Abstract:
본발명의다양한실시예는기지국안테나; 상기안테나길이방향을따라서간격지게실장되는복수개의도킹스테이션들; 및상기각각의도킹스테이션에각각장착되어, 상기안테나에직접연결되는복수개의 RU들을포함할수 있다. 또한, 본발명의다양한실시예는각각의도킹스테이션에장착된 RU 배치에따라이동통신서비스영역을수직분할(VS)로운영가능할수 있다.
Abstract:
A device for sensing an operating error of an apparatus using sound source noise and a semiconductor manufacturing apparatus comprising the same device are provided to monitor or control a processing state in a manufacturing process by performing a real-time monitoring process. A microphone(120) is attached to each of regions of a semiconductor manufacturing apparatus in order to receive sound source noise and to convert the sound source noise to an electrical signal. A sound source analysis controller(140) receives the electrical signal of the microphone and analyzes causes of the sound source noise. A display unit is connected to the sound source analysis controller in order to display the analyzed data. Each of the regions including the microphone is a sealed space for preventing an influence of external noise.