公开(公告)号：WO2007022500A3

公开(公告)日：2007-05-24

申请号：PCT/US2006032567

申请日：2006-08-18

Applicant: TERAVICTA TECHNOLOGIES INC ,  YEE IAN Y K ,  FLYNN WILLIAM G

Inventor： YEE IAN Y K ,  FLYNN WILLIAM G

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  H01H2059/0072

Abstract: A plate-based microelectromechanical system (MEMS) switch (20) is provided which includes a moveable plate (22) suspended above a substrate and a plurality of arms (36) extending from the periphery of the moveable plate (22) . The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate (22) . In addition or alternatively, one of the arms (36) is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended (over) a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.

Abstract translation: 提供了一种基于板的微机电系统（MEMS）开关（20），其包括悬挂在基板上方的可移动板（22）和从可移动板（22）的周边延伸的多个臂（36）。 可移动板包括悬挂在布置在基板上的第二电极上的第一电极和与第一电极电隔离的第一输入/输出信号接触结构。 在一些实施例中，第一输入/输出信号接触结构被布置成靠近可移动板（22）的边缘。 另外或替代地，臂（36）中的一个电耦合到第一输入/输出信号接触结构并且包括输入/​​输出信号迹线。 提供了一种基于悬臂的MEMS开关，其包括悬臂结构，其中悬置（上）第一电极布置在基板上的第二电极。 此外，悬臂结构包括与第一电极间隔开并布置在输入/输出信号接触结构之上的输入/输出信号线。

公开(公告)号：WO2004028953A3

公开(公告)日：2004-04-08

申请号：PCT/US2003/031239

申请日：2003-09-30

Applicant: TERAVICTA TECHNOLOGIES, INC.

Inventor： NELSON, Richard, D.

IPC: B81B3/00

Abstract: A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another micro-electromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.

公开(公告)号：WO2007022500A2

公开(公告)日：2007-02-22

申请号：PCT/US2006/032567

申请日：2006-08-18

Applicant: TERAVICTA TECHNOLOGIES, INC. ,  YEE, Ian, Y., K. ,  FLYNN, William, G.

Inventor： YEE, Ian, Y., K. ,  FLYNN, William, G.

IPC: H01H59/00

CPC classification number: H01H59/0009 ,  H01H2059/0072

Abstract: A plate-based microelectromechanical system (MEMS) switch is provided which includes a moveable plate suspended above a substrate and a plurality of arms extending from the periphery of the moveable plate. The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate. In addition or alternatively, one of the arms is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.

Abstract translation: 提供了一种基于板的微机电系统（MEMS）开关，其包括悬挂在基板上的可移动板和从可移动板的周边延伸的多个臂。 可移动板包括悬置在布置在基板上的第二电极上的第一电极和与第一电极电隔离的第一输入/输出信号接触结构。 在一些实施例中，第一输入/输出信号接触结构被布置成靠近可移动板的边缘。 另外或替代地，一个臂电耦合到第一输入/输出信号接触结构并且包括输入/​​输出信号迹线。 提供了一种基于悬臂的MEMS开关，其包括悬臂结构，其中第一电极悬置在衬底上的第二电极。 此外，悬臂结构包括与第一电极间隔开并布置在输入/输出信号接触结构之上的输入/输出信号线。

公开(公告)号：WO2004021382A3

公开(公告)日：2004-03-11

申请号：PCT/US2003/026696

申请日：2003-08-26

Applicant: TERAVICTA TECHNOLOGIES, INC.

Inventor： IVANCIW, Dan, A. ,  HILBERT, Claude

IPC: H01H59/00

Abstract: In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch.

公开(公告)号：WO2004021382A2

公开(公告)日：2004-03-11

申请号：PCT/US0326696

申请日：2003-08-26

Applicant: TERAVICTA TECHNOLOGIES INC

Inventor： IVANCIW DAN A ,  HILBERT CLAUDE

IPC: B81B3/00 ,  B81B7/02 ,  H01H1/00 ,  H01H1/60 ,  H01H9/00 ,  H01H11/00 ,  H01H47/00 ,  H01H47/04 ,  H01H49/00 ,  H01H59/00

CPC classification number: H01H1/605 ,  H01H1/0015 ,  H01H1/60 ,  H01H11/0062 ,  H01H47/04 ,  H01H59/0009 ,  H01H2059/0063 ,  Y10T307/911 ,  Y10T307/924

Abstract: In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch.

Abstract translation: 在用于使用关联电路来增强微机电开关的性能的方法和电路中，方法实施例之一是接触调节过程，包括对闭合开关的控制元件施加时变电压。 在另一个实施例中，可以调整施加到开关的控制元件的电压分布，以改善开关的致动速度或可靠性。 在另一方法实施例中，可以通过测量性能参数来评估交换机的性能，并且如果确定开关性能需要改进，则启动校正动作。 用于维持微机电开关的性能的电路的一个实施例包括第一和第二信号线节点，耦合到信号线节点的感测电路，并且适于感测开关的性能参数值，以及可操作地耦合至少 一个终端的交换机。

公开(公告)号：EP1782446A1

公开(公告)日：2007-05-09

申请号：EP05788541.0

申请日：2005-08-19

Applicant: Teravicta Technologies, Inc.

Inventor： NELSON, Richard, D. ,  FLYNN, William, G. ,  GOINS, David, A.

IPC: H01H59/00

CPC classification number: H01H59/0009

Abstract: A microelectromechanical system (MEMS) switch is provided which includes a multiple of three support arms extending from the periphery of a moveable electrode. In addition, MEMS switch includes a plurality of contact structures having portions extending into a space between a fixed electrode and the moveable electrode. In some cases, the relative arrangement of the support arms and the contact structures are congruent among three regions of the MEMS switch which collectively comprise the entirety of the fixed electrode and the entirety of the moveable electrode. In other embodiments, the contact structures may not be arranged congruently within the MEMS switch.

公开(公告)号：EP1537590A2

公开(公告)日：2005-06-08

申请号：EP03791790.3

申请日：2003-08-26

Applicant: Teravicta Technologies, Inc.

Inventor： IVANCIW, Dan, A. ,  HILBERT, Claude

IPC: H01H59/00 ,  H01H1/60 ,  H01H47/04 ,  H01H1/00

CPC classification number: H01H1/605 ,  H01H1/0015 ,  H01H1/60 ,  H01H11/0062 ,  H01H47/04 ,  H01H59/0009 ,  H01H2059/0063 ,  Y10T307/911 ,  Y10T307/924

Abstract: In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch.