a quartz glass crucible which has a long service life. As a result, the crystallisation promoter contains, in addition to a silicon, a first component which acts as a reticulating agent in quartz glass and a second component which is free of alkali metals and which acts as an agent forming separating points in quartz glass. The above mentioned components are contained and incorporated into a doping area (8) of the outer layer (6) having a layer thickness of more than 0.2mm.