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    MICRO-ELECTROMECHANICAL SWITCH PERFORMANCE ENHANCEMENT
    3.
    发明专利
    MICRO-ELECTROMECHANICAL SWITCH PERFORMANCE ENHANCEMENT 未知

    公开(公告)号：AU2003262880A1

    公开(公告)日：2004-03-19

    申请号：AU2003262880

    申请日：2003-08-26

    Applicant: TERAVICTA TECHNOLOGIES INC

    Inventor： IVANCIW DAN A ,  HILBERT CLAUDE

    IPC: B81B3/00 ,  B81B7/02 ,  H01H1/00 ,  H01H1/60 ,  H01H9/00 ,  H01H11/00 ,  H01H47/00 ,  H01H47/04 ,  H01H49/00 ,  H01H59/00

    Abstract: In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch.

    MICROELECTROMECHANICAL DEVICE HAVING AN ACTIVE OPENING SWITCH
    4.
    发明申请
    MICROELECTROMECHANICAL DEVICE HAVING AN ACTIVE OPENING SWITCH 审中-公开
    具有有源开关开关的微电子器件

    公开(公告)号：WO2004028953B1

    公开(公告)日：2005-08-11

    申请号：PCT/US0331239

    申请日：2003-09-30

    Applicant: TERAVICTA TECHNOLOGIES INC

    Inventor： NELSON RICHARD D

    IPC: H01H59/00 ,  B81B3/00 ,  H01H1/00

    CPC classification number: B81B3/0054 ,  B81B2201/014 ,  H01H59/0009

    Abstract: A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another micro-electromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.

    Abstract translation: 提供了一种微机电装置，其包括被构造成在闭合的开关上施加开启力的梁。 打开力可以基本上独立于存储在闭合开关中的力。 由梁施加的力与存储在闭合开关中的力的组合可能足以在移除与开关的致动相关联的力之后打开开关。 另一微机电装置包括在关闭门上方间隔开的开关梁和接触结构。 该装置还可以包括被配置成沿远离接触结构的方向在开关梁上施加力的附加梁。 用于打开开关的方法包括减小开关束和关闭门之间的吸引力。 该方法还包括在离开关闭门的方向上向开关梁外部施加机械力。

    MICROELECTROMECHANICAL DEVICE HAVING AN ACTIVE OPENING SWITCH
    5.
    发明申请
    MICROELECTROMECHANICAL DEVICE HAVING AN ACTIVE OPENING SWITCH 审中-公开
    具有有源开关开关的微电子器件

    公开(公告)号：WO2004028953A2

    公开(公告)日：2004-04-08

    申请号：PCT/US0331239

    申请日：2003-09-30

    Applicant: TERAVICTA TECHNOLOGIES INC

    Inventor： NELSON RICHARD D

    IPC: H01H59/00 ,  B81B

    CPC classification number: B81B3/0054 ,  B81B2201/014 ,  H01H59/0009

    Abstract: A microelectromechanical device is provided which includes a beam configured to apply an opening force on a closed switch. The opening force may be substantially independent of a force stored in the closed switch. A combination of the force applied by the beam and the force stored in the closed switch may be sufficient to open the switch after removal of a force associated with actuation of the switch. Another micro-electromechanical device includes a switch beam spaced above a closing gate and a contact structure. The device may also include an additional beam configured to apply a force on the switch beam in a direction away from the contact structure. A method for opening a switch includes reducing an attractive force between a switch beam and a closing gate. The method also includes externally applying a mechanical force on the switch beam in a direction away from the closing gate.

    Abstract translation: 提供了一种微机电装置，其包括被构造成在闭合的开关上施加开启力的梁。 打开力可以基本上独立于存储在闭合开关中的力。 由梁施加的力与存储在闭合开关中的力的组合可能足以在移除与开关的致动相关联的力之后打开开关。 另一微机电装置包括在关闭门上方间隔开的开关梁和接触结构。 该装置还可以包括被配置成沿远离接触结构的方向在开关梁上施加力的附加梁。 用于打开开关的方法包括减小开关束和关闭门之间的吸引力。 该方法还包括在离开关闭门的方向上向开关梁外部施加机械力。

    Integrated optical micro-electromechanical systems and methods of fabricating and operating the same
    7.
    发明申请
    Integrated optical micro-electromechanical systems and methods of fabricating and operating the same 失效
    集成的光学微机电系统及其制造和操作的方法

    公开(公告)号：US20020105699A1

    公开(公告)日：2002-08-08

    申请号：US09775867

    申请日：2001-02-02

    Applicant: TERAVICTA TECHNOLOGIES, INC

    Inventor： Robert F. Miracky ,  Jason D. Reed ,  Kai Hu ,  Claude Hilbert

    IPC: H04B010/04 ,  G02B006/12 ,  H04B010/00 ,  H01S003/00 ,  G02B013/14 ,  H01S003/08 ,  G02F001/29

    CPC classification number: G02B6/3524 ,  G02B6/1245 ,  G02B6/32 ,  G02B6/3526 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3598 ,  G02B6/4204 ,  G02B6/4232 ,  G02B6/4249 ,  G02B6/43 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/01039 ,  H01S3/101 ,  H01S5/005 ,  H01S5/0071 ,  H01S5/02248 ,  H01S5/02296 ,  H01S5/183 ,  H01L2924/00014

    Abstract: An apparatus and method of fabricating and operating a micro-electromechanical systems (MEMS) integrated optical structure is disclosed. Micro-optics is integrated with MEMS actuators to provide a building block for a micro-optical communication device. Such micro-optical communication device may realize a variety of optical communication systems including optical interconnects, laser communications, or fiber optic switches. In accordance with one aspect of the present invention, a micro-optical element such as a micro-lens is advantageously integrated with an actuator such as MEMS comb drive actuator to form a MEMS lens assembly. The MEMS lens assembly is further coupled to an optical source which may provide a MEMS integrated micro-optical communication device. This integration substantially obviates the generally needed external or manual positioning of the micro-optical element to align a light beam or an optical signal being emitted from the optical source. The MEMS comb drive actuator, responsive to an actuation force, selectively positions the micro-optical element. By appropriately micro positioning a micro-optical element such as a micro-lens relative to an optical source, such as an input optical fiber or a laser diode, a focused light beam or an optical signal may be coupled to a respective optical fiber or a detector. In one embodiment, a commonly used flip chip module assembly technique may be adapted for bonding the MEMS lens assembly to a carrier substrate, which preferably receives the optical source. The carrier substrate is generally disposed on a host assembly. A flip chip based passive alignment of the MEMS lens assembly could be provided. Additionally, an active alignment of the light beam or optical signal with an optical detector may be provided, which can be maintained through a feedback loop.

    Abstract translation: 公开了一种制造和操作微机电系统（MEMS）集成光学结构的装置和方法。 微光学与MEMS致动器集成，为微光通信设备提供一个构建模块。 这种微光通信设备可以实现包括光互连，激光通信或光纤交换机的各种光通信系统。 根据本发明的一个方面，诸如微透镜的微光学元件有利地与诸如MEMS梳状驱动致动器的致动器集成以形成MEMS透镜组件。 MEMS透镜组件还耦合到可以提供MEMS集成微光通信设备的光源。 该集成基本上消除了通常需要的外部或手动定位微光学元件以对准从光源发射的光束或光信号。 响应于致动力的MEMS梳驱动致动器选择性地定位微光学元件。 通过相对于诸如输入光纤或激光二极管等光源的微透镜适当微定位微光学元件，聚焦光束或光信号可以耦合到相应的光纤或 探测器。 在一个实施例中，常用的倒装芯片组件技术可适用于将MEMS透镜组件接合到优选接收光源的载体衬底。 载体基板通常设置在主机组件上。 可以提供MEMS透镜组件的基于倒装芯片的无源对准。 此外，可以提供光束或光信号与光学检测器的主动对准，其可以通过反馈回路来维持。

    MEMS SWITCH ELECTRODE CONFIGURATION TO INCREASE SIGNAL ISOLATION
    8.
    发明申请
    MEMS SWITCH ELECTRODE CONFIGURATION TO INCREASE SIGNAL ISOLATION 审中-公开
    MEMS开关电极配置增加信号隔离

    公开(公告)号：WO2006023809A1

    公开(公告)日：2006-03-02

    申请号：PCT/US2005/029693

    申请日：2005-08-19

    Applicant: TERAVICTA TECHNOLOGIES, INC. ,  GOINS, David, A.

    Inventor： GOINS, David, A.

    IPC: H01H59/00

    CPC classification number: H01H59/0009 ,  H01G5/18

    Abstract: A microelectromechanical system (MEMS) switch is provided which includes a moveable electrode (32) with an opening (49) arranged over at least a portion of the signal trace (28). In some cases, the opening may include a notch (34) arranged along a periphery of the moveable electrode. In particular, the opening may include a notch bound by two edges of the moveable electrode which are respectively arranged relative to opposing sides of the signal trace. In other embodiments, the opening may include a hole arranged interior to the peripheral edge of the moveable electrode. In some cases, the MEMS switch may include a plurality of contact structures coupled to signal traces. In such cases, the moveable electrode may include openings specifically arranged above a plurality of the signal traces.

    Abstract translation: 提供了一种微机电系统（MEMS）开关，其包括具有布置在信号迹线（28）的至少一部分上的开口（49）的可移动电极（32）。 在一些情况下，开口可以包括沿着可移动电极的周边布置的凹口（34）。 特别地，开口可以包括由可移动电极的两个边缘限定的凹口，其相对于信号迹线的相对侧分别布置。 在其他实施例中，开口可以包括布置在可移动电极的周边边缘内部的孔。 在一些情况下，MEMS开关可以包括耦合到信号迹线的多个接触结构。 在这种情况下，可移动电极可以包括特别布置在多个信号迹线上方的开口。

    PLATE-BASED MICROELECTROMECHANICAL SWITCH HAVING A THREE-FOLD RELATIVE ARRANGEMENT OF CONTACT STRUCTURES AND SUPPORT ARMS
    9.
    发明申请
    PLATE-BASED MICROELECTROMECHANICAL SWITCH HAVING A THREE-FOLD RELATIVE ARRANGEMENT OF CONTACT STRUCTURES AND SUPPORT ARMS 审中-公开
    具有接触结构和支撑臂的三维相对布置的基于板的微电子开关

    公开(公告)号：WO2006023724A1

    公开(公告)日：2006-03-02

    申请号：PCT/US2005/029557

    申请日：2005-08-19

    Applicant: TERAVICTA TECHNOLOGIES, INC. ,  NELSON, Richard, D. ,  FLYNN, William, G. ,  GOINS, David, A.

    Inventor： NELSON, Richard, D. ,  FLYNN, William, G. ,  GOINS, David, A.

    IPC: H01H59/00

    CPC classification number: H01H59/0009

    Abstract: A microelectromechanical system (MEMS) switch is provided which includes a multiple of three support arms extending from the periphery of a moveable electrode. In addition, MEMS switch includes a plurality of contact structures having portions extending into a space between a fixed electrode and the moveable electrode. In some cases, the relative arrangement of the support arms and the contact structures are congruent among three regions of the MEMS switch which collectively comprise the entirety of the fixed electrode and the entirety of the moveable electrode. In other embodiments, the contact structures may not be arranged congruently within the MEMS switch.

    Abstract translation: 提供了一种微机电系统（MEMS）开关，其包括从可移动电极的周边延伸的三个支撑臂的多个。 此外，MEMS开关包括多个接触结构，其具有延伸到固定电极和可移动​​电极之间的空间的部分。 在一些情况下，支撑臂和接触结构的相对布置在MEMS开关的三个区域中是一致的，它们共同地包括整个固定电极和整个可移动电极。 在其他实施例中，接触结构可以不一致地布置在MEMS开关内。

    MICROELECTROMECHANICAL SWITCHES HAVING MECHANICALLY ACTIVE COMPONENTS WHICH ARE ELECTRICALLY ISOLATED FROM COMPONENTS OF THE SWITCH USED FOR THE TRANSMISSION OF SIGNALS
    10.
    发明申请
    MICROELECTROMECHANICAL SWITCHES HAVING MECHANICALLY ACTIVE COMPONENTS WHICH ARE ELECTRICALLY ISOLATED FROM COMPONENTS OF THE SWITCH USED FOR THE TRANSMISSION OF SIGNALS 审中-公开
    微机电开关具有机械有源元件，电气隔离开关用于传输信号

    公开(公告)号：WO2007022500B1

    公开(公告)日：2007-06-28

    申请号：PCT/US2006032567

    申请日：2006-08-18

    Applicant: TERAVICTA TECHNOLOGIES INC ,  YEE IAN Y K ,  FLYNN WILLIAM G

    Inventor： YEE IAN Y K ,  FLYNN WILLIAM G

    IPC: H01H59/00

    CPC classification number: H01H59/0009 ,  H01H2059/0072

    Abstract: A plate-based microelectromechanical system (MEMS) switch (20) is provided which includes a moveable plate (22) suspended above a substrate and a plurality of arms (36) extending from the periphery of the moveable plate (22) . The moveable plate includes a first electrode suspended over a second electrode arranged on the substrate and a first input/output signal contact structure electrically isolated from the first electrode. In some embodiments, the first input/output signal contact structure is arranged proximate to the edge of the moveable plate (22) . In addition or alternatively, one of the arms (36) is electrically coupled to the first input/output signal contact structure and comprises an input/output signal trace. A cantilever-based MEMS switch is provided which includes a cantilever structure with a first electrode suspended (over) a second electrode arranged upon a substrate. In addition, the cantilever structure includes an input/output signal line spaced apart from the first electrode and arranged above an input/output signal contact structure.

    Abstract translation: 提供了一种基于板的微机电系统（MEMS）开关（20），其包括悬挂在衬底上方的可移动板（22）和从可移动板（22）的周边延伸的多个臂（36）。 可移动板包括悬置在布置在衬底上的第二电极上的第一电极以及与第一电极电隔离的第一输入/输出信号接触结构。 在一些实施例中，第一输入/输出信号触点结构布置为靠近可移动板（22）的边缘。 另外或可选地，臂（36）中的一个电耦合到第一输入/输出信号触点结构并且包括输入/​​输出信号迹线。 提供了一种基于悬臂的MEMS开关，其包括悬臂结构，该悬臂结构具有悬置（布置在）布置在衬底上的第二电极的第一电极。 另外，悬臂结构包括输入/​​输出信号线，该输入/输出信号线与第一电极隔开并且布置在输入/输出信号触点结构之上。

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