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公开(公告)号：JP2010156026A
公开(公告)日：2010-07-15
申请号：JP2008335718
申请日：2008-12-29
Applicant: Nippon Itf Kk , Sumitomo Electric Ind Ltd , 住友電気工業株式会社 , 日本アイ・ティ・エフ株式会社
Inventor： YAMASHITA TOSHINOBU , TSUJIOKA MASANORI , NAKAHIGASHI TAKAHIRO , MIYAKE KOJI , SAITO YOSHIHIRO
IPC: C23C16/26 , C10M103/02 , C10N20/00 , C10N30/06 , C10N40/02 , C23C16/02 , C23C16/503 , C23C16/515
Abstract: PROBLEM TO BE SOLVED: To provide a hard carbon film which has such excellent sliding properties and high durability as to exceed those of a conventional hard carbon film, not only in a so-called unlubricated sliding action which does not use a lubricating oil, but also in a sliding action in a lubricating oil containing no extreme-pressure agent, and to provide a method for forming the same.
SOLUTION: The hard carbon film has a carbon layer which has a peak of the graphite crystal in an X-ray scattered spectrum, in the film. The hard carbon film contains the graphite crystal having a crystal size of 15-100 nm, and has a weight density d (g/cm
3 ) of 1.81≤d 22 22 , wherein P represents the density of the carbon atom pair in the vicinity of the first proximity (pairs/cm
3 ) and d represents the weight density (g/cm
3 ).
COPYRIGHT: (C)2010,JPO&INPITAbstract translation: 要解决的问题：为了提供具有优异的滑动性能和高耐久性的硬碳膜超过常规硬碳膜的硬碳膜，不仅在不使用润滑剂的所谓的无润滑的滑动作用 油，而且在不含极压剂的润滑油中的滑动作用下，提供其形成方法。 解决方案：在该膜中，硬碳膜具有在X射线散射光谱中具有石墨晶体的峰值的碳层。 该硬质碳膜含有晶体尺寸为15-100nm的石墨晶体，其重量密度d（g / cm 3，SP 3）为1.81≤d<2.00，碳的密度为 原子对满足以下表达式：（5.01×d）×10
22 22 其中P表示 在第一邻近附近的碳原子对（对/ cm 3 / SP>），d表示重量密度（g / cm 3 SP 3）。 版权所有（C）2010，JPO＆INPIT
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公开(公告)号：JP2010100905A
公开(公告)日：2010-05-06
申请号：JP2008273934
申请日：2008-10-24
Applicant: Nippon Itf Kk , Tokai Rubber Ind Ltd , 日本アイ・ティ・エフ株式会社 , 東海ゴム工業株式会社
Inventor： HAYASHI TAKAHIRO , INAGAKI HIROKI , NAKAHIGASHI TAKAHIRO , TANAKA SACHIKAZU
Abstract: PROBLEM TO BE SOLVED: To provide a coating film superior in mold release characteristics and durability compared to a conventional one, and to provide a die superior in mold release characteristics and durability.
SOLUTION: The Si-containing carbon film 10 has the maximum concentration of F on the front surface 10a of the film and the minimum concentration of F on the rear surface 10b of the film. The concentration of F is preferably gradient from the front surface of the film to the rear surface of the film. The front surface of the film can be suitably used by being brought into contact with an adhesive material and/or a sticking material. The die has the Si-containing carbon film 10 stacked on the surface of a die.
COPYRIGHT: (C)2010,JPO&INPITAbstract translation: 要解决的问题：提供与常规脱模性能和耐久性相比优异的涂膜，并提供脱模特性和耐久性优异的模具。 解决方案：含Si碳膜10在膜的前表面10a上具有最大浓度F，并且膜的后表面10b上的F的最小浓度。 F的浓度优选从膜的前表面到膜的后表面是梯度的。 膜的前表面可以通过与粘合剂材料和/或粘合材料接触而适当地使用。 模具具有堆叠在模具表面上的含Si的碳膜10。 版权所有（C）2010，JPO＆INPIT
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公开(公告)号：JP4388152B2
公开(公告)日：2009-12-24
申请号：JP35929898
申请日：1998-12-17
Applicant: 住友電工ハードメタル株式会社 , 日本アイ・ティ・エフ株式会社
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14.发明专利Carrier for polishing device and its manufacturing method, both-side polishing method, and masking jig 审中-公开抛光装置载体及其制造方法，双面抛光方法及掩模
公开(公告)号：JP2009190165A
公开(公告)日：2009-08-27
申请号：JP2009006592
申请日：2009-01-15
Applicant: Nippon Itf Kk , Sumitomo Metal Fine Technology Co Ltd , 日本アイ・ティ・エフ株式会社 , 株式会社住友金属ファインテック
Inventor： YOSHIMIZU MASAHIDE , TANAKA SACHIKAZU , NAKAHIGASHI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a carrier for a polishing device, which extends a service lifetime of the carrier for the polishing device by improving adhesiveness of a DLC film to a base material of the carrier for the polishing device while preventing the surface of an object to be polished from being damaged. SOLUTION: In a method for manufacturing the carrier 1 for the polishing device, after exposing a sliding surface of a base material 2, comprising a resin as a matrix, of the carrier 1 for the polishing device to plasma, a DLC film 3 is formed on the sliding surface of the base material. The resin is a fiber-reinforced resin containing one or more kinds of reinforced fibers selected from among glass fibers, aramid fibers, and carbon fibers. In a both-side polishing method, the carrier 1 for the polishing device manufactured by the manufacturing method is arranged between upper and lower polishing plates respectively stuck with a polishing cloth. The object to be polished is set in an opening part 4 of the carrier 1 for the polishing device and polished from both sides thereof. COPYRIGHT: (C)2009,JPO&INPIT
Abstract translation: 解决问题的方案为了提供一种用于抛光装置的载体，其通过提高DLC膜与用于抛光装置的载体的基材的粘合性而延长了用于抛光装置的载体的使用寿命，同时防止了 要抛光的物体的表面被损坏。 解决方案：在用于制造用于抛光装置的载体1的方法中，在将用于抛光装置的载体1作为基质的基材2的滑动表面（包括树脂）暴露于等离子体之后，将DLC膜 3形成在基材的滑动面上。 该树脂是含有选自玻璃纤维，芳族聚酰胺纤维和碳纤维中的一种或多种增强纤维的纤维增强树脂。 在双面抛光方法中，通过制造方法制造的用于抛光装置的载体1布置在分别粘有抛光布的上和下抛光板之间。 将被抛光物体设置在用于抛光装置的载体1的开口部分4中并从其两侧抛光。 版权所有（C）2009，JPO＆INPIT
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15.发明专利
公开(公告)号：JP2008266704A
公开(公告)日：2008-11-06
申请号：JP2007109997
申请日：2007-04-19
Applicant: Kobe Univ , Nippon Itf Kk , 国立大学法人神戸大学 , 日本アイ・ティ・エフ株式会社
Inventor： TAGAWA MASAHITO , YOKOTA KUMIKO , OHARA HISANORI , MIYAKE KOJI , NAKAHIGASHI TAKAHIRO
Abstract: PROBLEM TO BE SOLVED: To provide a heat resistant and oxidation resistant carbon film having excellent heat resistance and oxidation resistance, and a method for forming the same, and to provide a heat resistant and oxidation resistant carbon film-coated article and a method for producing the same.
SOLUTION: (1) The heat resistant and oxidation resistant carbon film F has a composition comprising carbon as the main component and silicon, and has a silicon oxide-containing layer as the surface layer. (2) The heat resistance and oxidation resistant carbon film-coated article W is coated with the film. (3) The method for producing the heat resistant and oxidation resistant carbon film F includes: a step where a silicon-containing carbon film f1 is formed; and a step where the surface of the carbon film f1 formed in the above step is subjected to oxidation treatment, so as to form a silicon oxide-containing layer f2. (4) The method for producing an article includes a process where a heat resistant and oxidation resistant carbon film coating objective article is prepared, and the heat resistant and oxidation resistant carbon film F is formed at least on part of the surface of the article by the method (3), so as to obtain the heat resistant and oxidation resistant carbon film-coated article W.
COPYRIGHT: (C)2009,JPO&INPITAbstract translation: 要解决的问题：提供具有优异的耐热性和抗氧化性的耐热和抗氧化碳膜及其形成方法，并提供耐热和抗氧化的碳膜涂覆制品和 其制造方法 解决方案：（1）耐热和抗氧化碳膜F具有以碳为主要成分和硅的组成，并且具有含氧化硅的层作为表面层。 （2）耐热耐氧化碳膜涂布制品W被涂覆。 （3）耐热耐氧化碳膜F的制造方法包括：形成含硅碳膜f1的工序; 以及在上述步骤中形成的碳膜f1的表面进行氧化处理以形成含氧化硅的层f2的步骤。 （4）一种制品的制造方法，其特征在于，制作耐热耐氧化碳膜被覆物的制造方法，在制品表面的至少一部分上形成耐热氧化性碳膜F， 方法（3），以获得耐热和抗氧化的碳膜涂层制品W.版权所有（C）2009，JPO＆INPIT
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Patent Agency Ranking
公开(公告)号：JP4109503B2
公开(公告)日：2008-07-02
申请号：JP2002212044
申请日：2002-07-22
Applicant: 日新電機株式会社 , 日本アイ・ティ・エフ株式会社
CPC classification number: H01J37/32055 , C23C14/325 , H01J37/32009
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公开(公告)号：JP2006112422A
公开(公告)日：2006-04-27
申请号：JP2005257422
申请日：2005-09-06
Applicant: Nippon Itf Kk , Nissan Motor Co Ltd , 日本アイ・ティ・エフ株式会社 , 日産自動車株式会社
Inventor： KAMATA MASAYUKI , KUMAGAI HIROSHI , KONDO MIDORI , KIKUCHI KENJI , SAGAWA TAKUMITSU , MABUCHI YUTAKA , NAKAHIGASHI TAKAHIRO
CPC classification number: F01L3/04 , F02B77/02 , F02F3/12 , Y10T29/49231 , Y10T29/49263
Abstract: PROBLEM TO BE SOLVED: To provide: a member for an internal combustion engine which sheds deposit while evaporating liquid fuel which has adhered, that is, which can rapidly evaporate the liquid fuel which has adhered and prevent adhesion of the deposit; a piston, a valve and a fuel injection valve each utilizing the member; and a production method of the member for an internal combustion engine. SOLUTION: The member for an internal combustion engine comprises a substrate on which a carbon coating film is formed, the carbon coating film containing fluorine and having a thickness of 10 μm or less. The member includes an intermediate layer containing carbon and silicon between the substrate and the carbon film coating. The piston utilizes the member for an internal combustion engine, the piston being provided with carbon coating film on its crown surface. The valve utilizes the member for an internal combustion engine and is provided with carbon film coating on its stem portion, head portion, surface on the side of a combustion chamber or the like. The fuel injection valve utilizes the member for an internal combustion engine, the injection hole of which is provided with carbon film coating. The member for an internal combustion engine is produced by coating the carbon film coating by a gas-phase film forming method. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供：一种用于内燃机的构件，其在蒸发附着的液体燃料的同时沉积，即可以快速蒸发粘附的液体燃料并防止沉积物的粘附; 每个利用该构件的活塞，阀和燃料喷射阀; 以及内燃机用部件的制造方法。 解决方案：用于内燃机的构件包括其上形成有碳涂膜的基板，含有氟的厚度为10μm以下的碳涂膜。 该构件包括在基底和碳膜涂层之间含有碳和硅的中间层。 活塞利用内燃机的构件，活塞在其表面上设置有碳涂层膜。 该阀利用内燃机的构件，并且在其杆部，头部，燃烧室侧的表面等上设置有碳膜涂层。 燃料喷射阀利用内燃机的构件，其内部的喷射孔设置有碳膜涂层。 用于内燃机的构件是通过气相成膜法涂覆碳膜涂层而制成的。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2004214370A
公开(公告)日：2004-07-29
申请号：JP2002381294
申请日：2002-12-27
Applicant: Eagle Ind Co Ltd , Nippon Itf Kk , イーグル工業株式会社 , 日本アイ・ティ・エフ株式会社
Inventor： NAKAHIGASHI TAKAHIRO , KOMINO MITSUAKI , SAITO KENJI
IPC: H01L21/3065 , H01L21/31
Abstract: PROBLEM TO BE SOLVED: To provide a plasma resisting bellows wherein ruggedness is high when used in an atmosphere containing plasma (e.g. oxygen plasma), and ruggedness is high to repeated telescopic motion, so that generation of environmental contamination caused by itself can be restrained. SOLUTION: In the plasma resistant bellow B1 or B2, a diamond-like carbon (e.g. SiC containing DLC film 3) is formed on an external surface and (or) an internal surface of a bellows substrate 1 or 10 made from stainless steel material, through a silicon intermediate film 2. COPYRIGHT: (C)2004,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种耐等离子体波纹管，其在用于含有等离子体的气氛中（例如氧等离子体）的耐久性高，并且耐久性高到重复的伸缩运动，从而产生其自身引起的环境污染 被束缚 解决方案：在耐等离子体波纹管B1或B2中，在外表面和（或）由不锈钢制成的波纹管基板1或10的内表面上形成类金刚石碳（例如含有DLC膜3的SiC） 钢材，通过硅中间膜2。版权所有（C）2004，JPO＆NCIPI
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公开(公告)号：JP2004052049A
公开(公告)日：2004-02-19
申请号：JP2002212044
申请日：2002-07-22
Applicant: Nippon Itf Kk , Nissin Electric Co Ltd , 日新電機株式会社 , 日本アイ・ティ・エフ株式会社
Inventor： SETOYAMA MAKOTO , IRISAWA KAZUHIKO , YANASHIMA HIDEO
CPC classification number: H01J37/32055 , C23C14/325 , H01J37/32009
Abstract: PROBLEM TO BE SOLVED: To prolong a film-forming period onto a substrate and increase a degree of freedom for forming a multilayered film.
SOLUTION: An arc-type evaporation source 10a composing a vacuum arc vapor-deposition apparatus comprises several cathodes 14; a trigger drive unit 22a for performing an operation of switching a position of a trigger electrode 20 to the front of an arbitrary one cathode 14, and an operation of contacting and detaching the trigger electrode 20 with the cathode 14, at the switched position; a shutter 32 for covering the fronts of all the other cathodes 14 except the arbitrary one cathode 14; and a shutter drive unit 34 for performing an operation of moving the shutter 32 to switch the cathode 14 which is not covered with it. The vacuum arc vapor-deposition apparatus further has a switch-controlling unit 40 for controlling switching of the position of the trigger electrode 20 to the front of the cathode 14 which is not covered with the shutter 32, and switching of the cathode 14 which is not covered with the shutter 32, by controlling the shutter drive unit 34 and the trigger drive unit 22a.
COPYRIGHT: (C)2004,JPO
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