公开(公告)号：WO99019693A1

公开(公告)日：1999-04-22

申请号：PCT/GB1998/003036

申请日：1998-10-09

IPC: G01B9/02 ,  G01D5/353

CPC classification number: G01H9/004 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02014 ,  G01B9/02023 ,  G01B9/02027 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/45

Abstract: An interferometric sensor includes a broadband optical source, a depolarizer for depolarizing optical radiation emitted by the broadband optical source, a matched interferometer, a sensing interferometer, and a detector. The matched interferometer contains a phase modulator. The sensor is configured so that the optical path length difference in the sensing interferometer is approximately equal to the optical path length difference in the matched interferometer.

Abstract translation: 干涉测量传感器包括宽带光源，用于使由宽带光源发射的光辐射去极化的去极化器，匹配干涉仪，感测干涉仪和检测器。 匹配干涉仪包含相位调制器。 传感器被配置为使得感测干涉仪中的光程长度差近似等于匹配干涉仪中的光程长度差。

公开(公告)号：WO1990002930A1

公开(公告)日：1990-03-22

申请号：PCT/GB1989001030

申请日：1989-09-04

Applicant: NATIONAL RESEARCH DEVELOPMENT CORPORATION ,  TYRER, John, Raymond ,  MENDOZA-SANTOYO, Fernando ,  KERR, David

Inventor： NATIONAL RESEARCH DEVELOPMENT CORPORATION

IPC: G01J09/02

CPC classification number: G01B9/0201 ,  G01B9/02094

Abstract: An interferometric procedure, such as electronic speckle pattern interferometry, involves generating two signals representing the point-by-point variations in intensity of respective patterns of electromagnetic radiation resulting from the interference of first and second beams of such radiation derived from a coherent source, with at least the first beam from each pattern being scattered, before interference with its respective second beam, from a common object surface, and with a corresponding pair of the beams, one for each pattern, having a predetermined relative phase difference of other than a multiple of pi ; and determining from the two signals values for a datum phase of the radiation at the object surface. Preferably, as a preliminary to this last determination, DC components are removed from the two signals. Conveniently, to simplify the determination, the phase difference is an odd multiple of pi /4 or pi /2.

Abstract translation: 诸如电子散斑图案干涉测量的干涉测量程序涉及产生两个信号，表示由衍射自相干光源的这种辐射的第一和第二光束的干涉导致的各个电磁辐射图案的逐点变化的强度变化， 至少来自每个图案的第一光束在与其相应的第二光束干涉之前从公共物体表面散射，并且对应于一对光束，每个图案之一具有除多个之外的预定相对相位差 的pi 并根据两个信号确定物体表面上的辐射的基准相位值。 优选地，作为该最后确定的初步，将DC分量从两个信号中去除。 方便地，为了简化确定，相位差是pi / 4或pi / 2的奇数倍。

公开(公告)号：EP3829423B1

公开(公告)日：2024-09-04

申请号：EP19845420.9

申请日：2019-07-30

IPC: A61B5/00 ,  G01J3/00 ,  G01J3/28 ,  G01N21/00 ,  G01N21/17 ,  G01N21/47 ,  G01B9/02055

CPC classification number: G01J3/28 ,  A61B5/0066 ,  G01B9/02091 ,  G01B9/02008 ,  G01B9/0201 ,  G01B9/02005 ,  G01B9/02079

公开(公告)号：EP3347701A1

公开(公告)日：2018-07-18

申请号：EP16844877.7

申请日：2016-08-18

Applicant: Kla-Tencor Corporation

Inventor： LEVINSKI, Vladimir ,  PASKOVER, Yuri ,  LUBASHEVSKY, Yuval ,  MANASSEN, Amnon

IPC: G01N21/47 ,  G01J3/44

CPC classification number: G01B11/272 ,  G01B9/0201 ,  G01N21/4788 ,  G03F7/70633

Abstract: Metrology measurement methods and tools are provided, which illuminate a stationary diffractive target by a stationary illumination source, measure a signal composed of a sum of a zeroth order diffraction signal and a first order diffraction signal, repeat the measuring for a plurality of relations between the zeroth and the first diffraction signals, while maintaining the diffractive target and the illumination source stationary, and derive the first order diffraction signal from the measured sums. Illumination may be coherent and measurements may be in the pupil plane, or illumination may be incoherent and measurements may be in the field plane, in either case, partial overlapping of the zeroth and the first diffraction orders are measured. Illumination may be annular and the diffractive target may be a one cell SCOL target with periodic structures having different pitches to separate the overlap regions.

公开(公告)号：EP1384044B1

公开(公告)日：2018-06-27

申请号：EP02719995.9

申请日：2002-03-21

Applicant: Kuechel, Michael

Inventor： Kuechel, Michael

IPC: G01B9/02 ,  G01J9/02

CPC classification number: G01B9/0201 ,  G01B9/02022 ,  G01B9/02034 ,  G01B9/02057 ,  G01B9/02069 ,  G01B9/02072 ,  G01B9/02082 ,  G01B9/02098 ,  G01B2290/15 ,  G01B2290/30 ,  G01J9/02

Abstract: The invention provides interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent artifacts that would otherwise be present in the interferogram because of coherent superposition of unwanted radiation generated in the interferogram are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface from the perspective of different off-axis locations of illumination in an interferometer and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution to the combined interferogram is diluted.

公开(公告)号：EP2238430B9

公开(公告)日：2016-07-13

申请号：EP09829736.9

申请日：2009-11-23

Applicant: Zygo Corporation

Inventor： DAVIDSON, Mark ,  LIESENER, Jan ,  DE GROOT, Peter ,  COLONNA DE LEGA, Xavier ,  DECK, Leslie L.

IPC: G01N21/45 ,  G01B9/02

CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

公开(公告)号：EP2938961A1

公开(公告)日：2015-11-04

申请号：EP13789361.6

申请日：2013-11-13

Applicant: AM2M sp z o.o. sp kom.

Inventor： WOJTKOWSKI, Maciej ,  NOWAKOWSKI, Maciej ,  BORYCKI, Dawid

IPC: G01B9/02 ,  H04J14/00 ,  H04B10/00

CPC classification number: G01B9/02024 ,  G01B9/0201 ,  G01B9/02038 ,  G01B9/02069 ,  G01B9/02091

Abstract: The invention relates to applications of optical interference. It is already known to reduce speckle contrast by introducing arbitrary phase shifts in the reference light beam. According to the invention, such phase shifts are not introduced arbitrarily, but systematically whereby the phase changes are synchronised with the acquisition time intervals in such a way that interference fringes can be washed out in selected regions of the beam diameter maintaining high contrast of interference fringes in the desired regions at the same time. This technique can be used for enhancing the lateral resolution in imaging techniques and the bandwidth in optical communications.

Abstract translation: 本发明涉及光学干涉的应用程序。 已经知道通过在参考光束中引入任意相移，以减少散斑对比度。 。根据本发明，寻求相移不被任意推出，但系统地由此相位变化在寻求一种方式与所述获取的时间间隔同步没有干涉条纹，可以在该光束直径的选定区域保持干涉条纹的高对比度洗出 期望在在Sametime的区域。 可用于增强成像技术横向分辨率和在光通信带宽这种技术。

公开(公告)号：EP1789832B1

公开(公告)日：2014-03-19

申请号：EP05787149.3

申请日：2005-08-31

Applicant: Optos PLC

Inventor： PODOLEANU, Adrian, Gh. ,  ROGERS, John, A.

IPC: G02B26/06 ,  G02B21/00 ,  G01N21/84 ,  G01B9/02 ,  A61B3/13

CPC classification number: A61B3/102 ,  G01B9/0201 ,  G01B9/02091 ,  G01B2290/20 ,  G01B2290/35 ,  G01B2290/65 ,  G01N21/4795 ,  G02B17/023 ,  G02B26/06

公开(公告)号：EP2687812A1

公开(公告)日：2014-01-22

申请号：EP13177431.7

申请日：2013-07-22

Applicant: Samsung Electronics Co., Ltd ,  Korea Advanced Institute of Science and Technology

Inventor： Lim, Jae-guyn ,  Park, YongKeun ,  Jang, Jae-duck ,  Yu, Hyeon-seung ,  Lee, Seong-deok ,  Jang, Woo-young

IPC: G01B9/02

CPC classification number: G01B9/02091 ,  G01B9/0201 ,  G01B9/02083 ,  G01N2021/1787

Abstract: A method and apparatus are provided to generate tomography images that performs the method. The apparatus and method are configured to determine a basis pattern from modulated phases of incident rays from a spatial light modulator according to a pattern of arranged pixels, The apparatus and method are further configured to perform spatial shift modulation shifting an arrangement of the pixels vertically or horizontally with respect to the basis pattern to obtain shift patterns of the basis pattern. The apparatus and method are configured to generate tomography images for the basis pattern and the shift patterns using spectrum signals of rays obtained from the incident rays passing through the spatial light modulator and entering a subject. The apparatus and method are configured to select a pattern that generates a clearest tomography image of the subject based on the generated tomography images.

Abstract translation: 提供了一种用于产生执行该方法的断层摄影图像的方法和装置。 该装置和方法被配置为根据排列的像素的图案从空间光调制器的入射光线的调制相位确定基本图案。该装置和方法还被配置为执行空间移位调制以使像素的排列垂直移动或 相对于基础图案水平地获得基本图案的移动图案。 该装置和方法被配置为使用从通过空间光调制器的入射光线获得的光线的频谱信号来生成用于基本图案和移位图案的断层图像，并且进入对象。 该装置和方法被配置为基于所生成的断层摄影图像来选择产生对象的最清晰的断层图像的图案。

公开(公告)号：EP2551632A3

公开(公告)日：2013-05-08

申请号：EP12004990.3

申请日：2012-07-05

Applicant: Kabushiki Kaisha TOPCON

Inventor： Yuan, Zhijia ,  Wang, Zhenguo ,  Chan, Kinpui

IPC: G01B9/02 ,  A61B3/10

CPC classification number: G01B9/0201 ,  A61B3/102 ,  G01B9/02004 ,  G01B9/02069 ,  G01B9/02078 ,  G01B9/02091

Abstract: An optical imaging method is provided that can realize, at low cost, the extension of the imaging depth range. An optical imaging apparatus 400 is an apparatus that forms a tomographic image of an object using FD-OCT, and performs a scanning step, detection step and imaging step. In the scanning step, the object is scanned with a signal light while alternately changing the phase difference between the signal light and a reference light to two preset phase differences. In the detection step, interference light of the signal light passing through the object and the reference light is detected. In the imaging step, a tomographic image of the object is formed based on the detection results of a plurality of the interference lights sequentially obtained in the detection step according to the scanning.