Apparatus and method for automatic optical realignment
    163.
    发明公开
    Apparatus and method for automatic optical realignment 有权
    Vorrichtung und Verfahren zur automatischen optischen Neuausrichtung

    公开(公告)号:EP2333501A1

    公开(公告)日:2011-06-15

    申请号:EP09306159.6

    申请日:2009-11-30

    Abstract: An optical measurement apparatus (100) comprises a light source (1) for generating an incident light beam (4), a first optical system (13, 9a, 9b, 9c) for directing said incident light beam from said light source to said microscope objective (25) along an incident beam path, a spectrometer (27) and a measurement detector (7) for measuring secondary light (5) emitted from said sample (23), a second optical system (14a, 14b, 17) for collecting secondary light (5) generated from said sample (23) and for directing said secondary light toward said spectrometer (27) along a return beam path. According to the invention, the apparatus comprises at least one out of a 1 st switching mirror (10) and a 2 nd switching mirror (15), said 1 st switching mirror (10) having a position where it is inserted in said incident light path for directing said incident light beam toward a first detector (6) for optical misalignment detection of said incident beam path and said 2 nd switching mirror (15) having a position where it is inserted in said incident light path for directing said incident light beam along said return beam path toward a second detector for detecting optical misalignment in said return beam path.

    Abstract translation: 光学测量装置(100)包括用于产生入射光束(4)的光源(1),用于将来自所述光源的入射光束引导到所述显微镜的第一光学系统(13,9a,9b,9c) 物镜(25),用于测量从所述样品(23)发射的二次光(5)的光谱仪(27)和测量检测器(7),用于收集 从所述样品(23)产生的二次光(5)并且用于沿着返回光束路径将所述次级光导向所述光谱仪(27)。 根据本发明,该装置包括第一开关镜(10)和第二开关镜(15)中的至少一个,所述第一开关镜(10)具有插入入射光的位置 用于将所述入射光束引导到第一检测器(6)的路径,用于所述入射光束路径的光学偏移检测和所述第二转换镜(15),其具有插入所述入射光路中的位置,用于引导所述入射光束 沿着所述返回光束路径朝向用于检测所述返回光束路径中的光学未对准的第二检测器。

    DISPOSITIF ET PROCEDE DE MESURE DE CARACTERISATION PAR REFLECTOMETRIE
    166.
    发明公开
    DISPOSITIF ET PROCEDE DE MESURE DE CARACTERISATION PAR REFLECTOMETRIE 有权
    设备和测量方法,通过反射表面性能表征

    公开(公告)号:EP2021771A1

    公开(公告)日:2009-02-11

    申请号:EP07729581.4

    申请日:2007-05-29

    CPC classification number: G01N21/55 G01J3/02 G01J3/0237 G02B7/32

    Abstract: This invention concerns a device for measuring reflectometry characterization comprising 5 a source (10) which emits a beam of light, a detector (26), means for processing and controlling the light beam (19) so as to focus it on a reflective surface which is measured as a spot, which is receivable on a detector (26), 10 means for control and pick-up (30), a camera (29) and means for imaging the spot on the detector (26) and on the camera (29), in which the camera is connected to the control and pick-up means (30) in order to have 15 automatic focusing on the spot on the reflective surface to be measured and to automatically conjugate the reflective surface to be measured by the detector surface.

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