Planarization of layer over cavity
    1.
    发明专利
    Planarization of layer over cavity 审中-公开
    层的平面化

    公开(公告)号:JP2008209924A

    公开(公告)日:2008-09-11

    申请号:JP2008037817

    申请日:2008-02-19

    CPC classification number: B29D11/00596 B29C59/14 G02B26/0833

    Abstract: PROBLEM TO BE SOLVED: To provide a method of fabricating a micro device having a mirror surface.
    SOLUTION: The method of fabricating a microstructure includes disposing a sacrificial material in a recess formed in a lower layer and forming a layer of compensatory material on the sacrificial material in the recess. A first portion of the compensatory material is removed to form a substantially flat surface on the sacrificial material. The substantially flat surface is substantially co-planar with the upper surface of the lower layer. The method includes that an upper layer is formed on the lower layer and the substantially flat surface.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种制造具有镜面的微型装置的方法。 解决方案:制造微结构的方法包括将牺牲材料设置在形成在下层中的凹部中并在凹部中的牺牲材料上形成补偿材料层。 去除补偿材料的第一部分以在牺牲材料上形成基本平坦的表面。 基本平坦的表面与下层的上表面基本上共面。 该方法包括在下层和基本平坦的表面上形成上层。 版权所有(C)2008,JPO&INPIT

    Encapsulated spatial light modulator having improved performance
    2.
    发明专利
    Encapsulated spatial light modulator having improved performance 审中-公开
    具有改进性能的封装空间光调制器

    公开(公告)号:JP2008242451A

    公开(公告)日:2008-10-09

    申请号:JP2008048127

    申请日:2008-02-28

    Inventor: PAN SHAOHER X

    CPC classification number: G02B26/0833

    Abstract: PROBLEM TO BE SOLVED: To prevent unwanted scattered light in the micro chambers from exiting from the transparent window so as to ensure the optical performance of a spacial light modulator.
    SOLUTION: An encapsulated spatial light modulator, comprising: a spatial light modulator on a substrate within a chamber; an encapsulation cover in part defining the chamber; a spacer wall between the substrate and the encapsulation cover, wherein the spacer wall has an inner surface adjacent to the spatial light modulator; a spacer wall; a first light absorbing material on the inner surface of the spacer wall, the light absorbing material configured to absorb light in the chamber; and a material configured to absorb the first light.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:为了防止微室中的不想要的散射光从透明窗口离开,以确保空间光调制器的光学性能。 解决方案:一种封装的空间光调制器,包括:在腔室内的衬底上的空间光调制器; 部分限定腔室的封装盖; 衬底和封装盖之间的间隔壁,其中间隔壁具有与空间光调制器相邻的内表面; 间隔壁; 在间隔壁的内表面上的第一光吸收材料,所述光吸收材料构造成吸收室中的光; 以及被配置为吸收第一光的材料。 版权所有(C)2009,JPO&INPIT

    Headlight of vehicle involving image display
    3.
    发明专利
    Headlight of vehicle involving image display 审中-公开
    涉及图像显示的车辆的头灯

    公开(公告)号:JP2008201407A

    公开(公告)日:2008-09-04

    申请号:JP2008033822

    申请日:2008-02-14

    Inventor: PAN SHAOHER X

    Abstract: PROBLEM TO BE SOLVED: To provide a vehicle equipped with a headlight including a light source configured to project beams of light and a space light modulator including pixel cells arranged two-dimensionally. SOLUTION: The vehicle includes a headlight comprising a light source configured to emit light and a device to produce an image pixel in a display image in front of the vehicle. The image projected by the headlight can provide the driver with information, such as onto a roadway on which the vehicle is traveling. The vehicle is provided with the headlight having the light source configured to emit light and a space light modulator (SLM) including pixel cells in two-dimensional arrangement, in which the pixel cells are arranged to produce image pixels in the displayed image in front of the vehicle. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种配备有头灯的车辆,其包括配置为投射光束的光源和包括二维布置的像素单元的空间光调制器。 解决方案:车辆包括头灯,其包括被配置为发射光的光源和用于在车辆前方的显示图像中产生图像像素的装置。 由大灯投影的图像可以向驾驶员提供诸如车辆行驶的道路上的信息。 车辆设置有具有被配置为发光的光源的头灯和包括二维排列的像素单元的空间光调制器(SLM),其中像素单元布置成在显示图像的前方产生图像像素 机动车。 版权所有(C)2008,JPO&INPIT

    Efficient spatial modulator system
    4.
    发明专利
    Efficient spatial modulator system 审中-公开
    高效的空间调节器系统

    公开(公告)号:JP2008233898A

    公开(公告)日:2008-10-02

    申请号:JP2008046170

    申请日:2008-02-27

    Abstract: PROBLEM TO BE SOLVED: To provide a higher data writing speed than the conventional SLM system.
    SOLUTION: The spatial light modulator system includes an array of pixel cells that includes: two static random access memory (SRAM) devices configured to store digital data and to perform a write event that takes a minimum time period; a spatial light modulator configured to output light in an on direction or an off direction according to the write event; and a controller configured with a display sequence, wherein the controller controls write events from the two SRAM devices, and the first display slice and second display slice are ordered in the display sequence, so that the controller is configured to cause the spatial light modulator to output light and the two SRAM devices to perform a write event during the second display slice.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供比传统SLM系统更高的数据写入速度。 解决方案:空间光调制器系统包括像素单元阵列,其包括:被配置为存储数字数据并执行占用最小时间段的写入事件的两个静态随机存取存储器(SRAM)器件; 空间光调制器,被配置为根据所述写入事件在导通方向或关闭方向上输出光; 以及配置有显示顺序的控制器,其中所述控制器控制来自所述两个SRAM器件的写入事件,并且所述第一显示片和所述第二显示片在所述显示序列中排序,使得所述控制器被配置为使所述空间光调制器 输出光和两个SRAM器件在第二显示切片期间执行写入事件。 版权所有(C)2009,JPO&INPIT

    Non-contact micro-mirror
    5.
    发明专利
    Non-contact micro-mirror 审中-公开
    非接触式微镜

    公开(公告)号:JP2008112168A

    公开(公告)日:2008-05-15

    申请号:JP2007279029

    申请日:2007-10-26

    Inventor: PAN SHAOHER X

    CPC classification number: G02B26/0841

    Abstract: PROBLEM TO BE SOLVED: To manufacture a non-contact micro-mirror which is controlled by electrostatic force.
    SOLUTION: A micro-mirror device includes a hinge supported by a substrate and a mirror plate 110 tiltable about the hinge, and the hinge is configured to produce an elastic restoring force on the mirror plate, when the mirror plate is tilted away from an un-tilted position. The micro-mirror device also includes a controller that can produce an electrostatic force to overcome the elastic restoring force to tilt the mirror plate from the un-tilted position to an "on" position or an "off" position. The electrostatic force can counter the elastic restoring force to hold the mirror plate at the "on" position or the "off" position.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:制造由静电力控制的非接触式微反射镜。 解决方案:微镜装置包括由基板支撑的铰链和可围绕铰链倾斜的反射镜板110,并且铰链构造成在镜板倾斜时在镜板上产生弹性恢复力 从不倾斜的位置。 微镜装置还包括控制器,该控制器可以产生静电力以克服弹性恢复力,以将镜板从未倾斜位置倾斜到“开”位置或“关”位置。 静电力可以抵抗弹性恢复力,以将镜板保持在“开”位置或“关”位置。 版权所有(C)2008,JPO&INPIT

    High fill-ratio mirror-based spatial light modulator
    6.
    发明专利
    High fill-ratio mirror-based spatial light modulator 审中-公开
    高比例的基于反射镜的空间光调制器

    公开(公告)号:JP2008058962A

    公开(公告)日:2008-03-13

    申请号:JP2007213159

    申请日:2007-08-17

    Inventor: PAN SHAOHER X

    CPC classification number: G02B26/0841

    Abstract: PROBLEM TO BE SOLVED: To provide a micromirror base spatial light modulator.
    SOLUTION: A spatial light modulator is provided. The spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirror plates. The structural members are not located in the gap. One or more structural members supporting the hexagonal mirror plates include a supporting post on the substrate and the supporting post is under the hexagonal mirror plate.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种微反射镜基础空间光调制器。 解决方案:提供空间光调制器。 空间光调制器包括以基板上的蜂窝图案设置的六角镜板的二维阵列。 每个六角镜板由一个或多个结构构件支撑。 相邻的六角镜板之间有间隙。 结构件不在间隙内。 支撑六角镜板的一个或多个结构构件包括在基板上的支撑柱,并且支撑柱位于六角镜板下方。 版权所有(C)2008,JPO&INPIT

    Non-contact micro mirror
    7.
    发明专利
    Non-contact micro mirror 审中-公开
    非接触式微镜

    公开(公告)号:JP2008152238A

    公开(公告)日:2008-07-03

    申请号:JP2007279644

    申请日:2007-10-26

    Inventor: PAN SHAOHER X

    Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing a non-contact micro mirror device. SOLUTION: The micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge includes a length longer than 1 micron, a thickness less than 800 nanometers, and a width less than 1,000 nanometers. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种制造非接触式微反射镜装置的方法。 解决方案:微反射镜装置包括由基板支撑的铰链和可围绕铰链倾斜的反射镜板。 铰链包括长度大于1微米,厚度小于800纳米,宽度小于1000纳米的长度。 当镜板倾斜离开倾斜位置时,铰链可以在镜板上产生弹性恢复力。 版权所有(C)2008,JPO&INPIT

    Packaging of micro device
    8.
    发明专利
    Packaging of micro device 审中-公开
    微型器件的封装

    公开(公告)号:JP2008126402A

    公开(公告)日:2008-06-05

    申请号:JP2007296008

    申请日:2007-11-14

    Inventor: PAN SHAOHER X

    CPC classification number: B81B3/0005 B81C1/00992 B81C2201/0181 B81C2201/112

    Abstract: PROBLEM TO BE SOLVED: To provide a method for applying an anti-stiction material to a micro device, and a micro mechanical device to which the anti-stiction material is applied.
    SOLUTION: There is provided a method of applying an anti-stiction material to a micro device, including the steps of: enclosing the micro device in a chamber; vaporizing the anti-stiction material in a container, thereby forming the vaporized anti-stiction material; transferring the vaporized anti-stiction material from the container into the chamber in which the micro device is enclosed, via an inlet fluidly communicating with the chamber; and depositing the vaporized anti-stiction material on a surface of the micro device.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供将抗静电材料施加到微型装置的方法以及应用抗静电材料的微机械装置。 解决方案:提供了一种将抗静电材料施加到微型装置的方法,包括以下步骤:将微型装置封闭在腔室中; 在容器中蒸发抗静电材料,从而形成汽化的抗静电材料; 通过与腔室流体连通的入口将蒸发的抗静电材料从容器转移到微型装置被封闭的腔室中; 以及将所述蒸发的抗静电材料沉积在所述微型装置的表面上。 版权所有(C)2008,JPO&INPIT

    Low-voltage micromechanical device
    9.
    发明专利
    Low-voltage micromechanical device 审中-公开
    低电压微电子设备

    公开(公告)号:JP2008122961A

    公开(公告)日:2008-05-29

    申请号:JP2007290112

    申请日:2007-11-07

    CPC classification number: G09G3/346 G02B26/0841

    Abstract: PROBLEM TO BE SOLVED: To provide an apparatus having a plurality of micromechanical devices and a method of driving the plurality of micromechanical device of the apparatus.
    SOLUTION: The apparatus has the plurality of micromechanical devices, a first electric circuit, and a second electric circuit. Each of the micromechanical devices has: a first structure part on a substrate; a second structure part which is connected to the first structure portion, the second structure part having a conductive portion and being configured to move in response to a voltage pulse and a bias voltage; and an electrode on the substrate, the electrode being below the conductive portion of the second structure part.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有多个微机械装置的装置和驱动装置的多个微机械装置的方法。 解决方案:该装置具有多个微机械装置,第一电路和第二电路。 每个微机械装置具有:在基板上的第一结构部分; 第二结构部分,其连接到第一结构部分,第二结构部分具有导电部分,并且被配置为响应于电压脉冲和偏置电压而移动; 以及所述基板上的电极,所述电极位于所述第二结构部分的导电部分的下方。 版权所有(C)2008,JPO&INPIT

    Micro-mirror with hinge
    10.
    发明专利
    Micro-mirror with hinge 审中-公开
    微镜微镜

    公开(公告)号:JP2008112169A

    公开(公告)日:2008-05-15

    申请号:JP2007279643

    申请日:2007-10-26

    Inventor: PAN SHAOHER X

    CPC classification number: G02B26/0841

    Abstract: PROBLEM TO BE SOLVED: To provide a micro-mirror device with hinges.
    SOLUTION: A micro mirror device is equipped with a hinge, supported by a substrate and a mirror plate tiltable about the hinge. The hinge can contain an alloy selected from among a group consisting of a titanium nickel alloy having a titanium composition between about 30% to 70%, a titanium aluminum alloy having a titanium composition between about 30% to 70%, an aluminum copper alloy having a copper composition between about 5% to 20%, and aluminum titanium nitride having a nitrogen composition in the range of about 0% to 15%.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有铰链的微镜装置。 解决方案:微型镜装置配备有由基板支撑的铰链和可绕铰链倾斜的反射镜板。 铰链可以包含选自由钛组成在约30%至70%之间的钛镍合金,钛组成在约30%至70%之间的钛铝合金,具有约30%至70%的钛铝合金的铝合金, 约5%至20%的铜组合物和氮组成在约0%至15%范围内的氮化钛。 版权所有(C)2008,JPO&INPIT

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