公开(公告)号：US08891086B2

公开(公告)日：2014-11-18

申请号：US12724192

申请日：2010-03-15

Applicant: Kevin J. Knopp ,  Robert L. Green ,  Brendon D. Tower ,  Christopher D. Brown ,  Gregory H. Vander Rhodes

Inventor： Kevin J. Knopp ,  Robert L. Green ,  Brendon D. Tower ,  Christopher D. Brown ,  Gregory H. Vander Rhodes

IPC: G01N21/55 ,  G01N21/65 ,  G01J3/02 ,  G01J3/44 ,  G01N21/47 ,  G01N21/35

CPC classification number: G01N21/17 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0262 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/42 ,  G01J3/44 ,  G01J3/4412 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/55 ,  G01N21/59 ,  G01N21/65 ,  G01N2021/3595 ,  G01N2201/0221 ,  G01N2201/0612 ,  G01N2201/062 ,  G01N2201/105 ,  G01N2201/125

Abstract: Disclosed are apparatus, kits, methods, and systems that include a radiation source configured to direct radiation to a sample; a detector configured to measure radiation from the sample; an electronic processor configured to determine information about the sample based on the measured radiation; a housing enclosing the source, the detector, and the electronic processor, the housing having a hand-held form factor; an arm configured to maintain a separation between the sample and the housing, the arm including a first end configured to connect to the housing and a second end configured to contact the sample; and a layer positioned on the second end of the arm, the layer being configured to contact the sample and to transmit at least a portion of the radiation from the sample to the detector.

Abstract translation: 公开了包括被配置为将辐射引导到样品的辐射源的装置，试剂盒，方法和系统; 检测器，被配置为测量来自样品的辐射; 电子处理器，被配置为基于所测量的辐射来确定关于样本的信息; 包围所述源，所述检测器和所述电子处理器的外壳，所述外壳具有手持外形尺寸; 臂被配置为保持样品和壳体之间的分离，所述臂包括构造成连接到壳体的第一端和被配置为接触样品的第二端; 以及位于所述臂的第二端上的层，所述层被配置为接触所述样品并将所述辐射的至少一部分从所述样品透射到所述检测器。

公开(公告)号：US20130063724A1

公开(公告)日：2013-03-14

申请号：US13613141

申请日：2012-09-13

Applicant: Cameron John Tovey

Inventor： Cameron John Tovey

IPC: G01B11/00

CPC classification number: G01N21/253 ,  G01N21/774 ,  G01N2021/7773 ,  G01N2021/7793 ,  G01N2021/7796 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/105

Abstract: Motion control system and method for biosensor scanning that include inputting to a multi-axis motion controller move commands associated with the scan path as defined by multiple axes. The multiple axes including an x-baseline coordinate x0, a y-baseline coordinate y0, an x-direction oscillation amplitude x1, a y-direction oscillation amplitude y1, an oscillation frequency f and a phase φ. The multi-axis motion controller outputs digital commanded positions for each of the multiple axes. A post-processor receives the commanded positions and generates parameterized commanded positions x and y that each include a baseline motion component and an oscillating motion component. The parameterized commanded positions cause the scanning optical system to deflect the light beam to scan the beam spot over the scan path to scan the biosensor.

Abstract translation: 用于生物传感器扫描的运动控制系统和方法包括向多轴运动控制器输入移动与由多个轴定义的扫描路径相关联的命令。 多个轴包括x基线坐标x0，y基线坐标y0，x方向振荡振幅x1，y方向振荡振幅y1，振荡频率f和相位＆phgr。 多轴运动控制器为每个多轴输出数字指令位置。 后处理器接收命令位置并产生每个包括基线运动分量和振荡运动分量的参数化指令位置x和y。 参数化的命令位置使得扫描光学系统偏转光束以扫描扫描路径上的束斑以扫描生物传感器。

公开(公告)号：US07557910B2

公开(公告)日：2009-07-07

申请号：US11311924

申请日：2005-12-17

Applicant: Bruce Baran ,  Chris L. Koliopoulos ,  Songping Gao ,  Richard Earl Bills ,  Michael Murphree

Inventor： Bruce Baran ,  Chris L. Koliopoulos ,  Songping Gao ,  Richard Earl Bills ,  Michael Murphree

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable scan speed beam scanning subsystem, preferably using an acousto-optic deflector, with beam compensation, so that variable scanning speeds can be achieved. Also included are methods and systems for improving the signal to noise ratio by use of scatter reducing complements, and a system and method for selectively and repeatedly scanning a region of interest on the surface in order to provide additional observations of the region of interest.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有可变扫描速度波束扫描子系统，优选地使用声光偏转器，具有光束补偿，使得可以实现可变扫描速度。 还包括用于通过使用散射减少补充来改善信噪比的方法和系统，以及用于选择性地和重复扫描表面上的感兴趣区域以便提供感兴趣区域的附加观察的系统和方法。

公开(公告)号：US20060197945A1

公开(公告)日：2006-09-07

申请号：US11311926

申请日：2005-12-17

Applicant: Thimothy Tiemeyer ,  James Akutsu

Inventor： Thimothy Tiemeyer ,  James Akutsu

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A method for inspecting a surface of a workpiece comprises scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light and scattered light comprising light that is scattered from the surface upon impingement thereon by the incident beam; and determining an extent of a contribution to surface roughness from a component of the surface, with the component having a surface roughness spatial frequency range.

Abstract translation: 用于检查工件表面的方法包括扫描工件表面上的入射光束以撞击其上以产生反射光和散射光，其包括由入射光束在其上撞击时从表面散射的光; 并且确定从表面的部件对表面粗糙度的贡献的程度，其中该部件具有表面粗糙度空间频率范围。

公开(公告)号：US20060192950A1

公开(公告)日：2006-08-31

申请号：US11311925

申请日：2005-12-17

Applicant: Neil Judell ,  Songping Gao ,  Timothy Tiemeyer

Inventor： Neil Judell ,  Songping Gao ,  Timothy Tiemeyer

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The processing subsystem has a channel formation capability for forming selected channels and developing channel output associated with each selected channel, with the channel output developed from collector output associated with at least one collection and detection module. Also, a spherical defect channel is described for detection of small spherical objects and defects with like geometries, using scattered light observed by the back collector output and P-polarized scattered light observed by wing collectors

Abstract translation: 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 处理子系统具有用于形成所选择的信道的信道形成能力和与每个选择的信道相关联的开发信道输出，其中信道输出从与至少一个收集和检测模块相关联的收集器输出开发。 此外，使用通过后集电极输出观察到的散射光和机翼收集器观察到的P偏振散射光，描述了用于检测小球形物体和类似几何形状的缺陷的球形缺陷通道

公开(公告)号：US20060186362A1

公开(公告)日：2006-08-24

申请号：US11311904

申请日：2005-12-17

Applicant: Richard Bills ,  James McNiven

Inventor： Richard Bills ,  James McNiven

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features masking positioned in the collection and detection subsystem arranged to selectively prevent a portion of scattered light from passing through. Also included is a scatter absorbing system having a series of scatter absorbing elements for minimizing unrelated to the scatter associated with a desired location on the surface.

Abstract translation: 提供了表面检查系统，以及相关的部件和方法。 表面检查系统包括光束源子系统，光束扫描子系统，工件运动子系统，光学收集和检测子系统以及处理子系统。 该系统具有位于收集和检测子系统中的掩蔽，该收集和检测子系统布置成选择性地防止一部分散射光通过。 还包括具有一系列散射吸收元件的散射吸收系统，用于最小化与与表面上的期望位置相关联的散射无关。

公开(公告)号：US20240159669A1

公开(公告)日：2024-05-16

申请号：US17773115

申请日：2020-10-30

Applicant: UNM RAINFOREST INNOVATIONS

Inventor： Steven R.J. BRUECK ,  Alexander NEUMANN ,  Juan Jose FARIA BRICENO

IPC: G01N21/47

CPC classification number: G01N21/47 ,  G01N2021/4735 ,  G01N2021/4792 ,  G01N2201/105

Abstract: A method and system for high-speed 2Θ multi-point scatterometry is disclosed. The method includes directing a laser beam from a laser light source to a collimation optical system that collimates the laser beam to a collimated laser beam; adjusting a polarization of the collimated laser beam using a polarization control optics; directing the collimated laser beam that is polarized by a first optical system to illuminate a focal area on a sample surface; receiving reflected light from the focus of the laser light source at the sample surface by a second optical system; detecting the reflected light by a detector system to produce detection signals; and processing the detection signals to measure parameters of the sample surface.

公开(公告)号：US20230251479A1

公开(公告)日：2023-08-10

申请号：US18015770

申请日：2021-08-06

Applicant: ABBERIOR INSTRUMENTS GMBH

Inventor： Roman SCHMIDT ,  Winfried WILLEMER

IPC: G02B21/00 ,  G01N21/64

CPC classification number: G02B21/0072 ,  G02B21/0036 ,  G02B21/0076 ,  G01N21/6456 ,  G01N2201/105

Abstract: The invention relates to a method for localizing an emitter (F) in a sample (S) comprising illuminating the sample (S) with a stationary donut-shaped excitation beam (E), acquiring fluorescence photons; and estimating a position of the emitter (F) in the sample (S) from the acquired fluorescence photons. The invention further relates to an apparatus (1) for localizing an emitter (F) in a sample (S) comprising illumination means (10), acquisition means (20) and processing means (30) and a computer program comprising instruction to cause the apparatus (1) to execute the method for localizing an emitter (F).

公开(公告)号：US11674882B2

公开(公告)日：2023-06-13

申请号：US17692876

申请日：2022-03-11

Applicant: 1087 Systems, Inc.

Inventor： Matthias Wagner

IPC: G01N15/14 ,  G01N21/3577 ,  G02B21/00 ,  G01N21/39 ,  G01N21/53 ,  G01N15/06 ,  G01N15/00 ,  G01N21/35 ,  G01N21/3581 ,  G01N21/552 ,  G01N15/10

CPC classification number: G01N15/1436 ,  G01N15/00 ,  G01N15/06 ,  G01N15/147 ,  G01N15/1434 ,  G01N15/1475 ,  G01N21/35 ,  G01N21/3577 ,  G01N21/39 ,  G01N21/53 ,  G02B21/006 ,  G02B21/008 ,  G02B21/0032 ,  G02B21/0036 ,  G02B21/0064 ,  G01N21/3581 ,  G01N21/552 ,  G01N2015/0065 ,  G01N2015/0687 ,  G01N2015/0693 ,  G01N2015/1006 ,  G01N2015/1443 ,  G01N2015/1447 ,  G01N2015/1488 ,  G01N2015/1497 ,  G01N2021/399 ,  G01N2201/068 ,  G01N2201/105

Abstract: An analyzer of a component in a sample fluid includes an optical source and an optical detector defining a beam path of a beam, wherein the optical source emits the beam and the optical detector measures the beam after partial absorption by the sample fluid, a fluid flow cell disposed on the beam path defining an interrogation region in the a fluid flow cell in which the optical beam interacts with the sample fluid and a reference fluid; and wherein the sample fluid and the reference fluid are in laminar flow, and a scanning system that scans the beam relative to the laminar flow within the fluid flow cell, wherein the scanning system scans the beam relative to both the sample fluid and the reference fluid.

公开(公告)号：US20180266940A1

公开(公告)日：2018-09-20

申请号：US15459209

申请日：2017-03-15

Applicant: Savannah River Nuclear Solutions, LLC

Inventor： Eliel Villa-Aleman ,  William A. Spencer

IPC: G01N21/25 ,  G01N21/71 ,  G01N21/27 ,  G02B6/32

CPC classification number: G01N21/255 ,  G01J3/2889 ,  G01N21/27 ,  G01N21/718 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B6/32 ,  G02B26/12

Abstract: Systems and methods for examining spectral data over the course of a high speed event are described. The systems and methods can enable observation of the spectral evolution of a transient phenomenon into segment intervals on the order of, milliseconds or microseconds. The methods include reflecting light from an event off of a rotating mirror and sequentially delivering light from the mirror to a series of optical waveguides for sequential spectral analysis. The systems and methods can be useful in a wide variety of applications such as, LIBS applications; examination of high energy devices such as explosions or simulations of explosions; examination of deposition processes, e.g., coating formations; examination of chemical reactions; etc.