公开(公告)号：KR1020080051483A

公开(公告)日：2008-06-11

申请号：KR1020060122693

申请日：2006-12-06

Applicant: 삼성전자주식회사

Inventor： 김인우 ,  강현호 ,  박재현 ,  정지윤

IPC: H01L29/786

CPC classification number: H01L29/66765 ,  H01L21/3065 ,  H01L29/78609

Abstract: A method of manufacturing a thin film transistor substrate is provided to decrease off-current of the transistor by decreasing a leakage current at an off-state of the transistor. A gate electrode(120) is formed on a substrate(110), and then a gate insulating layer(130) and an active thin film are deposited on the substrate having the gate electrode. A photoresist pattern is formed in an active layer forming region on the active thin film. The active thin film is primarily etched by using a gas comprising SF6 and Cl2 by using the photoresist pattern as an etch mask, and then is secondarily etched by using a Cl2 gas to form an active layer. A source electrode(160) and a drain electrode(165) are formed on the active layer.

Abstract translation: 提供制造薄膜晶体管基板的方法，以通过减小晶体管截止状态下的漏电流来减小晶体管的截止电流。 在基板（110）上形成栅电极（120），然后在具有栅电极的基板上沉积栅极绝缘层（130）和有源薄膜。 光致抗蚀剂图案形成在有源薄膜上的有源层形成区域中。 通过使用光致抗蚀剂图案作为蚀刻掩模，通过使用包含SF 6和Cl 2的气体来主要蚀刻有源薄膜，然后通过使用Cl 2气体二次蚀刻以形成活性层。 源极电极（160）和漏电极（165）形成在有源层上。

公开(公告)号：KR1020080022785A

公开(公告)日：2008-03-12

申请号：KR1020060086382

申请日：2006-09-07

Applicant: 삼성전자주식회사

Inventor： 강현호 ,  김경욱

IPC: G02F1/133 ,  G02F1/1345 ,  G09G3/36 ,  G09G3/20

CPC classification number: G02F1/133 ,  G02F1/13452 ,  G09G3/3648 ,  G09G2330/06

Abstract: A display device is provided to prevent malfunction of a gate circuit unit generated by damage of a buffer unit caused by static electricity, thereby improving entire performance of the display device. A display panel(500) comprises a display area where pixel units are formed, and a gate circuit unit(210). The gate circuit unit is formed on a first area of a peripheral area surrounding the display area, and applies a gate signal to the pixel units in response to a vertical start signal. An FPCB(Flexible Printed Circuit Board)(120) is mounted on a second area of the peripheral area, and includes a driving chip for outputting a data signal to the pixel unit. A PCB(110) is electrically connected with the display panel through the FPCB. A buffer unit(115) is installed on the PCB, buffers the vertical start signal and applies the buffered signal to the gate circuit unit.

Abstract translation: 提供了一种显示装置，用于防止由静电引起的缓冲单元的损坏而产生的门电路单元的故障，从而提高显示装置的整体性能。 显示面板（500）包括形成像素单元的显示区域和门电路单元（210）。 门电路单元形成在围绕显示区域的周边区域的第一区域上，并且响应于垂直起始信号而向像素单元施加栅极信号。 FPCB（柔性印刷电路板）（120）安装在外围区域的第二区域上，并且包括用于向像素单元输出数据信号的驱动芯片。 PCB（110）通过FPCB与显示面板电连接。 缓冲单元（115）安装在PCB上，缓冲垂直启动信号并将缓冲信号施加到门电路单元。