Scan mirror reflectivity calibration method and apparatus

    公开(公告)号:US11852804B2

    公开(公告)日:2023-12-26

    申请号:US17214692

    申请日:2021-03-26

    Inventor: Lacy G. Cook

    CPC classification number: G02B26/10 G01N21/55 G02B26/0816 G01N2201/0683

    Abstract: A scan mirror reflectivity calibration device is provided for monitoring and calibration of a rotating two-sided scan mirror. The scan mirror reflectivity calibration device can comprise at least one light source assembly operable to direct light onto a back side of a rotating two-sided scan mirror. The at least one light source assembly can be mounted outside a swept volume of the rotating two-sided scan mirror. The scan mirror reflectivity calibration device further comprises at least one detector assembly operable to detect light that is emitted from the at least one light source assembly and is reflected off of the back side of the rotating two-sided scan mirror. The at least one detector assembly can be mounted outside the swept volume of the rotating two-sided scan mirror.

    SENSOR COMBINING DUST SENSOR AND GAS SENSOR
    172.
    发明申请

    公开(公告)号:US20190195792A1

    公开(公告)日:2019-06-27

    申请号:US16197056

    申请日:2018-11-20

    Inventor: Jaeyong RYU

    Abstract: The present invention provides a sensor combining a dust sensor and a gas sensor, comprising a light emitting unit for emitting light, a first light receiving unit for receiving scattered light which is emitted by the light emitting unit and scattered by dust to detect dust concentration, a mirror for changing a path of the emitted light which the light emitting unit emits, and a second light receiving unit for receiving the emitted light the path of which is changed by the mirror to detect gas concentration. An inflow section for introducing air into a detection space inside the sensor is formed in a Y-shaped tube in which a first inlet and a second inlet meet. The inflow section comprises a switch which selects a path through which air flows into the detection space out of the first inlet and the second inlet.

    METHOD AND SYSTEM FOR OPTICAL CHARACTERIZATION OF PATTERNED SAMPLES

    公开(公告)号:US20180328837A1

    公开(公告)日:2018-11-15

    申请号:US16042448

    申请日:2018-07-23

    Abstract: A method and system are presented for use in measuring on patterned samples, aimed at determining asymmetry in the pattern. A set of at least first and second measurements on a patterned region of a sample is performed, where each of the measurements comprises: directing illuminating light onto the patterned region along an illumination channel and collecting light reflected from the illuminated region propagating along a collection channel to be detected, such that detected light from the same patterned region has different polarization states which are different from polarization of the illuminating light, and generating a measured data piece indicative of the light detected in the measurement. Thus, at least first and second measured data pieces are generated for the at least first and second measurements on the same patterned region. The at least first and second measured data pieces are analyzed and output data is generated being indicative of a condition of asymmetry in the patterned region.

    METHOD OF MEASURING RAMAN SCATTERING AND RELATED SPECTROMETERS AND LASER SOURCES

    公开(公告)号:US20180195965A1

    公开(公告)日:2018-07-12

    申请号:US15864340

    申请日:2018-01-08

    CPC classification number: G01N21/65 G01N2201/06113 G01N2201/0683

    Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.

    Apparatus and method for inspecting seals of items

    公开(公告)号:US09927372B2

    公开(公告)日:2018-03-27

    申请号:US14441856

    申请日:2013-11-12

    Applicant: FOCALSPEC OY

    Abstract: A measuring apparatus is provided for inspecting a seal of an item. The measuring apparatus includes a radiation source for providing radiation for illuminating the seal of the item, a detector for receiving radiation from the item for generating a corresponding detected signal, and a processing arrangement for processing the detected signal to generate an output signal indicative of a state of the seal. The radiation source is arranged to focus the radiation into a plurality of focal points at the seal of the item, wherein the focal points are mutually spatially spaced apart. Moreover, the detector is arranged to image one or more of the focal points and to be selectively sensitive to an intensity of radiation received from the one or more focal points to generate a detected signal.

    INSPECTION SYSTEMS FOR ADDITIVE MANUFACTURING SYSTEMS

    公开(公告)号:US20180071999A1

    公开(公告)日:2018-03-15

    申请号:US15260345

    申请日:2016-09-09

    Applicant: Eric Karlen

    Inventor: Eric Karlen

    Abstract: An inspection system for an additive manufacturing machine can include a housing configured to be mounted to an internal construction of the additive manufacturing machine, wherein the housing defines a laser inlet configured to allow a laser beam from a laser of the additive manufacturing machine to enter into the housing, wherein the housing defines a laser outlet configured to allow the laser beam to exit from the housing and to allow reflected light to enter into the housing. One or more detectors is disposed within the housing and configured to receive the reflected light. The system includes one or more optical elements configured to allow the laser beam to pass through the housing from the laser inlet to the laser outlet toward a build area of the additive manufacturing machine and to direct reflected light from the laser outlet to the one or more detectors within the housing.

    Scanning microscope with polarised sample illumination

    公开(公告)号:US09909976B2

    公开(公告)日:2018-03-06

    申请号:US14916538

    申请日:2014-09-03

    Abstract: The invention relates to a method for investigating a sample, the sample being impinged upon by illuminating light, and detected light emerging from the sample being directed to a detector, and the illuminating light being directed through an acousto-optic component with which the impingement upon the sample by illuminating light can be temporarily interrupted. The method is notable for the fact that the sample is illuminated with a first illuminating light bundle that has a first linear polarization direction, and with a second illuminating light bundle whose linear polarization direction is continuously switched over between the first linear polarization direction and a second linear polarization direction different from the first linear polarization direction, the illuminating light having the first linear polarization direction proceeding along a first light path and illuminating light having the second linear polarization direction proceeding along a second light path, and the acousto-optic component combining the light paths.

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