Abstract:
PROBLEM TO BE SOLVED: To provide a method of fabricating a micro device having a mirror surface. SOLUTION: The method of fabricating a microstructure includes disposing a sacrificial material in a recess formed in a lower layer and forming a layer of compensatory material on the sacrificial material in the recess. A first portion of the compensatory material is removed to form a substantially flat surface on the sacrificial material. The substantially flat surface is substantially co-planar with the upper surface of the lower layer. The method includes that an upper layer is formed on the lower layer and the substantially flat surface. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To prevent unwanted scattered light in the micro chambers from exiting from the transparent window so as to ensure the optical performance of a spacial light modulator. SOLUTION: An encapsulated spatial light modulator, comprising: a spatial light modulator on a substrate within a chamber; an encapsulation cover in part defining the chamber; a spacer wall between the substrate and the encapsulation cover, wherein the spacer wall has an inner surface adjacent to the spatial light modulator; a spacer wall; a first light absorbing material on the inner surface of the spacer wall, the light absorbing material configured to absorb light in the chamber; and a material configured to absorb the first light. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a vehicle equipped with a headlight including a light source configured to project beams of light and a space light modulator including pixel cells arranged two-dimensionally. SOLUTION: The vehicle includes a headlight comprising a light source configured to emit light and a device to produce an image pixel in a display image in front of the vehicle. The image projected by the headlight can provide the driver with information, such as onto a roadway on which the vehicle is traveling. The vehicle is provided with the headlight having the light source configured to emit light and a space light modulator (SLM) including pixel cells in two-dimensional arrangement, in which the pixel cells are arranged to produce image pixels in the displayed image in front of the vehicle. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a higher data writing speed than the conventional SLM system. SOLUTION: The spatial light modulator system includes an array of pixel cells that includes: two static random access memory (SRAM) devices configured to store digital data and to perform a write event that takes a minimum time period; a spatial light modulator configured to output light in an on direction or an off direction according to the write event; and a controller configured with a display sequence, wherein the controller controls write events from the two SRAM devices, and the first display slice and second display slice are ordered in the display sequence, so that the controller is configured to cause the spatial light modulator to output light and the two SRAM devices to perform a write event during the second display slice. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To manufacture a non-contact micro-mirror which is controlled by electrostatic force. SOLUTION: A micro-mirror device includes a hinge supported by a substrate and a mirror plate 110 tiltable about the hinge, and the hinge is configured to produce an elastic restoring force on the mirror plate, when the mirror plate is tilted away from an un-tilted position. The micro-mirror device also includes a controller that can produce an electrostatic force to overcome the elastic restoring force to tilt the mirror plate from the un-tilted position to an "on" position or an "off" position. The electrostatic force can counter the elastic restoring force to hold the mirror plate at the "on" position or the "off" position. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a micromirror base spatial light modulator. SOLUTION: A spatial light modulator is provided. The spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirror plates. The structural members are not located in the gap. One or more structural members supporting the hexagonal mirror plates include a supporting post on the substrate and the supporting post is under the hexagonal mirror plate. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a non-contact micro mirror device. SOLUTION: The micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge includes a length longer than 1 micron, a thickness less than 800 nanometers, and a width less than 1,000 nanometers. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a method for applying an anti-stiction material to a micro device, and a micro mechanical device to which the anti-stiction material is applied. SOLUTION: There is provided a method of applying an anti-stiction material to a micro device, including the steps of: enclosing the micro device in a chamber; vaporizing the anti-stiction material in a container, thereby forming the vaporized anti-stiction material; transferring the vaporized anti-stiction material from the container into the chamber in which the micro device is enclosed, via an inlet fluidly communicating with the chamber; and depositing the vaporized anti-stiction material on a surface of the micro device. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an apparatus having a plurality of micromechanical devices and a method of driving the plurality of micromechanical device of the apparatus. SOLUTION: The apparatus has the plurality of micromechanical devices, a first electric circuit, and a second electric circuit. Each of the micromechanical devices has: a first structure part on a substrate; a second structure part which is connected to the first structure portion, the second structure part having a conductive portion and being configured to move in response to a voltage pulse and a bias voltage; and an electrode on the substrate, the electrode being below the conductive portion of the second structure part. COPYRIGHT: (C)2008,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a micro-mirror device with hinges. SOLUTION: A micro mirror device is equipped with a hinge, supported by a substrate and a mirror plate tiltable about the hinge. The hinge can contain an alloy selected from among a group consisting of a titanium nickel alloy having a titanium composition between about 30% to 70%, a titanium aluminum alloy having a titanium composition between about 30% to 70%, an aluminum copper alloy having a copper composition between about 5% to 20%, and aluminum titanium nitride having a nitrogen composition in the range of about 0% to 15%. COPYRIGHT: (C)2008,JPO&INPIT