Abstract:
본 발명은 EEPROM 혹은 플래쉬(Flash) 메모리의 플로팅 게이트(Floating Gate; FG) 를 2개의 양자점(quantum dot)으로 구성하고 이들을 Multi-value(다치)메모리에 응용한 다중 양자점 응용 단일 전자 다치 메모리 및 그 구동 방법(Double value Single Electron Memory using Multi-Quantum Dot and Driving Method thereof)을 기재한다. 본 발명에 따른 두 개의 양자점 응용 단일전자 메모리는 채널 상의 양단에 각각 플로팅 게이트를 형성한 다음 그 위에 절연층을 개재시켜 제어 게이트를 형성한 구조를 가진다. 따라서, 2개의 양자점을 응용하여 다치(Multi-value) 메모리 실현시킨다는 점과 다른 메모리들과는 달리 MOSFET의 스케일링(Scaling)에 따른 SCE와 같은 물리적 한계에 봉착치 않으면서 1Tb 이상의 초고집적 메모리를 구현할 수 있다.
Abstract:
본발명은단일전자터널링(single electron tunneling) 현상을응용하여휘발성단일전자트랜지스터메모리및 그구동방법을기재한다. 본발명에따른휘발성단일전자트랜지스터메모리는단일전자트랜지스터를액세스트랜지스터로이용하는동시에캐패시터에 20개미만의전자를저장하여정보(디지탈 0 혹은 1)를저장하거나읽을수 있다는데특징이있다. 즉, 단일전자트랜지스터를이용하여전자하나하나를제어하고이렇게제어된 20개미만의전자를드레인쪽에위치한캐패시터(capacitor)에저장한다.
Abstract:
본 발명은 실리콘을 전기화학적으로 부식시켜 얻은 수십나노미터 크기의 기공 실리콘(porous silicon)을 응용하여 제조한 기공 실리콘을 이용한 단일전자 트랜지스터(single electron transistor) 및 그 제조 방법에 관한 것이다. 본 발명에 따른 기공 실리콘을 이용한 단일전자 트랜지스터는 하부가 이산화 실리콘(SiO 2 )으로 구성된 실리콘 기판(SOI)에 직경 5 nm 이하의 기공 실리콘들을 HF-based 용액 내에서 전기화학적 부식에 의해 제조하여 단일전자 트랜지스터의 아일런드(island)로 활용하고, 금속 혹은 불순물이 주입 혹은 도핑된 실리콘으로 소스(source), 드레인(drain) 및 게이트(gate)를 형성함으로써, 아일런드 및 터넬장벽 형성이 보다 용이하여 대량 생산이 가능하며 또한 아일런드 크기를 산화로에서 조절할 수 있으므로 상온 작동이 가능한 단일전자 트랜지스터를 쉽게 제작할 수 있다.
Abstract:
A device and a method for transferring interrupt in a multiprocessor system are provided to minimize overhead added to the system in transfer of the interrupt by transferring interrupt information preferentially to a processor generating a page fault if the interrupt is requested from the outputs, and transferring the interrupt information to the processor performing the lowest priority process when the processor generating the page fault is not found. A process arbitration logic(211) assigns task to plural multiprocessors(220) which include plural processors(221). A page fault checker(213) detects whether a page fault is occurred in each processor. An interrupt arbitration logic(214) receives interrupt information from an interrupt controller(230) and transfers the interrupt information to the processor generating the page fault. A process priority block(212) stores priority of respective processes of the processor. The interrupt arbitration logic transfer the interrupt information to the processor selected according to the process priority when the page fault is not generated. The interrupt arbitration logic outputs an interrupt acknowledge signal to the interrupt controller when the interrupt information is transferred to the processor.
Abstract:
PURPOSE: An SONOS(Silicon-Oxide-Nitride-Oxide-Silicon) memory device and a method of erasing information thereof are provided to erase quickly information from the device by injecting hot holes into a nitride layer instead of using a conventional FN(Fowler-Nordheim) current. CONSTITUTION: A first electrode(12) and a second electrode(13) contact at least one bit line. A gate electrode(17) contacts a word line. A predetermined electric field is applied between the first and second electrodes and the gate electrode, so that hot holes are injected into a nitride layer(15) through an energy barrier of a tunnel oxide layer(14). At this time, a bit of information is erased from an SONOS memory device. The same positive voltage is applied to the first and second electrodes and a negative voltage is applied to the gate electrode.
Abstract:
A method of fabricating a single electron tunneling (SET) device, the method including forming a source electrode and a drain electrode a predetermined distance apart from each other on an insulating substrate, forming a metal layer having a thickness on the order of nanometers between the source and drain electrodes, and forming quantum dots between the source and drain electrodes due to the movement of metal atoms/ions within the metal layer caused by applying a predetermined voltage to the source and drain electrodes. In the manufacture of an SET device, quantum dots can be formed by a simple method instead of an self assembled monolayer (SAM) method or lithographic methods. Thus, SET devices fabricated in this way have no material dependency, and are also applicable to large scale integration (LSI) structures. Also, since quantum dots are obtained by deposition and electromigration, SET devices having the above-described advantages can be mass-produced.
Abstract:
PURPOSE: A single electron transistor is provided to improve a reproducibility and a uniformity by using a Schottky tunnel barrier which is naturally formed at a junction of a semiconductor and a metal. CONSTITUTION: A single electron transistor using a Schottky tunnel barrier comprises a semiconductor substrate, a source, a drain, an island, an insulation layer and a gate. The source(2) and the drain(3) are formed by doping a conductive impurity on the semiconductor substrate(1). The island(4) is formed by depositing a metal on the semiconductor substrate between the source and the drain, and forms a Schottky barrier at a boundary with the drain and at a boundary with the source, respectively. The insulation layer is formed on the island, and the gate is formed on the insulation layer.
Abstract:
PURPOSE: A non volatile single electron transistor memory is provided to secure a repeatability and a uniformity of an island by using a quantum dot for precisely controlling the size of the island to a unit of nanometer. CONSTITUTION: A non volatile single electron transistor memory comprises a silicon substrate(100), quantum dots(110) of a predetermined size, a source(120) and a drain(130), and a side gate. A SiO2 oxidation layer(100b) is formed on the silicon substrate. The quantum dots of a predetermined size are separated a predetermined interval from each other on the SiO2 oxidation layer. The source and drain are formed by evaporating a metal on the SiO2 oxidation layer including the quantum dots, having a predetermined number of the quantum dots used as an island, between the source and the drain. The side gate is formed on the SiO2 oxidation layer at a side surface of the source and drain, having a predetermined interval from the source and drain.