Self-gettering electron field emitter
    11.
    发明授权
    Self-gettering electron field emitter 失效
    自吸电子场发射器

    公开(公告)号:US6005335A

    公开(公告)日:1999-12-21

    申请号:US990624

    申请日:1997-12-15

    Inventor: Michael D Potter

    CPC classification number: H01J29/94 H01J2201/30423 H01J2329/00

    Abstract: A self-gettering electron field emitter has a first portion formed of a low-work-function material for emitting electrons, and it has an integral second portion that acts both as a low-resistance electrical conductor and as a gettering surface. The self-gettering emitter is formed by disposing a thin film of the low-work-function material parallel to a substrate and by disposing a thin film of the low-resistance gettering material parallel to the substrate and in contact with the thin film of the low-work-function material. The self-gettering emitter is particularly suitable for use in lateral field emission devices. The preferred emitter structure has a tapered edge, with a salient portion of the low-work-function material extending a small distance beyond an edge of the gettering and low resistance material. A fabrication process specially adapted for in situ formation of the self-gettering electron field emitters while fabricating microelectronic field emission devices is also disclosed.

    Abstract translation: 自吸电子场发射器具有由用于发射电子的低功函数材料形成的第一部分,并且其具有作为低电阻电导体和吸气表面的整体第二部分。 自吸收发射体通过将低功函数材料的薄膜平行于衬底设置并且将低电阻吸气材料的薄膜平行于衬底设置并与薄膜接触而形成 低功能材料。 自吸式发射器特别适用于横向场发射装置。 优选的发射极结构具有锥形边缘,低功函数材料的显着部分在吸气和低电阻材料的边缘之外延伸一小段距离。 还公开了专门用于在制造微电子场发射器件的同时形成自吸电子场发射体的制造工艺。

    Dual carrier display device
    12.
    发明授权
    Dual carrier display device 失效
    双载波显示设备

    公开(公告)号:US5850123A

    公开(公告)日:1998-12-15

    申请号:US899573

    申请日:1997-07-24

    CPC classification number: H01J61/00 H05B33/12

    Abstract: A microelectronic light-emitting device (10) is made with dual lateral thin-film emitters (35 and 40) substantially parallel to a substrate (20). Emitter electrodes (35 and 40) have a thickness of not more than several hundred angstroms. Each emitter has an emitting blade edge (110 or 115) having a small radius of curvature. Thus, opposed emitters for two opposite-sign carriers are provided, shaped to provide very high electric field intensity at their emitting tips. A region containing phosphor (50) extends between the two emitters and contacts them. When a suitable bias voltage is applied, electrons are injected into the phosphor from the blade edge of one emitter and holes are injected from the other emitter. The sum of diffusion lengths of the carriers (including secondary carriers) is equal to or greater than the shortest distance between the emitters. DC, AC, pulsed, or other voltage waveforms can be applied. Light emission is excited from the phosphor by carrier recombination. Devices may be combined in a matrix display array, and/or combined to form a super-pixel, and/or combined to form segments of a character display.

    Abstract translation: 微电子发光器件(10)由基本上平行于衬底(20)的双重横向薄膜发射器(35和40)制成。 发射极(35和40)的厚度不超过几百埃。 每个发射器具有具有小曲率半径的发射叶片边缘(110或115)。 因此,提供用于两个相对符号载体的相对的发射体,其被成形为在其发射尖端处提供非常高的电场强度。 含有荧光体(50)的区域在两个发射体之间延伸并与它们接触。 当施加合适的偏置电压时,电子从一个发射器的叶片边缘注入到荧光体中,并且从另一个发射极注入空穴。 载体(包括次级载体)的扩散长度之和等于或大于发射极之间的最短距离。 可以应用DC,AC,脉冲或其他电压波形。 通过载流子复合从磷光体激发发光。 设备可以组合在矩阵显示阵列中,和/或组合以形成超像素,和/或组合以形成字符显示的段。

    Fabrication process for lateral-emitter field-emission device with
simplified anode

    公开(公告)号:US5618216A

    公开(公告)日:1997-04-08

    申请号:US459033

    申请日:1995-06-02

    CPC classification number: H01J9/025 H01J3/022 H01J2201/30423 H01J2209/385

    Abstract: A field emission device (10) is made with a lateral emitter (100) substantially parallel to a substrate (20) and with a simplified anode stucture (70). The lateral-emitter field-emission device has a thin-film emitter cathode (100) which has a thickness not exceeding several hundred angstroms and has an emitting blade edge or tip (110) having a small radius of curvature. The anode's top surface is precisely spaced apart from and below the plane of the lateral emitter and receives electrons emitted by field emission from the blade edge or tip of the lateral-emitter cathode, when a suitable bias voltage is applied. A fabrication process is disclosed using process steps (S1-S18) similar to those of semiconductor integrated circuit fabrication to produce the novel devices and their arrays. Various embodiments of the fabrication process allow the use of conductive or insulating substrates (20) and allow fabrication of devices having various functions and complexity. The anode (70) is simply fabricated, without the use of prior-art processes which formed a spacer made by a conformal coating. In a preferred fabrication process for the simplified anode device, the following steps are performed: an anode film (70) is deposited; an insulator film (90) is deposited over the anode film; an ultra-thin conductive emitter film (100) is deposited over the insulator and patterned; a trench opening (160) is etched through the emitter and insulator, stopping at the anode film, thus forming and automatically aligning an emitting edge of the emitter; and means are provided for applying an electrical bias to the emitter and anode, sufficient to cause field emission of electrons from the emitting edge of the emitter to the anode. The anode film may comprise a phosphor (75) for a device specially adapted for use in a field emission display. The fabrication process may also include steps to deposit additional insulator films (130) and to deposit additional conductive films for control electrodes (140), which are automatically aligned with the emitter blade edge or tip (110).

    Optimal gate control design and fabrication method for lateral field
emission devices
    14.
    发明授权
    Optimal gate control design and fabrication method for lateral field emission devices 失效
    用于横向场发射装置的最佳门控制设计和制造方法

    公开(公告)号:US5604399A

    公开(公告)日:1997-02-18

    申请号:US470320

    申请日:1995-06-06

    CPC classification number: H01J3/022

    Abstract: A lateral field emission device and method of fabricating the device which maximizes gate control of the cathode emitter electric field strength is disclosed. Gate control increases when the position of the gate edge is optimized with respect to the position of the emitter tip. Maximum control is achieved if the gate extends a distance beyond the emitter in the direction of the anode. Preferably, the displacement of the gate edge from the emitter tip is one half the cathode tip-anode distance for optimum control. The high gain device of the present invention provides improved transconductance.

    Abstract translation: 公开了一种制造使阴极发射极电场强度的栅极控制最大化的器件的横向场致发射器件和方法。 当栅极边缘的位置相对于发射极尖端的位置被优化时,栅极控制增加。 如果栅极沿阳极方向延伸超过发射极的距离,则可实现最大的控制。 优选地,栅极边缘从发射极尖端的位移是用于最佳控制的阴极尖端 - 阳极距离的一半。 本发明的高增益器件提供了改进的跨导。

    Charged rotor pole micromachine motor
    15.
    发明授权
    Charged rotor pole micromachine motor 失效
    带电转子极微机电机

    公开(公告)号:US5466980A

    公开(公告)日:1995-11-14

    申请号:US346063

    申请日:1994-11-29

    CPC classification number: H02N1/004

    Abstract: An electrostatic micromachine motor includes a rotor having a hub and one or more rotor poles extending radially outward from the center of the hub. Near an exposed end of each rotor pole, an electron trap region is formed between a first layer and a second layer, with the first layer being the exposed end of the pole. The first layer and the second layer are formed of dissimilar insulators. An emitter device may be positioned adjacent to the exposed end of each rotor pole for injecting electrons into the electron trap region. Preferably, the emitter device is positioned adjacent to the exposed end, such that the emitter has a tip pointing towards, and spaced at a distance less than a mean free path distance of an electron in air, away from the first layer. A plurality of stator poles may be aligned about a periphery of the rotor. Both positive and negative voltages may be applied to the plurality of stator poles for causing rotation of the rotor of the micromotor.

    Abstract translation: 静电微机械马达包括具有毂的转子和从毂的中心径向向外延伸的一个或多个转子极。 在每个转子极的暴露端附近,在第一层和第二层之间形成电子捕获区,其中第一层是极的暴露端。 第一层和第二层由不相似的绝缘体形成。 发射极器件可以邻近每个转子极的暴露端定位,用于将电子注入到电子陷阱区域中。 优选地,发射器装置定位成与暴露端相邻,使得发射器具有指向远离第一层的尖端并且间隔开的距离小于空气中的电子的平均自由路径距离。 多个定子极可以围绕转子的周边排列。 正电压和负电压都可以施加到多个定子极以引起微电动机的转子的旋转。

    Micro-electro-mechanical switch and a method of using and making thereof
    16.
    发明授权
    Micro-electro-mechanical switch and a method of using and making thereof 有权
    微机电开关及其使用和制造方法

    公开(公告)号:US07280014B2

    公开(公告)日:2007-10-09

    申请号:US10096472

    申请日:2002-03-12

    CPC classification number: H01H59/0009 H01H2059/009

    Abstract: A micro-electro-mechanical switch includes at least one portion of a conductive line in the chamber, a beam with imbedded charge, and control electrodes. The beam has a conductive section which is positioned in substantial alignment with the at least one portion of the conductive line. The conductive section of the beam has an open position spaced away from the at least one portion of the conductive line and a closed position on the at least one portion of the conductive line. Each of the control electrodes is spaced away from an opposing side of the beam to control movement of the beam.

    Abstract translation: 微机电开关包括腔室中的导电线的至少一部分,具有嵌入电荷的束和控制电极。 光束具有导电部分,其被定位成与导电线的至少一个部分基本上对准。 光束的导电部分具有与导电线的至少一个部分间隔开的打开位置和导电线的至少一个部分上的闭合位置。 每个控制电极与光束的相对侧间隔开,以控制光束的移动。

    Micro fluidic valves, agitators, and pumps and methods thereof
    17.
    发明授权
    Micro fluidic valves, agitators, and pumps and methods thereof 有权
    微流体阀,搅拌器和泵及其方法

    公开(公告)号:US07195393B2

    公开(公告)日:2007-03-27

    申请号:US10160750

    申请日:2002-05-31

    Abstract: A valve which has a structure with at least one opening and a member which has a fixed static charge and also has a first position exposing the opening and a second position sealing the opening. A method for making the valve includes providing a structure with at least one opening and providing a member having a fixed static charge where the member has a first position exposing the opening and a second position sealing the opening. An agitator includes a base with at least one trench, a structure with at least one opening, and a membrane with a fixed static charge. The structure is connected to the base over the trench with the opening in the structure extending through to the trench in the base. The membrane is connected to the base across at least a portion of the trench. A pump includes a base with at least one trench, a structure with at least two openings, a membrane with a fixed static charge, a first cantilever arm having a fixed static charge, and a second cantilever arm having a fixed static charge. The structure is connected to the base over the trench with the openings in the structure extending through to the trench in the base. The membrane is connected to the base across at least a portion of the trench. The first cantilever arm has a first position exposing one of the openings and a second position sealing the one of the openings. The second cantilever arm has a first position exposing another one of the openings and a second position sealing the another one of the openings.

    Abstract translation: 一种阀,其具有至少一个开口的结构和具有固定静电荷的构件,并且还具有暴露开口的第一位置和密封开口的第二位置。 制造阀的方法包括提供具有至少一个开口的结构,并提供具有固定静电荷的构件,其中构件具有暴露开口的第一位置和密封开口的第二位置。 搅拌器包括具有至少一个沟槽的基部,具有至少一个开口的结构和具有固定静电荷的膜。 该结构通过沟槽连接到基部,结构中的开口延伸到基部中的沟槽。 膜跨过沟槽的至少一部分连接到基底。 泵包括具有至少一个沟槽的基座,具有至少两个开口的结构,具有固定静电荷的膜,具有固定静电荷的第一悬臂和具有固定静电荷的第二悬臂。 该结构连接到沟槽上的基部,结构中的开口延伸到底部的沟槽。 膜跨过沟槽的至少一部分连接到基底。 第一悬臂具有露出其中一个开口的第一位置和密封其中一个开口的第二位置。 第二悬臂具有暴露另一个开口的第一位置和密封另一个开口的第二位置。

    Accelerometer and methods thereof
    18.
    发明授权
    Accelerometer and methods thereof 失效
    加速计及其方法

    公开(公告)号:US06854330B2

    公开(公告)日:2005-02-15

    申请号:US10280299

    申请日:2002-10-24

    CPC classification number: G01P15/125 G01P2015/0828

    Abstract: An accelerometer includes a housing with a chamber, a member with a stored static charge, and a pair of electrodes connected to the housing. The member is connected to the housing and extends at least partially across the chamber. The pair of electrodes are each spaced from and on substantially opposing sides of the member from each other and are at least partially in alignment with each other. The member is movable with respect to the pair of electrodes or one of the pair of electrodes is movable with respect to the member.

    Abstract translation: 加速度计包括具有室的壳体,具有存储的静电荷的构件和连接到壳体的一对电极。 该构件连接到壳体并且至少部分地延伸穿过该腔室。 该对电极每个与构件的基本上相对的两侧彼此间隔开并且至少部分地彼此对准。 该构件可相对于一对电极移动,或者该对电极中的一个可相对于构件移动。

    Oxide based phosphors and processes therefor

    公开(公告)号:US06254805B1

    公开(公告)日:2001-07-03

    申请号:US09361423

    申请日:1999-07-27

    Abstract: A phosphor comprises, in atomic percentages, 90% to 100% of a mixed metal oxide MxTyOz, wherein M is a metal selected from Zn, Sn, In, Cu, and combinations thereof, T is a refractory metal selected from Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, and combinations thereof, and O is Oxygen, x, y, and z being chosen such that z is at most stoichiometric for MxTyOz; and 0% to 10% of a dopant comprising a substance selected from a rare earth element of the lanthanide series, Mn, Cr, and combinations thereof, or stoichiometrically excess zinc, copper, tin, or indium. Cathodoluminescent phosphor compositions stimulable by electrons of very low energy are prepared from metal oxides treated with refractory metals in various processes disclosed. Metal oxides or mixed-metal oxides of zinc, copper, tin, or indium are heated in the presence of a refractory metal such as titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, or combinations or alloys thereof to make phosphors of various chromaticities. In a simple embodiment, a quantity of Ta2O5 is added to a quantity of ZnO and heated at an effective temperature and time to form Ta2Zn3O8, which is useful in various forms as a blue-light-emitting phosphor. In preferred embodiments, the phosphors are prepared in situ in an electrically-conductive thin-film or surface-layer form during fabrication of displays.

    Electron field-emission display cell device having opening depth defined by etch stop
    20.
    发明授权
    Electron field-emission display cell device having opening depth defined by etch stop 失效
    具有由蚀刻停止限定的开口深度的电子场致发射显示单元装置

    公开(公告)号:US06169357A

    公开(公告)日:2001-01-02

    申请号:US08901505

    申请日:1997-07-28

    Inventor: Michael D Potter

    Abstract: An electron field-emission display comprises one or more display cell structures, each having a field-emission cathode and an anode comprising at least one of several cathodoluminescent phosphors disclosed. The display cell structures may also have one or more gate elements for controlling electron current flowing from cathode to anode when suitable electrical bias voltages are applied. A cell may have more than one phosphor, and in particular may have red, green, and blue phosphors selectively arranged. Each pixel site may have one anode of each color phosphor. The phosphors are preferably prepared in situ in an electrically-conductive thin-film or surface-layer form during fabrication of the display. A preferred fabrication process integrates an etch stop with the in situ phosphor process, the etch stop precisely defining the depth of an opening in the display cell structure. Metal oxides or mixed-metal oxides of zinc, copper, tin, or indium are heated in the presence of a refractory metal such as titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, or combinations thereof to make phosphors of various chromaticities, which may also include dopants, such as a lanthanide rare earth element, manganese, chromium, or stoichiometrically excess zinc, copper, tin, or indium. The display is operable when its phosphor is excited by electrons of very low energy.

    Abstract translation: 电子场发射显示器包括一个或多个显示单元结构,每个显示单元结构具有场致发射阴极和包含公开的多个阴极发光荧光体中的至少一个的阳极。 当施加适当的电偏压时,显示单元结构还可以具有一个或多个栅极元件,用于控制从阴极流向阳极的电子电流。 单元可以具有多于一个的磷光体,并且特别地可以具有选择性地布置的红色,绿色和蓝色磷光体。 每个像素位置可以具有每个彩色荧光体的一个阳极。 荧光体优选在制造显示器期间以导电薄膜或表面层形式原位制备。 优选的制造工艺将蚀刻停止与原位磷光体处理集成,蚀刻停止精确地限定显示单元结构中的开口的深度。 金属氧化物或锌,铜,锡或铟的混合金属氧化物在难熔金属如钛,锆,铪,钒,铌,钽,铬,钼,钨或其组合的存在下加热, 各种色度的荧光体,其还可以包括掺杂剂,例如镧系元素稀土元素,锰,铬或化学计量过量的锌,铜,锡或铟。 当其荧光体被非常低能量的电子激发时,显示器是可操作的。

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