-
公开(公告)号：JP2008058965A
公开(公告)日：2008-03-13
申请号：JP2007218966
申请日：2007-08-24
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： PAN SHAOHER X
CPC classification number: G02B26/0841 , B81B3/0005 , B81C2201/112
Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing a microstructure. SOLUTION: The method of manufacturing the microstructure includes that: a first structure part is formed on a substrate; a sacrificial material is arranged on the first structure part; a layer of a first structure material is deposited on the sacrificial material and the substrate; and a second structure part is formed on the layer of the first structure material by removing at least a part of the sacrificial material, wherein the second structure part is connected to the substrate and movable between the first position at which the second structure part is separated from the first structure part and the second position at which the second structure part is made contact to the first structure part, the stiction between the second structure part and the first structure part is reduced by forming a carbon layer on at least one of the surfaces of the second structure part and the first structure part. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题：提供一种制造微结构的方法。 解决方案：制造微结构的方法包括：在基板上形成第一结构部分; 牺牲材料布置在第一结构部件上; 在牺牲材料和基底上沉积第一结构材料层; 并且通过去除所述牺牲材料的至少一部分而在所述第一结构材料的层上形成第二结构部分，其中所述第二结构部分连接到所述基板并且可在所述第二结构部分分离的所述第一位置之间移动 从第一结构部分和第二结构部分与第一结构部分接触的第二位置，通过在至少一个表面上形成碳层来减小第二结构部分和第一结构部分之间的粘结 的第二结构部分和第一结构部分。 版权所有（C）2008，JPO＆INPIT
-
12.发明专利Microdevice manufacturing method using sacrificial material 审中-公开MICRODEVICE制造方法使用SACRIFICIAL MATERIAL
公开(公告)号：JP2007283486A
公开(公告)日：2007-11-01
申请号：JP2007108277
申请日：2007-04-17
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： PAN SHAOHER X
CPC classification number: G02B26/0841
Abstract: PROBLEM TO BE SOLVED: To provide a microstructure used for a space light modulator or the like. SOLUTION: The method comprises forming a substrate with a first structure part having the first height and a second structure part having the height higher than the first height, and accumulating a sacrificial material such as polyarylenes and hydrogen silsesquioxane on the substrate. In this case, the sacrificial material covers at least the first structure part, the layer of the first structure material is accumulated on the first sacrificial material, and an opening part is formed in the layer of the first structure material. The opening part provides an access from outside to the first sacrificial material located under the layer of the first structure material. Further, a third structure part connecting with the second structure part is formed by eliminating the first sacrificial material, and at least a part of the third structure part exist above the first structure part. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题：提供用于空间光调制器等的微结构。 解决方案：该方法包括用具有第一高度的第一结构部件和具有高于第一高度的高度的第二结构部件形成基板，并且在基板上积聚诸如聚亚芳基和氢倍半硅氧烷的牺牲材料。 在这种情况下，牺牲材料至少覆盖第一结构部分，第一结构材料的层被堆积在第一牺牲材料上，并且开口部分形成在第一结构材料的层中。 开口部分提供从外部到位于第一结构材料层下面的第一牺牲材料的通路。 此外，通过消除第一牺牲材料形成与第二结构部分连接的第三结构部分，并且第三结构部分的至少一部分存在于第一结构部分之上。 版权所有（C）2008，JPO＆INPIT
-
公开(公告)号：JP2007279741A
公开(公告)日：2007-10-25
申请号：JP2007099890
申请日：2007-04-05
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： PAN SHAOHER X
CPC classification number: G02B26/0833 , G02B26/125
Abstract: PROBLEM TO BE SOLVED: To provide a high-resolution scanning display system. SOLUTION: The display system includes: one or more rows of tiltable micro mirrors, each of which is configured to be selectively tilted to an "on" position to reflect incident light in an "on" direction and to be selectively tilted to an "off" position to reflect incident light in an "off" direction; and an optical projection system configured to project light reflected by the micro mirrors in the "on" direction to produce one or more first lines of image pixels along a first direction in a display image and to change the direction of the light reflected by the micro mirrors in the "on" direction to produce one or more second lines of image pixels in the display image. The one or more second lines of image pixels are substantially parallel to the one or more first lines of image pixels. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题：提供高分辨率扫描显示系统。 解决方案：显示系统包括：一排或多排可倾斜的微反射镜，每个微反射镜被配置为选择性地倾斜到“开”位置以将入射光反射成“开”方向，并且选择性地倾斜到 一个“关闭”的位置，以反射入射光在“关闭”方向; 以及光学投影系统，被配置为将由所述微反射镜反射的光以“在”方向投射，以在显示图像中沿着第一方向产生一个或多个第一行图像像素，并且改变由所述微镜反射的光的方向 在“开”方向上的反射镜以在显示图像中产生一个或多个第二行图像像素。 一个或多个第二行图像像素基本上平行于图像像素的一个或多个第一行。 版权所有（C）2008，JPO＆INPIT
-
公开(公告)号：JP2008134635A
公开(公告)日：2008-06-12
申请号：JP2007300817
申请日：2007-11-20
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： PAN SHAOHER X
CPC classification number: G02B26/0841 , B81B2201/042 , B81C1/00174
Abstract: PROBLEM TO BE SOLVED: To provide a simplified manufacturing process for micro mirrors and the micro mirrors manufactured by the simplified manufacturing process.
SOLUTION: A micro mirror includes a hinge support post 121a on the substrate 150, a hinge connection post 122a on the hinge support post, wherein the hinge connection post comprises a bottom layer 312 connected to the hinge support post and a side layer 315 surrounding a cavity 125a in the center of the hinge connection post, a hinge component 120a connected to the side layer of the hinge connection post; and a mirror plate configured to tilt around the hinge component.
COPYRIGHT: (C)2008,JPO&INPITAbstract translation: 要解决的问题：为简化制造工艺制造的微反射镜和微反射镜的简化制造工艺。 解决方案：微反射镜包括在基板150上的铰链支撑柱121a，铰链支撑柱上的铰链连接柱122a，其中铰链连接柱包括连接到铰链支撑柱的底层312和侧层 围绕铰链连接柱的中心的腔125a，铰链部件120a连接到铰链连接柱的侧层; 以及配置成围绕铰链部件倾斜的镜板。 版权所有（C）2008，JPO＆INPIT
-
公开(公告)号：JP2008119826A
公开(公告)日：2008-05-29
申请号：JP2007292593
申请日：2007-11-09
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： PAN SHAOHER X , NOVOTNY VLAD
CPC classification number: B81C1/00293 , B81B2203/0384 , B81C2203/0118 , B81C2203/0136 , B81C2203/019 , H01L23/041 , H01L23/10 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
Abstract: PROBLEM TO BE SOLVED: To provide a method for hermetically sealing a micro device on a semiconductor wafer and the hermetically sealed micro device on the semiconductor wafer.
SOLUTION: The method for packaging a micro device includes the steps of: encapsulating the micro device in a chamber on a substrate, wherein the chamber is defined by spacer walls and an encapsulation cover; removing a portion of the encapsulation cover and portions of the spacer walls to expose a surface of the spacer walls; and forming a layer of a sealing material on the exposed surface of the spacer walls to hermetically seal the micro device in the chamber.
COPYRIGHT: (C)2008,JPO&INPITAbstract translation: 要解决的问题：提供一种用于密封半导体晶片上的微器件和半导体晶片上的密封微器件的方法。 解决方案：用于封装微器件的方法包括以下步骤：将微器件封装在衬底上的腔室中，其中腔室由间隔壁和封装盖限定; 去除所述封装盖的一部分和所述间隔壁的部分以暴露所述间隔壁的表面; 以及在所述间隔壁的暴露表面上形成密封材料层，以将所述微型装置气密地密封在所述腔室中。 版权所有（C）2008，JPO＆INPIT
-
Patent Agency Ranking
公开(公告)号：JP2008033334A
公开(公告)日：2008-02-14
申请号：JP2007198190
申请日：2007-07-30
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： PAN SHAOHER X
CPC classification number: H04N9/3129 , G02B26/123 , G02B26/124 , G02B26/125 , G03B21/008 , G03B21/14 , G03B21/208 , G03B33/12 , H04N5/7458 , H04N9/3108 , H04N9/3111 , H04N9/3114
Abstract: PROBLEM TO BE SOLVED: To provide a display system whose footprint can be reduced, regarding a projection-type display device such as rear projection display. SOLUTION: The display system is characterized in including: a transparent tapered plate comprising a first face, a second face and a third face, wherein the first face is substantially smaller than the second face and the third face; a row of tiltable mirror plates, each comprising a reflective surface, configured to tilt to an "on" position to reflect incident light in an "on" direction or to tilt to an "off" position to reflect the incident light in an "off" direction; and an optical scanning system configured to control the direction of the light reflected by the mirror plates in the "on" direction. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题：关于诸如后投影显示的投影型显示装置，提供可以缩小其占地面积的显示系统。 解决方案：显示系统的特征在于包括：透明锥形板，包括第一面，第二面和第三面，其中第一面基本上小于第二面和第三面; 一排可倾斜的镜板，每个包括反射表面，其被配置为倾斜到“开”位置以将入射光反射到“开”方向或者倾斜到“关”位置以将入射光反射到“关” “方向; 以及光学扫描系统，被配置为控制由“反光板”反射的光在“向”方向上的方向。 版权所有（C）2008，JPO＆INPIT
-
公开(公告)号：JP2007298979A
公开(公告)日：2007-11-15
申请号：JP2007101175
申请日：2007-04-06
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： PAN SHAOHER X
Abstract: PROBLEM TO BE SOLVED: To provide a suitable high resolution color scanning display system. SOLUTION: This display system includes an optical space modulator 210 and an optical projection system 250. The optical space modulator 210 includes tiltable micromirrors 220 disposed in line in the horizontal direction 215. Generally, it includes a small number of lines (less than 10 for example) of tiltable micromirrors 220. COPYRIGHT: (C)2008,JPO&INPIT
Abstract translation: 要解决的问题：提供合适的高分辨率彩色扫描显示系统。 解决方案：该显示系统包括光学空间调制器210和光学投影系统250.光学空间调制器210包括在水平方向215上成直线设置的可倾斜的微镜220.通常，它包括少量的线（更少 例如10）可倾斜微镜220.版权所有（C）2008，JPO＆INPIT
-
公开(公告)号：JP2007156466A
公开(公告)日：2007-06-21
申请号：JP2006320695
申请日：2006-11-28
Applicant: Spatial Photonics Inc , スペイシャル フォトニックス, インコーポレイテッド
Inventor： LEE CHII GUANG , KAO CHUN-TEH , HU HUNG KWEI , PAN SHAOHER X
IPC: G02B26/08
CPC classification number: G02B26/0841 , B81B3/0008 , B81B2201/042 , B81B2203/0109
Abstract: PROBLEM TO BE SOLVED: To provide a high-contrast spatial light modulator for a preferable display and printing.
SOLUTION: A spatial light modulator includes a mirror plate (102), comprising a reflective upper surface, a lower surface (103) having a conductive surface portion, and a substrate portion having a first cavity that has an opening on the lower surface, a second cavity in the substrate portion, and a membrane over the second cavity. The modulator includes a substrate (300) comprising an upper surface, a hinge support post (105) in connection with the upper surface, a hinge component, supported by the hinge support post and in connection with the mirror plate that facilitates rotation of the mirror plate. The hinge component extends into the inside of the first cavity. An upright landing tip (222) is configured to contact the membrane over the second cavity in the substrate portion of the mirror plate, to stop the rotation of the mirror plate at a predetermined orientation.
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：提供用于优选显示和打印的高对比度空间光调制器。 解决方案：空间光调制器包括镜板（102），其包括反射上表面，具有导电表面部分的下表面（103）和具有第一腔体的基底部分，该第一腔体在下部 表面，衬底部分中的第二腔，以及在第二腔上的膜。 该调制器包括一个包括一个上表面的基片（300），一个与该上表面相连的一铰链支柱（105），一铰链部件，由该铰链支柱支撑并与该镜板连接， 盘子。 铰链部件延伸到第一腔体的内部。 直立着陆尖端（222）构造成在镜板的衬底部分中的第二腔上接触膜，以阻止镜板在预定取向的旋转。 版权所有（C）2007，JPO＆INPIT
-
公开(公告)号：TWI525759B
公开(公告)日：2016-03-11
申请号：TW102105536
申请日：2013-02-18
Applicant: 空間光子股份有限公司 , SPATIAL PHOTONICS, INC.
Inventor： 林辰華 , LIN, CHEN HUA , 葛爾德爾 羅蘭德 , GELDER, ROLAND VAN
CPC classification number: B81B7/0038 , B81C2203/0109 , B81C2203/019 , B81C2203/032
-
公开(公告)号：DE602006006272D1
公开(公告)日：2009-05-28
申请号：DE602006006272
申请日：2006-11-30
Applicant: SPATIAL PHOTONICS INC
Inventor： LEE CHII GUANG , KAO CHUN-TEH , HU HUNG KWEI , PAN SHAOHER X
-
-
-
-
-
-
-
-
-
Search Results
39
records
(took 0.031 seconds)
