INSPECTION APPARATUS AND INSPECTION METHOD
    151.
    发明公开

    公开(公告)号:US20240011915A1

    公开(公告)日:2024-01-11

    申请号:US18323698

    申请日:2023-05-25

    Inventor: Hark Ryong KIM

    Abstract: The present invention relates to an inspection apparatus and an inspection method which selectively adjust a numerical aperture of illuminating light in the form of collimated light when inspecting a target object, such as a wafer or the like, using a spectrum, thereby preventing a diffraction phenomenon caused by the illuminating light. The inspection apparatus may include: a camera unit disposed above a target object; an illumination unit configured to illuminate the target object with illuminating light; and a light detection unit configured to detect reflection light of the target object illuminated with the illuminating light, wherein the illumination unit comprises a numerical aperture adjustment device which has a first optical member having a first numerical aperture that is replaceable with a second optical member having a second numerical aperture different from the first numerical aperture so as to reduce a diffraction phenomenon caused by the illuminating light.

    SPECTROSCOPE AND ANALYSIS SYSTEM
    152.
    发明公开

    公开(公告)号:US20230304922A1

    公开(公告)日:2023-09-28

    申请号:US18122759

    申请日:2023-03-17

    Abstract: A spectroscope includes: a light incidence section that allows light from an outside to be incident; a diffraction grating that disperses wavelengths of the light incident on the diffraction grating by the light incidence section; a light reflector having a reflecting surface having an inclination variable around a rotation axis of the reflecting surface; and a light emitter that emits the light reflected by the light reflector to the outside. At least one of the light incidence section, the diffraction grating, and the light reflector, and the light emitter are changeable in a direction orthogonal to the rotation axis. The position of the light emitter is changeable in a direction along a center axis of the light emitted from the light emitter.

    Laser scanning microscope system and method of setting laser-light intensity value

    公开(公告)号:US09739715B2

    公开(公告)日:2017-08-22

    申请号:US15059203

    申请日:2016-03-02

    Abstract: A method of setting a laser-light intensity value includes: emitting laser light, the laser light being excitation light, a fluorescent-dyed biological sample being irradiated with the excitation light and emitting light; detecting fluorescence emitted by the biological sample, and outputting a signal corresponding to a brightness value; prestoring relation information, the relation information including the plurality of laser-light intensity values, and information on at least one possible correlation between a phototoxicity degree and the brightness value in relation to each of the laser-light intensity values, the phototoxicity to the biological sample resulting from the laser light; generating a fluorescence image having the brightness value based on the output signal; calculating a brightness value representative of a ROI area based on the generated fluorescence image; and referring to the relation information, and determining a laser-light intensity value satisfying tolerance of the phototoxicity based on the calculated representative brightness value.

    Methods for gas leak detection and localization in populated areas using horizontal analysis
    160.
    发明授权
    Methods for gas leak detection and localization in populated areas using horizontal analysis 有权
    采用横向分析方法对人口稠密地区进行气体泄漏检测和定位

    公开(公告)号:US09482591B2

    公开(公告)日:2016-11-01

    申请号:US13656080

    申请日:2012-10-19

    Applicant: Picarro, Inc.

    CPC classification number: G01M3/20 G01N21/3504 G01N33/0004 G01N2201/025

    Abstract: Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.

    Abstract translation: 提供了从移动平台改进的气体泄漏检测。 可以进行自动水平空间尺度分析,以区分泄漏与被测气体的背景水平。 可以通过使用同位素比率和/或化学示踪剂来提供源识别,以区分气体泄漏与测量气体的其他来源。 多点测量结合多点测量结果的空间分析可以提供泄漏源距离估计。 这些方法可以单独或以任何组合实施。

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