公开(公告)号：US07211928B2

公开(公告)日：2007-05-01

申请号：US10855135

申请日：2004-05-27

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L41/08

CPC classification number: G10K11/004 ,  B01J19/10 ,  B06B1/0269 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/70 ,  B06B2201/71 ,  B06B2201/72 ,  B08B3/12 ,  B08B2203/002 ,  G10K11/006

Abstract: The invention utilizes a multiple frequency ultrasound generator driving a multiple frequency harmonic transducer array to improve cleaning and processing effects while eliminating damage to parts being cleaned. An AC switch and circuitry to modify the output of an ultrasound generator in combination with techniques such as random AM and FM signals are used to produce ultrasound waves that have no single frequency components which eliminates exciting parts being cleaned into resonance. Generator signals that increase cavitation efficiency and that have successive time periods with predominately stable cavitation and predominantly transient cavitation further improve the performance of the cleaning or processing systems.

Abstract translation: 本发明利用驱动多频谐波换能器阵列的多频超声波发生器来改善清洁和处理效果，同时消除对被清洁部件的损坏。 AC开关和用于修改超声波发生器的输出以及诸如随机AM和FM信号的技术的电路用于产生没有单一频率分量的超声波，其消除被清理成谐振的兴奋部分。 具有增加气蚀效率并且具有主要稳定的气蚀和主要是瞬时空化的连续时间段的发电机信号进一步改善了清洁或处理系统的性能。

公开(公告)号：US07210354B2

公开(公告)日：2007-05-01

申请号：US11047110

申请日：2005-01-31

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: G01H3/00 ,  G01N29/00

CPC classification number: G10K11/004 ,  B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002

Abstract: The invention provides a sensing system for sensing process conditions within an ultrasonic process tank that includes process liquid, the liquid being subjected to ultrasound produced by transducers coupled to a generator. The sensing system includes an enclosure for housing a sample liquid, the enclosure passing ultrasonic energy from the process liquid to the sample liquid, the sample liquid being responsive to the ultrasonic energy, and at least one sensing device within the sample liquid, the sensing device generating signals indicative of characteristics of the sample liquid. The sample liquid includes materials adapted to produce chemiluminescence in response to the ultrasonic energy. The at least one sensing device includes a photo sensor for sensing the produced chemiluminescence and generating signals in response to the produced chemiluminescence.

Abstract translation: 本发明提供了一种感测系统，用于感测超声波处理槽内的处理条件，其包括处理液体，该液体经受与发生器耦合的换能器产生的超声波。 感测系统包括用于容纳样品液体的外壳，外壳将超声能量从处理液体传递到样品液体，样品液体响应于超声波能量，以及至少一个检测装置，在检测液体内，感测装置 产生指示样品液体特性的信号。 样品液体包括适于响应于超声能量产生化学发光的材料。 所述至少一个感测装置包括用于感测产生的化学发光并响应于所产生的化学发光产生信号的光传感器。

公开(公告)号：US07053000B2

公开(公告)日：2006-05-30

申请号：US10359765

申请日：2003-02-06

Applicant: Thomas W. Anderson ,  Robert Knop

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: H01L21/302 ,  H01L21/461

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057

Abstract: A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.

Abstract translation: 产生RF的系统和方法包括RF发生器，可变直流电源和比较器。 RF发生器具有耦合到换能器的输入的RF输出。 可变直流电源具有耦合到RF发生器的控制输入和DC输出。 比较器包括耦合到设定点控制信号的第一输入，耦合到RF发生器RF输出的第二输入以及耦合到可变直流电源上的电压控制输入的控制信号输出。

公开(公告)号：US07033845B2

公开(公告)日：2006-04-25

申请号：US10360320

申请日：2003-02-06

Applicant: Thomas W. Anderson ,  Robert Knop

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: H01L31/26 ,  H01L21/66 ,  B08B6/00 ,  B08B3/12 ,  C25F5/00

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of providing RF to a transducer includes an oscillator, an RF generator, and a voltage phase detector. The oscillator has a frequency control input and an RF signal output. The RF generator has an input coupled to the oscillator RF signal output and an RF generator output coupled to the transducer. The voltage phase detector includes a first phase input coupled to the RF signal output of the oscillator, a second phase input coupled to the RF generator output, and a frequency control signal output coupled to the oscillator frequency control voltage input.

Abstract translation: 向换能器提供RF的系统和方法包括振荡器，RF发生器和电压相位检测器。 振荡器具有频率控制输入和RF信号输出。 RF发生器具有耦合到振荡器RF信号输出的输入端和耦合到换能器的RF发生器输出。 电压相位检测器包括耦合到振荡器的RF信号输出的第一相位输入，耦合到RF发生器输出的第二相输入和耦合到振荡器频率控制电压输入的频率控制信号输出。

公开(公告)号：US06995067B2

公开(公告)日：2006-02-07

申请号：US10360322

申请日：2003-02-06

Applicant: John Boyd ,  Andras Kuthi ,  Michael G. R. Smith ,  Thomas W. Anderson ,  William Thie

Inventor： John Boyd ,  Andras Kuthi ,  Michael G. R. Smith ,  Thomas W. Anderson ,  William Thie

IPC: H01L21/336 ,  H01L21/42 ,  G01R31/26

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.

Abstract translation: 清洁衬底的系统和方法包括包括换能器和衬底的兆声波室。 换能器朝向基板。 可变距离d分离换能器和基板。 该系统还包括具有耦合到换能器的输出的动态可调的RF发生器。

公开(公告)号：US06865947B2

公开(公告)日：2005-03-15

申请号：US10105289

申请日：2002-03-26

Applicant: Seung Taek Baek

Inventor： Seung Taek Baek

IPC: B06B1/02 ,  B06B1/04 ,  G01H11/02 ,  G01N15/11

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

Abstract translation: 振动检测装置包括在筒管的内周具有所需长度的移动路径的线轴， 可以通过外部施加的振动或施加到筒管的振动沿着线轴的内周沿着移动路径移动的芯体; 卷绕在筒管的外周的线圈，其电感根据芯的移动而变化。

公开(公告)号：US20040182414A1

公开(公告)日：2004-09-23

申请号：US10814672

申请日：2004-03-30

Inventor： William L. Puskas

IPC: B08B003/10

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  G10K11/004 ,  G10K11/006

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., nullmicrosonicnull frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. This reduces or eliminates resonances which are created by transducers operating with a single sweep rate. An ultrasound generator of the invention sometimes utilizes amplitude modulation (AM), and the AM frequency is swept over time so as to reduce resonances. AM control is preferably provided by selecting a portion of the rectified power line frequency. In applications which utilize multiple generators, multiple transducers, and one or more tanks, simultaneously, the invention synchronizes the operation of the generators to a common FM signal to reduce beat frequencies between generators. Each such generator can also be adjusted, through AM, to control the process characteristics within the associated tank. Two or more transducers are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducers are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth. In a single chamber ultrasound system, two or more generators, each operating or optimized to generate a different range of frequencies, are connected to a multiplexer; and the desired frequency range is selected, and hence the right generator, according to the cavitation implosion energy that is desired within the tank chemistry.

公开(公告)号：US20030028287A1

公开(公告)日：2003-02-06

申请号：US10178751

申请日：2002-06-24

Inventor： William L. Puskas

IPC: G05B021/00

CPC classification number: B06B1/0269 ,  B06B1/0284 ,  B06B2201/70 ,  B06B2201/71 ,  B06B2201/72 ,  B08B3/12

Abstract: The invention utilizes a multiple frequency ultrasound generator driving a multiple frequency harmonic transducer array to improve cleaning and processing effects while eliminating damage to parts being cleaned. An AC switch and circuitry to modify the output of an ultrasound generator in combination with techniques such as random AM and FM signals are used to produce ultrasound waves that have no single frequency components which eliminates exciting parts being cleaned into resonance.

Abstract translation: 本发明利用驱动多频谐波换能器阵列的多频超声波发生器来改善清洁和处理效果，同时消除对被清洁部件的损坏。 AC开关和用于修改超声波发生器的输出以及诸如随机AM和FM信号的技术的电路用于产生没有单一频率分量的超声波，其消除被清理成谐振的兴奋部分。

公开(公告)号：US20020171331A1

公开(公告)日：2002-11-21

申请号：US10167704

申请日：2002-06-12

Inventor： William L. Puskas

IPC: H01L041/08

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  G10K11/004 ,  G10K11/006

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., nullmicrosonicnull frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. This reduces or eliminates resonances which are created by transducers operating with a single sweep rate. An ultrasound generator of the invention sometimes utilizes amplitude modulation (AM), and the AM frequency is swept over time so as to reduce resonances. AM control is preferably provided by selecting a portion of the rectified power line frequency. In applications which utilize multiple generators, multiple transducers, and one or more tanks, simultaneously, the invention synchronizes the operation of the generators to a common FM signal to reduce beat frequencies between generators. Each such generator can also be adjusted, through AM, to control the process characteristics within the associated tank. Two or more transducers are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducers are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth. In a single chamber ultrasound system, two or more generators, each operating or optimized to generate a different range of frequencies, are connected to a multiplexer; and the desired frequency range is selected, and hence the right generator, according to the cavitation implosion energy that is desired within the tank chemistry.

公开(公告)号：US06470751B1

公开(公告)日：2002-10-29

申请号：US09506727

申请日：2000-02-18

Applicant: Seung Taek Baek

Inventor： Seung Taek Baek

IPC: G01P1500

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

Abstract translation: 振动检测装置包括在筒管的内周具有所需长度的移动路径的线轴， 可以通过外部施加的振动或施加到筒管的振动沿着线轴的内周沿着移动路径移动的芯体; 卷绕在筒管的外周的线圈，其电感根据芯的移动而变化。