公开(公告)号：KR101347600B1

公开(公告)日：2014-01-23

申请号：KR1020130006426

申请日：2013-01-21

Applicant: 박호현 ,  이성만 ,  김웅열 ,  육근목

Inventor： 박호현 ,  이성만 ,  김웅열

IPC: H01L21/02

CPC classification number: H01L21/6719 ,  F16L51/02 ,  G01K7/00 ,  G05D7/00

Abstract: The present invention relates to an automatic pressure controller of a chamber for a semiconductor manufacturing process. The automatic pressure controller for adjusting pressure in a process chamber and detecting the temperature of process gas comprises; a gas pipe for discharging process gas by connecting a pump for discharging gas from a process chamber inside a casing; a fluid controller, having a bellows fluid block unit moving on a cone shaped inclined surface formed inside the gas pipe line, and in which the fluid block unit operates by an operating motor; and a temperature sensor for detecting the temperature by being equipped on one side of the gas pipe line. By using the present invention, the size of the device can be reduced, and operating failure caused by powder, moisture, or corrosiveness gases included in the gases can be prevented by opening or closing by the fluid controller having a Teflon bellows. Also, by measuring the temperature on a real time basis through a temperature sensor inside the gas pipe line, the accurate temperature of discharged gas is grasped to rapidly respond to a change in processes if processing conditions in the process chamber changes. The quality of the semiconductor can be improved and actual yield of products can be reduced.

Abstract translation: 本发明涉及一种用于半导体制造工艺的室的自动压力控制器。 用于调节处理室中的压力并检测工艺气体的温度的自动压力控制器包括： 用于通过连接用于从壳体内的处理室排出气体的泵来排出处理气体的气体管道; 流体控制器，具有波纹管流体块单元，其在形成在气体管线内部的锥形倾斜表面上移动，并且流体块单元由操作马达操作; 以及温度传感器，用于通过装配在气体管线的一侧来检测温度。 通过使用本发明，可以减少装置的尺寸，并且可以通过由具有特氟隆波纹管的流体控制器打开或关闭来防止气体中包含的粉末，水分或腐蚀性气体引起的操作故障。 此外，通过气体管线内的温度传感器实时测量温度，如果处理室中的处理条件改变，则掌握排出气体的精确温度以快速响应处理变化。 可以提高半导体的质量，并且可以降低产品的实际产量。

公开(公告)号：KR2019960005312U

公开(公告)日：1996-02-16

申请号：KR2019940019581

申请日：1994-07-29

Applicant: 김남교 ,  박호현

Inventor： 김남교

IPC: E04H15/32 ,  E04H15/56

Abstract: 본고안은각각의수지판을경첩으로서절첩되도록조립하여깔판을형성시키고지지대와천막을구성시키므로다목적으로사용가능한텐트깔판겸용천막에관한것이다.

Abstract translation: 本文涉及的内侧分别由铰链组件的树脂板被折叠以形成一个货盘和配置，因为所述支撑并与通用的帐篷帐篷可用托盘结合的帐篷。