公开(公告)号：US20020134402A1

公开(公告)日：2002-09-26

申请号：US10153903

申请日：2002-05-24

Inventor： Sameer I. Madanshetty

IPC: B08B003/12

CPC classification number: B06B1/0215 ,  B06B1/0603 ,  B06B1/067 ,  B06B2201/71 ,  B08B3/12 ,  G10K11/006 ,  G10K11/08 ,  G10K15/043 ,  Y10S134/902

Abstract: An article produced by acoustic cavitation by controlling cavitation events in a liquid insonification medium utilizing a waveform to excite a transducer with a series of tone bursts having medium recovery intervals between respective bursts so that the medium repeatedly recovers from cavitation events between bursts. Articles include a device made from a semiconductor wafer that is cleaned or otherwise processed by acoustic cavitation, a surface having been de-coated by acoustic cavitation, a chemical compound made from a chemical substance reacted by acoustic cavitation, and recycled paper made from inked paper de-inked by cavitation. Cavitation events are generated using a transducer and a waveform generator, e.g., square wave tone bursts, to excite the transducer with a signal controlled in frequency, burst repetition rate, duty-cycle and/or amplitude, e.g., utilizing bursts having a frequency between 500 KHz and 10 MHz, and a duty cycle between 0.1% and 70%.

Abstract translation: 通过声波空化产生的物品，其通过使用波形来控制液体非离子化介质中的气蚀事件，以在各个脉冲串之间具有具有介质恢复间隔的一系列音调脉冲串来激发换能器，使得介质从突发之间的空化事件重复地恢复。 制品包括由通过声空化清洗或以其他方式处理的半导体晶片制成的装置，已被声空化去除的表面，由声空化反应的化学物质制成的化合物和由油墨纸制成的再生纸 由气穴脱墨。 使用换能器和波形发生器（例如，方波音频脉冲串）来产生气蚀事件，以频率控制的信号激发换能器，突发重复率，占空比和/或幅度，例如利用具有在 500KHz和10MHz，占空比为0.1％至70％。

公开(公告)号：US06181052B2

公开(公告)日：2001-01-30

申请号：US09371704

申请日：1999-08-09

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002 ,  G01N27/06 ,  G01N29/032 ,  G01N29/222 ,  G01N29/348 ,  G01N2291/02818 ,  G01N2291/02863 ,  G10K11/004 ,  G10K11/006

Abstract: The invention provides systems, methods and apparatus for processing delicate parts within a process tank such as an ultrasonic tank. Typically, one or more transducers connect to the tank and respond to drive signals from a generator to produce ultrasound within process liquid within the tank. Specific features of the invention include: (1) a power up-sweep ultrasonic system for moving contaminants upwards within the tank by sweeping transducer drive signals from an upper frequency to a lower frequency without sweeping from the lower frequency to the upper frequency; (2) a multi-generator system for producing ultrasound at selected different frequencies within the tank by switching a common transducer bank to one of the generators in response to remote relays initiated by the user; (3) a probe sensing system for sensing process conditions within the tank including an enclosure for housing a sample liquid and one or more sensing transducers within the sample liquid, the transducers generating signals indicative of characteristics of the sample liquid, a subsystem analyzing the signals in feedback with the generator to modify process conditions; (4) variable voltage ultrasonic generator systems to accommodate varying world-wide voltage supplies; (5) a laminar process tank for efficiently pushing contaminants upwards in a tank; (6) a quick dump rinse tank including a pressure cavity to accelerate dumping processes; (7) an ultrasonic generating unit formed of a printed circuit board (PCB) and multiple transducers within the PCB; (8) an AC power system to produce an AC voltage at frequency f that is impressed across a capacitive element; and (9) various configurations of transducers, including acid-safe transducers, double-compression transducers, and transducers with increased reliability.

Abstract translation: 本发明提供了用于处理诸如超声波罐的处理罐内的精密部件的系统，方法和装置。 通常，一个或多个换能器连接到油箱并响应来自发电机的驱动信号，以在罐内的处理液体内产生超声波。 本发明的具体特征包括：（1）上行扫描超声波系统，用于通过从较高频率向较低频率扫描换能器驱动信号而不用从较低频率扫频到上频频率来将污染物向上移动; （2）多发生器系统，用于响应由用户发起的远程继电器，通过将公共换能器组切换到发电机中的一个，在罐内以选定的不同频率产生超声波; （3）用于感测罐内的工艺条件的探针感测系统，包括用于容纳样品液体和样品液体内的一个或多个感测传感器的外壳，换能器产生指示样品液体特性的信号，分析信号的子系统 用发电机反馈修改工艺条件; （4）可变电压超声波发生器系统，以适应不同的世界范围的电压源; （5）用于在罐中有效地将污染物向上推动的层流工艺罐; （6）快速倾倒冲洗槽，包括压力腔，以加速倾倒过程; （7）由印刷电路板（PCB）和PCB内的多个换能器构成的超声波发生单元; （8）交流电力系统，以产生跨过电容元件施加的频率f的交流电压; 和（9）各种配置的传感器，包括耐酸性传感器，双压缩传感器和具有更高可靠性的传感器。

公开(公告)号：US06172444B2

公开(公告)日：2001-01-09

申请号：US09370751

申请日：1999-08-09

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/71 ,  B08B3/12 ,  B08B2203/002 ,  G01N27/06 ,  G01N29/032 ,  G01N29/222 ,  G01N29/348 ,  G01N2291/02818 ,  G01N2291/02863 ,  G10K11/004 ,  G10K11/006

Abstract: The invention provides systems, methods and apparatus for processing delicate parts within a process tank such as an ultrasonic tank. Typically, one or more transducers connect to the tank and respond to drive signals from a generator to produce ultrasound within process liquid within the tank. Specific features of the invention include: (1) a power up-sweep ultrasonic system for moving contaminants upwards within the tank by sweeping transducer drive signals from an upper frequency to a lower frequency without sweeping from the lower frequency to the upper frequency; (2) a multi-generator system for producing ultrasound at selected different frequencies within the tank by switching a common transducer bank to one of the generators in response to remote relays initiated by the user; (3) a probe sensing system for sensing process conditions within the tank including an enclosure for housing a sample liquid and one or more sensing transducers within the sample liquid, the transducers generating signals indicative of characteristics of the sample liquid, a subsystem analyzing the signals in feedback with the generator to modify process conditions; (4) variable voltage ultrasonic generator systems to accommodate varying world-wide voltage supplies; (5) a laminar process tank for efficiently pushing contaminants upwards in a tank; (6) a quick dump rinse tank including a pressure cavity to accelerate dumping processes; (7) an ultrasonic generating unit formed of a printed circuit board (PCB) and multiple transducers within the PCB; (8) an AC power system to produce an AC voltage at frequency f that is impressed across a capacitive element; and (9) various configurations of transducers, including acid-safe transducers, double-compression transducers, and transducers with increased reliability.

Abstract translation: 本发明提供了用于处理诸如超声波罐的处理罐内的精密部件的系统，方法和装置。 通常，一个或多个换能器连接到油箱并响应来自发电机的驱动信号，以在罐内的处理液体内产生超声波。 本发明的具体特征包括：（1）上行扫描超声波系统，用于通过从较高频率向较低频率扫描换能器驱动信号而不用从较低频率扫频到上频频段来将污染物向上移动; （2）多发生器系统，用于响应由用户发起的远程继电器，通过将公共换能器组切换到发电机中的一个，在罐内以选定的不同频率产生超声波; （3）用于感测罐内的工艺条件的探针感测系统，包括用于容纳样品液体和样品液体内的一个或多个感测传感器的外壳，换能器产生指示样品液体特性的信号，分析信号的子系统 用发电机反馈修改工艺条件; （4）可变电压超声波发生器系统，以适应不同的世界范围的电压源; （5）用于在罐中有效地将污染物向上推动的层流工艺罐; （6）快速倾倒冲洗槽，包括压力腔，以加速倾倒过程; （7）由印刷电路板（PCB）和PCB内的多个换能器构成的超声波发生单元; （8）交流电力系统，以产生跨过电容元件施加的频率f的交流电压; 和（9）各种配置的传感器，包括耐酸性传感器，双压缩传感器和具有更高可靠性的传感器。

公开(公告)号：US6002195A

公开(公告)日：1999-12-14

申请号：US66171

申请日：1998-04-24

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: B01J19/10 ,  B06B1/02 ,  B06B1/06 ,  G10K11/00 ,  H01L41/08

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  G10K11/004 ,  G10K11/006 ,  B06B2201/71

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., "microsonic" frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. Two or more transducer are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducer are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth.

Abstract translation: 本发明利用某些夹紧的超声换能器的谐波在超声波罐的液体内产生超声波，并且在约100khz至350khz（即“微音”）频率的频率范围内。 将微声频率应用于液体优选地与换能器的谐波带宽内的微声频率的扫描同时发生，以减少或消除（a）液体内的驻波，（b）其他共振，（c）高能空化爆发，以及 （d）不均匀的声场，每个声场对于半导体晶片和其它微细零件的清洁和/或处理是不期望的。 本发明还可以驱动超声波换能器，使得施加的能量的频率在换能器的超声波带内具有扫描速率; 并且扫描速率也变化，使得扫描速率在操作期间基本上不恒定。 本发明有时使用两个或更多个换能器组合，以扩大施加到主频率周围的液体或谐波之一的声能的总带宽。 传感器的带宽被重叠，使得附接的发生器可以组合地驱动换能器，以在更宽的带宽内将超声波输送到液体。

公开(公告)号：US5834871A

公开(公告)日：1998-11-10

申请号：US718945

申请日：1996-09-24

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: B01J19/10 ,  B06B1/02 ,  B06B1/06 ,  G10K11/00 ,  H01L41/08

CPC classification number: B01J19/10 ,  B06B1/0276 ,  B06B1/0618 ,  B06B1/0622 ,  G10K11/004 ,  G10K11/006 ,  B06B2201/71

Abstract: The invention utilizes harmonics of certain clamped ultrasound transducers to generate ultrasound within the liquid of an ultrasonic tank and in a frequency range of between about 100 khz to 350 khz (i.e., "microsonic" frequencies). The application of microsonic frequencies to liquid preferably occurs simultaneously with a sweeping of the microsonic frequency within the transducer's harmonic bandwidth to reduce or eliminate (a) standing waves within the liquid, (b) other resonances, (c) high energy cavitation implosion, and (d) non-uniform sound fields, each of which is undesirable for cleaning and/or processing of semiconductor wafers and other delicate parts. The invention can also drive ultrasonic transducers such that the frequency of applied energy has a sweep rate within the ultrasonic bandwidth of the transducers; and that sweep rate is also varied so that the sweep rate is substantially non-constant during operation. This reduces or eliminates resonances which are created by transducers operating with a single sweep rate. An ultrasound generator of the invention sometimes utilizes amplitude modulation (AM), and the AM frequency is swept over time so as to reduce resonances. AM control is preferably provided by selecting a portion of the rectified power line frequency. In applications which utilize multiple generators, multiple transducers, and one or more tanks, simultaneously, the invention synchronizes the operation of the generators to a common FM signal to reduce beat frequencies between generators. Each such generator can also be adjusted, through AM, to control the process characteristics within the associated tank. Two or more transducers are sometimes used by the invention, in combination, to broaden the overall bandwidth of acoustical energy applied to the liquid around the primary frequency or one of the harmonics. The bandwidths of the transducers are made to overlap such that an attached generator can drive the transducers, in combination, to deliver ultrasound to the liquid in a broader bandwidth. In a single chamber ultrasound system, two or more generators, each operating or optimized to generate a different range of frequencies, are connected to a multiplexer; and the desired frequency range is selected, and hence the right generator, according to the cavitation implosion energy that is desired within the tank chemistry.

公开(公告)号：US5777860A

公开(公告)日：1998-07-07

申请号：US733117

申请日：1996-10-16

Applicant: Robert C. Halbert

Inventor： Robert C. Halbert

IPC: B06B1/02 ,  H02M7/5387 ,  H01L41/08 ,  H02M5/40

CPC classification number: B06B1/0253 ,  H02M7/53871 ,  B06B2201/71 ,  Y02B70/1441

Abstract: An ultrasonic power supply for driving piezoelectric transducers in an ultrasonic cleaning apparatus comprises a full-wave rectifier for providing unfiltered direct current to an inverter circuit of the clamped mode resonant converter type, which provides alternating current output at the series resonant frequency condition of the transducers. The inverter circuit switching cycle is controlled responsive to means for causing a set average power level to be maintained, means for causing the resonant frequency to be maintained and including means for causing the resonant frequency to be swept symmetrically by an adjustable sweep frequency. Also, power modulation means are provided for optionally providing to the transducers power bursts of a set amplitude, but at the set average power level. As a result of the unfiltered direct current from the full-wave rectifier, the power supply will operate substantially at unity power factor.

Abstract translation: 用于在超声波清洗装置中驱动压电换能器的超声波电源包括全波整流器，用于向钳​​位模式谐振转换器类型的逆变器电路提供未滤波的直流电流，其在换能器的串联谐振频率条件下提供交流输出 。 响应于用于使得设定的平均功率电平得以保持的装置来控制逆变器电路切换周期，包括用于使谐振频率保持的装置，并且包括用于使共振频​​率对称地以可调扫描频率扫描的装置。 而且，功率调制装置被提供用于可选地向传感器提供设定振幅的功率脉冲串，但处于设定的平均功率电平。 由于来自全波整流器的未滤波的直流电的结果，电源将基本上以单位功率因数运行。

公开(公告)号：US4888565A

公开(公告)日：1989-12-19

申请号：US284515

申请日：1988-12-15

Applicant: Gordon E. Littleford ,  Roy F. Underwood

Inventor： Gordon E. Littleford ,  Roy F. Underwood

IPC: B08B3/12 ,  B06B1/02 ,  H03L5/00 ,  H03L7/183

CPC classification number: H03L7/183 ,  B06B1/0253 ,  H03L5/00 ,  B06B2201/71

Abstract: An ultrasonic generator, particularly for use in ultrasonic cleaning systems, provides a constant ultrasonic power output for a cleaning tank or chamber. A generator output stage fed from an unsmoothed mains power supply receives signals from an oscillator via a pulse-width modulation circuit. A power control feedback loop monitors the mains current, or alternatively the output signal from the output stage, and provides a compensation signal to the pulse-width modulation circuit. A frequency control feedback loop senses the current in the output from the output stage and tunes the generator for maximum current in this output.

Abstract translation: 超声波发生器，特别是用于超声波清洗系统的超声波发生器为清洗槽或室提供恒定的超声功率输出。 从未平滑的主电源馈送的发电机输出级通过脉宽调制电路接收来自振荡器的信号。 功率控制反馈回路监测电源电流，或者输出级输出信号，并向脉冲宽度调制电路提供补偿信号。 频率控制反馈回路检测来自输出级的输出中的电流，并在该输出中调谐发生器的最大电流。

公开(公告)号：US3681626A

公开(公告)日：1972-08-01

申请号：US3681626D

申请日：1971-11-11

Applicant: BRANSON INSTR

Inventor： PUSKAS WILLIAM L

IPC: H03B5/08 ,  B06B1/00 ,  B06B1/02 ,  B06B1/06 ,  B08B3/12 ,  H03B5/12 ,  H03B5/30 ,  H01V7/00

CPC classification number: B06B1/0253 ,  B06B2201/55 ,  B06B2201/71

Abstract: An oscillatory circuit for ultrasonic cleaning apparatus, omitting an output transformer, includes a half bridge transistor switching circuit and an oscillatory circuit to which a variable quantity of ultrasonic transducers are connectable. The feedback circuit for causing the transistors to be alternatingly conductive comprises a transformer winding and the serially connected parallel connection of a capacitor and unidirectional current conduction means (rectifier) so selected that during the non-conductive period the associated transistor is biased with a potential slightly less than the base-emitter electrode breakdown voltage.

公开(公告)号：US3433462A

公开(公告)日：1969-03-18

申请号：US3433462D

申请日：1968-01-19

Applicant: CREST ULTRASONICS CORP

Inventor： COOK EDWARD G

IPC: B06B1/02 ,  B06B1/06 ,  B01F9/00 ,  B01F13/08

CPC classification number: B06B1/0276 ,  B06B1/0648 ,  B06B2201/20 ,  B06B2201/71

公开(公告)号：US3085185A

公开(公告)日：1963-04-09

申请号：US81265659

申请日：1959-05-12

Applicant: DETREX CHEM IND

Inventor： EMIL JACKE STANLEY ,  COLLISON JOHN W

IPC: B06B1/02

CPC classification number: B06B1/0238 ,  B06B2201/55 ,  B06B2201/71