Abstract:
The present invention relates to a patterning method to form a leading wire having a line width no wider than 30μm from a transparent conducting oxide coated on a substrate using a laser beam. Provided in the present invention is a fine patterning method for a transparent conducting oxide using laser scribing which includes: (a) a phase for preparing a substrate coated with a transparent conducing oxide; (b) a phase for rounding off the transparent conducing oxide, leaving with a flank around the transparent conducing wire portion using a broad-width laser beam; and (c) a phase for rounding off the flank with a narrow-width laser beam. [Reference numerals] (AA) FTO film(top); (BB) FTO film; (CC) Cross section; (DD) Substrate(PI, glass, plastic, ceramic, metal); (EE) FTO laser etching; (FF) FTO etched part(scribbing)
Abstract:
본 발명은 굽힘 가공성을 가지는 저저항 고투과율 FTO 투명전도막 제조 방법으로, 불소가 도핑된 산화주석 투명전도막을 상압 CVD 및 스프레이 파이로졸법에 의하여 투명기판위에 증착하는 단계; 상기 불소가 도핑된 산화주석 박막을 air 분위기하에서 후 열처리하여 곡면가공 또는 굽힘성형하는 단계를 포함하여 구성되는 것을 특징으로 한다.
Abstract:
PURPOSE: A method for manufacturing a FTO(Fluorine Doped Tin Oxide) transparent conductive film with nonlinear continuous transfer device is provided to improve the uniformity of a thin film on a curved substrate by transferring a glass substrate to a pre-heating chamber, deposition chamber, and a annealing heat chamber by stages. CONSTITUTION: A pre-heating unit(2), a deposition unit(1), and an annealing heat chamber(3) are connected to a nonlinear transfer apparatus. The nozzle unit is attached to a complex shaped substrate at a right angle. An exhaust unit is installed at the side of a nozzle. The substrate is heated and surface-processed, and moved to the deposition unit. A FTO free cursor is sprayed through the nozzle of the deposition unit. The FTO free cursor reaches the substrate through the FTO free cursor. An even curved surface FTO film is formed. A curved substrate with FTO is rapidly cooled in an annealing heat unit. [Reference numerals] (2) Pre-heating unit; (3) Annealing part; (4) Air knife(Air curtain); (5) Tension device; (6) Mist supply; (7) Exhaust
Abstract:
초유연 기판을 물리적으로 안정화시키고, 상기 물리적으로 안정화된 초유연 기판상 기상공정을 이용하여 투명전도막을 형성하는 방법. 상기 초유연 기판을 물리적으로 안정화시키는 방법은 (1) 누름, 하중, 물리적 체결과 같은 물리적 고정화 (2) 자기력, 전자기력과 같은 전자기력적 고정화, (3) 접착제, 바인더, 페이스트와 같은 화학적 고정화, (4) 감압, 진공과 같이 유체역학적 고정화 중 어느 하나의 기판 고정화 방법으로 안정화시킨 후, 초유연 기판상 투명전도막을 형성하는 것을 특징으로 한다.