System for detection of wafer defects
    151.
    发明申请
    System for detection of wafer defects 有权
    晶圆缺陷检测系统

    公开(公告)号:US20040146295A1

    公开(公告)日:2004-07-29

    申请号:US10345097

    申请日:2003-01-15

    Applicant: NEGEVTECH LTD.

    Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

    Modification of the normalized difference method for real-time optical tomography
    152.
    发明申请
    Modification of the normalized difference method for real-time optical tomography 有权
    用于实时光学层析成像的归一化差分法的修改

    公开(公告)号:US20040010397A1

    公开(公告)日:2004-01-15

    申请号:US10408511

    申请日:2003-04-07

    Abstract: Computation-saving techniques and stability-adding techniques provide for fast, accurate reconstructions of a time series of images involving large-scale 3D problems, such as real-time image recovery in an optical tomography imaging system. A system equation for a target medium (116) such as tissue is solved using a Normalized Difference Method (NDM) (250). Because of the inherent stability of the NDM solutions, a weight matrix (W) of the system equation can be provided for a given point in a time series (220), then reused without recalculation at subsequent points. Further savings are achieved by decomposing W using singular value decomposition or direct matrix decomposition, transforming it to reduce its dimensions, and/or scaling it to achieve a more stable numerical solution. Values of measured energy (112) emerging from the target medium are back-substituted into the system equation for the different points to obtain the target medium properties.

    Abstract translation: 计算节省技术和稳定性增加技术提供了涉及大规模3D问题的时间序列图像的快速,精确重建,例如光学层析成像系统中的实时图像恢复。 使用归一化差分法(NDM)(250)解决诸如组织的目标介质(116)的系统方程式。 由于NDM解决方案的固有稳定性,可以为时间序列(220)中的给定点提供系统方程的权重矩阵(W),然后在后续点重新计算。 通过使用奇异值分解或直接矩阵分解来分解W来实现进一步的节省,将其变换以减小其尺寸,和/或缩放以实现更稳定的数值解。 从目标介质出现的测量能量(112)的值被替代为不同点的系统方程,以获得目标介质特性。

    Device for the automatic detection and inspection of defects on a
running web, such as a textile fabric
    153.
    发明授权
    Device for the automatic detection and inspection of defects on a running web, such as a textile fabric 失效
    用于自动检测和检查诸如织物之类的运行纸幅上的缺陷的装置

    公开(公告)号:US5742398A

    公开(公告)日:1998-04-21

    申请号:US731587

    申请日:1996-10-16

    Abstract: Apparatus for detecting defects in a web of textile material as it is being drawn through an inspection zone. A header is arranged to project a line of light on the running web and a reflected light image from the web is sensed and analyzed for defects. The header includes a fiber bundle for producing a line of light and an optical element for collimating the light upon the web as it passes through the inspection zone.

    Abstract translation: 用于检测纺织材料的网状物在被抽取通过检查区域时的缺陷的装置。 头部被布置成在运行的网上投射一条光线,并且感测来自卷筒纸的反射光图像并分析其缺陷。 头部包括用于产生光线的纤维束和用于在纤维网通过检查区域时将光准直的光学元件。

    Variable filter spectrophotometers
    154.
    发明授权
    Variable filter spectrophotometers 失效
    可变过滤分光光度计

    公开(公告)号:US5526121A

    公开(公告)日:1996-06-11

    申请号:US5320

    申请日:1993-01-15

    Abstract: A variable filter spectrophotometer, for use with sample and reference; has a main member, a filter unit, a drive, a detector, a light distribution system, and a clamping circuit. The main member defines first and second beam paths, which are intersected by the filter unit. The filter unit has filtering and opaque portions. The filter unit is continuously movable relative to the beam paths in a repeating cycle from a first filtering relation in which the filtering portion is interposed in the first beam path and the opaque portion completely blocks the second beam path, to a first dark relation in which both beam paths are blocked, to a second filtering relation in which the filtering portion is interposed in the second beam path and the first beam path is completely blocked, and to a second dark relation in which both beam paths are completely blocked. The filtering portion is variably transmissive along a direction of movement of the filter unit. The drive continuously moves the filter unit relative to the beam paths. The detector produces a signal responsive to light received. The light distribution system directs light separately to and from the sample and reference, to and from the beam paths, and to the detector. The clamping circuit clamps the signal produced by the detector during the filtering relations to the signal produced by the detector during the dark relations.

    Abstract translation: 可变过滤分光光度计,用于样品和参考; 具有主构件,过滤单元,驱动器,检测器,配光系统和钳位电路。 主要部件限定了由过滤器单元相交的第一和第二光束路径。 过滤器单元具有过滤和不透明部分。 过滤器单元可以从第一过滤关系的重复循环中相对于光束路径连续移动,其中过滤部分插入在第一光束路径中,而不透明部分完全阻挡第二光束路径到第一黑暗关系,其中 两个光束路径被阻挡到第二滤波关系,其中滤波部分插入在第二光束路径中并且第一光束路径被完全阻挡,并且到第二暗关系,其中两个光束路径被完全阻挡。 过滤部分沿着过滤器单元的移动方向是可变的。 驱动器相对于光束路径连续地移动滤光单元。 检测器产生响应于接收到的光的信号。 光分配系统将光分别引导到样品和从样品引导,参考和从光束路径引导到检测器。 钳位电路在滤波关系期间将由检测器产生的信号钳位在由暗检测器产生的信号中。

    Optical analytical instrument and method having improved calibration
    155.
    发明授权
    Optical analytical instrument and method having improved calibration 失效
    光学分析仪器和具有改进校准的方法

    公开(公告)号:US5125747A

    公开(公告)日:1992-06-30

    申请号:US596513

    申请日:1990-10-12

    Abstract: Optical analytical instruments to determine a physical parameter of a fluid, and methods of operation of such instruments, are shown. These employ a source of suitable optical radiation, a detector means, means defining a zone for the fluid, means defining an optical path from the radiation source through the fluid zone to the detector means, and reading and control circuitry. At least two readings of optical energy that has been influenced by the fluid are taken without there having occurred substantial change to the fluid. During one of the readings a filter of known absorbance is included in the optical path so that the respective reading represents a calibration reading. A calibration-value-determining means is constructed first to compare, effectively, the two readings to remove the effect of the fluid from the value of the calibration reading, second, to compare, effectively the residual value of the calibration reading to a known value based on the known absorbance of the filter, and, third, on the basis of the second comparison, to make a calibration adjustment based on values derived while the fluid sample remained unchanged in the fluid zone. Novel software implementations of the determinations are shown. Specific examples of instruments and methods implementing these features shown are a dual lamp, no-moving part in-line spectrophotometer, a no-moving part reflection colorimeter capable of on-line or off-line operation, a scatter or fluorescence detecting implementation and a turbidimeter.

    System for performing spectral analyses under computer control

    公开(公告)号:US3751643A

    公开(公告)日:1973-08-07

    申请号:US3751643D

    申请日:1972-05-23

    Applicant: IBM

    Inventor: DILL F KONNERTH K

    Abstract: Measurements of physical attributes such as dielectric film thickness that are susceptible to spectral analysis are accomplished rapidly and accurately by a spectrophotometric system in which a programmed digital computer operating concurrently with the optical scanning means automatically performs the calibrating, normalizing and data reducing functions that otherwise must be carried out as time-consuming human, mechanical or analog electronic operations. The control over the optical data handling operations exercised by the computer eliminates the need for mechanically or electronically adjusting the optical apparatus to meet changing system conditions, whether periodic or aperiodic. Source light is transmitted through a rotating variable-wavelength interference filter which acts during one-half of its cycle to transmit light of varying wavelength through a fiber-optic reference path directly to the optical data acquisition apparatus, while acting in the next half-cycle to transmit light of such varying wavelength indirectly to said data acquisition apparatus through a measurement path. In the present example, where film thickness is the attribute being measured, the measurement path comprises a bifurcated fiber-optic bundle, one branch of which is used to carry the light of variable wavelength to the sample, and the other branch of which carries light reflected from the sample to the aforesaid data acquisition apparatus. A computer program enables light passed through the reference path in one half-cyle to calibrate the system for measuring optical transmission or reflectance in the next half-cycle. Reduction of relative reflectance data to absolute reflectance data (needed for the accurate determination of film thickness) is accomplished by additional computer programs whose algorithms are based upon the discovery that all graphs of absolute reflectance versus wavelength for film samples of a given material having different thicknesses are bounded by a common pair of wave envelopes.

    DISTRIBUTED GAS DETECTION SYSTEM AND METHOD USING HOLLOW CORE OPTICAL FIBERS OPTICALLY COUPLED TO SOLID CORE OPTICAL FIBERS
    157.
    发明申请
    DISTRIBUTED GAS DETECTION SYSTEM AND METHOD USING HOLLOW CORE OPTICAL FIBERS OPTICALLY COUPLED TO SOLID CORE OPTICAL FIBERS 审中-公开
    分布式气体检测系统和使用空心光纤光学耦合到固体核心光纤的方法

    公开(公告)号:WO2017196449A1

    公开(公告)日:2017-11-16

    申请号:PCT/US2017/023705

    申请日:2017-03-23

    Abstract: A distributed gas detection system includes solid core fibers, hollow core fibers, and an interrogator device. The solid core fibers are configured to receive light of one or more wavelengths from a light source. The hollow core fibers are disposed in different locations. Each of the hollow core fibers is optically coupled with a different corresponding one of the solid core fibers and configured to receive at least some of the light transmitted through the corresponding solid core fiber. The interrogator device is configured to receive at least some of the light propagating through the solid core fibers and the hollow core fibers. The interrogator device is configured to identify a location of a presence of a gas-of-interest by examining absorption of at least one of the wavelengths of the light in at least one of the hollow core fibers.

    Abstract translation: 分布式气体检测系统包括实芯纤维,中空芯纤维和询问器装置。 固体芯纤维被配置为接收来自光源的一个或多个波长的光。 中空芯纤维布置在不同的位置。 每个中空芯纤维与不同的相应的一个固体芯纤维光学耦合,并被配置为接收透过相应的固体芯纤维的至少一些光。 询问器装置被配置为接收通过实心芯纤维和空芯纤维传播的至少一些光。 询问器装置被配置成通过检查至少一根中空芯纤维中的光的至少一个波长的吸收来识别存在感兴趣气体的位置。

    APPARATUS AND METHOD FOR MEASURING THE LIGHT ABSORBANCE OF A SUBSTANCE IN A SOLUTION
    158.
    发明申请
    APPARATUS AND METHOD FOR MEASURING THE LIGHT ABSORBANCE OF A SUBSTANCE IN A SOLUTION 审中-公开
    用于测量溶液中物质的光吸收的装置和方法

    公开(公告)号:WO2017144719A1

    公开(公告)日:2017-08-31

    申请号:PCT/EP2017/054504

    申请日:2017-02-27

    Inventor: EHRING, Hanno

    Abstract: The present invention relates to an apparatus for measuring the absorbance of a substance in a solution, comprising at least one sample cell arranged to contain said solution that is at least partially transparent to light of a predefined wavelength spectrum, at least two light passages through said at least one sample cell, each of said light passages having a known path length,an LED light source arrangement comprising at least two LEDs, each arranged to emit a light output with a wavelength within said predefined wavelength spectrum,wherein a plurality of optical fibers, one for each light passage, is arranged at each LED for receiving said light output and guiding it to the light passages. The invention also relates to a method for measuring the absorbance of a substance in a solution.

    Abstract translation: 本发明涉及一种用于测量溶液中物质的吸光度的装置,其包括至少一个样品池,该样品池布置成包含所述溶液,该溶液对预定波长谱的光至少部分透明 ,至少两个通过所述至少一个样品池的光通道,每个所述光通道具有已知的路径长度,LED光源装置包括至少两个LED,每个LED被布置为发射波长在所述预定波长内的光输出 其中在每个LED上布置多条光纤,每条光通路一条光纤,用于接收所述光输出并将其引导至光通道。 本发明还涉及测量溶液中物质的吸光度的方法。

    QUANTIFICATION METHOD OF IMPURITIES IN LACTIDE
    160.
    发明申请
    QUANTIFICATION METHOD OF IMPURITIES IN LACTIDE 审中-公开
    LACTIDE中染色体的定量方法

    公开(公告)号:WO2015086494A1

    公开(公告)日:2015-06-18

    申请号:PCT/EP2014/076830

    申请日:2014-12-08

    Abstract: The invention relates to a method for quantification of the amount of impurities in lactide. Said method is characterized in that the quantification of the impurities is based on measurements performed on absorptions in the near Infra-Red region of the electromagnetic spectrum. With this method, small amounts of impurities like water, free-acid species or both can be determined online in a reaction mixture of lactide in a relatively simple manner. This allows a simple online monitoring of the production process of lactide.

    Abstract translation: 本发明涉及量化丙交酯中杂质量的方法。 所述方法的特征在于,杂质的定量是基于对电磁光谱的近红外区域的吸收进行的测量。 通过这种方法,可以在相对简单的方式在丙交酯的反应混合物中在线测定少量的杂质如水,游离酸物质或两者。 这允许简单的在线监测丙交酯的生产过程。

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